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• Different Methods (Top-down and Bottom up approaches)
• Growth Kinetics (Cluster Formation followed by Nucleation and Growth)
Synthesis of Nanomaterials
Design and preparation of nanoparticles with high functionality
i.e., to fabricate nanomaterials which have the suitable properties
for applications
The fabrication of nanomaterials of tailored properties involve the control of Size,
shape, structure, composition and purity of their constituents.
Nanoparticle Synthesis
Bottom-Up approach
(or self-assembly approach)
Top-Down approach
• Bottom up approach refers to the build up of
a material from the bottom: atom by atom,
molecule by molecule
• Atom by atom deposition leads to formation of
Self- assembly of atoms/molecules
and clusters
• These clusters come together to form self-
assembled monolayers on the surface of
substrate
• Top down approach refers to slicing
or successive cutting of a bulk material
to get nano sized particle.
There are two approaches for synthesis of nanomaterials and the fabrication of nano
structures.
 Mechanical methods :
- cutting , etching, grinding
- ball milling
 Lithographic techniques:
- Photo Lithography
- Electron Beam Lithography
• Physical and chemical processing methods:
Physical techniques-
Physical Vapor Deposition (PVD): involves
condensation of vapor phase species
- Evaporation (Thermal , e-beam)
- Sputtering
- Plasma Arcing,
- Laser ablation,
Chemical techniques-
CVD: Deposition of vapor phase of reaction
species
- PECVD(RF-PECVD,MPECVD)
Self-assembled Monolayer :
Electrolytic deposition, Sol-gel method,
Microemusion route, pyrolysis.
Physical processing methods:
Bottom-Up approachTop-Down approach
All the synthesis/deposition techniques are divided into two
categories based on the phase of starting material
All the Bottom-up techniques,
the starting material is either
gaseous state or liquid state of
matter
In Top-down techniques,
the starting material is solid state
How to synthesize nanoparticles?
The key to make nanoparticles is how to control and stop the reaction to make nano-size products because
the properties of nanoparticles depend on their size and morphology.
Top-down refers to the traditional workshop or microfabrication method where tools are used to cut, mill and shape
materials into the desired shape and order.
Bottom-up refers to methods where devices 'create themselves' by selfassembly. Chemical synthesis is a good
example. Bottom-up should broadly speaking be able to produce devices much cheaper than top-down methods, but
getting control over the methods is difficult when things become larger and more bulky than what is normally made by
chemical synthesis. Of course nature has had time to evolve and optimize self-assembly processes that can do
wonders.
Top-Down approach Bottom-Up approach
ADVANTAGES
• Ultra-fine nanoparticles, nanoshells, nanotubes
can be prepared
• Deposition parameters can be controlled
• Narrow size distribution is possible (1-20 nm)
• Cheaper technique
-broad size distribution (10-1000 nm)
-varied particle shapes or geometry
-Control over deposition parameters
is difficult to achieve
-Impurities: stresses, defects and
imperfections get introduced
• Expensive technique
ADVANTAGES
• Large scale production:
deposition over a large substrate
is possible
• Chemical purification is not required
DISADVANTAGES
DISADVANTAGES
• Large scale production is difficult
• Chemical purification of nanoparticles
is required
Yields:
Bottom – Up Synthesis
• Two approaches
– Physical Processing : thermodynamic equilibrium
approach
• generation of supersaturation
• nucleation
• subsequent growth
– Chemical Processing: kinetic approach
• limiting the amount of precursors for the growth
confining in a limited space
Growth Kinetics: Nucleation and Growth processes
Synthesis of nanoparticles is a combination of two stage process,
nucleation and growth.

Most phase transformations begin with the formation of numerous small particles (clusters)
of the new phase that increase in size until the transformation is complete.
• Nucleation is the process whereby nuclei (seeds) act as templates for crystal growth.
• Transformation rate
• Kinetics of Phase Transformation
– Nucleation: homogeneous, heterogeneous
– Free Energy, Growth
Phase Transformations
Nucleation
There are two different categories of Nucleation:
Heterogeneous nucleation –
The nucleation of critical nuclei forming at defects such as surface
imperfections, grain boundaries is called heterogeneous nucleation.
