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MNTL HIGHLIGHTS REPORT 1
HIGHLIGHTS REPORT
ENGINEERING AT ILLINOIS
2
MNTL HIGHLIGHTS REPORT 3
FOUNDED MORE THAN 25 YEARS AGO AS A III-V COMPOUND SEMICONDUCTOR MATERIALS AND
DEVICES RESEARCH AND INNOVATION FACILITY, THE MICRO + NANOTECHNOLOGY LAB HAS
ENABLED UNIVERSITY OF ILLINOIS RESEARCHERS TO ADVANCE TECHNOLOGY IN HIGH-SPEED
DATA COMMUNICATIONS, HIGH-EFFICIENCY LIGHTING, SOLAR POWER, FLEXIBLE ELECTRONICS,
AND NOVEL MICROELECTRONICS/PHOTONICS CONCEPTS FOR NEXT-GENERATION COMPUTING
ARCHITECTURES. WITH THE ADDITION OF THE BIO-NANOTECHNOLOGY LAB COMPLEX IN 2007,
OUR RESEARCHERS ARE ALSO MAKING ADVANCES IN BIOMEDICAL IMAGING, BIOMEDICAL
DIAGNOSTICS, AND ENVIRONMENTAL MONITORING, WHILE DEVELOPING NEW TOOLS FOR LIFE
SCIENCE RESEARCH.
THROUGHOUT THE YEARS, WE HAVE BEEN ONE OF THE PREMIER BIO- AND NANOTECHNOLOGY
TRAINING SITES FOR YOUNG SCIENTISTS AND ENGINEERS, PREPARING THEM TO TACKLE NEW
RESEARCH PROBLEMS AND CREATE NOVEL PRODUCTS AND PROCESSES.
THIS REPORT SUMMARIZES THE BREADTH AND DEPTH OF THE RESEARCH AND TRAINING
PROGRAMS AT MNTL, WHICH IS ONE OF THE MOST IMPACTFUL UNIVERSITY-BASED RESEARCH
LABORATORIES IN THE WORLD.
MNTL HIGHLIGHTS REPORT 2014-2015
PROJECT MANAGER
Laura Schmitt
CONTRIBUTING WRITERS
Liz Ahlberg, Meg Dickinson, Rick Kubetz,
Jonathan Lin, Laura Schmitt
DESIGN
Winter Agency
IMAGES
Brian Stauffer, Greg Pluta, Thompson • McClellan,
Jonathan Lin, Janet Sinn-Hanlon, Design
Group@VetMed (pg 12)
MNTL ADMINISTRATION
DIRECTOR
Brian T. Cunningham
INDUSTRY AFFILIATES PROGRAM
MANAGING DIRECTOR
Greg Pluta
FACILITIES MANAGER
Ken Tarman
BUSINESS OFFICE MANAGER
Nandini Topudurti
BIONANOTECHNOLOGY LAB MANAGER
Angana Senpan
ASSISTANT DIRECTOR OF COMMUNICATIONS
Laura Schmitt
CENTER ADMINISTRATION
Center for Nanoscale Science & Technology Executive
Director and Research Faculty Agricultural & Biological
Engineering
IRFAN AHMAD
Center for Nanoscale Science & Technology and NSF
Science & Technology Center: Emergent Behavior of
Integrated Cellular Systems Program Coordinator
CARRIE KOUADIO
Center for Innovative Instrumentation Technology (NSF
I/UCRC) Managing Director
GREG PLUTA
RESEARCH BRIEFS
FACULTY AWARDS
INDUSTRY AFFILIATES PROGRAM
RESEARCH FUNDING
STUDENT RESEARCH
MNTL IMPACT
19
18
8
24
27
30
MNTL HIGHLIGHTS REPORT 5
The technologies being developed by the faculty and students who conduct their research in the Micro +
Nanotechnology Lab (MNTL) have been essential to many important developments in our society—from
high-speed optoelectronic devices that enable the Internet, to materials and structures that form the foun-
dations of high-speed computation, to photonic nanostructures used in biosensors for medical diagnos-
tics, to microelectromechanical transducers that form the basis for radio frequency filters. In nearly every
case, these technologies required a cycle of incubation, iteration, and demonstration as we moved from
understanding their fundamental properties to realizing their performance potential.
While we publicize important breakthroughs in this 2014-15 MNTL highlights report, we know that each break-
through actually took a great deal of effort over many months to convert a novel idea into a demonstrated reality.
It takes even longer to turn these innovations into products. We engage with our faculty, students, alumni, and
industry partners for the entire process.
In fact, we are launching a new Industry Affiliates Program in 2016 to better facilitate our technical interactions,
communication, and funding of our research with a broad range of companies.
AS YOU READ OUR MNTL HIGHLIGHTS REPORT, YOU WILL NOTICE THAT
OUR RESEARCH IS INCREASINGLY INTERDISCIPLINARY. FOR EXAMPLE,
>> We recently established an Illinois Partnership for Vision Engineering that brings together MNTL scientists with
clinical ophthalmologists and engineers at the University of Illinois in Chicago. This collaboration aims to solve
grand challenges in the implementation of targeted nanoparticle drug delivery, sensor-integration with artificial
corneas, and electronic-biological interfaces.
 While some of our faculty are working with colleagues who specialize in the circuits and systems that form
the fabric of next-generation low power computation systems, others are working with specialists in infectious
disease or cancer to develop point-of-care diagnostic tests. The possibilities are endless, as materials and
structures we can create on the nanometer scale are the enablers of systems that manipulate photons, elec-
trons, biomolecules, and cells.
 Some of our researchers are investigating a new semiconductor fabrication paradigm, where pulses of light
catalyze electrochemical reactions that dope, etch, and metallize circuit patterns onto a semiconductor wafer
with high resolution—making it possible to prototype new devices more quickly and cheaply.
One of our core missions is to educate, inspire, and train students to become the next generation of innovative
leaders in these multidisciplinary fields. You will see in this report that MNTL’s outreach is enormous. During 2014
and 2015, with leadership provided by the Center for Nanoscale Science and Technology (CNST), we welcomed
more than 50 researchers to our BioNanotechnology Summer Institute, 16 middle  high school and community
college STEM faculty to our Research Experience for Teachers program, and 26 students to our Research Expe-
rience for Undergraduates program.
