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水素顕微鏡151222
1.
分析工房 (株) 水素顕微鏡Scanning type
Electron-Stimulated Desorption Ion Microscope (SESDIM)は、電子励起イオン脱離を応用したイオンの検出顕微鏡です。 試料サイズ:15mm×5mm×3mm厚以内(平坦)、 感度:H;0.005ML、O;0.0001ML 分解能:平面方向1mm、深さ方向:1nm豊田工業大学 上田一之名誉教授発明(現TF技研) 水 素 顕 微 鏡
2.
分析工房 (株) SiとSiO2面からの水素と酸素の分布。どの像も白く見えるところほど高濃度 K.Ueda,K.Ogai, Surf.
Sci. 462 (20001)1. Si SiO2 30mm シリコンと熱酸化膜で作ったラインアンドスペース表面からの水素と酸素の顕微像の一例です。 熱酸化膜上の水素(H(1))とSi上に存在する水素(H(2))が分離でき、酸素も熱酸化膜からの酸素(O(1))と自然酸化物から のもの(O(2))が区別されています。これは、化学結合の違いにより、脱離の速度が変わってくるので、TOFスペクトルとして 分離できるからです。単に水素や酸素を検出できるだけでなく、化学的分析能力を持つことが大きな特徴です。その理由は、 結合や吸着状態の違いを脱離の運動エネルギーに反映して、吸着対象を識別して検出するからです。 飛行時間(μ秒)
3.
分析工房 (株) 測定原理 ・試料に100~500e V
の低速の電子を照射すると固体表面に吸着している水素や酸素がイオン化されて真 空中に飛び出してくるのでこれらを検出、増幅して信号とします。 ・電子ビームはパルスとして照射するのでイオンの検出に飛行時間法を用いることが出来ます。 ・この信号をTOF スペクトルとして表示すると局所場に応じた質量分析ができることになり、水素像や酸素像 の2次元分布を得ることができます。
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