7. The number of transistors in a dense integrated
circuit doubles approximately every two years.
Gordon Moore (1929 - )
co-founder and chairman emeritus of Intel
Corporation
8.
9. Integrated circuit (IC), sometimes called as a chip or
microchip, is a semiconductor wafer on which a
thousand or millions of tiny resistors, capacitors,
and transistors are fabricated.
10. Slika 2. Višestruki spojevi metal-dielektrik u IC kolu,
fotografija dobijena elektronskom mikroskopijom
P Chabert, N Braithwaite Physics of Radio Frequency Plasmas,
Cambridge University Press, 2011.
15. Slika 1. Udubljenje “trench” u monokristalu Si, širine
0,2μm i dubine 4μm, dobijeno plazma nagrizanjem
(etching), za potrebe “charge storage” kondenzatora u
IC kolima
Lieberman M. A. Lichtenberg A.J. Principles of Plasma
Discharges and Materials Processing John Wiley and Sons,
2005.