Performix 300mm EFEM is an innovative, high-quality equipment front end solution that provides exceptional throughput and world-class tool availability.

2. Kensington Laboratories offers Performix, a 300mm
equipment front-end module (EFEM) wafer handling
environment designed for ISO Class 1 specifications, to
address the growing constraints faced by the
semiconductor industry.
2 Wide Performix EFEM 3 Wide Performix EFEM 4 Wide Performix EFEM

3. EFEM Configurable For AWide Range Of
Semiconductor Substrate Processing
Applications.

4. Performix combines the best of newly developed advanced robotic
technologies and industry-proven equipment. Available in 2, 3, and 4
port configurations, the Performix system monocoque construction, a
anybody frame, provides a sturdy foundation for the four major
components, each uniquely designed to provide the speed, accuracy,
and flexibility to meet your particular needs.
ADO Load Port
The ADO 300mm load port accesses the wafer in up to 6 seconds, 1.5
to over 3 times better than competitive products.
 Best in class FOUP interoperability: Kensington Laboratories
patented latchkey opening mechanism opens all SEMI standard
FOUP configurations, in any condition, ensuring excellent
repeatability.
 Built to last: A robust design and precision assembly ensures
exceptional lifetime and performance.
 Superior reliability: Demonstrated MCBF >600,000 cycles at 90%
confidence level.

5. MultiLink Robotic Systems
Introduced in 1995, Multilink robotic systems combine mature,
proven technology with state of the art performance. These
robots are mainstays in fabs throughout the industry.
 Exceptional throughput: Proprietary z axis design
enables market leading peak speeds of 55 inches/second
and acceleration rates of up to 200 inches/second2.
 Precision wafer placement: High performance design
provides precise motion control and eliminates structural
deflection and creep.
 Fast swap times: Dual arm systems have demonstrated
swap times of less than 3 seconds and throughput greater
than 360 wph on a 4 port configuration.
 300mm installed base: MultiLink robots are currently
installed at 98% of all 300mm fabs.

6. Prealigner
High-speed prealignment provides state of the art placement accuracy in both vacuum chuck
and edge contact configurations.
Central Controller
The optional central controller provides a simple single wire host interface, coordinating all
EFEM operations. A straightforward, user-friendly command set makes interfacing and
controlling the Performix fast and easy.
System Features
The Performix system’s unique monocoque frame forms a rigid enclosure that reduces
vibration and enhances stability.This design eliminates the need for a traditional skin-on-frame
EFEM design. A patented datum plane serves as a reference point to ensure precision
alignment of components and eliminate tolerance variability.

7.  Latchkey opening mechanism opens all
SEMI standard FOUP configurations, in
any condition
 FOUP latchkeys require no vacuum door
attachment
 Dual end effector, multiple link robot arm
system with corner reach-around and
extended reach capabilities
 High torque, synchronously operating
multiple link robot arm mechanism
 Continuously rotatable multiple link robot
arm mechanism
 Robot arm with specimen edge gripping
end effector
 Robot arm with specimen sensing and
edge gripping end effector
 Self-teaching robot arm position method
 Through-beam wafer mapping

8. Performix integrates the highest quality
components based upon a history of
cutting-edge system design.

9.  Unibody frame for simple and sturdy foundation
 Configurable using Kensington full line of Multilink Robots, Pre-
Aligners and FOUP Load Ports
 SEMI Complaint and CE Certified
 Three sizes – 2 FOUPWide, 3 FOUP Wide and 4 FOUP Wide
 BOLTS interface for ADO as well as alternative substrate
handling platforms
 Class 1 Cleanliness
 Options
 BOLTS interface for non-wafer applications
 BOLTS interface for small wafer applications
 Chemical Filtration
 AMHS Options
 Programmable lights, light tower and buttons

10. Sales – Kensington Robots
& Stages, Newport PM500
Stages, Spare Parts
sales@kensingtonlabs.com
Service - Kensington
robot and stage repairs,
Newport PM500 stage repairs
service@kensingtonlabs.com
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
Phone: 510.324.0126
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800