The document discusses different methods for synthesizing nanomaterials, including top-down and bottom-up approaches. It describes growth kinetics involving cluster formation, nucleation, and growth. Bottom-up synthesis techniques include physical vapor deposition methods like evaporation and sputtering, as well as chemical methods like wet chemical synthesis, microemulsions, and colloidal synthesis. Nucleation can be homogeneous or heterogeneous, and supercooling affects nucleation rate and crystal size. Overall the document provides an overview of the various techniques used for controlling size, shape, structure, and properties during nanomaterial synthesis.
thGAP - BAbyss in Moderno!! Transgenic Human Germline Alternatives ProjectMarc Dusseiller Dusjagr
thGAP - Transgenic Human Germline Alternatives Project, presents an evening of input lectures, discussions and a performative workshop on artistic interventions for future scenarios of human genetic and inheritable modifications.
To begin our lecturers, Marc Dusseiller aka "dusjagr" and Rodrigo Martin Iglesias, will give an overview of their transdisciplinary practices, including the history of hackteria, a global network for sharing knowledge to involve artists in hands-on and Do-It-With-Others (DIWO) working with the lifesciences, and reflections on future scenarios from the 8-bit computer games of the 80ies to current real-world endeavous of genetically modifiying the human species.
We will then follow up with discussions and hands-on experiments on working with embryos, ovums, gametes, genetic materials from code to slime, in a creative and playful workshop setup, where all paticipant can collaborate on artistic interventions into the germline of a post-human future.
dusjagr & nano talk on open tools for agriculture research and learningMarc Dusseiller Dusjagr
Open Tools for Research, Learning, Sharing in Agriculture and
Society as a whole.
Remote lecture by Marc Dusseiller and Fernando "nano" Castro on open science hardware for agriculture and edication, held for students of microbiology at UGM, Yogyakarta (remote - online )
UGM 2022: Open Source Biological Art and DIY / DIWO Scientific InstrumentsMarc Dusseiller Dusjagr
Overview of transdisciplinary approach bridging art and science in the global hackteria network.
Concrete examples of building low-cost scientific laboratory equiment.
Various DIY electronics for data logging.
what is art?
The document discusses different methods for synthesizing nanomaterials, including top-down and bottom-up approaches. It describes growth kinetics involving cluster formation, nucleation, and growth. Bottom-up synthesis techniques include physical vapor deposition methods like evaporation and sputtering, as well as chemical methods like wet chemical synthesis, microemulsions, and colloidal synthesis. Nucleation can be homogeneous or heterogeneous, and supercooling affects nucleation rate and crystal size. Overall the document provides an overview of the various techniques used for controlling size, shape, structure, and properties during nanomaterial synthesis.
thGAP - BAbyss in Moderno!! Transgenic Human Germline Alternatives ProjectMarc Dusseiller Dusjagr
thGAP - Transgenic Human Germline Alternatives Project, presents an evening of input lectures, discussions and a performative workshop on artistic interventions for future scenarios of human genetic and inheritable modifications.
To begin our lecturers, Marc Dusseiller aka "dusjagr" and Rodrigo Martin Iglesias, will give an overview of their transdisciplinary practices, including the history of hackteria, a global network for sharing knowledge to involve artists in hands-on and Do-It-With-Others (DIWO) working with the lifesciences, and reflections on future scenarios from the 8-bit computer games of the 80ies to current real-world endeavous of genetically modifiying the human species.
We will then follow up with discussions and hands-on experiments on working with embryos, ovums, gametes, genetic materials from code to slime, in a creative and playful workshop setup, where all paticipant can collaborate on artistic interventions into the germline of a post-human future.
dusjagr & nano talk on open tools for agriculture research and learningMarc Dusseiller Dusjagr
Open Tools for Research, Learning, Sharing in Agriculture and
Society as a whole.
Remote lecture by Marc Dusseiller and Fernando "nano" Castro on open science hardware for agriculture and edication, held for students of microbiology at UGM, Yogyakarta (remote - online )
UGM 2022: Open Source Biological Art and DIY / DIWO Scientific InstrumentsMarc Dusseiller Dusjagr
Overview of transdisciplinary approach bridging art and science in the global hackteria network.
Concrete examples of building low-cost scientific laboratory equiment.
Various DIY electronics for data logging.
what is art?
