This document describes porous ceramic chuck tables that are used to securely hold semiconductor wafers during processing. The chuck tables are made of ultra-flat ceramic materials that minimize contact with wafers, reducing the risk of particles damaging wafers. They offer features like mirror polishing, lightweight strength and resistance to heat, wear and corrosion to improve yield for applications like lithography, inspection and wafer cleaning.

1. Porous Ceramic Chuck Table
www.chuck-table.com wilson.wu@aol.com
Round type : Size 6", 8", 12" Square Type : PCB, LCD Universal Type : Order made
ULTRA-FLAT CERAMIC VACUUM CHUCKS
Solutions Developed Specifically for Wafer Handling
Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer
processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting
wafer geometry for precision applications. We offer:
• Ultra-flat capabilities
• Mirror polish
• Exceptionally lightweight
• High stiffness
• Low thermal expansion
• Large size capability – 500 mm and beyond
• Extreme wear resistance
High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, we produce high-
quality, top-performance components. You'll find our materials:
• Reduce the effect of particulate contamination
• Offer ultra-clean purity
• Minimize wafer contact
• Resist corrosion in aggressive chemical cleaning
Typical applications include:
• Lithography
• Inspection
• Wafer cleaning
• Wafer grinding
• Wafer dicing