2016 promises to be another outstanding year at MNTL. We were fortunate to bring in several new faculty—Wen-
juan Zhu, Can Bayram, and Arend van der Zande—who are establishing their research groups to create innova-
tions in flexible optoelectronics, novel 2-dimensional materials  devices, and novel photonic device architectures.
Please read on to learn more about how we are turning nano-scale discoveries into world-changing technologies.
Brian T. Cunningham
MNTL Director
6
A JEWEL IN THE UNIVERSITY OF ILLINOIS COLLEGE OF ENGINEERING CROWN, THE
MICRO + NANOTECHNOLOGY LAB PROVIDES 300 STUDENTS AND DOZENS OF
FACULTY RESEARCHERS WITH ALL THE ADVANCED TOOLS THEY NEED FOR
CONDUCTING PHOTONICS, MICROELECTRONICS, BIOTECHNOLOGY, AND
NANOTECHNOLOGY RESEARCH.
MNTL IS ONE OF THE ONLY UNIVERSITY-BASED RESEARCH FACILITIES IN THE
COUNTRY TO HAVE STATE-OF-THE-ART CLEANROOMS AND A BIOSAFETY LEVEL-2
COMPLEX ALL UNDER ONE ROOF, ENABLING OUR RESEARCHERS TO CONDUCT
GROUNDBREAKING WORK AT THE INTERSECTION OF ENGINEERING AND BIOLOGY.
MNTL RESEARCHERS DESIGN, BUILD, AND TEST INNOVATIVE NANOSCALE
TECHNOLOGIES, SPANNING SIZES FROM ATOMS TO ENTIRE SYSTEMS.
E
MNTL HIGHLIGHTS REPORT 7
EXPERIMNTL
8
SELF-ROLLED-UP MEMBRANE
HAS MEDICAL AND ELECTRONIC
APPLICATIONS
ECE Professors John Dallesasse and Milton Feng have created a
transistor-injected quantum cascade laser, which is a hybrid of an
heterojunction bipolar transistor (HBT) and quantum cascade laser
(QCL). This 3-terminal device emits light between the mid-infra-
red and terahertz frequencies, can be made on many substrates,
and can be manufactured easily in a commercial GaAs foundry.
“We think the advantages of our device are compelling because
the [TI-QCL] will allow not only a lot of conventional QCL uses like
gas detection, chemical sensing, and process monitoring, but it will
also enable some interesting communications applications for free-
space links,” said Dallesasse. “Applications in the THz region might
also open up because of our device.”
ECE Professor Xiuling Li and Cell  Developmental Biology Professor Martha
Gillette led a team of researchers who created a neuron cell culturing platform
that consists of arrays of ordered microtubes (2.7- 4.4μm in diameter) formed by
strain-induced self-rolled-up nanomembrane (s-RUM) technology using ultrathin
(40 nm) silicon nitride (SiNx) film on transparent substrates. This patented tech-
nique helps neuron cells grow 20x faster than conventional methods. Someday
these microtubes may be implanted like stents to promote neuron regrowth at
injury sites or to treat disease.
Several years ago, Li’s group used the s-RUM technique to make an inductor, a
key integrated circuit element, 100x smaller without sacrificing performance. Pro-
cessed while flat, the inductors then roll themselves up on their own, taking up
much less space on a chip.
NOVEL PATENTED
LASER HAS
ENVIRONMENTAL,
HEALTH, AND
MANUFACTURING
APPLICATIONS
MNTL HIGHLIGHTS REPORT 9
NEW SYNTHETIC
TUMOR ENVIRONMENTS
MAKE CANCER RESEARCH
MORE REALISTIC
Materials Science and Engineering Assistant Professor Kris Kilian and Illinois
colleagues have developed a new technique to create a cell habitat of squishy
fluids, called hydrogels, which can realistically and quickly recreate microenvi-
ronments found across biology. To illustrate the potential of their technique,
the Illinois team mixed breast cancer cells and cells called macrophages that
signal cancer cells to spread and grow into a tumor. They were able to observe
how differently cells act in the three-dimensional, gel-like environment, which is
much more like body tissues than current options—a flat, hard plastic plate or
expensive mouse avatars that are created by injecting human tumor cells into
mice. “This is really the first time that it’s been demonstrated that you can use
a rapid methodology like this to spatially define cancer cells and macrophages,”
said Kilian, noting the importance of the architecture to answering fundamental
biological questions.
What sets the team’s model apart from mouse avatars and hard plastic plates is
that it can replicate much more accurately the sizes and shapes of the microen-
vironment within the patient’s problem area. The materials that pharmaceutical
companies use to test drugs’ effects on cells don’t allow for three-dimensional
vascularization, a network of capillaries that carry drugs and other materials
throughout the body. The team’s model does, creating networks that go from
straight, to snakelike, to any shape.
10
WHEN THE NEW CARLE ILLINOIS COLLEGE OF MEDICINE WELCOMES ITS FIRST
CLASS OF 25 STUDENTS IN THE FALL OF 2018, IT WILL BE THE FIRST SUCH COL-
LEGE IN THE COUNTRY TO BE SPECIFICALLY DESIGNED AT THE INTERSECTION OF
ENGINEERING AND MEDICINE. MNTL DIRECTOR BRIAN CUNNINGHAM ENVISIONS
THE COLLEGE OF MEDICINE WILL HELP FACILITATE NEW INTERACTIONS BETWEEN
MNTL RESEARCHERS AND THE MEDICAL COMMUNITY.
“The new College of Medicine will bring clinical researchers from many disciplines
into closer proximity with MNTL faculty, providing opportunities for discussions
that lead to research collaborations, and for research collaborations to translate
into clinical practice,” said Cunningham, who recently led the formation of a new
Illinois Partnership for Ophthalmology Engineering, which brings ophthalmologist
faculty at the U of I Chicago campus together with Urbana engineering faculty for
research collaborations aimed at drug delivery, diagnostic tests, surgical tools,
and implanted devices.