This document provides an overview of Dr. Marc R. Dusseiller's background and work investigating transdisciplinary approaches at the intersection of nanotechnology and human genome editing. It discusses his involvement with DIY biology and open source laboratory infrastructure projects since the 1980s aimed at making science more accessible. Specific projects mentioned include Hackteria workshops around the world to share skills for citizen science, as well as investigations into using nanoparticles for human genome editing and setting up a nano lab in a former bar in Slovenia.
Throughout the course, we will lift the fogs of these superficial discussions and through hands-on activities get closer to grasp the world of the small. We will build our own simple DIY (do-it-yourself) optical and electronic instruments to learn more about nanoparticles and nanosensors, how to “see” them, how to “hear” them.
During the 10 years of Hackteria.org we have established a global network and online knowledge base enabling practioners from diverse backgrounds to experiment with life science methodologies, from laboratory biology and genetics to environmental monitoring or fermentation. We have explored methods of collaboration, established in the early interenet culture, such as hackathons or docusprints as offline physical face-to-face production sessions, aswell as online tools for co-writing text-based instructions and lab notes. In this talk, I will give an overview of how our DIWO (Do-It-With-Others) method has lead to highly innovative projects, low-cost laboratory infrastructures, playful and critical prototypes, new workshop methods embracing a radically transdisciplinary approach to bridge the arts and the sciences.
Seoul 2019 - “Hackteria | Open Source Biological Art” - Transdisciplinary Ap...Marc Dusseiller Dusjagr
During the 10 years of Hackteria.org we have established a global network and online knowledge base enabling practioners from diverse backgrounds to experiment with life science methodologies, from laboratory biology and genetics to environmental monitoring or fermentation. We have explored methods of collaboration, established in the early interenet culture, such as hackathons or docusprints as offline physical face-to-face production sessions, aswell as online tools for co-writing text-based instructions and lab notes. In this talk, I will give an overview of how our DIWO (Do-It-With-Others) method has lead to highly innovative projects, low-cost laboratory infrastructures, playful and critical prototypes, new workshop methods embracing a radically transdisciplinary approach to bridge the arts and the sciences.
Presentation of the founding and background of Hackteria | Open Source Biological Art
Examples of modes of temporary collaborations during retreats, labs, camps and more.
WHAT IS/NOT WORKING
*/ Sesi konversasi mengenal kerja bersama
Organized along with Kunci and lifepatch, the event marks Hackteria’s tenth year as a global network that involves the collaboration of scientists, makers, hackers and artists in exploring new possibilities in bioart, open source hardware/software and experiments with biology, art/science based in various locations.
Instead of denoting what has been succeeded and how to pursue it, the conversation will explore possibilities of what could enable working together based on Kunci’s, Hackteria’s and lifepatch’s experience. The question ‘what is/not working’ may imply a ceased productivity, and at the same time, may provide opportunities to discover distinct values based on “non-productive” issues.
An overview of the 10 years history of Hackteria, establishing a global network of transdisciplinary collaborations and bioart workshops. Various examples of DIY science instruments, from rough educational prototypes to advanced open hardware for science.
This document provides an overview of the speaker's experiences with DIY biology and biohacking. It discusses the development of generic laboratory infrastructure to support citizen science, knowledge sharing and open source hardware. It describes various workshops and labs focused on transdisciplinary approaches at the intersection of biology, art, and design. Examples include DIY microscopy, synthetic biology competitions, environmental monitoring, and body hacking. The document emphasizes that biohacking has always existed as people find novel ways to apply science in their daily lives.
Creative PCB Design for Manufacturing using svg2shenzhen dusjagr taipeiMarc Dusseiller Dusjagr
I have explored many ways to make creative PCB designs for simple workshops in electronics and soldering, as part of the Swiss Mechatronic Art Society and in collaboration with other geeks worldwide. Pencil drawing, inkscape, homemade etching and in the end... creating Gerber files for Manufacturing using the amazing tool by Budi Prakosa "svg2shenzhen" to export from Inkscape to KiCad and produce nice gerber files. These slides are an overview of many examples over the years that lead to the most recent tool and PCBs.
This document provides an overview of DIY biology and biotechnology ("biohacking") through examples of workshops, labs, and projects. It discusses the global DIYbio community and efforts to provide open infrastructure like websites, instructions, and DIY lab instruments. Examples include homemade microscopy, PCR thermocyclers from hacked hairdryers, DNA testing, tissue engineering, fermentation, and mobile labs in Indonesia. The goal is democratizing access to tools and knowledge through a transdisciplinary approach involving artists, designers, researchers and citizens.
