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• May 9, 2016
Zero- Defect Methodology
for Automotive and Other Key
Applications
March, 2016 Authors:
Ray Hou (GUC Automotive BD)
Jason Lin (GUC Operations Manager)
Igor Elkanovich (Verisense CTO)
Lewis Chu (GUC Marketing Director) - presenter
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
• Public company, traded in Taipei Stock Exchange
• Partially owned by TSMC
• Services : ASIC, Chip design service, IPs
• Worldwide offices: US, China, Europe, Japan and Korea
• Verisense, GUC Israeli partner, offers leading ASIC & FPGA design services
GUC Corporation Information
0
10
20
30
2010 2011 2012 2013 2014 2015
16nm
20nm
28nm
40nm
65nm
90nm
0.13um
0.18um above
GUC Tape Outs per year
P2
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Automotive IC Reliability Requirements
• Reliability: < 5 FIT
– FIT (failure in time) is defined as a failure rate of 1 per billion hours
– 1 FIT is equivalent to having an MTBF of 1 billion hours
• Defects < 5-10 DPPM
– DPPM: defective parts per million ppm
• High max. ambient temperature
Min. Max.
0 - 40 °C 150 °C
1 - 40 °C 125 °C
2 - 40 °C 105 °C
3 - 40 °C 85 °C
Grade
Operation Ambient Temperature
P3
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
GUC Comprehensive Reliability Management
• Reliability control at all stages thought the flow
DFR DFM DFT
Reliability Manufacturing Testing
Risk/
Robustness
checking
ZD testing
method
Outlier
program
Tightened
Control
P4
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Failures Distribution in Time
Early failures Random failures Wear-out failuresFailures category
Main cause Defect Process Baseline Product design
Mechanism •High Test coverage
•Outlier screening
•3-temp. testing
•Visual spec. tighten
•Burn-in testing
•SPC/Cpk control
•Equipment monitor
•Reliability monitor
•Continuous improvement
•Circuit design robustness
•Design for Manufacturing
•Package/material robustness
•Drift analysis for spec margin
Screen
weak chip
Reduce process variation
Enhance
design robustness
P5
EM void in a Cu line
under a via
Brittle failure (Si fracture)
due to temperature cycling
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
DFT Approach for Automotive Product
DFT Item Automotive product
Digital • Stack at faults coverage > 99%
• Transition faults coverage > 85%
• Pseudo Stuck-at IDDQ faults coverage > 80%
• Small Delay (Optional)
• Bridge (Optional)
SRAM • March 68N
• Checkerboard & Inverse background data
• Physical mapping
ROM • ReadOnly 2N
Analog • Functionality and Spec check
• Additional signal to increase analog testability
internal reference voltage monitor
analog bias tuning setting to touch performance boundary
• Analog test modes built in
P6
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Silicon Process Variation
• Variation measured by Process Monitor (PM)
7,000
9,200
11,600
6,800
8,800
11,000
6500
7500
8500
9500
10500
11500
12500
13500
14500
15500
16500
0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800
Count
Chip Sorting
PM Silicon vs. SPICE Correlation
BUFD4-7T35P140-HVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-SVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-HVT
(SS_0.9V_25C)
BUFD4-7T35P140-HVT
(TT_0.9V_25C)
BUFD4-7T35P140-HVT
(FF_0.9V_25C)
BUFD4-7T35P140-SVT
(SS_0.9V_25C)
BUFD4-7T35P140-SVT
(TT_0.9V_25C)
BUFD4-7T35P140-SVT
(FF_0.9V_25C)
7,000
9,200
11,600
6,800
8,800
11,000
6500
7000
7500
8000
8500
9000
9500
10000
10500
11000
11500
12000
0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800
Count
Chip Sorting
PM Silicon vs. SPICE Correlation
BUFD4-7T35P140-HVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-SVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-HVT
(SS_0.9V_25C)
BUFD4-7T35P140-HVT
(TT_0.9V_25C)
BUFD4-7T35P140-HVT
(FF_0.9V_25C)
BUFD4-7T35P140-SVT
(SS_0.9V_25C)
BUFD4-7T35P140-SVT
(TT_0.9V_25C)
BUFD4-7T35P140-SVT
(FF_0.9V_25C)
7,000
9,200
11,600
6,800
8,800
11,000
6500
7000
7500
8000
8500
9000
9500
10000
10500