Bioengineering Department Head Rashid Bashir, a former MNTL director, was a
key member of the team that helped develop plans for the medical school and
guided the proposal through the campus and Board of Trustees approval process.
“Microfluidics and nanotechnology as applied to biology and medicine will be im-
portant technology pillars of the new College of Medicine—both from a curriculum
and research perspective,” said Bashir, who will co-chair the Carle Illinois College
of Medicine’s core curriculum committee. “MNTL’s Bionanotechnology Lab and
cleanrooms provide unique research and educational facilities for the physician
inventors and innovators of tomorrow trained in the new College of Medicine.”
NEW COLLEGE
OF MEDICINE
TO ENHANCE
RESEARCH
OPPORTUNITIES
MNTL HIGHLIGHTS REPORT 11
Many MNTL faculty are leaders in the photonics and nanoelectron-
ics areas, and are known for creating the highest speed transistors,
solid-state lasers, and integration of optical components for opti-
cal fiber communications. With the new College of Medicine, these
technologies will provide opportunities for cross-disciplinary col-
laboration that can include laser-based therapies, optical devices
for monitoring physiological health conditions, and light sources
for biomedical imaging.
PROFESSORS RASHID BASHIR, LOGAN LIU, AND BRIAN CUNNINGHAM are working on
high sensitivity biosensor technology that can be operated by miniature detection in-
struments for applications known as the “point of care.” These detection technologies
will enable doctors to perform tests and get quick results in remote health clinics, phar-
macies, and in some cases, even in the patients’ home. Currently, such tests are per-
formed in clinical diagnostic laboratories and often take hours or days to yield results.
MATERIALS SCIENCE  ENGINEERING ASSISTANT PROFESSOR KRIS KILIAN is develop-
ing innovative approaches to regenerative medicine—a new, promising area that has
the potential to heal damaged tissue and organs. His group is developing materials
that mimic the cellular environment to better understand the stem cell differentiation
process, which is key to restoring tissue structure and function caused by injury or
disease.
ECE PROFESSOR KEVIN KIM’S GROUP has developed a way to encapsulate drugs in
biodegradable polymer microspheres that control the release of pharmaceutical com-
pounds directly into their target tissues for high efficacy and reduced side effects.
ECE PROFESSOR XIULING LI has developed stents only a few microns in diameter that
can speed up and direct neuron growth. These tiny structures might someday help
patients with Alzheimer’s or traumatic brain injury.
BIOENGINEERING ASSISTANTPROFESSOR ANDREWSMITH isdevelopinganovelclassof
medical image contrast agents called quantum dots that will be used in many forms
of tissue pathology to increase the contrast with which doctors can visualize disease.
Applications include early cancer detection, cancer treatment, cardiac monitoring, and
metabolite tracking.
BIOENGINEERING PROFESSOR ROHIT BHARGAVA led a team that has developed an
advanced imaging technique that scans a tissue sample with infrared light to directly
measure the chemical composition of the cells without using any chemical stains. This
new technique could help doctors and researchers more quickly assess cancer tissue
without damaging the cells.
IN ADDITION, SEVERAL MNTL
RESEARCHERS ARE ALREADY DIRECTLY
ENGAGED IN DEVELOPING TECHNOLOGY
THAT WILL HAVE AN IMPACT ON
FUTURE MEDICAL PRACTICE.
12
Bioengineering Professor Rashid Bashir and Mechanical Science  Engineering
Professor Taher Saif have demonstrated a class of tiny walking (less than a
centimeter in size) bio-bots powered by muscle cells and controlled with elec-
trical pulses. “Biological actuation driven by cells is a fundamental need for any
kind of biological machine you want to build,” said Bashir, the Abel Bliss Pro-
fessor and Bioengineering department head. “We’re trying to integrate these
principles of engineering with biology in a way that can be used to design and
develop biological machines and systems for environmental and medical ap-
plications.”
Previously, Bashir and his collaborators, including Chemical  Biomolecular
Engineering Associate Professor Hyunjoon Kong, demonstrated bio-bots that
“walk” on their own, powered by beating heart cells from rats. However, heart
cells constantly contract, denying researchers control over the bot’s motion.
This makes it difficult to use heart cells to engineer a bio-bot that can be turned
on and off, sped up or slowed down.
The new bio-bots are powered by a strip of skeletal muscle cells, which are trig-
gered by an electric pulse. This gives the researchers a simple way to control
the bio-bots and opens the possibilities for other forward design principles, so
engineers can customize bio-bots for specific applications. “Skeletal muscles
cells are very attractive because you can pace them using external signals,”
Bashir said. “For example, you would use skeletal muscle when designing a
device that you wanted to start functioning when it senses a chemical or when
it received a certain signal. To us, it’s part of a design toolbox. We want to have
different options that could be used by engineers to design these things.”
PIONEERING
BIOLOGICAL MACHINES
MNTL HIGHLIGHTS REPORT 13
ENHANCING SOLAR
CELL PERFORMANCE
One way to improve the light absorption of solar cells is to create
anti-reflection material layers on the photovoltaic wafer. However,
all the possible approaches—multilayer dielectric film, nanoparticle
sludges, microtextures, and 3D silicon nanostructure arrays, to name
a few—are costly and often times incompatible with industry stan-
dards. ECE Associate Professor Gang Logan Liu has developed a
new nano-manufacturing technique called Simultaneous Plasma-En-
hanced Reactive Ion Synthesis  Etching (SPERISE) that offers a bet-
ter anti-reflection solution while possibly increasing the p-n junction
surface area. SPERISE improves the overall efficiency and lowers the
manufacturing costs of solar cells. In fact, Liu’s group made a solar
cell with its single-step process that performed 18.3 % better than a
cell fabricated by standard industrial processes.
NANOTECHNOLOGY
ENHANCES DRUG DELIVERY
ECE Professors Kevin Kim and Hyungsoo Choi have created medi-
cine-laced nanoparticles that can be administered nasally to bypass
the blood-brain barrier. These nanoparticles target damaged brain tis-
sue and may provide a longer treatment window for stroke patients.