Overview of dusjagr's background from nanobiotechnology to making cheese and global workshopology. The role of temporary labs for collaborative prototyping, examples from Taiwan, Indonesia and Switzerland. Hackerspaces crossing digital- and biotechnologies.
This document discusses biohacking and open source biology. It begins by explaining that biohacking is about life and democratizing access to tools and knowledge. This includes topics like genetic engineering, DNA testing, and building one's own laboratory. The document then highlights several examples of open source biological art and DIY biology projects. It emphasizes building communities around collaborative development and workshopping. The goal is to make science more open and accessible to all.
- Dr. Marc Dusseiller discusses his experiences with biohacking and DIY (do-it-yourself) biology over the past 10+ years, including workshops held around the world.
- He helped establish hackerspaces and labs that merge digital and biological technologies to democratize science tools and knowledge.
- Examples include microfarming algae, DIY microscopy, DNA testing, and collaborations on projects like synthetic biology and environmental monitoring.
1. The document discusses the speaker's experiences with biohacking and DIY biology, including early work bridging material science and biology, developing workshops for various groups, and collaborating on projects like algae farming and open source biological art.
2. It describes the concept of biohacking as community-driven biology involving topics like genetic engineering, DNA testing, and environmental monitoring. The goal is democratization of tools and knowledge.
3. The speaker advocates for an approach of DIY and DIWO (Do It Yourself/With Others) to create useful or beautiful things through collaborative development and sharing of knowledge via online resources like the Hackteria wiki.
This document discusses DIY (do-it-yourself) microscopy and building microscopes. It mentions the author's experiences constructing microscopes using inexpensive materials and providing workshops to teach these skills globally. Specific projects are noted, such as building stable microscope stages and observing dancing tardigrades. The goal is to demystify science and make microscopy accessible through open source plans and a shared knowledge base.
Personal Introduction, from NanoBioInterfaces to stuffing rats. From Hackteria and global Biohackers to Smart Coconuts and low-cost electronics educational tools
Overview of dusjagr's activities in the hackteria network, 8 years of workshops from biohacking and synbio to fermentation of cheeses and stuffing rats.
Temporary Labs, Community Involvement and BioLabs discusses how to start community bio labs through sharing experiences setting up various labs over time. It outlines how Dr. Marc Dusseiller was involved in labs since 2006 and ran nanolab courses from 2008-2012. It emphasizes that people are more important than infrastructure and shares how the BioTehna lab in Ljubljana was started in 2012 and has expanded through collaborative workshops and growing community involvement. The document promotes starting labs anywhere through flexible do-it-yourself approaches and networking with others.
From September to November dusjagr was on another world tour of workshopology, taxidermia, plant-geeking, space programs, poop analysis and visiting a great number of geeks and hackers worldwide.
PooperLeaks is a public archive of personal health data gathered at the Hackteria BYOP (Bring Your Own Poop) LAB. The philosophy of BYOP embraces the open sharing of everything: share your microbes, share your biodata, share your shit - for the eternal wellness of your guts, science, and society.
This document provides an overview of Dr. Marc R. Dusseiller's background and work investigating transdisciplinary approaches at the intersection of nanotechnology and human genome editing. It discusses his involvement with DIY biology and open source laboratory infrastructure projects since the 1980s aimed at making science more accessible. Specific projects mentioned include Hackteria workshops around the world to share skills for citizen science, as well as investigations into using nanoparticles for human genome editing and setting up a nano lab in a former bar in Slovenia.
Throughout the course, we will lift the fogs of these superficial discussions and through hands-on activities get closer to grasp the world of the small. We will build our own simple DIY (do-it-yourself) optical and electronic instruments to learn more about nanoparticles and nanosensors, how to “see” them, how to “hear” them.
During the 10 years of Hackteria.org we have established a global network and online knowledge base enabling practioners from diverse backgrounds to experiment with life science methodologies, from laboratory biology and genetics to environmental monitoring or fermentation. We have explored methods of collaboration, established in the early interenet culture, such as hackathons or docusprints as offline physical face-to-face production sessions, aswell as online tools for co-writing text-based instructions and lab notes. In this talk, I will give an overview of how our DIWO (Do-It-With-Others) method has lead to highly innovative projects, low-cost laboratory infrastructures, playful and critical prototypes, new workshop methods embracing a radically transdisciplinary approach to bridge the arts and the sciences.
