2. Content
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Introduction to Plasma Physics.
Fundamental aspects of Plasma Physics.
Methods and equipment for plasma forming.
Applications of atmospheric plasma.
Applications of vacuum plasma.
Conclusion.
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7. Plasma Components
Plasma is 4th state of matter and
consists from mix of ions,
electrons, atoms, molecules.
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8. Types of Plasma
1. Ionized gas. More understanding.
2. Ionized solid state (Example: ionized
semiconductors ( Fast ionized dinistors)).
3. Ionized liquid (Example: breakdown of water or
oil).
4. Dust plasma.
5. Cluster plasma (Example: evaporated plasma in
electron source).
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9. Main parameters of plasma
1. Density Ne – number of electrons in volume, 1/cm3.
2. Temperature T, [eV]. 1 eV = 11606 K ~ 104K.
mv 2
3
e U
kT
2
2
eU[J]
eU[eV] kT[J]
T[eV]
3. Langmuir frequency- plasma frequency:
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10. Main directions
1. Methods and devices for forming of
plasma.
2. Applications of plasma in science,
technology and industry.
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11. Methods and devices for
forming of plasma
It is very complicated area:
1. Fundamental knowledge and
understanding of plasma physics.
2. Knowledge and experience in electrical
engineering.
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13. Passive and active generation
of plasma
1. Passive generation of plasma:
Thermal ionization and chemical
processes.
2. Active generation of plasma:
Ionization of atoms & molecules
by external active energy source.
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16. Atmosphere plasma
Atmosphere plasma – generation of
plasma for pressure 760 Torr.
Hard conditions: variation of temperature,
humanity.
The types of plasma:
1. Pulsed plasma.
2. DC
3. AC, RF MW plasma
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18. Types of pulsed plasma
generators
SWITCHES
HIGH
VOLTAGE
POWER
SUPPLY
CHARGE
POWER
SUPPLY
R
SWITCH
PLASMA
L
C
C
HVD
Rcur
PIN
ELECTRODE
PLATE
ELECTRODE
CURRENT
TRANSFORMER
SWITCH
DIELECTRIC
METAL PLATE
CHARGE
POWER
SUPPLY
C
L
METAL
GRID
METAL
ELECTRODE
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SCOPE
23. High Pressure gas plasma
Main reason of increasing pressure is increasing of
electrical insulation.
Gas sparks for high voltage and pulsed power
equipment.
Different gases: N2, SF6, N2+CO.
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24. Ionization of gas by
charged particles
Ionization gas by charged particles
is effective method for generation
of volume plasma.
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25. Vacuum plasma
1. Forming of plasma for glow discharge .
2. Forming of clusters high energy plasma
for technical vacuum.
3. Forming of magnetron discharge.
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28. Vacuum plasma
Positive
High purity
matter
Materials
science &
technology
Problem
Large cross
section
Vacuum plasma
Clusters and
fractal
technologies
Generation
of beams
Microwave
and pulsed
power
technologies
Instrumentation
& diagnostics
New state
of matter
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