Nucleation is much easier since stable “nucleating surface” is already present;
requires slight supercooling (0.1-10ºC).
Homogenous nucleation – this happens spontaneously!
nucleation that randomly occurs away from a surface.
nuclei form uniformly throughout the parent phase ; requires considerable
supercooling (typically 80-300°C)
Nucleation is the first step in the formation of either a new thermodynamic phase or a new
structure via self-assembly or self-organisation.
Nucleation is typically defined to be the process that determines how long we have to wait
before the new phase or self-organised structure, appears. Nucleation is often found to be very
sensitive to impurities in the system.
Supercooling

During the cooling of a liquid, solidification (nucleation) will
begin only after the temperature has been lowered below the
equilibrium solidification (or melting) temperature Tm. This
phenomenon is termed supercooling (or undercooling.

The driving force to nucleate increases as ∆T increases

Small supercooling  slow nucleation rate - few nuclei - large
crystals

Large supercooling  rapid nucleation rate - many nuclei - small
crystals
Phase Classification:
I.Gas (Vapor) Phase Fabrication:
PVD:
- Inert Gas Condensation,
- Evaporation (Thermal , e-beam)
- Plasma Arcing,
- Laser ablation,
- Sputtering
CVD: (PECVD and Microwave-PECVD)
II. Liquid Phase Fabrication:
- Wet chemical synthesis,
- Sol-gel,
- Self assembled Monolayer(SAM)
- Microemulsion method
- Spray Pyrolysis
Bottom – Up Synthesis
Physical Methods:
with starting phase as Gas (Vapor) phase
Bottom – Up Synthesis
• Inert-gas condensation:
Physical Vapor Deposition (PVD):
Bottom-Up approach
In this process, a metal is evaporated inside an ultra-
high vacuum (UHV) chamber filled with inert gas (He).
The vaporized species collide with Helium molecules
thus losing kinetic energy. As collisions limit the mean
free path, supersaturation can be achieved above the
vapors source.
At high supersaturation, the vapors rapidly form no. of
clusters that grow via coalescence and agglomeration.
These clusters get condensed on liquid nitrogen cooled
surfaces to form nanoparticles.
The size, morphology, and yield of the NPs
should be controlled
The inert gas evaporation–condensation (IGC)
technique, in which nanoparticles are formed via the
evaporation of a metallic source in an inert gas, has
been widely used in the synthesis of ultrafine metal
particles
•involves generation and condensation of vapor phase species via thermal evaporation,
sputtering or laser ablation
Tube Furnace
(~500-1000 o
C)
• Evaporation technique
Thermal evaporation Electron-beam evaporation
Thermal deposition inside a vacuum chamber where the
material, usually in a boat is heated typically to its
melting point and the substrate to be deposited on is
positioned facing the source. A high current flowing
through the boat heats it up and causes evaporation.
A crystal monitor is mounted close to the substrate,
which provides an estimate of how much and how fast
the material is being deposited.
This technique is based in the heat produced by high energy
electron beam bombardment on the material to be
deposited. A high dc voltage is applied to a tungsten filament
that causes electrons to be emitted out. These emitted
electrons are accelerated to excites the target solid and
produces vapors, which travels to the substrate. As they reach
the surface, they condense and form a thin film coating.
• Used for depositing materials with high melting point
(W, Ta, C, etc.)
• As electrons can be focalized, it is possible to obtain
a very localized heating on the material to evaporate,
with a high density of evaporation power (several kW)
Bottom-Up approach
Limitations-
• High temperature process ( 500-1200o
C)
• Ultra high vacuum(10-6
torr)
• High cost
• Sputtering
Atoms of Target (source) materials are ejected or sputtered by high energy ion
bombardment of high-energy noble gas atoms, commonly Argon, produced by a high
voltage DC or RF glow discharge. These ejected sputtered atoms (due to momentum
transfer) form a thin film coating after condensing on substrate kept as anode plate
Sputter deposition are methods of depositing thin films by sputtering. They involve ejecting material
from a “target” that is a source onto a “substrate” such as a silicon wafer.
Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV.