Seoul 2019 - “Hackteria | Open Source Biological Art” - Transdisciplinary Ap...Marc Dusseiller Dusjagr
During the 10 years of Hackteria.org we have established a global network and online knowledge base enabling practioners from diverse backgrounds to experiment with life science methodologies, from laboratory biology and genetics to environmental monitoring or fermentation. We have explored methods of collaboration, established in the early interenet culture, such as hackathons or docusprints as offline physical face-to-face production sessions, aswell as online tools for co-writing text-based instructions and lab notes. In this talk, I will give an overview of how our DIWO (Do-It-With-Others) method has lead to highly innovative projects, low-cost laboratory infrastructures, playful and critical prototypes, new workshop methods embracing a radically transdisciplinary approach to bridge the arts and the sciences.
Presentation of the founding and background of Hackteria | Open Source Biological Art
Examples of modes of temporary collaborations during retreats, labs, camps and more.
WHAT IS/NOT WORKING
*/ Sesi konversasi mengenal kerja bersama
Organized along with Kunci and lifepatch, the event marks Hackteria’s tenth year as a global network that involves the collaboration of scientists, makers, hackers and artists in exploring new possibilities in bioart, open source hardware/software and experiments with biology, art/science based in various locations.
Instead of denoting what has been succeeded and how to pursue it, the conversation will explore possibilities of what could enable working together based on Kunci’s, Hackteria’s and lifepatch’s experience. The question ‘what is/not working’ may imply a ceased productivity, and at the same time, may provide opportunities to discover distinct values based on “non-productive” issues.
An overview of the 10 years history of Hackteria, establishing a global network of transdisciplinary collaborations and bioart workshops. Various examples of DIY science instruments, from rough educational prototypes to advanced open hardware for science.
This document provides an overview of the speaker's experiences with DIY biology and biohacking. It discusses the development of generic laboratory infrastructure to support citizen science, knowledge sharing and open source hardware. It describes various workshops and labs focused on transdisciplinary approaches at the intersection of biology, art, and design. Examples include DIY microscopy, synthetic biology competitions, environmental monitoring, and body hacking. The document emphasizes that biohacking has always existed as people find novel ways to apply science in their daily lives.
Creative PCB Design for Manufacturing using svg2shenzhen dusjagr taipeiMarc Dusseiller Dusjagr
I have explored many ways to make creative PCB designs for simple workshops in electronics and soldering, as part of the Swiss Mechatronic Art Society and in collaboration with other geeks worldwide. Pencil drawing, inkscape, homemade etching and in the end... creating Gerber files for Manufacturing using the amazing tool by Budi Prakosa "svg2shenzhen" to export from Inkscape to KiCad and produce nice gerber files. These slides are an overview of many examples over the years that lead to the most recent tool and PCBs.
This document provides an overview of DIY biology and biotechnology ("biohacking") through examples of workshops, labs, and projects. It discusses the global DIYbio community and efforts to provide open infrastructure like websites, instructions, and DIY lab instruments. Examples include homemade microscopy, PCR thermocyclers from hacked hairdryers, DNA testing, tissue engineering, fermentation, and mobile labs in Indonesia. The goal is democratizing access to tools and knowledge through a transdisciplinary approach involving artists, designers, researchers and citizens.
Overview of dusjagr's background from nanobiotechnology to making cheese and global workshopology. The role of temporary labs for collaborative prototyping, examples from Taiwan, Indonesia and Switzerland. Hackerspaces crossing digital- and biotechnologies.
This document discusses biohacking and open source biology. It begins by explaining that biohacking is about life and democratizing access to tools and knowledge. This includes topics like genetic engineering, DNA testing, and building one's own laboratory. The document then highlights several examples of open source biological art and DIY biology projects. It emphasizes building communities around collaborative development and workshopping. The goal is to make science more open and accessible to all.
- Dr. Marc Dusseiller discusses his experiences with biohacking and DIY (do-it-yourself) biology over the past 10+ years, including workshops held around the world.
- He helped establish hackerspaces and labs that merge digital and biological technologies to democratize science tools and knowledge.
- Examples include microfarming algae, DIY microscopy, DNA testing, and collaborations on projects like synthetic biology and environmental monitoring.
