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Intellectual Property Creation and
Management for Emerging Growth
Technology Companies
Patents in Detail (Part 2)
Intellectual Property Creation and
Management for Emerging Growth
Technology Companies
Patents in Detail (Part 2)
Patent Application Preparation Process
Evaluate Subject Matter
Identify Basic
Elements of Invention
Prepare Outline
Of Subject Matter
Draft Set of Claims
Prepare Drawings
Draft Background and
Summary of Invention
Draft Detailed
Description of Invention
Draft Abstract of
Disclosure
Start
End
U.S. Patent 5,937,142
• Background of Invention
• Summary of Invention
• Detailed Description of Invention
• Claims
• Abstract
Cover Page for U.S. 5,937,142
Background -Where the
Rest of the World Is
• Sets Stage for Invention
• Give Some Specifics on Closet Prior Art
– Definitions
– Elements
– Particular Patents
– Deficiencies Linked to Benefits Provided
Issued Patent
Background of Invention
for U.S. 5,937,142
Summary:
Without Boring Details, This
is Where I Am
• Asserts That Invention Overcomes
Problems Stated in Background
• Defines Elements of the Invention
• Recited Advantages and Attainments
Issued Patent
Detailed Description - How I Do
What I Do to be Where I Am
• Introduces the Invention and its
Environment
• Uses Full, Clear, Concise and Exact Terms
• Addresses Persons Skilled in Art
• Permits Making and Using Invention
• Describes How the Elements in the
Drawings Operate as a Unit
Issued Patent
Description of Drawings
for U.S. 5,937,142
Detailed Description
for U.S. 5,937,142
Drawing: Mechanical
Drawing: System Level Design
Drawing: Optical Design
Drawing: Circuit Diagram
Algorithms
Claims for U.S. 5,937,142
Key Filing Information
for U.S. 5,937,142
Claims - This is What I Want
the Patent to Protect
• Particularly Point Out and Distinctly Claim
• List of Basic Structure and Functions of
Invention
• Highlight Difference Between Invention
and Prior Art
Issued Patent
Claim 1 for U.S. 5,937,142
What is claimed is:
1. A system for rapid thermal processing of a substrate in a process chamber while measuring and controlling the
temperature at the substrate to establish substantially uniform substrate temperature in real time, comprising:
an axisymmetrical multi-zone illuminator, comprising:
a plurality of substantially concentric rings of heating radiative lamps to direct optical power toward said
substrate; and
a gas showerhead facing a substrate frontside for gas delivery wherein the gas showerhead is an optical reflector,
said optical reflector having substantially high optical reflectivity;
a multi-zone temperature measurement system, comprising:
a plurality of pyrometry sensors coupled to said multi-zone illuminator to measure the substrate radiance; and
a system for real-time measurement and compensation of substrate emissivity and illuminator lamp light
interference effects;
a multi-variable temperature controller for providing multi-zone real-time temperature control; and
a plurality of illuminator lamp power supplies.
Claim 14 for U.S. 5,937,142
14. An axisymmetrical multi-zone illuminator system for use in rapid
thermal processing of a substrate in a process chamber, comprising:
a lamp housing;
a plurality of substantially concentric rings of heating radiative lamps
embedded within the lamp housing facing the substrate for generating
and directing optical power toward a backside of the substrate; and
an optical reflector having substantially high optical reflectivity facing
a frontside of the substrate for radiating optical energy transmitted
through the substrate backside toward the substrate frontside, said
optical reflector driving the effective frontside emissivity towards 1.
Intellectual Property Creation and
Management for Emerging Growth
Technology Companies
Patents in Detail (Part 2)
www.HULSEYIPLaw.com

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Bill Hulsey Patent Lawyer - Intellectual Property - Patents in Detail

  • 1. Intellectual Property Creation and Management for Emerging Growth Technology Companies Patents in Detail (Part 2)
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  • 4. Intellectual Property Creation and Management for Emerging Growth Technology Companies Patents in Detail (Part 2)
  • 5. Patent Application Preparation Process Evaluate Subject Matter Identify Basic Elements of Invention Prepare Outline Of Subject Matter Draft Set of Claims Prepare Drawings Draft Background and Summary of Invention Draft Detailed Description of Invention Draft Abstract of Disclosure Start End
  • 6. U.S. Patent 5,937,142 • Background of Invention • Summary of Invention • Detailed Description of Invention • Claims • Abstract
  • 7. Cover Page for U.S. 5,937,142
  • 8. Background -Where the Rest of the World Is • Sets Stage for Invention • Give Some Specifics on Closet Prior Art – Definitions – Elements – Particular Patents – Deficiencies Linked to Benefits Provided Issued Patent
  • 10. Summary: Without Boring Details, This is Where I Am • Asserts That Invention Overcomes Problems Stated in Background • Defines Elements of the Invention • Recited Advantages and Attainments Issued Patent
  • 11. Detailed Description - How I Do What I Do to be Where I Am • Introduces the Invention and its Environment • Uses Full, Clear, Concise and Exact Terms • Addresses Persons Skilled in Art • Permits Making and Using Invention • Describes How the Elements in the Drawings Operate as a Unit Issued Patent
  • 12. Description of Drawings for U.S. 5,937,142
  • 19. Claims for U.S. 5,937,142
  • 20. Key Filing Information for U.S. 5,937,142
  • 21. Claims - This is What I Want the Patent to Protect • Particularly Point Out and Distinctly Claim • List of Basic Structure and Functions of Invention • Highlight Difference Between Invention and Prior Art Issued Patent
  • 22. Claim 1 for U.S. 5,937,142 What is claimed is: 1. A system for rapid thermal processing of a substrate in a process chamber while measuring and controlling the temperature at the substrate to establish substantially uniform substrate temperature in real time, comprising: an axisymmetrical multi-zone illuminator, comprising: a plurality of substantially concentric rings of heating radiative lamps to direct optical power toward said substrate; and a gas showerhead facing a substrate frontside for gas delivery wherein the gas showerhead is an optical reflector, said optical reflector having substantially high optical reflectivity; a multi-zone temperature measurement system, comprising: a plurality of pyrometry sensors coupled to said multi-zone illuminator to measure the substrate radiance; and a system for real-time measurement and compensation of substrate emissivity and illuminator lamp light interference effects; a multi-variable temperature controller for providing multi-zone real-time temperature control; and a plurality of illuminator lamp power supplies.
  • 23. Claim 14 for U.S. 5,937,142 14. An axisymmetrical multi-zone illuminator system for use in rapid thermal processing of a substrate in a process chamber, comprising: a lamp housing; a plurality of substantially concentric rings of heating radiative lamps embedded within the lamp housing facing the substrate for generating and directing optical power toward a backside of the substrate; and an optical reflector having substantially high optical reflectivity facing a frontside of the substrate for radiating optical energy transmitted through the substrate backside toward the substrate frontside, said optical reflector driving the effective frontside emissivity towards 1.
  • 24. Intellectual Property Creation and Management for Emerging Growth Technology Companies Patents in Detail (Part 2)