Bottom-Up approach
RF or DC signal
Advantages-
• Non-thermal process, no heating reqd.
• low vacuum(10-3
torr) is needed.
Limitations-
• controlling Deposition parameters is difficult
• High cost
Thin Film Deposition by sputtering process
The sputtering process consists of the bombardment of the target material by fast moving, heavy, inert gas ions from a
plasma. The bombarding ions cause atoms to be ejected from the target material by momentum transfer between the
colliding ions and the target atoms. The process is schematically shown in Figure 3.1a, where a number of processes are
shown to occur when the ions collide with the target material. Some of the bombarding ions are reflected back and are
neutralized, but may still be sufficiently energetic to reach the substrate were the film is being deposited. This can be a
source of substrate bombardment (back scattering) which can effect the resulting properties of the film. The majority of
the colliding ions tend to induce sputtering by ejecting atoms of the target material by momentum transfer. This is a
secondary collision process, as shown schematically in Figure 3.1a. The ejected atoms will have random directions but, as
discussed in Chapter 4, the sputtering process can induce texture in the resulting films due to the sputtering conditions.
Secondary electrons which are emitted either join the oscillating plasma gas, which cause the continuous ionization of the
gas to sustain the incident ions needed for sputtering, or they liberate their energy in the form of heat on colliding with the
substrate or other parts of the chamber. The sputtered target atoms which are deposited at the substrate form the
resulting thin film. The basic processes occurring at the surface of the substrate are shown in Figure 3.1b.
The mobility of the incident atoms arriving at the substrate is highly dependent upon the sputtering parameters (pressure
and power), the temperature of the substrate, the distance between target and substrate, and the surface.
Figure 3.1: An illustrative diagram showing the sputtering process at the target (a), and film formation at the substrate (b).
Schematic of thin-film growth based on DC sputtering technique. The processes include (a)
migration of single atoms on substrate, (b) aggregation of single atoms, (c) nucleation to form
nanoparticles, (d) growth of nanoparticles, (e) coalescence of nanoparticles, and (f) formation of
continuous film.
Plasma Processing methods
In general, plasma processing involves chemical and physical reactions between particles and
solid surfaces in contact with the plasma. Some examples are plasma etching, thin film
deposition, protective coating, surface hardening, ion implantation etc.
plasma of inert gases is produced by DC (direct current) glow or arc discharges,
• Arc discharges technique:
Bottom-Up approach
In this electric arc discharge method, material is vaporized between two electrodes by arc produced by applying
very high voltage (50-100V) across the electrodes. This ionizes the inert gas and plasma is generated (temperature
6000o
C), due to which metal atoms are evaporated and get condensed on water cooled substrate.
Later the substrate is heated to remove the impurities.
Carbon nanotubes are prepared by graphite as cathode.
Nanotubes of dichalcogenides are prepared by such as MoS2, WS2 are prepared are prepared by starting with
MoO3 and WO3.
•  Laser ablation pulsed laser deposition system
In this method, a solid metal rod is ablated using a Nd:YAG laser (high Power) in a chamber
containing Ar gas. In the plasma that results from the laser ablation, metal atoms are evaporated
and condensed on water cooled substrate.
Later the substrate is heated to remove the impurities.
NPs of Iron, gold, palladium, and compounds of sulphide are pepared by this method.
Bottom-Up approach
This method is applicable for high melting point elements and transition metals.
Disadvantage: 
•   High temperature method
•   low quality of material deposited
Advantage: 
•   capable of High deposition rate of 2-3 g/min 
Chemical vapor Deposition:
•  RF-plasma enhanced CVD
•  Microwave Plasma Enhanced CVD
Plasma Enhanced CVD-
Bottom-Up approach
Chemical vapour deposition (CVD) is a chemical process used to produce high-purity, high-
performance solid materials. The process is often used in the semiconductor industry to
produce thin films. In a typical CVD process, the wafer (substrate) is exposed to one or more
volatile precursors, which react and/or decompose on the substrate surface to produce the
desired deposit.
The energy source (RF/ Microwave power) is
intended to generate a plasma in which the
gases are broken down to form reaction
species.
Adv.
