Se-2000 for modular design provides modularity and high measurement performance in a compact table footprint. This cost effective tool includes automatic sample positioning suitable for R&D laboratories and production quality monitoring.
3. www.semilab.com
Multiple application areas
⢠Spectroscopic Ellipsometry is a very versatile thin film measurement method, its
applications cover:
o thin dielectric films: oxide, nitride, silicon (semiconductor/solar/flat panel)
o thin metal layers
o organic layers / OLED (flat panel), polymers
o LED/lighting
o R&D materials: graphene, 3D nanostructures
Spectroscopic Ellipsometry (SE)
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Spectroscopic ellipsometry demand by industry for 2010
4. www.semilab.com
It is based on polarization change of spectral light
ď Characterization quantities:
ďź Layer thickness
ďź Optical functions (eg. refractive index, absorption, ...)
1. Thin layers on any substrates (Si, glass, PET foil, ...)
2. Very thin layer characterization (from mono layer) is possible
3. Complex multilayer characterization for each layer individually
4. Thick layers with Infrared SE (up to ~100 Âľm)
ď A few principles:
ďź It is an absolute measurement: do not need any reference
ďź It is a non-direct technique: does not give directly the physical parameters
of the sample (thickness and index)
ďź It is necessary to always use a model to describe the sample
Spectroscopic Ellipsometry (SE)
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5. www.semilab.com
Spectroscopic Ellipsometry (SE)
1/20/2014 5
⢠Ellipsometry is based on the measurement of the
change of the polarization state of light after
reflection from a sample
⢠Using Spectroscopic Ellipsometry (SE), up to 7
layers can be analyzed simultaneously in one
measurement in order to:
â Extract the thickness of every individual layer
â Obtain material optical properties over a wide
spectral range from Deep UV to Near IR
⢠SE has the advantage of high sensitivity due to the
additional measurement of the phase of light at
different wavelengths. As a consequence, SE
allows analysis of complex structures like multi-
layers with rough interfaces and unknown material
composition
⢠SE is an indirect measurement method: the
thickness and composition of the structure is
determined on an optical model basis, through a
regression procedure
),,().( iii
j
s
p
TknfeTan
r
r
ď˝ďď˝ď˝ ď
ď˛
Amplitude ratio
Phase shift Directly Measured Parameters:
Tan(Ψ) and Cos(Î) (ellipsometric angles) or
ι and β (Fourier coefficients)
Where:
⢠rp Complex reflection coefficient for P polarization
⢠rs Complex reflection coefficient for S polarization
⢠Tanď,ď Amplitude ratio and phase difference of the P
and S components of the reflected light,
respectively
SE is a non-destructive, optical (thus, non-contact) technique that is able
to measure optical properties and thickness of single and multi layers
Substrate (ns, ks)
Thin Film ... i (ni, ki, Ti)
Ei
EP
Er
Spectral detection
Thin Film 2 (n2, k2, T2)
Thin Film 1 (n1, k1, T1)
Incoming spectral light
Ambient (n0, k0)
θo
ES
rp
rs
6. www.semilab.com1/20/2014 6
Experimental Measurement
=
Model Simulation
?
No, proposition for new
parameters
Yes
Physical Model
with an estimated sample structure
Calculated values
Film structure and optical properties proposed are correct
Advanced minimization algorithms
for quick convergence
- Film stack and structure
- Material n, k values,
- Composition Fraction of Mixture
- Index dispersion
Cos(Î)
Tan(Ψ)
Schematic of the regression procedure theory
Cos(Î)
Tan(Ψ)
Spectroscopic Ellipsometry (SE)
8. www.semilab.com
SE-2000
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Reliability
Low cost of
ownership
Performance
User
interface
Speed
Key targets
of SE-2000
development
⢠Complete redesign of SW
⢠New âsmartâ electronics
⢠New mapping stage
⢠Combined acquisition
⢠New mapping stage
⢠Combined acquisition
⢠Compact electronics
⢠Less 3rd party components
⢠New operating SW
⢠Tool controlled by single notebook
Easy install
⢠Quicker system align
⢠Cheaper install trips
9. www.semilab.com
SE-2000
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Product commercially available !