11000
11500
12000
0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800
Count
Chip Sorting
PM Silicon vs. SPICE Correlation
BUFD4-7T35P140-HVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-SVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-HVT
(SS_0.9V_25C)
BUFD4-7T35P140-HVT
(TT_0.9V_25C)
BUFD4-7T35P140-HVT
(FF_0.9V_25C)
BUFD4-7T35P140-SVT
(SS_0.9V_25C)
BUFD4-7T35P140-SVT
(TT_0.9V_25C)
BUFD4-7T35P140-SVT
(FF_0.9V_25C)
7,000
9,200
11,600
6,800
8,800
11,000
6500
7000
7500
8000
8500
9000
9500
10000
10500
11000
11500
12000
0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800
Count
Chip Sorting
PM Silicon vs. SPICE Correlation
BUFD4-7T35P140-HVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-SVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-HVT
(SS_0.9V_25C)
BUFD4-7T35P140-HVT
(TT_0.9V_25C)
BUFD4-7T35P140-HVT
(FF_0.9V_25C)
BUFD4-7T35P140-SVT
(SS_0.9V_25C)
BUFD4-7T35P140-SVT
(TT_0.9V_25C)
BUFD4-7T35P140-SVT
(FF_0.9V_25C)
7,000
9,200
11,600
6,800
8,800
11,000
6500
7000
7500
8000
8500
9000
9500
10000
10500
11000
11500
12000
0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800
Count
Chip Sorting
PM Silicon vs. SPICE Correlation
BUFD4-7T35P140-HVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-SVT
(Silicon_0.9V_25C)
BUFD4-7T35P140-HVT
(SS_0.9V_25C)
BUFD4-7T35P140-HVT
(TT_0.9V_25C)
BUFD4-7T35P140-HVT
(FF_0.9V_25C)
BUFD4-7T35P140-SVT
(SS_0.9V_25C)
BUFD4-7T35P140-SVT
(TT_0.9V_25C)
BUFD4-7T35P140-SVT
(FF_0.9V_25C)
Slow PM
Fast PM
P7
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
VMK: Variation Measurement Kit
• PMs inserted on regular grid
• PMs represent all used VTs, channel
lengths, gates types
• Interface protocols: APB, JTAG, I2C
• Automatic test pattern generation
• Spice simulated in all corners for
reference
• Statistic is collected through all wafers
production
P8
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Soft Error Rate and Solution
• Soft errors are induced by external radiation (e.g. alpha
particles)
• Solutions
– Design: filp-flop
– Memory: ECC
– Package: low-alpha materials
P9
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
DFM: Extended Physical Rules Check
P10
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
DFM: Tightening Electromigration Rules
• EM rating for automotive:
• Additional Poly/High-R/Metal-gate R current density rule
Figure : Poly EM requirement for regular products
Figure : Rating factor for automotive products
Figure : Rating factor for regular products
P11
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Potential Defect Identification
• Production test tightening for Outliers segregation
Upper/Lower Spec Limits
Tightening Tightening
P12
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Outlier Program at Production Test
• ELFR (Early Life Failure Rate)
– more than 2000 samples or production ramp-up, with HTOL method to
identify the early failure mode/rate for CIP
• Dynamic Voltage Stress (DVS) testing to screen weaker parts
– 1.2x ~ 1.8x stress voltage during testing
– Failure Analysis of failed parts to seek the process improvement or spec
refining
• Statistical Yield/Bin Limit (SBL/SYL) in testing
– to separate the maverick parts for risk assessment
– Maverick mechanism (yield limit by step/machine) on assembly process
• Wafer selection rule with specific WAT risk parameters
– to separate marginal/risk wafer for assessment/tightened screening
P13
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Summary
• Reliability is handled throughout all stages
– DFT, physical implementation and production
• GUC flow is based on volume production experience -
allows minimal defects and very low FIT
– Silicon-proven comprehensive DFT and testing methodology
– Overcome challenging of 28nm/16nm DFM rules
– Proprietary Solution for Process Variation Monitoring
– Intelligent Mechanisms for Testing: ELFR, DVS testing, SBL/SYL
and Maverick mechanism
P14
GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance
• May 9, 2016
Thank you !
