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Daytona Beach Conference Aluminum Oxide And Silicon Nitride Thin Films As (2)

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1) The document discusses using aluminum oxide and silicon nitride thin films as anti-corrosion layers for magnesium-aluminum alloys and carbon steel fasteners. 2) It investigates depositing aluminum oxide using e-beam evaporation and silicon nitride using plasma-enhanced chemical vapor deposition. 3) Testing found that a double layer of aluminum oxide with a post-deposition heat treatment and UV-curable top layer provided the highest impedance and corrosion protection.

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ALUMINUM OXIDE AND SILICON NITRIDE THIN FILMS AS ANTI-CORROSION LAYERS C. Qu 1 , P. Li 1 , J. Fan 1 , D. Edwards 1 , W. Schulze 1 , G. Wynick 1 , R. E. Miller 1 , L. Lin 1 , Q. Fang 2 , K. Bryson 3 , H. Rubin 4 , and X. W. Wang 1* ,[object Object],[object Object],[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Thin Films ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
E-beam Evaporation Technique ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
E-beam Evaporation ,[object Object]
Plasma Enhanced Chemical Vapor Deposition (PECVD) ,[object Object],[object Object],[object Object],[object Object]
Plasma Enhanced Chemical Vapor Deposition (PECVD) ,[object Object],SiH 4 NH 3 N 2 RF Vacuum Shower head Shower head Substrate holder (Bottom electrode) Top electrode
Issue ,[object Object],[object Object],[object Object]
Control
Defect
Impedance of Control
Single-layer Aluminum Oxide Thin Film ,[object Object]
Impedance ,[object Object]
Post Deposition ,[object Object],[object Object],[object Object],[object Object]
Comparison ,[object Object]
Single-layer Silicon Nitride Thin Film ,[object Object]
Increasing Thickness ,[object Object]
Thicker ,[object Object]
Thickest ,[object Object]
Impedance ,[object Object]
Impedance Modulus Comparison ,[object Object]
Progress ,[object Object],Control Single-layer Aluminum Oxide Single-layer Aluminum Oxide w/ Heat Treatment Double-layer Aluminum Oxide w/ Heat Treatment Double-layer Aluminum Oxide w/ Heat Treatment and UV-curable material on the top Silicon Nitride via PECVD
Density of Aluminum Oxide Film ,[object Object],[object Object],[object Object],[object Object],[object Object]
Conclusion ,[object Object],[object Object],[object Object],[object Object]

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