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Analysis of flicker noise degradation mechanism in ultra-thin oxide CMOS Student: H. C. Chang Advisor: Tahui Wang National Chiao Tung University   Institute of electronics   EVDTL
Outline ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Motivation ,[object Object],[object Object],[object Object],[object Object]
In this thesis ,[object Object],[object Object],[object Object],[object Object],[object Object]
Flicker Noise Unified Model I-V model:
Flicker Noise Unified Model Drain current noise power: Input referred noise power:
Stress-enhanced Flicker Noise degradation ,[object Object],[object Object],[object Object]
NMOS:Max I b  Stress ,[object Object],[object Object]
NMOS:Max I g  Stress ,[object Object],[object Object]
NMOS:FN Stress ,[object Object],[object Object]
ONO Cell:FN Program ,[object Object],[object Object],[object Object]
ONO Cell:Max I g  Program ,[object Object],[object Object],[object Object]
ONO Cell:Double side Program ,[object Object]
Two-region model High Vt  region dominate   V t L 2 L 1 Q 2 Q 1
Extended to Three-region  High Vt  region dominate   V t L 2 L 1 Q 2 Q 1 L 3 Q 3
Dominant 1/f noise degradation mechanisms ,[object Object],[object Object],[object Object],[object Object],[object Object]
NMOS: Gate Voltage Dependence ,[object Object],[object Object],Fresh: Max I g  stress:
NMOS: Cross Point in V G  dependence
NMOS: Channel Length Dependence Low Vg High Vg after stress: at low gate bias  L independence at high gate bias  1/L
NMOS:  V t  Dependence At low gate bias  1/f noise At high gate bias  1/f noise
PMOS: Gate Voltage Dependence
PMOS: Channel Length Dependence Low Vg High Vg ,[object Object]
PMOS:  V t  Dependence PMOS  1/f noise
Oxide Soft Breakdown Effects on 1/f noise ,[object Object],[object Object],[object Object]
Tunneling current effect on NMOS
Tunneling current effect on PMOS ,[object Object]
Comparison of SBD effect between NMOS & PMOS
SBD effect on PMOS ,[object Object],[object Object]
SBD effect on PMOS ,[object Object]
Oxide charge distribution
SBD effect on NMOS ,[object Object],[object Object],[object Object]
SBD channel width dependence ,[object Object]
Two-region model along the gate width For large gate width  current bypass the SBD spot  negligible noise degradation
Summary ,[object Object],[object Object],[object Object],[object Object],[object Object]
Summary ,[object Object],[object Object],[object Object]
Reference ,[object Object]

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