www.guc-asic.com
P15

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Lewis Chu,Marketing Director,GUC

  • 1. • May 9, 2016 Zero- Defect Methodology for Automotive and Other Key Applications March, 2016 Authors: Ray Hou (GUC Automotive BD) Jason Lin (GUC Operations Manager) Igor Elkanovich (Verisense CTO) Lewis Chu (GUC Marketing Director) - presenter
  • 2. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 • Public company, traded in Taipei Stock Exchange • Partially owned by TSMC • Services : ASIC, Chip design service, IPs • Worldwide offices: US, China, Europe, Japan and Korea • Verisense, GUC Israeli partner, offers leading ASIC & FPGA design services GUC Corporation Information 0 10 20 30 2010 2011 2012 2013 2014 2015 16nm 20nm 28nm 40nm 65nm 90nm 0.13um 0.18um above GUC Tape Outs per year P2
  • 3. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Automotive IC Reliability Requirements • Reliability: < 5 FIT – FIT (failure in time) is defined as a failure rate of 1 per billion hours – 1 FIT is equivalent to having an MTBF of 1 billion hours • Defects < 5-10 DPPM – DPPM: defective parts per million ppm • High max. ambient temperature Min. Max. 0 - 40 °C 150 °C 1 - 40 °C 125 °C 2 - 40 °C 105 °C 3 - 40 °C 85 °C Grade Operation Ambient Temperature P3
  • 4. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 GUC Comprehensive Reliability Management • Reliability control at all stages thought the flow DFR DFM DFT Reliability Manufacturing Testing Risk/ Robustness checking ZD testing method Outlier program Tightened Control P4
  • 5. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Failures Distribution in Time Early failures Random failures Wear-out failuresFailures category Main cause Defect Process Baseline Product design Mechanism •High Test coverage •Outlier screening •3-temp. testing •Visual spec. tighten •Burn-in testing •SPC/Cpk control •Equipment monitor •Reliability monitor •Continuous improvement •Circuit design robustness •Design for Manufacturing •Package/material robustness •Drift analysis for spec margin Screen weak chip Reduce process variation Enhance design robustness P5 EM void in a Cu line under a via Brittle failure (Si fracture) due to temperature cycling
  • 6. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 DFT Approach for Automotive Product DFT Item Automotive product Digital • Stack at faults coverage > 99% • Transition faults coverage > 85% • Pseudo Stuck-at IDDQ faults coverage > 80% • Small Delay (Optional) • Bridge (Optional) SRAM • March 68N • Checkerboard & Inverse background data • Physical mapping ROM • ReadOnly 2N Analog • Functionality and Spec check • Additional signal to increase analog testability internal reference voltage monitor analog bias tuning setting to touch performance boundary • Analog test modes built in P6
  • 7. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Silicon Process Variation • Variation measured by Process Monitor (PM) 7,000 9,200 11,600 6,800 8,800 11,000 6500 7500 8500 9500 10500 11500 12500 13500 14500 15500 16500 0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800 Count Chip Sorting PM Silicon vs. SPICE Correlation BUFD4-7T35P140-HVT (Silicon_0.9V_25C) BUFD4-7T35P140-SVT (Silicon_0.9V_25C) BUFD4-7T35P140-HVT (SS_0.9V_25C) BUFD4-7T35P140-HVT (TT_0.9V_25C) BUFD4-7T35P140-HVT (FF_0.9V_25C) BUFD4-7T35P140-SVT (SS_0.9V_25C) BUFD4-7T35P140-SVT (TT_0.9V_25C) BUFD4-7T35P140-SVT (FF_0.9V_25C) 7,000 9,200 11,600 6,800 8,800 11,000 6500 7000 7500 8000 8500 9000 9500 10000 10500 11000 11500 12000 0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800 Count Chip Sorting PM Silicon vs. SPICE Correlation BUFD4-7T35P140-HVT (Silicon_0.9V_25C) BUFD4-7T35P140-SVT (Silicon_0.9V_25C) BUFD4-7T35P140-HVT (SS_0.9V_25C) BUFD4-7T35P140-HVT (TT_0.9V_25C) BUFD4-7T35P140-HVT (FF_0.9V_25C) BUFD4-7T35P140-SVT (SS_0.9V_25C) BUFD4-7T35P140-SVT (TT_0.9V_25C) BUFD4-7T35P140-SVT (FF_0.9V_25C) 7,000 9,200 11,600 6,800 8,800 11,000 6500 7000 7500 8000 8500 9000 9500 10000 10500 