In one lab experiment, the drug molecules were encapsulated in gela-
tin nanoparticles and safely transported to the brain for the treatment
of ischemic stroke. A fundamental understanding of the way gelatin
nanoparticles interact with the brain may allow this technology to
someday be applied to humans.
TINY LASER
GIVES BIG BOOST
ECE Professor Milton Feng developed an oxide-confined vertical-cav-
ity surface-emitting laser (VCSEL) that transmits error-free data over
a fiber-optic network at a blazing fast 57 gigabits per second, making
it the fastest directly modulated laser in the United States. This VC-
SEL’s data-transfer capability will enhance telemedicine, tele-instruc-
tion, and cloud computing. The VCSEL’s compact size also makes it
very energy efficient—it uses 100 times less energy than electrical
wires. Feng’s research group is working on fine-tuning the VCSEL’s
design so it can operate in the very hot environment of data
centers. He anticipates pushing the VCSEL to about 60 Gbps.
14
CHIP-SCALE HYBRID
MICROSYSTEMS FOR RF COMMUNICATION,
SENSING, AND IMAGING APPLICATIONS
ECE Assistant Professor Songbin Gong has demonstrated a new type of multi-fre-
quency RF filter based on two-port laterally vibrating lithium niobate MEMS resona-
tors. The new filter, which operates on most broadband radio and tv, cellphone, and
Wi-Fi signals, exhibits electromechanical coupling coefficients of 8% at 500 MHz
and 14.6% at 750 MHz, enabling low loss and wideband filtering. This filter may pro-
vide a viable path to implement chip-scale reconfigurable front-ends, which includes
all the components in the receiver that process the signal at the original incoming
radio frequency—a solution desired by the telecommunications industry.
PROVIDING A
BETTER UNDERSTANDING
OF TOPOLOGICAL INSULATORS
ECE Associate Professor MatthewGilbert and Physics faculty colleague NadyaMason
areinvestigating novel materials called topological insulators and how they differ from
traditional semiconducting materials—an important step toward post-CMOS
applications. Topological insulators have insulating interiors but surfaces that allow
for the flow of electrons. They have far different physical qualities than standard
semiconducting materials like silicon.
Their research focuses on conductance oscillations in nanowires made of the topo-
logical insulator Bi2Se3, demonstrating that conduction occurs only on the surface,
which may eliminate the resistivity and related power dissipation due to bulk scat-
tering that occurs in typical device materials such as copper and silicon. In addition,
they found conductance behavior consistent with a “topological mode” that can be
turned on and off with a magnetic field. This unique topological mode is a necessary
component of proposed fault-tolerant quantum computing using these materials, yet
has not previously been demonstrated in nanowires.
BRIGHTNESS EQUALIZED
QUANTUM DOTS
IMPROVE BIOLOGICAL IMAGING
Bioengineering Assistant Professor Andrew Smith has introduced a new class of
light-emitting quantum dots (QDs) with tunable and equalized fluorescence bright-
ness across a broad range of colors. This results in more accurate measurements
of molecules in diseased tissue and improved quantitative imaging capabilities.
“Previously light emission had an unknown correspondence with molecule number,”
explained Smith. “Now it can be precisely tuned and calibrated to accurately count
specific molecules. This will be particularly useful for understanding complex pro-
cesses in neurons and cancer cells to help us unravel disease mechanisms, and for
characterizing cells from diseased tissue of patients.”
According to the researchers, these new materials will be especially important for
imaging in complex tissues and living organisms where there is a major need for
quantitative imaging tools that can provide a consistent and tunable number of pho-
tons per tagged biomolecule. They are also expected to be used for precise color
matching in light-emitting devices and displays, and for photon-on-demand encryp-
tion applications. The same principles should be applicable across a wide range of
semiconducting materials.
MNTL HIGHLIGHTS REPORT 15
It can take 20 years between the creation of a new material in the lab and the fab-
rication of next-generation consumer electronic devices that employ the material.
Thanks to a $1.5 million NSF cyber-infrastructure grant, University of Illinois researchers
are working to speed up the technology transfer process by up to 50 percent.
The Data Infrastructure Building Blocks (DIBBs) program will transform materials-to-
device processes by creating new data infrastructure that would enable researchers to
better collect, curate and correlate scientific data generated during material creation and
device fabrication processes. Illinois researchers are collecting and curating digital data
from selected materials-making / characterization and device-fabrication instruments
at MNTL and the Materials Research Lab on campus. Co-principal investigators include
Materials Science  Engineering Director John Rogers and MNTL Director Brian
Cunningham.
“We have scientists who are producing cutting-edge materials accompanied by enormous
amounts of digital data from high-end instruments, and then writing down results in a note-
book or storing them on local disks. Only the most interesting results are published, while
others get deleted or stored in a drawer for 10 years,” said Computer Science Professor
Klara Narhstedt, the principal investigator of the grant and director of the Coordinated Sci-
ence Laboratory (CSL). “Our goal with the NSF DIBBs grant is to make sure this innovative
research is not only preserved, but that it’s also easy for other scientists, such as circuit and
device builders, to access and build upon their work.”
ACCELERATING
MATERIALS-TO-DEVICES
CYCLE
16
ELECTRONIC DEVICE PERFORMANCE
ENHANCED WITH NEW TRANSISTOR
ENCASING METHOD
While silicon-based transistors have been the foundation of modern electronics for
more than 60 years, carbon nanotube wires show promise in someday replacing
silicon because they can operate ten times as fast and are more flexible. However,
they have an important gap to cross.
ECE Professor Joe Lyding has created a more effective method for closing gaps in
atomically small wires, further opening the doors to a new transistor technology.
“The connection between the nanotubes is highly resistive and results in slowing
the operation of the transistor down,” Lyding said. “When electrons go past that
junction, they dissipate a lot of energy.”The resistance results in heat pooling at the
junctions between the tubes, providing researchers with the perfect opportunity to
“solder” these connections using a material that reacts with heat to deposit metal
across the junctions. Once the current runs through, the deposited metal reduces
the junction resistance, effectively stopping the energy loss.
