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Vacuum Arc Deposition in interior cavities (Yan Valsky), Lecture Prof. R..LBoxman

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Yan Valsky, MSc, MBA
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VACUUM ARC DEPOSITION IN INTERIOR CAVITIES Physical and Engineering Principles and Ideas for Interior Implementations Raymond L. Boxman Electrical Discharge and Plasma Laboratory School of Electrical Engineering Tel-Aviv University  
Background and Objectives ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Outline ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
I. Physics of the Vacuum Arc – The Arc Discharge ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Difference between Glow and Arc – cathode electron emission process ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Cathode Spot Characteristics ,[object Object],[object Object],[object Object],[object Object],[object Object]
Cathode Spot Plasma Jets ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Cathode Spot Theory ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Beilis Model: Cathode Spot & Cathode Plasma Jet Cathode Cathode Spot Region Hydrodynamic Plasma Flow SHEATH Electron relaxation zone. Ion diffusion Kinetic flow Knudsen Layer Plasma Jet Expansion  Acceleration Region e  i e  a
Beilis Model ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Beilis Model – cont’d ,[object Object],[object Object],[object Object],[object Object],[object Object]
Beilis Model – Hydrodynamic Plasma Expansion ,[object Object],[object Object],[object Object],[object Object],[object Object]
Explosive Electron Emission (Mesyats et al. ) ,[object Object]
EEE (Mesyats et al. ) – cont’d ,[object Object],[object Object]
Macroparticles
Macroparticles ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
II. Vacuum Arc Engineering ,[object Object],[object Object],[object Object]
II. Vacuum Arc Engineering ,[object Object],[object Object],[object Object],[object Object]
Arc Ignition ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Controlling Cathode Spot Location and Motion ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Magnetic Control of Cathode Spots
Passive Border
Strelnitski Shield
Pulse Control ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Heat Removal ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Heat Removal from Cathode ,[object Object],[object Object],[object Object],[object Object]
Heat Removal from Cathode, cont’d ,[object Object],h c – contact heat transfer coefficient h w – heat transfer coefficient to water
 
Substrate Temperature Control ,[object Object],[object Object],[object Object],[object Object],[object Object]
Macroparticle Control ,[object Object],[object Object],[object Object],[object Object],[object Object]
Minimize MP Production/Transmission ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
 
Macroparticle Removal ,[object Object],[object Object]
VENETIAN BLIND
Two quarter-torus filtered arcs at Tel Aviv University
 
 
Filtered Arc – Advantages and Disadvantages ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Other Arc Modes ,[object Object],[object Object],[object Object]
10  m
III. How can we coat the inside of:
Approach 1: Ignore MPs
Approach 1: Ignore MPs ,[object Object],[object Object]
Approach 2: Miniature Filter: Example – Welty Rect. Filter
Approach 2: Miniature Filter: Another Example ,[object Object],[object Object],[object Object],[object Object]
Approach III. Beilis “black-body” HRAVA deposition device
Interior Coatings - Considerations ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Summary and Conclusions ,[object Object],[object Object],[object Object],[object Object],[object Object]
Summary and Conclusions, cont’d ,[object Object],[object Object]

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