1. The document discusses the speaker's experiences with biohacking and DIY biology, including early work bridging material science and biology, developing workshops for various groups, and collaborating on projects like algae farming and open source biological art.
2. It describes the concept of biohacking as community-driven biology involving topics like genetic engineering, DNA testing, and environmental monitoring. The goal is democratization of tools and knowledge.
3. The speaker advocates for an approach of DIY and DIWO (Do It Yourself/With Others) to create useful or beautiful things through collaborative development and sharing of knowledge via online resources like the Hackteria wiki.
This document discusses DIY (do-it-yourself) microscopy and building microscopes. It mentions the author's experiences constructing microscopes using inexpensive materials and providing workshops to teach these skills globally. Specific projects are noted, such as building stable microscope stages and observing dancing tardigrades. The goal is to demystify science and make microscopy accessible through open source plans and a shared knowledge base.
Personal Introduction, from NanoBioInterfaces to stuffing rats. From Hackteria and global Biohackers to Smart Coconuts and low-cost electronics educational tools
Overview of dusjagr's activities in the hackteria network, 8 years of workshops from biohacking and synbio to fermentation of cheeses and stuffing rats.
Temporary Labs, Community Involvement and BioLabs discusses how to start community bio labs through sharing experiences setting up various labs over time. It outlines how Dr. Marc Dusseiller was involved in labs since 2006 and ran nanolab courses from 2008-2012. It emphasizes that people are more important than infrastructure and shares how the BioTehna lab in Ljubljana was started in 2012 and has expanded through collaborative workshops and growing community involvement. The document promotes starting labs anywhere through flexible do-it-yourself approaches and networking with others.
From September to November dusjagr was on another world tour of workshopology, taxidermia, plant-geeking, space programs, poop analysis and visiting a great number of geeks and hackers worldwide.
PooperLeaks is a public archive of personal health data gathered at the Hackteria BYOP (Bring Your Own Poop) LAB. The philosophy of BYOP embraces the open sharing of everything: share your microbes, share your biodata, share your shit - for the eternal wellness of your guts, science, and society.
1. Slide 1Mikrosysteme
GrundlagenGrundlagen
Mikro- und NanosystemeMikro- und Nanosysteme
Mikro- und Nanosysteme in der Umwelt, Biologie und MedizinMikro- und Nanosysteme in der Umwelt, Biologie und Medizin
Prozesse: Ätzen, Beschichten, Bonden, AbformenProzesse: Ätzen, Beschichten, Bonden, Abformen
Dr. Marc R. DusseillerDr. Marc R. Dusseiller
3. Slide 3Mikrosysteme
Ätzen - ÜberblickÄtzen - Überblick
Selektivität zwischen Ätzmaske und MaterialSelektivität zwischen Ätzmaske und Material
• Chemisches Ätzen, NassChemisches Ätzen, Nass
• Glass (amorph) in HFGlass (amorph) in HF
• Polymere (amorph, teilkr.) in LösungsmittelnPolymere (amorph, teilkr.) in Lösungsmitteln
• Poly-Si (polykristallin) in KOHPoly-Si (polykristallin) in KOH
• Metalle (polykristallin) in versch. LaugenMetalle (polykristallin) in versch. Laugen
• TrockenätzenTrockenätzen
• Sputtering (Ionenätzen)Sputtering (Ionenätzen) Anisotrop, schlechte Sel.Anisotrop, schlechte Sel.
• RIE (Chem. & Phys.)RIE (Chem. & Phys.) Anisotrop, gute Sel.Anisotrop, gute Sel.