Lyding’s technique, which is transferable to conventional silicon transistor manufac-
turing equipment, involves applying a thin layer of solution made from compounds
that contain the metal needed to solder the junctions together. “With [our] method,
you just send current through the nanotubes and that heats the junctions. From
there, chemistry occurs inside that layer, and then we’re done. You just have to rinse
it off,” Lyding said. “You don’t need a custom, expensive vacuum chamber.”
FACULTY PLAY KEY ROLE IN ENGINEERING-
OPHTHALMOLOGY INITIATIVE
Several MNTL faculty are involved in a new collaboration between the Department of Ophthalmology and Visual Sci-
ences and the College of Engineering at the University of Illinois at Chicago and the College of Engineering in Urbana.
The Illinois Partnership for Ophthalmology Engineering will bring together vision scientists, clinicians, and engineers to
address important unsolved challenges in vision research. During 2015, MNTL faculty and staff helped organize two
meetings, where clinicians and doctors shared research interests and capabilities in retinal imaging, drug delivery, engi-
neered surfaces for medical implants, minimally invasive diagnostics, tissue engineering, sensors, and neural interfac-
es. As a result, the three key units have requested seed funding from the university administration, which will facilitate
the development of proposals to NSF, NIH, and DoD. In fact, an NSF NRT training grant letter of intent was submitted
to the funding agency in November, and three more major proposals are in development.
MNTL HIGHLIGHTS REPORT 17
Vertical-cavity surface-emitting lasers (VCSELs) are the semiconductor la-
ser workhorse of short-distance optical interconnects in data centers, server
clusters, the Internet infrastructure, and supercomputer applications. How-
ever, as bandwidth demand increases and data centers grow larger, the opti-
cal interconnects will need to achieve high bandwidth over longer fiber-optic
transmission distances, requiring VCSELs with narrow spectral width, suffi-
cient output power, and higher modulation efficiency.
ECE Professor Kent Choquette  has developed multiple research strategies to
address these challenges. First, his research group has developed photonic
crystal VCSELs that exhibit record bandwidth distance performance by in-
corporating a periodic index profile to control the optical modes of the laser.
Second, his group has demonstrated a novel coherently coupled VCSEL array
structure that achieves both requirements by using monolithic feedback en-
hancement to create record high modulation bandwidth with a potential path
toward 100 Gb/s data rate. The photonic crystal VCSEL phased arrays are
also appropriate for other applications, such as electronic beam steering, high
brightness laser sources, and novel optical beam production.
NOVEL VCSEL DESIGNS
TO ENABLE HIGH-PERFORMANCE
OPTICAL TRANSMISSION
OF DIGITAL DATA
LASERS SHED LIGHT
ON INTERACTIONS BETWEEN
BIOLOGICAL MOLECULES
ECE Professor Gary Eden and his students have recently conducted stud-
ies that may provide a new way to observe interactions between biological
molecules. In one experiment, the group obtained laser action from several
biomolecules, demonstrating that their emission spectra and other optical
properties are sensitive to interactions of the lasing molecules with their en-
vironment.
Specifically, the group reported lasing from flavin mononucleotide, which is
a co-enzyme derived from Vitamin B2 (riboflavin). The laser spectrum and
the polarization of the laser radiation emitted by the biomolecules were
shown to be extraordinarily sensitive to the solvent, thus providing a
powerful diag-nostic of molecule-molecule interactions.
In related experiments, the team has shown that optical energy can be ex-
changed between two molecules that are connected by biotin-streptavidin, a
biological complex to which molecules, quantum dots, or nanoparticles can
be attached (“docked”) and separated by a precisely-known distance.
18
MNTL FACULTY AFFILIATES ELECTED
TO NATIONAL ACADEMY OF SCIENCES
Chemistry Professor Catherine Murphy and Materials Science  Engineering Professor
John Rogers were elected to the National Academy of Sciences in 2015. Murphy, who
is associate director of the Frederick Seitz Materials Research Lab (MRL) on campus,
works to develop inorganic nanomaterials for applications in biology and technology.
Her group develops methods to manufacture tiny nanorods made of metals such as
gold, silver and copper, and she investigates their uses for imaging cells, chemical sens-
ing and photothermal therapy. She also studies the environmental impact of nanoparti-
cles and how their properties influence their behavior.
Rogers, who is the director of the Frederick Seitz MRL, is a pioneer of flexible, stretch-
able and transient electronics. He combines soft, stretchable materials with microscale
and nanoscale electronic components to create classes of devices with a wide range of
practical applications from medicine to sensing to solar energy.
MNTL FACULTY RESEARCHER ELECTED TO NAE
ECE Professor J. Gary Eden was elected to the National Academy of Engineering, one
of the highest professional honors an engineer can receive. Eden, who uses lasers to
study how visible and ultraviolet light interact with matter, was honored for development
and commercialization of micro-plasma technologies and excimer lasers. His work has
led to advances in multiple areas of application. For example, excimer lasers, a class of
ultraviolet lasers Eden developed, are used industrially in semiconductor manufactur-
ing and clinically for eye surgeries. His work also has advanced such areas as ultrafast
spectroscopy, which uses laser pulses to study the interactions between atoms and mol-
ecules, and photochemical vapor deposition, which uses lasers to deposit thin films of
semiconductors and other materials on a surface.
FACULTY AWARDS
UNDERSTANDING THE
PHYSICS OF A NEW TYPE
OF PHOTONIC BIOSENSOR
A whispering gallery mode (WGM) resonator is a miniature optical device that re-
circulates light. A biosensor can be made by functionalizing a WGM device and
looking for small changes in its resonance wavelengths due to binding events of
chemicals and biological agents. However, the device’s effectiveness is hampered
by its inability to detect very small concentrations of analytes.
ECE Associate Professor Lynford Goddard and his students have conducted
simulations to explain the fundamental physics of a new type of WGM biosen-
sor that incorporates gold nanoparticles around the circumference of the WGM
waveguide. The nanoparticles form a plasmonic chain ring resonator (PCRR), a
structure that experiences a collective oscillation in the presence of light.
The integrated WGM-PCRR biosensor creates a wavelength shift that is a few or-
ders of magnitude larger than the conventional WGM biosensor because of the
way that light is localized in the PCRR for specific sizes and spacings of nanopar-
ticles. The enhanced sensitivity should enable the detection of a single binding
event of a small protein such as a Thyroglobulin cancer marker protein.
