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Business Reisen

Energy Challenges and Energy-Saving Opportunities
for Semiconductor Manufacturing Industry

J. M. Tsao and S.C. Hu
Department of Air-Conditioning and Refrigeration Engineering
National Taipei University of Technology
Taipei, Taiwan ROC

tech_9-1

tech_9-1

tech_9-1

tech_9-1

tech_9-1

tech_9-1

tech_9-1

tech_9-1

tech_9-1

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tech_9-1

1. Energy Challenges and Energy-Saving Opportunities for Semiconductor Manufacturing Industry J. M. Tsao and S.C. Hu Department of Air-Conditioning and Refrigeration Engineering National Taipei University of Technology Taipei, Taiwan ROC