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Passive Hybrid MEMS for High-Temperature Telemetric Measurements
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Passive Hybrid MEMS for High-Temperature Telemetric Measurements
1.
2.
3.
4.
5.
6.
7.
8.
9.
Components of
MEMS
10.
11.
Image of the
hybrid telemetric MEMS.
12.
13.
Microscope image
of interdigitated capacitor
14.
15.
Bent Beam structure
.
16.
17.
Equivalent model of
the interdigitated capacitor and an impedance diagram measured at 270 ◦C [(a) modulus and (b) phase].
18.
Impedance module of
the interdigitated capacitor measured at different Temperatures(100 ◦C to 330 ◦C.)
19.
20.
21.
Microscope image of
the inductor A1 realized by thick-film deposition on alumina.
22.
Microscope image of
the inductor B1 realized by photolithography
23.
Equivalent model of
the planar inductor and impedance diagrams at different temperatures.(23 ◦C to 340 ◦C)
24.
25.
26.
27.
28.
BLOCK DIAGRAM OF
INDUCTIVE TELEMETRY
29.
30.
31.
Modulus and phase
of the impedance measured from the terminals of the readout inductor.
32.
33.
34.
35.
Modules of hybrid
sensor measured using impedance analyzer at different temperatures.
36.
Phase of hybrid
sensor measured using impedance analyzer at different temperatures
37.
38.
Capacitance sensor values
directly measured and compared with the calculated ones.
39.
Temperature values measured
with the Pt100 and compared with the Min-Phase and 3-Resonances calculated values.
40.
41.
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