MNTL HIGHLIGHTS REPORT 19
WITH MEMBERSHIP RATES BASED ON COMPANY SIZE AND LEVEL OF INTEREST, THE IAP
WILL ENABLE COMPANIES TO PARTNER WITH FACULTY ON PRE-COMPETITIVE RESEARCH
PROJECTS, PROVIDING A COST-EFFECTIVE APPROACH FOR GAINING INSIGHT INTO COM-
MERCIAL APPLICATIONS OF UNIVERSITY RESEARCH. THE IAP WILL ALSO DEVELOP AN
MNTL GRADUATE STUDENT INDUSTRY-RECRUITING PIPELINE, CONNECTING UNIQUELY
QUALIFIED STUDENTS WITH COMPANY INTERNSHIPS AND FULL-TIME JOBS.
NEW
INDUSTRY
AFFILIATES
PROGRAM
MNTL IS LAUNCHING A NEW INDUSTRY AFFILIATES PROGRAM (IAP)
IN 2016 TO FACILITATE TECHNICAL INTERACTIONS BETWEEN COMPANY
RESEARCHERS AND ILLINOIS FACULTY AND STUDENTS.
20
ILLINOIS LED PIONEERS
RECEIVE MOST PRESTIGIOUS
U.S. ENGINEERING AWARD
ECE Professor Emeritus Nick Holonyak Jr. and two of his former students, George
Craford and Russ Dupuis, were awarded the 2015 Charles Stark Draper Prize for
Engineering. They shared the prize with Isamu Akasaki and Shuji Nakamura for
the invention, development, and commercialization of materials and processes for
light-emitting diodes (LEDs).
LEDs are used by billions of people on a daily basis through applications like computer
monitors, cellphone screens, TVs, traffic lights, home lighting, digital watch displays,
medical applications, and many more. In third-world areas without electricity, LEDs
combined with solar cells are bringing light to people who’d previously relied on fire
and kerosene lamps. The $33 billion LED industry has stimulated global job growth
and dramatically lowered the cost of energy.
In 2012 alone, more than 49 million LEDs were installed in the U.S., with an estimated
annual savings of $675 million in energy costs. In 2013, LEDs saw rapid growth in
general lighting applications, reducing U.S. CO2 emissions by more than 12 million
tons. LEDs also produce the greatest amount of light for the energy used, and have
the longest lifetime of any lighting source available.
MNTL HIGHLIGHTS REPORT 21
Holonyak created the world’s first visible red LED in 1962 while working at General Electric.
Although most researchers at the time were trying to make light-emitters from gallium arse-
nide, which produces infra-red light, Holonyak made his visible LED from an unconventional
mixture of gallium, arsenide, and phosphide (GaAsP)—an alloy that underpins all high-bright-
ness LEDs made today.
While at Monsanto in the early 1970s, Craford invented the first yellow LED and significantly
increased the brightness of red LEDs by adding nitrogen to Holonyak’s GaAsP LED technolo-
gy. Later at Hewlett-Packard, Craford’s team pioneered the development of another new LED
technology (AlInGaP), which led to applications in traffic lights and automobiles. At Philips
Lumileds Lighting Company, Craford oversaw the development of the first high-power white
LEDs, which are widely used today in general lighting, car headlights, and cell phone flash.
A researcher at Rockwell International, Dupuis developed and refined a process called
metal organic chemical vapor deposition (MOCVD) in 1977, which enabled production of
high-brightness LEDs. Dupuis’ MOCVD growth technology is the basis of virtually all produc-
tion of high-brightness LEDs, laser diodes, solar cells, and high-speed optoelectronic (light
controlling) devices. Today, Dupuis is an engineering faculty member at Georgia Tech.
NICK HOLONYAK, JR.
RUSS DUPUIS
GEORGE CRAFORD
22
FACULTY AWARDS
ILESANMI ADESIDA has been selected to receive the 2016 Functional Materials
John Bardeen Award presented by the Minerals, Metals and Materials Society for his
contri-butions to and leadership in the electronic materials field.
JEAN PAUL ALLAIN was selected as a U.S. Fulbright Scholar to Colombia and
awarded the 2015-2016 Fulbright–Colciencias Innovation and Technology Award. He
will conduct research with collaborators from the Universidad de Antioquia in
Medellin aimed at developing functional nanomaterials for biotechnology and
energy applications through multiple short-term visits to this country.
RASHID BASHIR was elected a Fellow of the International Academy of Medical  Bi-
ological Engineering (IAMBE) and the BiomedicalEngineering Society (BMES) in 2015.
Bashir’s research interests include bionanotechnology, biomicroelectromechanical
systems, laboratory on a chip, interfacing biology and engineering from molecular to
tissue scale, and applications of semiconductor fabrication to biomedical engineering.
CAN BAYRAM received the 2014 IEEE Electron Devices Society (EDS) (EDS)
Early Career Award—one of EDS’s highest honors—for his early career technical
achievements. Before joining the Illinois faculty in 2015, Bayram was a post-
doctoral researcher at IBM’s T.J. Watson Research Center where he developed thin-
film LEDs. At MNTL, Bayram is developing a novel, vertical LED architecture for
biological and solid-state lighting applications.
KENT CHOQUETTE was elected president of the IEEE Photonics Society, a role that
he begins in 2016. As president, Choquette aims to improve the way research is
released to the public, making it less expensive and more quickly accessible for
researchers.
ECE PROFESSOR EMERITUS JIM COLEMAN received a 2015 University of
Illinois Electrical  Computer Engineering Distinguished Alumni award for research
accomplishments in the field of compound semiconductor crystal growth, teaching,
and service. A faculty member for 31 years, Coleman retired in 2013. He is
currently an electrical engineering faculty member at the University of Texas at
Dallas. In 2014, Coleman was elected a Fellow of the National Academy of Inventors.
BRIAN CUNNINGHAM was invested as Donald Biggar Willett Professor of Engineer-
ing, recognizing his intellectual leadership and outstanding research. Cunningham is
internationally recognized for his contributions to the advancement of photonic crys-
tal-based biosensing. He was also selected as a 2014 Fellow of the Optical Society of
America for the invention, development, and commercialization of biosensors and de-
tection instrumentation based on nanostructured surfaces and for the development
of biological applications.