• TiefenätzenTiefenätzen
• Si (einkristallin) in KOH (nass)Si (einkristallin) in KOH (nass) Anisotrop, OrientierungAnisotrop, Orientierung
• Si mit DRIESi mit DRIE (trocken)(trocken) Vertical SidewallVertical Sidewall
4. Slide 4Mikrosysteme
ÄtzenÄtzen
• NassätzenNassätzen
• In ÄtzflüssigkeitenIn Ätzflüssigkeiten
• Spannungen bei TrocknungSpannungen bei Trocknung
• Gefährliche LösungenGefährliche Lösungen
• Meist Isotrop oder Orientierungsabhängig (Si 100)Meist Isotrop oder Orientierungsabhängig (Si 100)
• SchnellSchnell
• TrockenätzenTrockenätzen
• In VakuumIn Vakuum
• Vielzahl an ÄtzgeometrienVielzahl an Ätzgeometrien
• AnisotropAnisotrop
• Vertical SidewallVertical Sidewall
• Komplexere Maschinen nötigKomplexere Maschinen nötig
• Zum Teil sehr langsamZum Teil sehr langsam
5. Slide 5Mikrosysteme
Dünnschichtätzen - TiefenätzenDünnschichtätzen - Tiefenätzen
Aspect Ratio (Aspektverhältnis) = Tiefe/StrukturbreiteAspect Ratio (Aspektverhältnis) = Tiefe/Strukturbreite
• Dünnschichtätzen << 1Dünnschichtätzen << 1
Dünne funktionale Schichten werden geätzt, Sensormaterialien, Leiterbahnen, ...Dünne funktionale Schichten werden geätzt, Sensormaterialien, Leiterbahnen, ...
• Tiefenätzen > 1Tiefenätzen > 1
Substratmaterialien werden geätzt, Si, Glass, PMMA, ...Substratmaterialien werden geätzt, Si, Glass, PMMA, ...
20. Slide 20Mikrosysteme
Chemical Vapor Deposition (CVD)Chemical Vapor Deposition (CVD)
• Zum Beispiel eine Beschichtung mit Silizium:Zum Beispiel eine Beschichtung mit Silizium:
SiHClSiHCl33 + H+ H22 → Si + 3 HCl→ Si + 3 HCl
Gas + Gas → Schicht + Gas (Reaktionsprodukte können abgesaugt werden)Gas + Gas → Schicht + Gas (Reaktionsprodukte können abgesaugt werden)
21. Slide 21Mikrosysteme
Chemical Vapor Deposition (CVD)Chemical Vapor Deposition (CVD)
• EpitaxieEpitaxie (Greek;(Greek; epiepi "above" and"above" and taxistaxis "in ordered"in ordered
manner")manner")
Die Kristall Orientierung kann weitergeführt werdenDie Kristall Orientierung kann weitergeführt werden
in der Beschichtungin der Beschichtung
24. Slide 24Mikrosysteme
Bonding - VerbindungsverfahrenBonding - Verbindungsverfahren
Verbindung von zwei (teils) mikrostrukturiertenVerbindung von zwei (teils) mikrostrukturierten
Substraten zu einem 3D DeviceSubstraten zu einem 3D Device
• KlebenKleben
Dicke Zwischenchichten, Verstopfen der StrukturenDicke Zwischenchichten, Verstopfen der Strukturen
• GlaslötenGlaslöten
Dicke Zwischenschichten, thermische SpannungenDicke Zwischenschichten, thermische Spannungen
• Eutektisches BondenEutektisches Bonden
Legierungsbildung am Interface zu anderen MetallenLegierungsbildung am Interface zu anderen Metallen
zB. Gold (370° C) oder Aluminium (577° C)zB. Gold (370° C) oder Aluminium (577° C)
• Anodisches Bonden (1000 V, 500° C)Anodisches Bonden (1000 V, 500° C)
Diffusion von NaDiffusion von Na++
Ionen aus dem Glas führt zu Anziehung derIonen aus dem Glas führt zu Anziehung der
Oberflächen und Si-O-Si BindungOberflächen und Si-O-Si Bindung
• SiliziumdirektbondenSiliziumdirektbonden
Si-OH Bindungen an der Oberfläche führt zu Wasserbildung undSi-OH Bindungen an der Oberfläche führt zu Wasserbildung und
Si-O-SiSi-O-Si
25. Slide 25Mikrosysteme
Bonding - VergleichBonding - Vergleich
Verbindung von zwei (teils) mikrostrukturiertenVerbindung von zwei (teils) mikrostrukturierten
Substraten zu einem 3D DeviceSubstraten zu einem 3D Device
26. Slide 26Mikrosysteme
FallbeispielFallbeispiel
MEMS technology Insulin Nanopump™MEMS technology Insulin Nanopump™ – Debiotech S. A. Switzerland– Debiotech S. A. Switzerland
