2. Introduction
Micro-electromechanical systems
(MEMS) are small integrated devices or
systems that combine electrical and
mechanical components.
They range in size from the sub
micrometer level to the millimetres level.
3. The legs of a spider mite standing on
gears from a micro-engine.
A MEMS silicon motor together with a
strand of human hair.
4. Different names for MEMS
USA: Micro- Electro Mechanical
System.
Europe: Micro system Technology.
Japan: Micro machines.
5. MEMS Technology
Micro fabrication Technology.
The electronics are fabricated using
integrated circuit (IC) process
sequences.
The micromechanical components are
fabricated using compatible
"micromachining" processes
7. Micro fabrication
There are three basic building blocks in MEMS
technology.
Deposition: The ability to deposit thin
film of material on substrate.
Lithography: To apply a patterned mask on
top of the films by photolithographic imaging.
Etching: To etch the films selectively to the
mask.
8. Deposition Technology
Deposition technology can be classified
into two groups:
Deposition by Chemical Reaction:
Chemical Vapor Deposition.
Electro deposition.
Epitaxy
Thermal oxidation.
11. Etching Technology
There are two classifications for etching process:
Wet Etching: The material is dissolved in chemical
solution.
Dry Etching: the material is sputtered or dissolved
using reactive ions or vapour phase etchants.
14. Commercial Application
Inkjet printers
Airbag Inflation system
Tire Pressure Sensor
Disposal Blood Pressure Sensor
Dynamic Stability Control in Cars
DMD chip in DLP Projectors
15. Advantages
Minimize energy and materials use in
manufacturing
Cost/performance advantages
Improved reproducibility
Improved accuracy and reliability
Increased selectivity and sensitivity
16. Disadvantages
Farm establishment requires huge
investments
Micro-components are Costly compare
to macro-components
Design includes very much complex
procedures
Prior knowledge is needed to integrate
MEMS devices