Micro-electro-mechanical systems (MEMS) combine mechanical and electrical components at the microscale using microfabrication techniques. MEMS are fabricated using processes such as chemical and physical vapor deposition, photolithography, and wet or dry etching to create 3D mechanical structures. Common MEMS materials include metals, polymers, ceramics and semiconductors. MEMS have a wide variety of applications including in automotive, medical, military and consumer electronics as sensors, actuators and microsystems such as accelerometers and gyroscopes. Advantages of MEMS include miniaturization, improved accuracy and reliability while disadvantages include high initial costs and complex design processes.

1. Micro Electro Mechanical Systems

2.  Introduction
 Mems process
 Fabrication process
 Materials for mems
 Micro machining technology
 Application of mems
 Advantages and disadvantages
 Conclusion
 Reference
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3.  MEMS: micro-electro-mechanical systems
 Combination of mechanical functions
(sensing,moving,heating) and electrical
functions (switching ,deciding) on the
same chip using micro fabrication
technology.
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4. MEMS DESIGN
FABRICATION
TESTING
PACKING
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5. MicroElectroMechanicalSystems

6.  Chemical Vapor Deposition
Chemical vapor deposition
 Physical Vapor Deposition
Sputtering
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7. MicroElectroMechanicalSystems

8.  Application of photo resist
 Optical exposure to print an image of
the mask onto the resist
 Immersion in an aqueous developer
solution to dissolve the exposed resist
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9. MicroElectroMechanicalSystems

10. • DRY ETCHING
• WET ETCHING
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11.  Materials are the basic things required to develop
micro sensors
 Metals
 Polymers
 Ceramic materials
 Semiconductors
 Composite materials
MicroElectroMechanicalSystems

12.  Process of shaping silicon or other
materials to realise 3-D mechanical in
miniature form and the mechanical
devices that are compatible with the
micro electronic devices
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13.  BULK micromachining:
 SURFACE micromachining:
 LIGA process
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14.  In Medical Field
• A MEMS device can be implanted in the human
body.
• MEMS surgical tools provide the flexibility and
accuracy to perform surgery.’
• Bio-mems
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15. An example of a bio-MEMS device is this
automated FISH microchip.
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16.  In Automotives
•Air bag System
•Vehicle security system
• Inertial brake lights
•Rollover detection
•Automatic door locks.
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17.  As gyroscope
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18.  In microphones
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19.  In accelerometers
MEMS accelerometers are widely used in
• cars for airbag deployment
• smart phones
• gaming devices for sensing motion.
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20.  As sensors
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21.  In military
Apart from these applications mems are also used
in many fields in the present world , like
 They are used to detect earth quakes, in gas shut
off, in shock and tilt sensing.
 Inkjet printers and micro scanners also involve
the use of mems.
Micro-electro mechanical system (MEMS) technology
help projectiles to reach their targets accurately.
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22.  Minimize energy and materials.
 Improved reproducibility.
 Improved accuracy and reliability.
 Increased selectivity and sensitivity.
ADVANTAGES
MicroElectroMechanicalSystems

23. DISADVANTAGES
 Farm establishment requires huge
investments.
 Micro-components are costly compared to
macro components.
 Design includes very much complex procedures.
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24.  This enabling technology promises to create
entirely new categories of products.
 Mems will be the indispensible factor in
advancing technology.
 As with all emerging technologies had been
predicted to revolutionize technology and our
lives.
MicroElectroMechanicalSystems

25.  R. Ghodssi, P. Lin (2011). MEMS Materials and Processes
Handbook. Berlin:Springer
 Waldner, Jean-Baptiste (2008). Nanocomputers and Swarm
Intelligence. London:ISTE John Wiley & Sons. p. 205.
 McCord, M. A.; M. J. Rooks (2000). "2". SPIE Handbook of
Microlithography, Micromachining and Microfabrication.
 Chang, Floy I-Jung (1995). Xenon difluoride etching of
silicon for MEMS (M.S.)
 Williams, K.R.; Muller, R.S. (1996). "Etch rates for
micromachining processing".Journal of
Microelectromechanical Systems 5 (4): 256
 en.wikipedia.org/wiki/Microelectromechanical_systems
MicroElectroMechanicalSystems

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