Ein Silizium MEMS kurz vor der MarkteinführungEin Silizium MEMS kurz vor der Markteinführung
31. Slide 31Mikrosysteme
Fallbeispiel - Debiotech‘s NanopumpFallbeispiel - Debiotech‘s Nanopump
• FabrikationFabrikation
• SOI (Silicon on Insulator)SOI (Silicon on Insulator)
• Ätzen von hinten (DRIE)Ätzen von hinten (DRIE)
• Ätzen von oben, Kanäle, VentileÄtzen von oben, Kanäle, Ventile
• Sensor (geheim)Sensor (geheim)
• Anti-Haft SchichtAnti-Haft Schicht
• Bonding vn Glass mit ZugangBonding vn Glass mit Zugang
• Piezomaterial integrationPiezomaterial integration
http://www.debiotech.com
32. Slide 32Mikrosysteme
Fallbeispiel - Debiotech‘s NanopumpFallbeispiel - Debiotech‘s Nanopump
• Sehr genaue und konstante DosisSehr genaue und konstante Dosis
(U) pro Pumpenschlag(U) pro Pumpenschlag
• Geringer Fehler in der FlussmengeGeringer Fehler in der Flussmenge
auch bei kurzer Betriebszeitauch bei kurzer Betriebszeit
• Grösse (bez. Kleine)Grösse (bez. Kleine)
• DisposableDisposable
34. Slide 34Mikrosysteme
LIGALIGA
LIGA – Lithographie Galvanik AbformenLIGA – Lithographie Galvanik Abformen
X-ray Lithographisches Strukturieren eines PolymersX-ray Lithographisches Strukturieren eines Polymers
Galvanisches Abscheiden von NiGalvanisches Abscheiden von Ni
Überwachsen der MikrostrukturenÜberwachsen der Mikrostrukturen
Entfernen des SubstratesEntfernen des Substrates
mechanisch oder chemischmechanisch oder chemisch
Entfernen des PolymersEntfernen des Polymers
→→ Ni-Gussform für weitereNi-Gussform für weitere
AbformungsverfahrenAbformungsverfahren
36. Slide 36Mikrosysteme
UV-Lithographische Strukturen – SU-8UV-Lithographische Strukturen – SU-8
Poor man‘s LIGAPoor man‘s LIGA
Chemisch Verstärkter Photoresist (Epoxy vernetzt durch UV initierte Säurebildung)Chemisch Verstärkter Photoresist (Epoxy vernetzt durch UV initierte Säurebildung)
Dicke Filme mit Spin-coating (bis 500Dicke Filme mit Spin-coating (bis 500 μμm)m)
Vertical Side-wall ohne Ätzen und ohne x-ray (im Gegensatz zu LIGA)Vertical Side-wall ohne Ätzen und ohne x-ray (im Gegensatz zu LIGA)
Hohe Festigkeit und chemische Stabilität durch hohe VernetzungHohe Festigkeit und chemische Stabilität durch hohe Vernetzung
38. Slide 38Mikrosysteme
Injection Molding - MikroinjektionInjection Molding - Mikroinjektion
Reaction Injection Molding (RIM)Reaction Injection Molding (RIM)
Komponenten eines Polymer Precursors gespritztKomponenten eines Polymer Precursors gespritzt
zB. Polyurethan PrecursorszB. Polyurethan Precursors
Niedrige Viskosität, tiefe TemperaturNiedrige Viskosität, tiefe Temperatur
Schrumpfen während der Reaktion (bis 20%)Schrumpfen während der Reaktion (bis 20%)
Thermoplastic Injection Molding (TIM)Thermoplastic Injection Molding (TIM)
Polymer Granulat wird geschmolzen und gespritzt (PMMA, PVC,Polymer Granulat wird geschmolzen und gespritzt (PMMA, PVC,
ABS, PE etc.)ABS, PE etc.)
Hohe Viskosität, hohe TemperaturHohe Viskosität, hohe Temperatur
Auch für Keramiken geeignet zB. SchlickergussAuch für Keramiken geeignet zB. Schlickerguss
39. Slide 39Mikrosysteme
Hot Embossing – Heiss PrägenHot Embossing – Heiss Prägen
Thermoplastische PolymereThermoplastische Polymere
Vorgeformtes Polymer Werkstück, flachVorgeformtes Polymer Werkstück, flach
zB. PMMAzB. PMMA
Temperatur über TTemperatur über Tgg damit die Viskosität klein wirddamit die Viskosität klein wird
Hohe Genauigkeit, kein SchrumpfenHohe Genauigkeit, kein Schrumpfen
Kostengünstigere FormenKostengünstigere Formen