  Chemical Methods:  
  with starting phase as Liquid phase
Bottom – Up Synthesis
Wet Chemical Synthesis technique:
wet chemical approaches for the production of inorganic 
nanoparticles are important for large scale production of nanoparticles
Sol-gel method:
Colloidal Synthesis: Self Assembled Monolayers
langmuir-blodgett films
  Reverse-Micelle structures
Dip coating method
Spin coating method
Spray pyrolysis method:
Micro-emulsion method
Colloidal methods are simple and well established wet
chemistry precipitation processes in which solutions of the
different ions are mixed under controlled temperature and
pressure to form insoluble precipitates.
Spherical micelle structure layout:
Micelle structure Reverse Micelle structure
surfactant
amphiphilic molecules
If the dispersion medium is aqueous solvent, several
molecules aggregate in such a manner that hydrophobic
radicals form a core (inner element), while hydrophilic
groups form the surface layer of a micelle (a micelle
structure develops)
If the dispersion medium is an organic liquid, molecules i
a micelle may have a reverse orientation, when the core
made up of polar groups, and hydrophobic radicals are
turned inwards (reverse micelle structure develops)
• Microemulsion method
Microemulsions are isotropic, thermodynamically stable dispersion of oil,
water, surfactant and often cosurfactant. Microemulsion can be characterized
as oil-in-water (O/W), water-in-oil (W/O) and bicontinuous system. Water-in-
oil microemulsions are composed of nanometer-sized water droplets that are
dispersed in a continuous oil medium and stabilized by surfactant molecules.
These droplets can serve as nanoreactors for producing nanoparticles 
• Microemulsion method
An example of self-assembly that achieves a limited degree of control over both
formation and organization is the growth of quantum dots.
Several parameters, such as the concentration of the reactive precursor in the micelle
and the weight percentage of the aqueous phase in the microemulsion, affect the
properties including particle size, particle size distribution, and phases of the final
particles formed.
There are several advantages to using this method—
the preparation of very small particles and
the ability to control the particle size.
Disadvantages - include low production yields and
the need to use large amount of liquids.
Colloidal Synthesis of Semiconducting Quantum Dots
Colloidal Synthesis of CdSe (semiconducting) Quantum Dots:
Chemicals used:
CdO - Cadmium Oxide
TOP - Trioctylphosphine
TDPA - Tetradecylphosphonic Acid
Se - Selenium Powder
Surfactant/ Capping agent used: Trioctylphosphine Oxide (TOPO)
TOP-Se/Ar gas
> 300o
C
TOPO- capped CdSe
CdO + TOPO
+ TDPA
TOPO capped CdSe nanoparticle
Synthesis Approach
Colloidal Synthesis of CdSe (semiconducting) Quantum Dots:
TEM Studies
Nearly monodispersed and highly crystalline CdSe quantum dots can be synthesiszed by colloidal
synthesis
Size ~ 5 nm
CdSe/TOPO QDs
20 nm50 nm
2 nm
20 nm50 nm
2 nm
A B
C D
1 2 3 4 5 6 7 8 9 10
0
10
20
30
40
50
60
70
80
90
100
NumberofParticles
Particle Size (nm)
(After Pyridine Treatment)
CdSe QDs
Size distribution of nanoparticles formed
Disadvantage:
• controlling time and precursor is critical
Advantages:
• Greener technique (environment friendly)
• cheaper and effective
• Narrow size particles( 2-10 nm ) can be synthesized
Colloidal Synthesis of CdSe (semiconducting) Quantum Dots:
Gold sol was prepared by mixing the required
concentration of NaOH (5 × 10−4
M) and
chloroauric acid solution (1 × 10−4 M) in either
neat glycerol or glycerol-water mixtures [80 to
20% (v/v) glycerol in water] at room temperature
in the absence or presence of PVP [0.05% - 0.1%
(w/v)].
Gradual formation of different color with time
indicates the formation of Au NPs (Scheme 1).
The experiments were repeated at least three
times and found to be within the experimental
error of ± 5%.
Green Synthesis of Gold nanoparticles ( Au NPs):
In spray pyrolysis, the source is deposited to the substrate in droplets of liquid sprayed
onto the surface of the substrate to form a coating. The substrate is heated to about
350-500o
C, which results to film formation. The liquid that is sprayed is made of the
material diluted in either water or alcohol, or both.
