1. OOFELIE::Multiphysics 2015
for MICROSYSTEMS DESIGN
MEMS and MOEMS revolutionize the transducer industry in terms of the very small
component size, product reliability and reduced production costs. The continuously
decreasing size makes a strongly coupled multiphysic simulation approach
mandatory to obtain accurate and quick results.
When your microsystems need high dimensional stability, increased accuracy and
reliable performances, the MICROSYSTEMS DESIGN suite is the right solution for you.
AN AUTOMATED MULTIPHYSICS FEA SOLUTION
OOFELIE::Multiphysics is a 3D strongly coupled multiphysics FEA solution used to
conceptualise, design, analyse, and optimise various types of systems before starting
the time-consuming and costly build-and-test cycles. The automated exploration of
the design space allows to identify the appropriate design by using:
 Parametric studies and Design of Expermiments
 Optimization strategies
OOFELIE::Multiphysics is tightly linked with MEMSPro®
for connection to the EDA
flow:
 Model importation using MEMSPro®
from SoftMEMS
 Model exportation to EDA solver using Verilog-A or VHDL-AMS exchange
and to the optical software ZEMAX®
to accurately predict the behaviour of MOEMS.
© 2015 Open Engineering - All rights reserved
KEY FEATURES
 PARAMETRIC GEOMETRIC MODELLER
 Integration & Import from leading CAD tools
 CAD healing technology
 PHYSICAL FIELDS & COUPLINGS
 Coupled Electrostatics Mechanics
 Piezo-resistivity
 Electromagnetics
 Piezoelectric analysis
 Thermo-mechanical and pyro couplings
 Thermal radiation including view factors
 Electro-thermos-mechanics including Peltier and
Seebeck effects
 Fluid-Structure Interaction
 Multiphysic contact
 MATERIALS
 Linear and non-linear Multiphysic materials
 DISCRETISATION TECHNIQUES
 FEM-BEM coupling
 Fast Multipole Method (FMM) with BEM
 ANALYSIS
 Static & Transient (linear, non-linear)
 Harmonic & Modal
 Random vibration
 MODEL ORDER REDUCTION
 Capacitive SEMs including electrostatic forces
 Extraction of mutual capacitance matrix
 IC co-simulation Verilog-A and VHDL-AMS export
 SCRIPTING & CUSTOMISATION
 C++-like scripting language
 AUTOMATED DESIGN SPACE EXPLORATION
 Parametric studies
 Design of Experiments
 Monte-Carlo studies
 Sensitivity analysis
 Optimisation
 Model Updating
 SUPPORTED PLATFORMS
 Windows and Linux
A TIME-SAVING, HASSLE-FREE SOLUTION FOR ACCURATE
AUTONOMOUS SMART SENSORS DESIGN
Courtesy of ONERA

2. APPLICATION EXAMPLE: VIBRATING INERTIAL
ACCELEROMETER - DIVA (COURTESY OF ONERA)
ONERA designed a monolythic quartz sensor, sensitive to orthogonal
acceleration. This design efficiently decouples the vibrating beam from the
outside case through the frame. The measured frequency shift is directly
related to the acceleration and a high quality factor is needed for frequency
tracking stability.
The whole device, including the sensor package, is simulated using
OOFELIE::Multiphysics because of the need of strongly coupled Piezo-
thermo-elastic modelling.
OBJECTIVES
 Compute and optimise the resonance quality factor
 Minimise the effect of thermal stresses on resonance frequency to
reduce temperature influence on device performance
 Account for the package by studying energy losses through mounting
parts and the main structure
CHALLENGES
 Activate the resonating beam through piezoelectric effect
 Minimise thermal stresses influencing the frequency behaviour
 Include thermo-elastic damping effects which are critical for space and
vacuum applications
SIMULATION REQUIREMENTS
A real need for a strongly coupled Multiphysic approach
 Time constants of governing phenomena reach similar magnitudes
 Simulation of coupled Piezo-thermo-mechanical effects on a complex
3D structure in combination with the electric measurement circuit
OOFELIE::Multiphysics for MICROSYSTEMS DESIGN
A complete modelling solution used by ONERA to predict the major
characteristics of their innovative sensors
 Optimized quality factor (thermo-elastic damping and package effect)
 Accelerometer scale factor (evaluation of frequency shift due to
acceleration)
 Optimized electric parameters of the driving circuit
An efficient modelling simulation environment with proven agreement
between numerical and experimental results.
© 2015 Open Engineering - All rights reserved
OPEN ENGINEERING
LIEGE science park, The Labs
Rue Bois Saint-Jean, 15/1
B-4102 Seraing (Belgium)
Tel.: +32 4 353.30.34
info@open-engineering.com
www.open-engineering.com
BENEFITS
 SOLUTION FOR REAL LIFE INDUSTRIAL PROBLEMS
You will be able to import, model, parameterise
and mesh complex 3D structures
 EFFECTIVE SIMULATION
You will obtain a faster convergence and a shorter
simulation time through strongly coupled
simulations between relevant physical
phenomena, necessary to accurately design
continually shrinking components
 ABILITY TO HANDLE 3D INDUSTRIAL PROBLEMS
You will be able to efficiently handle large scale
problems using coupled FEM, BEM (with FMM)
in simulation methods
 REDUCING DESIGN CYCLES
You will cut your design cycles thanks to highly
accurate results and fast simulations to optimise
your designs
 MODELLING WITH ACCURACY
You will benefit from an intuitive and smart tool
with a pre-configured wide range of strong
couplings between the main physical phenomena
 INTEGRATED SIMULATION PACKAGE
You will benefit from a broad sensors and
actuators coverage
 CONNECTED TO THE EDA DESIGN FLOW
Compatible with the latest MEMSPro®
versions.
AUTONOMOUS SMART SYSTEMS
OOFELIE::Multiphysics allows you to focus on
the design of smart sensors by predicting the
behaviour of the active components:
 TRANSDUCERS
Accelerometer, gyrometer, pressure sensor, micro-
mirror, IR (micro-bolometer), flow sensor,
magnetometer, SAW, BAW
 POWER CONVERTERS
Energy harvester based on piezoelectric or
thermoelectric (Seebeck) effects
OOFELIE::Multiphysics allows you to analyse
the interaction with the IC and the package.