Porous Ceramic Vacuum Chuck Tables

1. Chuck Table
Porous Ceramic Chuck Tables

2. Chuck Table
Main Function of Chuck Table
 Mainly used to support and chuck the
semiconductor wafer when grinding and
dicing. It is applied in the process of thinning,
dicing, clearance, transportation and so on.
Silicon
Wafer
Chuck table

3. Chuck Table
Classification by applications
 Thinning Chucks
 Dicing Chucks
 Cleaning Chucks
 Film Uncovered Chucks
 Transportation Chucks
 Grinding Chucks

4. Chuck Table
Photos
 wafer
 Chuck Table
 Thinning Chucks  Dicing Chucks
 Clearance Chucks

5. Chuck Table
Chucks and silicon photos
 Transportation Chucks
Transportation ChucksFace side

6. Chuck Table
Characteristics
 High flatness and parallelism.
 Compact and uniform microstructure with high
strength.
 Good permeability and uniform adsorption
affinity.
 Long life time.
 Dressing easily.

7. Chuck Table
Thinning chucks and machines
 Disco company
Disco 810 ， 83H/6 ， 82IF ， 800series ， 8000
series
 G&N company
G&N 300 ， 400 ， 500 ， 700 ， 940 ， Multi Nano 3-
300
 Strasbaugh company
7AF
 Okamoto company
VG401 ， VG502
 ACCREFECH -Tokyo Seimitsu
 PG200 、 PG300
 AM company
VRG250S

8. Chuck Table
Disco machines
DGP 8760
Polishing machine
DFP 8140
DFP 8160
DFG
8540
DFG
8560
DAG 810
DFG 830
DFE 8060
DFG 81H/6
DFG 83H/6
DFG 82IF/8
8000
series
800
series
Silicon thinning machines Silicon polishing machines
IF series
Creep
series
DFG 841
Note: our chucks can match with the machines
marked with red characters.

9. Chuck Table
Disco 83H/6

10. Chuck Table
Thinning chucks with Disco machine
 Grinding processes on Disco dicing machine
 In-feed ： Disco DFG
82IF/8 used this kind of
process. Front side
matched with
DFG
82IF/8
Back side
matched with
DFG 82IF/8

11. Chuck Table
Thinning chucks matched with Disco machine
Creep: Disco DFG 83H/6 used this kind of process
Front side ，
matched with
Disco 83H/6

12. Chuck Table
It can suck 3-8’’
silicon wafer.

13. Chuck Table
Disco thinning machines
Silicon thinning
machine
series
types Maximum
process size
Chucks amount grinding
process
800 series DAG810 8" 1
In-feed:DFG830 8" 2
8000series DFG 8540 8" 2
DFG 8560 300mm 3
IF series DFG82IF/8 8" 4
Creep series DFG83H/6 6" 8 Creep:

14. Chuck Table
G&N silicon thinning machines
 G&N 300 series
 G&N 400 series
 G&N 500 series
 G&N 700 series

15. Chuck Table
G&N 300series
MPS 2R 300 S
MPS 2R 300 DS
MPS 2R 300 DCS
300
series
program
300series
parameters
Grinding process Composite feed
300S
300DCS
Chucks
specificat
ion
4" ， 5" ， 6" ，
8"
Chucks
number
5 ， 3 ， 2 ，
1
300 DS
specificat
ion
4" ， 5" ， 6" ，
8"
Chucks
number
8 ， 5 ， 4 ，

16. Chuck Table
G&N 400 series
Machine
type
G&N MPS 2R 400DS
Grinding
mode
Composite feed
Wafer size 4” 、 5” 、 6” 、 8 ＂
Chucks
number
8 、 5 、 4 、 1

17. Chuck Table
G&N 500series
Machine
type
G&N MPS T500
Grinding
mode
Vertical feed and
creep
Wafer
size
4 ＂～ 6 ＂
Chucks
number
2

18. Chuck Table
G&N 700 系列
Machine type G&N MPS R700S
Grinding mode
Work table rotate, while
the spindle vertical feed
Wafer size
4“ 、 5” 、 6“ 、 8” 、 12
＂
Chucks number 30 、 20 、 14 、 7 、 3

19. Chuck Table
Korea AM thinning machine
6’’ thinning chuckVRG-250S

20. Chuck Table
Basic process of wafer cutting

21. Chuck Table
Precision parameter of dicing chuck
Material chuck size parallelism
Stainless steel and
porous ceramic
4" 2μm
6" 2μm
8" 3μm
12" 10μm
Note: We can make the precision according to the
customers’ requirements.

22. Chuck Table
Dicing machines
 Disco company
automatic machine ： 600series 、 6000series
semi-automatic ： 300series 、 500series 、 600series 、
3000series
ADT company
ADT 7100series 、 7200series
ACCREFECH -Tokyo Seimitsu company
ACCREFECH A-WD series

23. Chuck Table
Disco machines
 automatic dicing machines
 600series
DFD 641 、 DFD 651 、 DFD 681 、 DFD 691
 6000series
DFD 6240 、 DFD 6340 、 DFD6450
 semi-automatic
 300series
DAD321 、 DAD322 、 DAD341 、 DAD351
 3000series
DAD3230 、 DAD3350
Note: our chucks have matched with the red
character machines
DAD321
DAD341
DFD3350
DFD6340

24. Chuck Table
Chucks matched with DAD 321

25. Chuck Table
DAD 341 machine

26. Chuck Table
DFD 3350 machine and chucks

27. Chuck Table
DFD 6340 machine and chuck

28. Chuck Table
ADT machines
ADT 7100 chuck

29. Chuck Table
Tokyo Seimitsu company
A-WD-100A chuck

30. Chuck Table
Contact Us
Werlchem LLC
Wilson.wu@aol.com
http://www.chuck-table.com
San Leandro, California