Azbil MVF Series Micro Flow vortex gas flowmeters provide high sensitivity and quick response through the use of proprietary sensor technology. Temperature and pressure compensation are built in, negating the need for two additional devices.

1. The MVF series of Micro Flow vortex gas flowmeters make use of
our proprietary μF (Micro Flow) sensor, which has high sensitivity
and quick response. As a result, MVF flowmeters achieve a wide
measurement range of 100:1.
In addition, a temperature and pressure compensation function is built
in, so there is no need for a temperature sensor, pressure sensor, or
compensation device, contributing to the reduction in total cost.
Model No. configuration Ex.: MVF0500CUN0110000
Basic
model No.
MVF
Gas type
N
S
C
G
P
B
Connection
U
D
A
Power
supply
1
Communi-
cation
1
Output
0
Pipe size
050
080
100
150
Micro Flow vortex gas flowmeter
50 A (2B)
80 A (3B)
100 A (4B)
150 A (6B)
With temperature & pressure compensation
Without pressure compensation, with temperature compensation
Low pressure range (0 to 0.1 Mpa),
with temperature & pressure compensation
Medium pressure range (0 to 0.3 Mpa),
with temperature & pressure compensation
Main unit material SCS13A
Wafer connection (with spacer for JIS 10K flange)
Wafer connection (with spacer for DIN PN10 flange)
Wafer connection (with spacer for ANSI 150 flange)
Air/nitrogen, argon
Oxygen (degreasing must be selected)*1
Carbon dioxide gas
City gas 13 A (LNG base), methane
Propane
Butane
With 4 to 20 mA output + pulse output
24 Vdc power supply
RS-485 communication
Horizontal left to right flow, converter on top*2
Horizontal left to right flow, converter on bottom*2
Horizontal right to left flow, converter on top*2
Horizontal right to left flow, converter on bottom*2
Vertical below to above flow, converter on left*2
Vertical above to below flow, converter on left*2
None
Degreasing of gas-contacting parts (necessary if fluid is oxygen)*1
None
Mill sheet for main unit and vortex generator
Product version
Model
0
L
1
3
Material
C
DescriptionDirection
0
1
2
3
4
5
Option 1
0
1
Option 2
0
C
Appended
No.
0
*1. If oxygen (“S”) is selected, be sure to select “1” (Degreasing of gas-contacting parts) for Option 1.
*2. Explanation of flow direction
Specifications
Model No.
Pipe size
Gas types
Operating temperature range
Operating pressure range,
pressure sensor accuracy
Rated power supply voltage
Output signal (1)
Integrated pulse output (1)
Communication function
Gas-contacting material
Connection type
Pipe size
Protective structure
Weight
MVF050 MVF080 MVF100 MVF150
50 A 80 A 100 A 150 A
Air, nitrogen, argon, oxygen, carbon dioxide (CO2), city gas (13 A), methane, propane, butane, and other inert gases and mixed gases outside the explosion limit range
-15 to +60 °C
Model No.: MVF 1C 011 00: 0.0–0.1 MPa, ±2% FS @23 °C
Model No.: MVF 3C 011 00: 0.0–0.3 MPa, ±2% FS @23 °C
Model No.: MVF 0C 011 00: 0.0–1.0 MPa, ±1% FS @23 °C
24 Vdc. Operating range: 24 Vdc±10%, 100 mA or less
Instantaneous flow rate output: 4 to 20 mAdc (allowable load resistance 600 Ω max.), maximum current: 23.2 mA, approx. 3.5 mA downscale output during burnout
Open collector output, contact rating: 10 to 30 Vdc, 20 mA or less, pulse weight: selectable from 0.1, 1, and 10 m3
/pulse
RS-485 interface, 3-wire system
Flow passage: SCS13A, SUS304. μF sensor: silicon, gold, etc. O-ring: type 4D (Viton).
JIS 10K wafer connection
50 A (2B) 80 A (3B) 100 A (4B) 150 A (6B)
IP67 (by JIS C 0920 and IEC 529 standards, watertight structure for the assumed outdoor installation)
6.3 kg 6.6 kg 9 kg 17 kg
Left to right flow Flow direction: below to above Right to left flow Flow direction: above to below
Converter is above
Code 0
Converter is below
Code 1
Converter is on the left
Code 4
Converter is above
Code 2
Converter is below
Code 3
Converter is on the left
Code 5
[Explanation of terms] % rdg: percentage of the reading. m3
/h (normal): indicates a value converted to volumetric flow per hour at 0 °C and 101.325 kPa (1 atmosphere).
Specification method
(1) 4 to 20 mA span
After checking the measurement range for each pressure,
specify the model.
