"MEMS-based Laser Beam Scanning Technology Platform; Basis for Applications from Displays to 3D Sensors and 3D Printers" presentation by Jari Honkanen at MEMS Engineer Forum, April 26-27, 2017, Ryogoku, Tokyo, Japan

1. Don’t just think outside the box.
See outside the box.
MEMS-based Laser Beam Scanning Technology
Platform; Basis for Applications from Displays to 3D
Sensors and 3D Printers
Jari Honkanen
April 27, 2017

2. 5/18/20172 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.
Outline
 Problem Statement
 Why Platform Strategy?
 What is Laser Beam Scanning (LBS) Technology?
 9 Laser Beam Scanning Applications
 Wrap-up

3. 3 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
MEMS Business Challenge: Decreasing Average Selling Price
$0.00
$0.50
$1.00
$1.50
$2.00
$2.50
$3.00
$3.50
$4.00
2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020
MEMSASP
Year
MEMS Average Selling Price (ASP) 2000-2020
Source: Yole Developpment

4. 4 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Business Challenge: Increasing Development Cost
[Above illustrative Data for ASICs]
Source: http://archive.cotsjournalonline.com

5. 5 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Business Challenge
 Lower Prices … Lower Contribution Margin … and … Higher Development Costs
 Need huge volumes to justify development and to achieve positive ROI
 Are there markets large enough to produce needed volumes?
 Any strategies how to buck the trend?

6. 6 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
6
Commodity - $0.05
Goods - $0.25
Service - $1.50
Experience - $4
Component
Feature
Application or System
Platform
Value
How to increase value? Food for thought …

7. 7
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A group of technologies that are used as a
base upon which other applications are
developed

8. 8
MICROVISION, INC. PROPRIETARY AND CONFIDENTIAL
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5/18/2017
MEMS Platform & ASIC Platform for Laser Beam Scanning Engine
MEMS Mirror Analog & Digital
ASICs
Application Software
Laser Diodes
Optical Elements
Electronics
Laser Beam Scanning Engine
Embedded
FW
Integrated Photonics Module Electronics Module

9. MEMS Laser Beam Scanning
Technology
Creating Applications
One Pixel at a Time

10. 10
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Laser Beam Scanning Bi-axial MEMS Mirror Platform
Flexures
PZRs
Coil
Mirror
~Φ1mm

11. 11
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SLOW SCAN AXIS
(Vertical）
FAST SCAN AXIS
(Horizontal）
Laser Beam Scanning Technology - MEMS

12. 12
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Laser Beam
Laser Beam Scanning Technology – MEMS Horizontal Scan

13. 13
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Laser Beam Scanning Technology – MEMS Vertical Scan

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Coil Vertical
Drive Input
(Ramp Drive)
Magnetic Field
Laser Beam Scanning Technology – MEMS Electromagnetic Actuation

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Coil Horizontal
Drive Input
(Sinusoidal drive)
Fast scan resonant scanner
f = 26.5 ～ 29.0 kHz
Magnetic Field
Laser Beam Scanning Technology – MEMS Electromagnetic Actuation

16. Laser Beam Scanning Applications

17. 17 MICROVISION, INC. COPYRIGHT 2016. ALL RIGHTS RESERVED.5/18/2017
Disclosure
 The following presents 9 LBS applications as “food for though” demonstrating how to a
single MicroVision platform MEMS design has been utilized for multiple applications
 Applications are presented at the high level of abstraction focusing to the MEMS-based
Laser Beam Scanning part of the system
 Rest of the System complexities have been severely simplified or simply omitted

18. LBS Display Applications

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Laser Beam Scanning for Displays – How it works
Red laser
Green laserBlue laser
2D MEMS
Micro mirror
Raster Scan

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PicoP® Scanning Technology - Projection DisplayRaster ScanLaser Beam Scanning for Displays – How it works

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MEMS-based LBS Application: Pico Projector
3 Laser RGB Pico Projector 5 Laser RRGGB Pico Projector
+ +
Image Source: Sony Corp.
Platform MEMS RGB Laser Diodes
Platform MEMS
RRGGB Laser
Diodes

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MEMS-based LBS Application: 3D Pico Projector
+ +
Platform MEMS RGB Laser Diodes

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MEMS-based LBS Application: Heads-Up Display (HUD)
Aftermarket HUD Original Equipment
(Embedded) HUD
Relay Optics
+
Platform MEMS RGB Laser Diodes
+

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MEMS-based LBS Application: Augmented Reality Eyewear
Relay Optics
++
Viewing OpticsPlatform MEMS RGB Laser Diodes
+

25. LBS Sensing Applications

26. 27
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Red laser
Green laser
Blue laser
2D MEMS
Micro mirror
IR laser
IR Photodetector
Laser Beam Scanning with Sensing – How does it work
• X,Y location of object known because of
knowledge of MEMS pointing angle.
• Z determined by Time-of-Flight

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MEMS-based LBS Application: Interactive Projection
+
IR
+
IR Photodetector
Platform MEMS RGBIr Laser Diodes

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MEMS-based LBS Application: Interactive AR Eyewear
+
IR
+
IR Photodetector
+
Beam Splitter
AR Display
Gesture Field
Platform MEMS RGBIr Laser Diodes

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MEMS-based LBS Application: Mid-range LiDAR
+ IR
+
IR PhotodetectorPlatform MEMS IR Laser Diode

30. Other LBS Applications

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MEMS-based LBS Application: 3D Printing
+
UV
a) UV MEMS Scanner
b) UV curable resin
c) Transparent tank bottom
d) Solidified resin
e) Lifting platform
Image Source: https://en.wikipedia.org/wiki/3D_printing
Platform MEMS UV Laser Diode

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MEMS-based LBS Application: OCT (Optical Coherence Tomography)
+ + +
Image Source: Utku Baran, Wei Wei, Jingjiang Xu, Xiaoli Qi, Wyatt O. Davis, Ruikang K.
Wang, “Video-rate volumetric optical coherence tomography-based microangiography,”
Optial Engineering 55(4), 040503 (2016), doi: 10.1117/1.OE.55.4.040503.
Beam Splitters
IR Photodetector
Platform MEMS
1300nm IR
Laser Diode

33. Wrap-up

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Summary
 Produce MEMS, Sell Systems
Images Source: https://en.wikipedia.org/wiki/Amphicar
 Think platform to increase value, lifetime, and number of applications for your MEMS
device.
 But stay within reason, do not try to target too many non synergistic applications or
markets
 1961 Amphicar – Drove like a boat, floated like a car

35. DON’T JUST THINK OUTSIDE THE BOX.
SEE OUTSIDE THE BOX.
© 2016 MICROVISION, INC. ALL RIGHTS RESERVED.
PICOP IS A REGISTERED TRADEMARK OF MICROVISION, INC. ALL OTHER TRADEMARKS ARE
THE PROPERTY OF THEIR RESPECTIVE OWNERS.