JOHN DALLESASSE was elected a 2015 IEEE Fellow for contributions to the
oxidation process of III-V semiconductors used in photonic device manufacturing.
GARY EDEN was inducted into the National Academy of Inventors, a distinction
accorded to academic inventors. Eden has more than 70 patents, including several
that he’s licensed to two start-up companies he co-founded—Eden Park Illumination
and EP Purification.
ADESIDA
ALLAIN
BASHIR
DALLESASSE
MNTL HIGHLIGHTS REPORT 23
MATTHEW GILBERT received a 2014 NSF CAREER award—one of the agency’s most
prestigious awards for junior faculty. Gilbert will use the research funding to determine
the potential of topological materials to make information processing systems by un-
derstanding the light-matter interactions and high-frequency responses in topological
nanosystems.
SONGBIN GONG received a prestigious 2014 DARPA Young Faculty award for a
concept that aims to develop an integrated circuit design that replaces conventional
CMOS transistor technology. Specifically, he aims to develop a system that dissipates
very little energy as waste heat, and which can recover and reuse the most of the heat
as additional energy.
NICK HOLONYAK JR. received the University of Illinois Alumni Achievement Award
for pioneering and world-renowned achievements in optoelectronics. The inventor of
the first practical semiconductor LED and laser, Holonyak earned three electrical engi-
neering degrees from Illinois (BS 1950, MS 1951, PhD 1954), conducting his doctoral
research under two-time Nobel laureate John Bardeen.
XIULING LI, JIANJUN CHENG, AND JOHN ROGERS were selected as the first class
of College of Engineering Faculty Entrepreneurial Fellows to develop technology and
test its commercial applications. Li also received a Donald Biggar Willett Faculty Schol-
ar award, which recognizes mid-career College of Engineering faculty who excel in
their contributions to the university. An Illinois faculty member since 2007, Li’s research
is focused on nanostructured semiconductor materials and devices.
LOGAN LIU was elected a 2015 Fellow of the American Institute for Medical and
Biological Engineering (AIMBE) for contributions to biomolecular sensing and
imaging nanotechnology, enabling new medical and environmental health research
and applications.
WILLIAM KING was elected a Fellow of the American Physical Society in 2014 for
distinguished contributions to the applied physics of nanometer-scale thermal and
mechanical property measurements, and the translation of this work to numerous ap-
plications in materials science and nanotechnology.
JOE LYDING received the 2014 Foresight Institute Feynman Prize for his
pioneering work in the development of scanning tunneling microscope (STM)
technology. Lyding is also known for developing hydrogen depassivation li-
thography, a generic patterning technique using a resist that allows pattern transfer
to enable many different types of structures and functionalization of surfaces, all while
maintaining atomic resolution and precision. Lyding was also elected a 2014 Fellow of
the American Association for the Advancement of Science for distinguished contribu-
tions in nanotechnology and discovery of the giant deuterium isotope effect.
GABRIEL POPESCU was selected as a 2015 Optical Society/OSA Fellow for novel
quantitative nanoscale phase imaging of cells and tissues. Popescu’s group develops
novel optical methods based on light scattering, interferometry, and microscopy, to
image cells and tissues quantitatively and with nanoscale sensitivity.GONG
LI
CHENG
GILBERT
24
Rashid Bashir, Massachusetts General Hospital, A Microfluidic
Biochip to Perform Complete Blood Cell Count at Point of Care,
April 2015—April 2016, $145,000.
Kent Choquette, NSF, Optical Phased Laser Arrays and Their
Functionality, September 2015—August 2018, $350,000.
Brian Cunningham, Brendan Harley, and Mary Kraft, National
Institute of Biomedical Imaging  Bioengineering, Label Free
Interrogation of Heterogeneties in HSC Fate Decision Signatures,
April 2015—January 2017, $193,000.
Brian Cunningham, NSF, Multiresonator Photonic Crystal En-
hanced Fluorescence and SERS, May 2015—April 2018, $600,000.
A collaboration with Washington University in St. Louis.
Brian Cunningham, Rashid Bashir, Steve Lumetta, and Ian
Brooks, NSF, Pathtracker: A smartphone-based system for mo-
bile infectious disease detection and epidemiology, September
2015, $1,000,000.
Brian Cunningham, NIH, Rapid Disease Diagnostics using Pho-
tonic Crystal Enhanced Antigen Biomarker,
June 2014—May 2018, $448,000.
Brian Cunningham, NSF, Multiresonator Photonic Crystal En-
hanced Fluorescence and SERS, May 2015—April 2018, $600,000.
A collaboration with Washington University in St. Louis.
John Dallesasse  Brian Cunningham, NSF, EAGER: Lab in a
Smartphone Sept, Sept. 2014—Aug. 2016, $300,000.
John Dallesasse, NSF, Transistor Injected Quantum Cascade La-
ser: An Improved Coherent Mid-IR Source, Aug. 2014—July 2017,
$400,000.
Gary Eden, II-VI Foundation, Microplasma Array-Pumped Wave-
guide Lasers, July 2014—June 2015, $95,000.
Gary Eden, AFOSR, Synthesis and Control of Coherent Structures
in Low-Temperature Plasmas for Reconfigurable Electromagnetic
Devices, $412,000.
Gary Eden, AFOSR, Plasma-chemical Synthesis and Probing of
Plasma-Surface Interactions in Microcavity Plasmas, $301,000.
Gary Eden, AFOSR, Laser and Gas Chromatography Systems for
Studies of Excited Molecular Complexes and Phased Arrays of
Microlasers, dates, $918,000.
Milton Feng, Army Research Office, Bit Error Rate Test Equip-
ment for High-Speed Vertical Cavity Transistor Laser-Microcavity
VCSEL and Photoreceiver, Sept. 2014—Aug. 2015, $200,000.
Milton Feng, AFOSR, Complex Material and Devices RTD GHz –
THz Electronics, March 2015—February 2018, $657,000.