Maximum span specifications m3
/h (normal)
(2) Pulse weight
50 A: 0.01, 0.1, 1, 10 m3
/pulse
Other than 50 A: select from 0.1, 1, 10, and 100 m3
/pulse.
Sample specification
Model No. MVF0800CUN0112000
Range 0 to 500 m3
/h (normal)
Pulse weight 1 m3
/pulse
50 A
80 A
100 A
150 A
8000 m3
/h (normal)
16000 m3
/h (normal)
24000 m3
/h (normal)
48000 m3
/h (normal)
The minimum span specification is 1% of the maximum span
specification.
Micro Flow Vortex Gas Flowmeter MVF Series
7-15
1
DIGITAL
CONTROLLERS
2
RECORDERS,
INDICATORES
3
CONVERTERS
4
FLAMESAFEGUARD
SYSTEM
5
ACTUATORS
6SENSORS
7
GASFLOW
MEASUREMENTAND
CONTROLPRODUCTS
GAS FLOW MEASUREMENT AND CONTROL PRODUCTS

2. (1) Pressure range 0 to 0.1 MPa: MVF 1
MVF0501 (port size 50A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.01 7.4
±Qmin ±4.8%RD ±3.4%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 237
0.02 7.4
±Qmin ±4.8%RD ±3.3%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 258
0.03 7.4
±Qmin ±4.7%RD ±3.2%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 279
0.05 7.4
±Qmin ±4.7%RD ±3.1%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 322
0.1 7.4
±Qmin ±4.6%RD ±3.0%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428
MVF1001 (port size 100A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.01 13.7
±Qmin ±4.8%RD ±3.4%RD
13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 805
0.02 13.7
±Qmin ±4.8%RD ±3.3%RD
13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 878
0.03 13.7
±Qmin ±4.7%RD ±3.2%RD
13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 950
0.05 13.7
±Qmin ±4.7%RD ±3.1%RD
13.7 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1095
0.1 14.6
±Qmin ±4.6%RD ±3.0%RD
14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457
(2) Pressure range 0 to 0.3 MPa: MVF 3
MVF0503 (port size 50A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.1 7.4
±Qmin ±5.4%RD ±4.1%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428
0.15 7.4
±Qmin ±5.1%RD ±3.7%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 535
0.2 7.4
±Qmin ±4.9%RD ±3.5%RD
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 641
0.3 8.5
±Qmin ±4.7%RD ±3.2%RD
8.5 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 854
MVF1003 (port size 100A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.1 14.6
±Qmin ±5.4%RD ±5.7%RD
14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457
0.15 18.2
±Qmin ±5.1%RD ±4.9%RD
18.2 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1819
0.2 21.8
±Qmin ±4.9%RD ±4.4%RD
21.8 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 2180
0.3 29.0
±Qmin ±4.7%RD ±3.8%RD
29.0 ≤ Q ≤ 48 48 < Q < 156 156 ≤ Q ≤ 2904
MVF0801 (port size 80A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.01 11.0
±Qmin ±4.8%RD ±3.4%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 523
0.02 11.0
±Qmin ±4.8%RD ±3.3%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 570
0.03 11.0
±Qmin ±4.7%RD ±3.2%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 617
0.05 11.0
±Qmin ±4.7%RD ±3.1%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 711
0.1 11.0
±Qmin ±4.6%RD ±3.0%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946
MVF1501 (port size 150A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.01 20.0
±Qmin ±4.8%RD ±3.4%RD
20.0 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 1733
0.02 20.0
±Qmin ±4.8%RD ±3.3%RD
20.0 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 1889
0.03 20.4
±Qmin ±4.7%RD ±3.2%RD
20.4 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 2045
0.05 23.6
±Qmin ±4.7%RD ±3.1%RD
23.6 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 2356
0.1 31.3
±Qmin ±4.6%RD ±3.0%RD
31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135
MVF0803 (port size 80A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.1 11.0
±Qmin ±5.4%RD ±4.1%RD
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946
0.15 11.8
±Qmin ±5.1%RD ±3.7%RD
11.8 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1181
0.2 14.2
±Qmin ±4.9%RD ±3.5%RD
14.2 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1416
0.3 18.9
±Qmin ±4.7%RD ±3.2%RD
18.9 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1886
MVF1503 (port size 150A)
Operating
pressure
(MPa)
Minimum
measurable flow rate
Qmin
Accuracy
0.1 31.3
±Qmin ±5.4%RD ±4.1%RD
31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135
0.15 39.1
±Qmin ±5.1%RD ±3.7%RD
39.1 ≤ Q ≤ 65 65 < Q < 286 286 ≤ Q ≤ 3913
0.2 46.9
±Qmin ±4.9%RD ±3.5%RD
46.9 ≤ Q ≤ 78 78 < Q < 286 286 ≤ Q ≤ 4692
0.3 62.5
±Qmin ±4.7%RD ±3.2%RD
62.5 ≤ Q ≤ 104 104 < Q < 286 286 ≤ Q ≤ 6249
Table for specifying overall accuracy (for air, after temperature and pressure compensation)
Flow rate unit: m3
/h (normal)
Accuracy differs according to operating pressure and flow rate range.