Spray pyrolysis
Spray pyrolysis is a process that atomizes a precursor solution with the help
of a spray nozzle, and heats the droplets to form solid particles on the substrate

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synthesis of nanomaterials

  • 1. • Different Methods (Top-down and Bottom up approaches) • Growth Kinetics (Cluster Formation followed by Nucleation and Growth) Synthesis of Nanomaterials Design and preparation of nanoparticles with high functionality i.e., to fabricate nanomaterials which have the suitable properties for applications The fabrication of nanomaterials of tailored properties involve the control of Size, shape, structure, composition and purity of their constituents.
  • 2. Nanoparticle Synthesis Bottom-Up approach (or self-assembly approach) Top-Down approach • Bottom up approach refers to the build up of a material from the bottom: atom by atom, molecule by molecule • Atom by atom deposition leads to formation of Self- assembly of atoms/molecules and clusters • These clusters come together to form self- assembled monolayers on the surface of substrate • Top down approach refers to slicing or successive cutting of a bulk material to get nano sized particle. There are two approaches for synthesis of nanomaterials and the fabrication of nano structures.
  • 3.  Mechanical methods : - cutting , etching, grinding - ball milling  Lithographic techniques: - Photo Lithography - Electron Beam Lithography • Physical and chemical processing methods: Physical techniques- Physical Vapor Deposition (PVD): involves condensation of vapor phase species - Evaporation (Thermal , e-beam) - Sputtering - Plasma Arcing, - Laser ablation, Chemical techniques- CVD: Deposition of vapor phase of reaction species - PECVD(RF-PECVD,MPECVD) Self-assembled Monolayer : Electrolytic deposition, Sol-gel method, Microemusion route, pyrolysis. Physical processing methods: Bottom-Up approachTop-Down approach All the synthesis/deposition techniques are divided into two categories based on the phase of starting material All the Bottom-up techniques, the starting material is either gaseous state or liquid state of matter In Top-down techniques, the starting material is solid state
  • 4. How to synthesize nanoparticles? The key to make nanoparticles is how to control and stop the reaction to make nano-size products because the properties of nanoparticles depend on their size and morphology. Top-down refers to the traditional workshop or microfabrication method where tools are used to cut, mill and shape materials into the desired shape and order. Bottom-up refers to methods where devices 'create themselves' by selfassembly. Chemical synthesis is a good example. Bottom-up should broadly speaking be able to produce devices much cheaper than top-down methods, but getting control over the methods is difficult when things become larger and more bulky than what is normally made by chemical synthesis. Of course nature has had time to evolve and optimize self-assembly processes that can do wonders.
  • 5.
  • 6. Top-Down approach Bottom-Up approach ADVANTAGES • Ultra-fine nanoparticles, nanoshells, nanotubes can be prepared • Deposition parameters can be controlled • Narrow size distribution is possible (1-20 nm) • Cheaper technique -broad size distribution (10-1000 nm) -varied particle shapes or geometry -Control over deposition parameters is difficult to achieve -Impurities: stresses, defects and imperfections get introduced • Expensive technique ADVANTAGES • Large scale production: deposition over a large substrate is possible • Chemical purification is not required DISADVANTAGES DISADVANTAGES • Large scale production is difficult • Chemical purification of nanoparticles is required Yields:
  • 7. Bottom – Up Synthesis • Two approaches – Physical Processing : thermodynamic equilibrium approach • generation of supersaturation • nucleation • subsequent growth – Chemical Processing: kinetic approach • limiting the amount of precursors for the growth confining in a limited space
  • 8. Growth Kinetics: Nucleation and Growth processes Synthesis of nanoparticles is a combination of two stage process, nucleation and growth.  Most phase transformations begin with the formation of numerous small particles (clusters) of the new phase that increase in size until the transformation is complete. • Nucleation is the process whereby nuclei (seeds) act as templates for crystal growth.