Ease of use through improved HW and SW
Extended performances (RCE)
New compact and stable design
(compared to the predecessor GES5E)
GEN6
GES5E
Improved reliability: reduced maintenance cost
10. www.semilab.com
Example #1: Lamp (Xe light source module)
SE-2000 mechanics and optics
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Fitting mechanical design to ellipso arms
With ozone filter integrated
11. www.semilab.com
Example #2: Sample stage
SE-2000 mechanics and optics
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Fast, moves with 10 cm/sec speed motion
Covers on axis, clean environment
13. www.semilab.com
Example #4: Inside ellipso arms
SE-2000 mechanics and optics
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Stable working with stepper motor (no magnet)
Up to 10 possible light attenuator setting
Aperture
Industrial design for stable alignment
Rotating attenuator wheel
14. www.semilab.com
Focusing optics, spot size
⢠Standard microspot optics (MS)
⢠Ultra microspot optics (UMS)
60 Âľm between 250 â 990 nm
⢠NIR extension to UMS (unique)
80 Âľm between 1000 â 1600 nm
SE-2000 mechanics and optics
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Special high brightness source
Spot size on sample: ~400 Âľm
Good for R&D samples and usual
glass substrates (>0.4 mm) for
eliminating backside reflection
15. www.semilab.com
Unique function: maintaining all spectral
detection methods in one tool!
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Fast spectrograph
Wavelength range:
193 - 1 700 nm
High resolution
spectrometer
Wavelength range:
193 - 2 400 nm
FTIR extension
Wavelength range:
1 500 - 25 000 nm
26. www.semilab.com
Example #1: Transmission ellipsometry
SE-2000: new and enhanced features
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Anisotropic sample (thick transparent polymer foil) measured in transmission mode
Jones Matrix components
measured in transmission:
measured and fitted spectra
Resulted Euler angles:
Ď = 88.5 °¹ 0.4°
θ = 21.0°¹ 3.8°
Ď = -86.4°¹ 0.5°
Refractive index and Extinction:
sample
Xâ
Yâ
Zâ
27. www.semilab.com
Example #2: Mueller Matrix
SE-2000: new and enhanced features
1/20/2014 27
Full MM15 with two compensators or truncated MM11 with only one compensator
Full MM15 spectrum of a
sample Half Wave Plate
(anisotropic material)
28. www.semilab.com
-4.5
-3.5
-2.5
-1.5
-0.5
0.5
55 60 65 70 75
log10(Intensity)
Scattering angle (°)
Example #3: Scatterometry
SE-2000: new and enhanced features
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2 Âľm period photoresist grating with analyser arm angle scan from 75 deg. to 55 deg.
Specular
reflection
angle
Scattered
intensity
peak
at 375 nm
29. www.semilab.com
Semilab SE-2000 with all options
Example of optional special samples stages
available
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Eg.: Advanced Environment Cell with
optional liquid circulation and
temperature control
AdvancedEnvironmentCellmountedonSE-2000stage
AdvancedEnvironmentCell
controlandcirculationboxes
30. www.semilab.com
Liquid cell: in-situ protein adsorption experiment
⢠Circulating liquid (DI water) in the
cell with Si sample piece being
measured in-situ by SE
⢠Bovine Serum Albumin (BSA)
solution inserted to the cell and
the growth speed is monitored
Example of optional special samples stages
available
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Two different growth mechanisms:
silicon
silicon
BSA molecules
BSA molecules
1.
2.
31. www.semilab.com
EPA option: Ellipsometric Porosimetry Atmospheric
Example: Pluronic templated
porous SiO2 layer on
top of Si substrate
Example of optional special samples stages
available
1/20/2014 31
Tri-block copolimer Pluronic P123
Micelle structure with
effective pore size ~ 6 nm based on TEM
Relative humidity
max. Vads = 47%
(porosity)
Pore size ~ 5-7 nm
with structure
32. www.semilab.com
Small heating vacuum stage from Linkam Ltd. (UK)
For smaller, 1â samples as
adaptation for ellipsometer stage
⢠Wide temperature range cell 1: -
196C to 350C
⢠Wide temperature range cell 2:
RT to 600C
⢠Wide temperature range cell 3:
RT to 1000C
Example of optional special samples stages
available
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34. www.semilab.com
New SAM: automated measurement software interface improvement
Software improvements
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Either recipe-based or manual measurement mode
Program status feedback
Multi-user acounts
Graphical 3D map of
results even in-situ during
measurement sequence
35. www.semilab.com
New SEA: easy-to use analysis software
Software improvements
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Functions:
Interactive graphical interface
Various fitting functions and
optical dispersion laws
Immediate visualization of all
functions
Powerful âviewerâ window for
comparing of different spectrums
More than just SE: porosimetry
and Raman analysis modules
Automatic PDF report creation
Linked to SAM for automation
Evaluation of scatterometry
37. www.semilab.com
High spatial resolution mapping (sub-mm step size)
Graphene layers: novel electrode material
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Visual correlation
between sample photo
and mapping data
no graphene
graphene single layer
graphene multilayer
38. www.semilab.com
3D ITO nanomaterial: plasmonic (novel optical)
structures
1/20/2014 38
Tunable absorption peak and
plasmonic response with Ag content
Check our recent publication in Optics Letters, Vol. 38, Issue 19, pp. 3969-3972 (2013) !