11000 11500 12000 0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800 Count Chip Sorting PM Silicon vs. SPICE Correlation BUFD4-7T35P140-HVT (Silicon_0.9V_25C) BUFD4-7T35P140-SVT (Silicon_0.9V_25C) BUFD4-7T35P140-HVT (SS_0.9V_25C) BUFD4-7T35P140-HVT (TT_0.9V_25C) BUFD4-7T35P140-HVT (FF_0.9V_25C) BUFD4-7T35P140-SVT (SS_0.9V_25C) BUFD4-7T35P140-SVT (TT_0.9V_25C) BUFD4-7T35P140-SVT (FF_0.9V_25C) 7,000 9,200 11,600 6,800 8,800 11,000 6500 7000 7500 8000 8500 9000 9500 10000 10500 11000 11500 12000 0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800 Count Chip Sorting PM Silicon vs. SPICE Correlation BUFD4-7T35P140-HVT (Silicon_0.9V_25C) BUFD4-7T35P140-SVT (Silicon_0.9V_25C) BUFD4-7T35P140-HVT (SS_0.9V_25C) BUFD4-7T35P140-HVT (TT_0.9V_25C) BUFD4-7T35P140-HVT (FF_0.9V_25C) BUFD4-7T35P140-SVT (SS_0.9V_25C) BUFD4-7T35P140-SVT (TT_0.9V_25C) BUFD4-7T35P140-SVT (FF_0.9V_25C) 7,000 9,200 11,600 6,800 8,800 11,000 6500 7000 7500 8000 8500 9000 9500 10000 10500 11000 11500 12000 0 400 800 1200 1600 2000 2400 2800 3200 3600 4000 4400 4800 5200 5600 6000 6400 6800 Count Chip Sorting PM Silicon vs. SPICE Correlation BUFD4-7T35P140-HVT (Silicon_0.9V_25C) BUFD4-7T35P140-SVT (Silicon_0.9V_25C) BUFD4-7T35P140-HVT (SS_0.9V_25C) BUFD4-7T35P140-HVT (TT_0.9V_25C) BUFD4-7T35P140-HVT (FF_0.9V_25C) BUFD4-7T35P140-SVT (SS_0.9V_25C) BUFD4-7T35P140-SVT (TT_0.9V_25C) BUFD4-7T35P140-SVT (FF_0.9V_25C) Slow PM Fast PM P7
  • 8. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 VMK: Variation Measurement Kit • PMs inserted on regular grid • PMs represent all used VTs, channel lengths, gates types • Interface protocols: APB, JTAG, I2C • Automatic test pattern generation • Spice simulated in all corners for reference • Statistic is collected through all wafers production P8
  • 9. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Soft Error Rate and Solution • Soft errors are induced by external radiation (e.g. alpha particles) • Solutions – Design: filp-flop – Memory: ECC – Package: low-alpha materials P9
  • 10. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 DFM: Extended Physical Rules Check P10
  • 11. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 DFM: Tightening Electromigration Rules • EM rating for automotive: • Additional Poly/High-R/Metal-gate R current density rule Figure : Poly EM requirement for regular products Figure : Rating factor for automotive products Figure : Rating factor for regular products P11
  • 12. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Potential Defect Identification • Production test tightening for Outliers segregation Upper/Lower Spec Limits Tightening Tightening P12
  • 13. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Outlier Program at Production Test • ELFR (Early Life Failure Rate) – more than 2000 samples or production ramp-up, with HTOL method to identify the early failure mode/rate for CIP • Dynamic Voltage Stress (DVS) testing to screen weaker parts – 1.2x ~ 1.8x stress voltage during testing – Failure Analysis of failed parts to seek the process improvement or spec refining • Statistical Yield/Bin Limit (SBL/SYL) in testing – to separate the maverick parts for risk assessment – Maverick mechanism (yield limit by step/machine) on assembly process • Wafer selection rule with specific WAT risk parameters – to separate marginal/risk wafer for assessment/tightened screening P13
  • 14. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Summary • Reliability is handled throughout all stages – DFT, physical implementation and production • GUC flow is based on volume production experience - allows minimal defects and very low FIT – Silicon-proven comprehensive DFT and testing methodology – Overcome challenging of 28nm/16nm DFM rules – Proprietary Solution for Process Variation Monitoring – Intelligent Mechanisms for Testing: ELFR, DVS testing, SBL/SYL and Maverick mechanism P14
  • 15. GUC Property – Security CCopyright © 2016 GUC Uncompromising Performance • May 9, 2016 Thank you ! www.guc-asic.com P15