  • 9. • Transformation rate • Kinetics of Phase Transformation – Nucleation: homogeneous, heterogeneous – Free Energy, Growth Phase Transformations
  • 10. Nucleation There are two different categories of Nucleation: Heterogeneous nucleation – The nucleation of critical nuclei forming at defects such as surface imperfections, grain boundaries is called heterogeneous nucleation. Nucleation is much easier since stable “nucleating surface” is already present; requires slight supercooling (0.1-10ºC). Homogenous nucleation – this happens spontaneously! nucleation that randomly occurs away from a surface. nuclei form uniformly throughout the parent phase ; requires considerable supercooling (typically 80-300°C) Nucleation is the first step in the formation of either a new thermodynamic phase or a new structure via self-assembly or self-organisation. Nucleation is typically defined to be the process that determines how long we have to wait before the new phase or self-organised structure, appears. Nucleation is often found to be very sensitive to impurities in the system.
  • 11. Supercooling  During the cooling of a liquid, solidification (nucleation) will begin only after the temperature has been lowered below the equilibrium solidification (or melting) temperature Tm. This phenomenon is termed supercooling (or undercooling.  The driving force to nucleate increases as ∆T increases  Small supercooling  slow nucleation rate - few nuclei - large crystals  Large supercooling  rapid nucleation rate - many nuclei - small crystals
  • 12. Phase Classification: I.Gas (Vapor) Phase Fabrication: PVD: - Inert Gas Condensation, - Evaporation (Thermal , e-beam) - Plasma Arcing, - Laser ablation, - Sputtering CVD: (PECVD and Microwave-PECVD) II. Liquid Phase Fabrication: - Wet chemical synthesis, - Sol-gel, - Self assembled Monolayer(SAM) - Microemulsion method - Spray Pyrolysis Bottom – Up Synthesis
  • 13. Physical Methods: with starting phase as Gas (Vapor) phase Bottom – Up Synthesis
  • 14. • Inert-gas condensation: Physical Vapor Deposition (PVD): Bottom-Up approach In this process, a metal is evaporated inside an ultra- high vacuum (UHV) chamber filled with inert gas (He). The vaporized species collide with Helium molecules thus losing kinetic energy. As collisions limit the mean free path, supersaturation can be achieved above the vapors source. At high supersaturation, the vapors rapidly form no. of clusters that grow via coalescence and agglomeration. These clusters get condensed on liquid nitrogen cooled surfaces to form nanoparticles. The size, morphology, and yield of the NPs should be controlled The inert gas evaporation–condensation (IGC) technique, in which nanoparticles are formed via the evaporation of a metallic source in an inert gas, has been widely used in the synthesis of ultrafine metal particles •involves generation and condensation of vapor phase species via thermal evaporation, sputtering or laser ablation Tube Furnace (~500-1000 o C)
  • 15. • Evaporation technique Thermal evaporation Electron-beam evaporation Thermal deposition inside a vacuum chamber where the material, usually in a boat is heated typically to its melting point and the substrate to be deposited on is positioned facing the source. A high current flowing through the boat heats it up and causes evaporation. A crystal monitor is mounted close to the substrate, which provides an estimate of how much and how fast the material is being deposited. This technique is based in the heat produced by high energy electron beam bombardment on the material to be deposited. A high dc voltage is applied to a tungsten filament that causes electrons to be emitted out. These emitted electrons are accelerated to excites the target solid and produces vapors, which travels to the substrate. As they reach the surface, they condense and form a thin film coating. • Used for depositing materials with high melting point (W, Ta, C, etc.) • As electrons can be focalized, it is possible to obtain a very localized heating on the material to evaporate, with a high density of evaporation power (several kW) Bottom-Up approach Limitations- • High temperature process ( 500-1200o C) • Ultra high vacuum(10-6 torr) • High cost
  • 16. • Sputtering Atoms of Target (source) materials are ejected or sputtered by high energy ion bombardment of high-energy noble gas atoms, commonly Argon, produced by a high voltage DC or RF glow discharge. These ejected sputtered atoms (due to momentum transfer) form a thin film coating after condensing on substrate kept as anode plate Sputter deposition are methods of depositing thin films by sputtering. They involve ejecting material from a “target” that is a source onto a “substrate” such as a silicon wafer. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV. Bottom-Up approach RF or DC signal Advantages- • Non-thermal process, no heating reqd. • low vacuum(10-3 torr) is needed. Limitations- • controlling Deposition parameters is difficult • High cost
