3. Advanced CO 2 Cleaning, used and proven in numerous high tech industries, is now available as a back-end cleaning solution. The Future of IC cleaning
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5. A clean semiconductor device, free of particulate contamination, is more important today than ever before.
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8. CO 2 is non-toxic, non-flammable and non-corrosive. Recycled CO 2 is exempt from the EPA Global Warming legislation. Yes 100 ~0 n-Propyl Bromide Yes 350 0.15 1,1,1-Trichloroethane Yes 50 ~0 Trichloroethylene No 1000 ~0 Acetone Yes 400 ~0 Isopropyl Alcohol No 5,000 None Carbon Dioxide VOC OSHA PEL (ppm) Ozone Depleting Potential (ODP) Solvent
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11. F = m x Impact ! ∆ t ∆ v Adjustable compositions of lean (high freq. impacts) energetic CO 2 particles (size control) and heated propellant gas…at low spray pressures (10 -120 psi). First …Particle Size and Density CO 2 COMPOSITE SPRAY CLEANING ENERGY FINE MEDIUM COARSE IMPACT SHEAR STRESS (MPa) 0.1 1 60 Shaved Ice and Pellets (100 - 500 MPa) 500 100 10 ULTRAFINE 1 10 PARTICLE RANGE (microns) CO 2 Composite Sprays (0.01 - 60 MPa) Snow Sprays (0.01 - 2 MPa) Control Parameters CO 2 Particle Size CO 2 Particle Density Propellant Pressure Propellant Temperature
12. Second …Spray Control Gas Particle Size Chemistry Spray Density Temperature Pressure Distance/Angle Time (Propulsion/ Heating) Additive(s) (Chemical/ Physical) CO 2 Chemical Thermal Mechanical
13. Third …Process Enhancement Tool Existing Cleaning and Inspection Process CO 2 composite sprays easily adapt to and augment an existing cleaning technologies such as air blown ionization to increase overall cleaning process efficiency and effectiveness …. Composite sprays are additive without being mechanically destructive (energy control)…
14. CO 2 Composite Spray Technology (Conventional)