1. Microchannel Fabrication with Aluminium
as Etching Mask for Microfluidic Applications
D.O.E
AZRIRUZAINI BIN NORDIN , MR. WAN MOKHDZANI BIN WAN NOR HAIMI
, MR STEVEN TANISELASS, MR R. VITYACHARAN, MR MOHD HAFIZ
SCHOOL OF MICROELECTRONIC ENGINEERING
UNIVERSITI MALAYSIA PERLIS (UniMAP)
Microfluidic system is MEMS technology which revolutionized from microelectronic circuit on signal processing
and communication where this is an innovative and multidisciplinary field in behaviour of fluid flow on a
microscale fluid reactions carried on integrated miniaturized microfluid channel and reactor. Fluids circulating in
channels can exhibit dramatically different performance from that in macro-scale tubes. Flow is normally
turbulence-free, so layers containing different components can move along together. The main point in this project
is to create the high quality of microchannel based it surface using various etching parameter according to design
of experiment (D.O.E) method.
.
Process flow
-Systematic, rigorous approach to problem solving
that applies techniques at the data collection stage
so as to ensure the generation of valid, defensible,
and supportable in conclusions.
- Used in R.I.E parameter
- level = 2, factor = 4, response=16 per design
- factor= flow rate, temperature ,pressure ,RF power
Application
Introduction
-Design Microchannel fabrication process.
-Etching process using Design of
Experiment (D.O.E)
-Analyze the microchannel surface
characteristic
Objective
Microchannel
Model Design
Microchannel
Fabrication
Inspection
And
Observation
Result And Analysis (AFM/SEM)
Y
N
Etching process (D.O.E)
Design And Fabrication Process
Layout part Dimension
Reservoir radius 3mm
Reservoir angle 349°
Microchannel length 10mm
Microchannel width
500µ,300µ,100µ,50µ,
30µ,10µ
Layout part Dimension
Reservoir length 2mm
Reservoir width 3.5mm
Reservoir contact angle 119°
Microchannel length 5.5mm
Microchannel width 500µ,300µ,100µ,50µ,
30µ,10µ
-Apply in various on-chip microfluidic bio-devices such as
chemical reactor and synthesis
-can be used for cooling of miniature devices such as micro heat
exchanger