  • 17. Thin Film Deposition by sputtering process The sputtering process consists of the bombardment of the target material by fast moving, heavy, inert gas ions from a plasma. The bombarding ions cause atoms to be ejected from the target material by momentum transfer between the colliding ions and the target atoms. The process is schematically shown in Figure 3.1a, where a number of processes are shown to occur when the ions collide with the target material. Some of the bombarding ions are reflected back and are neutralized, but may still be sufficiently energetic to reach the substrate were the film is being deposited. This can be a source of substrate bombardment (back scattering) which can effect the resulting properties of the film. The majority of the colliding ions tend to induce sputtering by ejecting atoms of the target material by momentum transfer. This is a secondary collision process, as shown schematically in Figure 3.1a. The ejected atoms will have random directions but, as discussed in Chapter 4, the sputtering process can induce texture in the resulting films due to the sputtering conditions. Secondary electrons which are emitted either join the oscillating plasma gas, which cause the continuous ionization of the gas to sustain the incident ions needed for sputtering, or they liberate their energy in the form of heat on colliding with the substrate or other parts of the chamber. The sputtered target atoms which are deposited at the substrate form the resulting thin film. The basic processes occurring at the surface of the substrate are shown in Figure 3.1b. The mobility of the incident atoms arriving at the substrate is highly dependent upon the sputtering parameters (pressure and power), the temperature of the substrate, the distance between target and substrate, and the surface. Figure 3.1: An illustrative diagram showing the sputtering process at the target (a), and film formation at the substrate (b).
  • 18. Schematic of thin-film growth based on DC sputtering technique. The processes include (a) migration of single atoms on substrate, (b) aggregation of single atoms, (c) nucleation to form nanoparticles, (d) growth of nanoparticles, (e) coalescence of nanoparticles, and (f) formation of continuous film.
  • 19. Plasma Processing methods In general, plasma processing involves chemical and physical reactions between particles and solid surfaces in contact with the plasma. Some examples are plasma etching, thin film deposition, protective coating, surface hardening, ion implantation etc. plasma of inert gases is produced by DC (direct current) glow or arc discharges, • Arc discharges technique: Bottom-Up approach In this electric arc discharge method, material is vaporized between two electrodes by arc produced by applying very high voltage (50-100V) across the electrodes. This ionizes the inert gas and plasma is generated (temperature 6000o C), due to which metal atoms are evaporated and get condensed on water cooled substrate. Later the substrate is heated to remove the impurities. Carbon nanotubes are prepared by graphite as cathode. Nanotubes of dichalcogenides are prepared by such as MoS2, WS2 are prepared are prepared by starting with MoO3 and WO3.
  • 20. •  Laser ablation pulsed laser deposition system In this method, a solid metal rod is ablated using a Nd:YAG laser (high Power) in a chamber containing Ar gas. In the plasma that results from the laser ablation, metal atoms are evaporated and condensed on water cooled substrate. Later the substrate is heated to remove the impurities. NPs of Iron, gold, palladium, and compounds of sulphide are pepared by this method. Bottom-Up approach This method is applicable for high melting point elements and transition metals. Disadvantage:  •   High temperature method •   low quality of material deposited Advantage:  •   capable of High deposition rate of 2-3 g/min 
  • 21. Chemical vapor Deposition: •  RF-plasma enhanced CVD •  Microwave Plasma Enhanced CVD Plasma Enhanced CVD- Bottom-Up approach Chemical vapour deposition (CVD) is a chemical process used to produce high-purity, high- performance solid materials. The process is often used in the semiconductor industry to produce thin films. In a typical CVD process, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. The energy source (RF/ Microwave power) is intended to generate a plasma in which the gases are broken down to form reaction species. Adv.
