Double Patterning

Double Patterning Wai-Shing Luk

Background ,[object Object],[object Object]

光刻过程 ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Sub-wavelength Lithograph ,[object Object],[object Object],[object Object],[object Object],[object Object]

What is Double Patterning? ,[object Object]

How Difficult is Layout Splitting? ,[object Object]

Key Techniques ,[object Object],[object Object],[object Object],[object Object],[object Object]

New Polygon Cutting Algorithm ,[object Object],[object Object]

Dynamic Priority Search Tree ,[object Object],[object Object]

Splitting and Stitching ,[object Object]

Conflict Detection ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],A B C D E F b

Layout Splitting Problem Formulation ,[object Object],[object Object],[object Object],[object Object],[object Object]

Bi-connected Graph ,[object Object],[object Object],[object Object],a b

Bi-connected Components ,[object Object],[object Object],[object Object]

Tri-connected Graph ,[object Object],[object Object],[object Object],a b e g h d c f

SPQR-Tree ,[object Object],R R S P S S S P S

Divide-and-Conquer Method ,[object Object],[object Object],[object Object],[object Object],[object Object]

More Technical Details ,[object Object],[object Object]

Current Status of Our SW ,[object Object],[object Object],[object Object],[object Object],[object Object]

Conclusions ,[object Object],[object Object],[object Object],[object Object],[object Object]

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