Micro Flow Vortex Gas Flowmeter MVF Series
7-16
GAS FLOW MEASUREMENT AND CONTROL PRODUCTS
1
DIGITAL
CONTROLLERS
2
RECORDERS,
INDICATORES
3
CONVERTERS
4
FLAMESAFEGUARD
SYSTEM
5
ACTUATORS
6
SENSORS
7
GASFLOW
MEASUREMENTAND
CONTROLPRODUCTS

3. (3) Pressure range 0 to 1.0 MPa: MVF 0
MVF0500 (port size 50A)
Operating
pressure
(kPa)
Minimum
measurable flow rate
Qmin
Accuracy
100 7.4
±Qmin ±6.7% rdg ±5.7% rdg
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 428
150 7.4
±Qmin ±6.0% rdg ±4.9% rdg
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 535
200 7.4
±Qmin ±5.6% rdg ±4.4% rdg
7.4 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 641
300 8.5
±Qmin ±5.1% rdg ±3.8% rdg
8.5 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 854
400 10.7
±Qmin ±4.9% rdg ±3.5% rdg
10.7 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1067
500 12.8
±Qmin ±4.8% rdg ±3.3% rdg
12.8 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1280
600 14.9
±Qmin ±4.7% rdg ±3.2% rdg
14.9 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1493
700 17.1
±Qmin ±4.6% rdg ±3.1% rdg
17.1 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1706
800 19.2
±Qmin ±4.6% rdg ±3.0% rdg
19.2 ≤ Q ≤ 32 32 < Q < 74 74 ≤ Q ≤ 1919
900 21.3
±Qmin ±4.6% rdg ±3.0% rdg
21.3 ≤ Q ≤ 36 36 < Q < 74 74 ≤ Q ≤ 2131
980 23.0
±Qmin ±4.6% rdg ±3.0% rdg
23.0 ≤ Q ≤ 38 38 < Q < 74 74 ≤ Q ≤ 2302
MVF1000 (port size 100A)
Operating
pressure
(kPa)
Minimum
measurable flow rate
Qmin
Accuracy
100 14.6
±Qmin ±6.7% rdg ±5.7% rdg
14.6 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1457
150 18.2
±Qmin ±6.0% rdg ±4.9% rdg
18.2 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 1819
200 21.8
±Qmin ±5.6% rdg ±4.4% rdg
21.8 ≤ Q ≤ 39 39 < Q < 156 156 ≤ Q ≤ 2180
300 29.0
±Qmin ±5.1% rdg ±3.8% rdg
29.0 ≤ Q ≤ 48 48 < Q < 156 156 ≤ Q ≤ 2904
400 36.3
±Qmin ±4.9% rdg ±3.5% rdg
36.3 ≤ Q ≤ 60 60 < Q < 156 156 ≤ Q ≤ 3628
500 43.5
±Qmin ±4.8% rdg ±3.3% rdg
43.5 ≤ Q ≤ 73 73 < Q < 156 156 ≤ Q ≤ 4351
600 50.7
±Qmin ±4.7% rdg ±3.2% rdg
50.7 ≤ Q ≤ 85 85 < Q < 156 156 ≤ Q ≤ 5075
700 58.0
±Qmin ±4.6% rdg ±3.1% rdg
58.0 ≤ Q ≤ 97 97 < Q < 156 156 ≤ Q ≤ 5799
800 65.2
±Qmin ±4.6% rdg ±3.0% rdg
65.2 ≤ Q ≤ 109 109 < Q < 156 156 ≤ Q ≤ 6522
900 72.5
±Qmin ±4.6% rdg ±3.0% rdg
72.5 ≤ Q ≤ 121 121 < Q < 156 156 ≤ Q ≤ 7246
980 78.2
±Qmin ±4.6% rdg ±3.0% rdg
78.2 ≤ Q ≤ 130 130 < Q < 156 156 ≤ Q ≤ 7825
MVF0800 (port size 80A)
Operating
pressure
(kPa)
Minimum
measurable flow rate
Qmin