  • 22.   Chemical Methods:     with starting phase as Liquid phase Bottom – Up Synthesis
  • 23. Wet Chemical Synthesis technique: wet chemical approaches for the production of inorganic  nanoparticles are important for large scale production of nanoparticles Sol-gel method: Colloidal Synthesis: Self Assembled Monolayers langmuir-blodgett films   Reverse-Micelle structures Dip coating method Spin coating method Spray pyrolysis method: Micro-emulsion method Colloidal methods are simple and well established wet chemistry precipitation processes in which solutions of the different ions are mixed under controlled temperature and pressure to form insoluble precipitates.
  • 24. Spherical micelle structure layout: Micelle structure Reverse Micelle structure surfactant amphiphilic molecules If the dispersion medium is aqueous solvent, several molecules aggregate in such a manner that hydrophobic radicals form a core (inner element), while hydrophilic groups form the surface layer of a micelle (a micelle structure develops) If the dispersion medium is an organic liquid, molecules i a micelle may have a reverse orientation, when the core made up of polar groups, and hydrophobic radicals are turned inwards (reverse micelle structure develops) • Microemulsion method
  • 25. Microemulsions are isotropic, thermodynamically stable dispersion of oil, water, surfactant and often cosurfactant. Microemulsion can be characterized as oil-in-water (O/W), water-in-oil (W/O) and bicontinuous system. Water-in- oil microemulsions are composed of nanometer-sized water droplets that are dispersed in a continuous oil medium and stabilized by surfactant molecules. These droplets can serve as nanoreactors for producing nanoparticles  • Microemulsion method An example of self-assembly that achieves a limited degree of control over both formation and organization is the growth of quantum dots.
  • 26. Several parameters, such as the concentration of the reactive precursor in the micelle and the weight percentage of the aqueous phase in the microemulsion, affect the properties including particle size, particle size distribution, and phases of the final particles formed. There are several advantages to using this method— the preparation of very small particles and the ability to control the particle size. Disadvantages - include low production yields and the need to use large amount of liquids.
  • 27. Colloidal Synthesis of Semiconducting Quantum Dots
  • 28. Colloidal Synthesis of CdSe (semiconducting) Quantum Dots: Chemicals used: CdO - Cadmium Oxide TOP - Trioctylphosphine TDPA - Tetradecylphosphonic Acid Se - Selenium Powder Surfactant/ Capping agent used: Trioctylphosphine Oxide (TOPO)
  • 29. TOP-Se/Ar gas > 300o C TOPO- capped CdSe CdO + TOPO + TDPA TOPO capped CdSe nanoparticle Synthesis Approach Colloidal Synthesis of CdSe (semiconducting) Quantum Dots:
  • 30.
  • 31. TEM Studies Nearly monodispersed and highly crystalline CdSe quantum dots can be synthesiszed by colloidal synthesis Size ~ 5 nm CdSe/TOPO QDs 20 nm50 nm 2 nm 20 nm50 nm 2 nm A B C D 1 2 3 4 5 6 7 8 9 10 0 10 20 30 40 50 60 70 80 90 100 NumberofParticles Particle Size (nm) (After Pyridine Treatment) CdSe QDs Size distribution of nanoparticles formed Disadvantage: • controlling time and precursor is critical Advantages: • Greener technique (environment friendly) • cheaper and effective • Narrow size particles( 2-10 nm ) can be synthesized Colloidal Synthesis of CdSe (semiconducting) Quantum Dots:
  • 32. Gold sol was prepared by mixing the required concentration of NaOH (5 × 10−4 M) and chloroauric acid solution (1 × 10−4 M) in either neat glycerol or glycerol-water mixtures [80 to 20% (v/v) glycerol in water] at room temperature in the absence or presence of PVP [0.05% - 0.1% (w/v)]. Gradual formation of different color with time indicates the formation of Au NPs (Scheme 1). The experiments were repeated at least three times and found to be within the experimental error of ± 5%. Green Synthesis of Gold nanoparticles ( Au NPs):
  • 33. In spray pyrolysis, the source is deposited to the substrate in droplets of liquid sprayed onto the surface of the substrate to form a coating. The substrate is heated to about 350-500o C, which results to film formation. The liquid that is sprayed is made of the material diluted in either water or alcohol, or both. Spray pyrolysis Spray pyrolysis is a process that atomizes a precursor solution with the help of a spray nozzle, and heats the droplets to form solid particles on the substrate