1. Integrated Power Management Silicon Platforms for Fabless Design in the 5V- 700V Range Dr Shye Shapira Director of RD Integrated Power Management Platforms TowerJazz May 4, 2011

2. Integrated Power Management Applications are Thriving Portable devices are proliferating: Including multiple subsystems with different voltage ratings that require multiple power management circuits. Green (Efficient) Offline Applications: Small size conversion circuitry from Grid to a low voltage application power. Highest volume application: home LED lights.

3. From IDM Monopoly to Foundry –Fabless Relation Last three years and ongoing: Process Design kits available from Foundries 60V, 200V, 700V Until then : Integrated Power Management Design almost all Independent Device Manufacturer 3

4. Impact on the Israeli Fabless Arena Growing Market + Foundry Availability of Power Management Platforms + Large Fabless Community + 2 to 5 years = Most Fabless companies in Israel ( as in most other places…) design integrated PM Chips

5. The Odds For/Against Fabless Power Design Europe/US 2011 (Tradition in PMIC* design) Israel 2011 (No tradition in PMIC* design but analog /digital design community) Independent Power Device Manufacturer Universities Analog /RF Design Houses Digital Intensive IDM Production Worthy PMIC Design Capability Time Engineering Work Force Migration Engineering Work Force Migration Power Supply Makers Fabless Start Up Fabless Start Up Production Worthy PMIC Design Capability Learning Cycles Production Worthy PMIC Design Capability *PMIC=Power Management Integrated Circuits

6. Evening Out the Odds U.S. Wild West 1860 s: ”God created man, but Samuel Colt made them Equal.“ 6 Integrated Power Management Design 2011 : ” Advanced Foundry Power Management Design Platforms, Process Design Kits and Design Service make Design Capabilities Equal.“

7. Challenges in Power Management Platform Design

8. Integrated Power Management Application Space 5v-60V DC DC Converter (“Boost Buck” Convertors Std Alone, Digital Cameras) LED Drivers Motor Drives Line Drivers Class D Audio Amplifiers. Low Ron and low noise. Power over Ethernet RF Power Amplifiers 150v-700V Offline applications AC adapter Voltages 400 to 600V Lighting

9. TowerJazz Confidential 5-60V : PMIC and the Self Aligned Body Ldmos Drain Channel Channel Self aligned Body option Allows short channel , Low specific Rdson Isolated Source Two Process options to allow reduced Rdson Scalable drain allows proper voltage BV relation 9

10. Pcell Features & GUI of a scalable voltage LDMOS Scalable Voltage : Best Device Area tradeoff for required voltage Guard Ring Selection in Pcells Parasitic Metal Resistance Calculator Transistor is mad of a 2D array of fingers. #Nf=Nr*Nc Drift region or operating voltage choosing box/switch Calculators: operating voltage, Breakdown voltage, Ron with or without the M2 routing Thermal resistance flag Routing options Guard Ring options: no G.R, PM rings (up to 5) or P+AA ring Advanced options, will be allowed at future PDK 10 10

11. Isolation Challenge In Integrated Power Management Circuits 1. Current (Several Amps) Drawn From Substrate by inductor through ldmos drain affects all other low current (microA-mA) circuitry via noise or latchup risk. 2. Minority Carriers injected by diode may still diffuse to substrate through isolating layer Analog Bgref (I~microA) 11

12. 5V-60V Isolated Platforms TowerJazz Confidential Shallow NBL: Buried layer shorted to drain Deep NBL: Buried layer Isolated Allows drain Isolation Deep NBL Shallow NBL

13. 700V platform Logic Density Analog Rdson: Resurf 13

14. 700V NLDMOS Layout Examples: 700v Ldmos Device and Building Blocks Double Resurf: Isolation layer Pinched off on both sides

15. Zener Diode in 700V Process BV = 6V Can Float to 50V No Walk out

16. Additional Material Chipex 2010:Integrated Power Management Platforms: Applications Production and Figures of Merit. ASCR Technion: Integrated Power Management Circuit Platforms: Figures of Merit, Features and their correlation to applications. GSA Forum:Integrated Power Management Platforms: The Entry of Fabless Design Houses to Power Management System Design 16