Accuracy
100 11.0
±Qmin ±6.7% rdg ±5.7% rdg
11.0 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 946
150 11.8
±Qmin ±6.0% rdg ±4.9% rdg
11.8 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1181
200 14.2
±Qmin ±5.6% rdg ±4.4% rdg
14.2 ≤ Q ≤ 31 31< Q < 110 110 ≤ Q ≤ 1416
300 18.9
±Qmin ±5.1% rdg ±3.8% rdg
18.9 ≤ Q ≤ 31 31 < Q < 110 110 ≤ Q ≤ 1886
400 23.6
±Qmin ±4.9% rdg ±3.5% rdg
23.6 ≤ Q ≤ 39 39 < Q < 110 110 ≤ Q ≤ 2355
500 28.3
±Qmin ±4.8% rdg ±3.3% rdg
28.3 ≤ Q ≤ 47 47 < Q < 110 110 ≤ Q ≤ 2825
600 33.0
±Qmin ±4.7% rdg ±3.2% rdg
33.0 ≤ Q ≤ 55 55 < Q < 110 110 ≤ Q ≤ 3295
700 37.6
±Qmin ±4.6% rdg ±3.1% rdg
37.6 ≤ Q ≤ 63 63 < Q < 110 110 ≤ Q ≤ 3765
800 42.3
±Qmin ±4.6% rdg ±3.0% rdg
42.3 ≤ Q ≤ 71 71 < Q < 110 110 ≤ Q ≤ 4235
900 47.0
±Qmin ±4.6% rdg ±3.0% rdg
47.0 ≤ Q ≤ 78 78 < Q < 110 110 ≤ Q ≤ 4705
980 50.8
±Qmin ±4.6% rdg ±3.0% rdg
50.8 ≤ Q ≤ 85 85 < Q < 110 110 ≤ Q ≤ 5081
MVF1500 (port size 150A)
Operating
pressure
(kPa)
Minimum
measurable flow rate
Qmin
Accuracy
100 31.3
±Qmin ±6.7% rdg ±5.7% rdg
31.3 ≤ Q ≤ 57 57 < Q < 286 286 ≤ Q ≤ 3135
150 39.1
±Qmin ±6.0% rdg ±4.9% rdg
39.1 ≤ Q ≤ 65 65 < Q < 286 286 ≤ Q ≤ 3913
200 46.9
±Qmin ±5.6% rdg ±4.4% rdg
46.9 ≤ Q ≤ 78 78 < Q < 286 286 ≤ Q ≤ 4692
300 62.5
±Qmin ±5.1% rdg ±3.8% rdg
62.5 ≤ Q ≤ 104 104 < Q < 286 286 ≤ Q ≤ 6249
400 78.1
±Qmin ±4.9% rdg ±3.5% rdg
78.1 ≤ Q ≤ 130 130 < Q < 286 286 ≤ Q ≤ 7806
500 93.6
±Qmin ±4.8% rdg ±3.3% rdg
93.6 ≤ Q ≤ 156 156 < Q < 286 286 ≤ Q ≤ 9364
600 109.2
±Qmin ±4.7% rdg ±3.2% rdg
109.2 ≤ Q ≤ 182 182 < Q < 286 286 ≤ Q ≤ 10921
700 124.8
±Qmin ±4.6% rdg ±3.1% rdg
124.8 ≤ Q ≤ 208 208 < Q < 286 286 ≤ Q ≤ 12478
800 140.4
±Qmin ±4.6% rdg ±3.0% rdg
140.4 ≤ Q ≤ 234 234 < Q < 286 286 ≤ Q ≤ 14035
900 155.9
±Qmin ±4.6% rdg ±3.0% rdg
155.9 ≤ Q ≤ 260 260 < Q < 286 286 ≤ Q ≤ 15593
980 168.4
±Qmin ±4.6% rdg ±3.0% rdg
168.4 ≤ Q ≤ 281 281 < Q < 286 286 ≤ Q ≤ 16838
External dimensions
(Unit: mm)MVF050 MVF080
MVF100 MVF150
ADEINJAPAN
WHILE
C
IRCUITSAREALIV
E
COVER
M
U
STBEKEPTTIG
H
T
117
50
127
61
96
44
351
130
208
59
70
ADEINJAPAN
WHILE
C
IRCUITSAREALIV
E
COVER
M
USTBEKEPTTIG
H
T
117
50
127
61
126
60
367
130
208
59
70
100
117
50
130
208
127
61
70.5
399
151
59
117
50
127
61
212
99
427
130
208
59
140
60
Micro Flow Vortex Gas Flowmeter MVF Series
7-17
1
DIGITAL
CONTROLLERS
2
RECORDERS,
INDICATORES
3
CONVERTERS
4
FLAMESAFEGUARD
SYSTEM
5
ACTUATORS
6SENSORS
7
GASFLOW
MEASUREMENTAND
CONTROLPRODUCTS
GAS FLOW MEASUREMENT AND CONTROL PRODUCTS