Matthew Gilbert, NSF CAREER award, Global Quantum Modeling
of Topological Nanosystems for Energy-Efficient Devices, June
2014—May 2019, $400,000.
Matthew Gilbert, ONR, High-Frequency Topological Nanosys-
tems, $314,000.
Lynford Goddard, NSF, Spectrally and Temporally Engineered
Processing Using PhotoElectroChemistry (STEP-PEC), June
2015—May 2018, $370,000.
Songbin Gong, DARPA, Resonance Enhanced Authentication
Communication and Charging Reach, Jan. 2015—July 2016,
$525,000.
Songbin Gong, DARPA, Parametrically Excited Resonant Com-
puting Systems (PERCS), $250,000.
Xiuling Li, NSF, Programmable Metal-Assisted Chemical Etching
for Three Dimensional Functional Metamaterials, May 2015—
April 2018, $180,000. A collaborative project with the University
of Texas-Arlington.
Xiuling Li and Lynford Goddard, NSF, Research Experience for
Teachers, May 2014—April 2017, $500,000.
Catherine Murphy, NSF, Summer Nanotechnology Research
Experience for Undergraduates, March 2014—March 2017,
$375,000.
Klara Nahrstedt and Brian Cunningham, NSF, Timely and Trust-
ed Curator and Coordinator Data Building Blocks, October 2014
– September 2017, $1,500,000.
Dan Wasserman, NSF, EAGER: Novel Approaches for Generating
and Controlling Light in the Optical No Man’s Land of the Far IR,
June 2014—Nov. 2015, $112,000.
RESEARCH FUNDING
MNTL HIGHLIGHTS REPORT 25
FUNDAMNTL
26
OUR RESEARCHERS ARE PART OF A HISTORIC SEMICONDUCTOR LEGACY THAT
BEGAN WITH ENGINEERING GIANTS JOHN BARDEEN, NICK HOLONYAK JR., AND
CHIH-TANG SAH, WHOSE GROUNDBREAKING WORK HELPED LAUNCH AND AD-
VANCE TODAY’S INFORMATION TECHNOLOGY REVOLUTION. THEY AND THEIR
ELECTRICAL ENGINEERING COLLEAGUES FROM THE STORIED ELECTRICAL ENGI-
NEERING RESEARCH LAB—THE PRECURSOR TO THE MICRO  NANOTECHNOLOGY
LAB—SET A STANDARD OF EXCELLENCE THAT TODAY’S FACULTY STRIVE TO
MEET. WE PROUDLY INTRODUCE THREE NEW FACULTY.
WENJUAN ZHU is identifying the unique electronic and photonic properties of 2D mate-
rials and fabricating nanoscale devices. She and her students are taking advantage of the
high carrier mobility of metallic 2D materials like graphene to build plasmonic devices
and solar cells with transparent electrodes. For semiconducting 2D materials, such as
MoS2 and WSe2, they are making sub-10nm transistors for computing. Zhu and her
group are also combining 2D materials with traditional semiconducting materials and
exploring their applications in computation, communications, energy, and medical areas.
Before joining the Illinois faculty in August 2014, Zhu spent 11 years at IBM, where she
made key contributions to 65 nm and 32 nm CMOS technology and explored the funda-
mental properties of 2D materials like graphene and layered transition metal dichalco-
genides (LTMD) and made devices and circuits.
CAN BAYRAM is developing efficient, high-power  compact ultra-violet AlGaInN LEDs to
detect and eliminate biological agents like anthrax, plague, and ebola, and may be used to
enable clean drinking water in underdeveloped areas. He and his students are also creat-
ing light sources that are tunable from UV to visible (200-750nm) wavelengths for general
lighting, visualization, and biological applications. In the electronics area, he and his group
are creating GaN-based transistors for next generation power transistors.
Before joining the Illinois faculty in August 2014, Bayram spent three years at IBM, where
he was part of the team that developed a record-breaking specific power solar cell, which
was featured on the cover of Advanced Energy Materials in May 2013. Bayram also created
a technique to grow GaN material that is compatible with conventional CMOS fabrication
technology.
AREND VAN DER ZANDE, who joined the Illinois faculty in August 2015, is investigating
the properties of 2-dimensional (2D) materials and building novel devices from them.
While his group has grown isolated layers of molybdenum disulfide (MoS2), their goal is
to grow large-scale uniform MoS2 and other 2D materials. They’ve begun building a
metal-organic chemical vapor deposition (MOCVD) system at MNTL that can produce
uniform 2D materials on four-inch wafers.
Van der Zande earned his doctorate in physics at Cornell University. He spent four years
as a post-doctoral researcher at Columbia University, where he isolated and engineered
the first graphene mechanical membrane. Because of its strength and flexibility, he and
colleagues were able to build nanomechanical systems like electrostatically tunable drum-
head resonators and impermeable gas membranes.
OUR
NEWEST
FACULTY
MNTL HIGHLIGHTS REPORT 27
TRAINING THE
NEXT GENERATION
OF SEMICONDUCTOR
 BIOMEDICAL
LEADERS
THROUGHOUT ITS 25-YEAR HISTORY, MNTL HAS TRAINED AND EDU-
CATED MORE THAN 1,100 STUDENTS SO THEY ARE PREPARED FOR CA-
REERS IN INDUSTRY, ACADEMIA, AND GOVERNMENT IN THE AREAS OF
PHOTONICS, MICROELECTRONICS, BIOTECHNOLOGY, AND NANOTECH-
NOLOGY. WE PROUDLY INTRODUCE YOU TO SEVERAL OF OUR STU-
DENTS WHO REPRESENT THE EXCEPTIONAL CALIBER OF OUR YOUNG
RESEARCHERS.
A member of Professor Xiuling Li’s group, ECE doctoral student PAUL FROETER is
growing III-V semiconductors and insulators via Metal Organic Chemical Vapor Phase
Deposition (MOCVD) and Plasma Enhanced Chemical Vapor Deposition, respectively, to
make Self-rolled-up Membranes (S-RuM). These membranes can self-assemble into 3D
structures through controlled strain relaxation.
Froeter’s research opened routes to realizing miniaturized RF components, biocompati-
ble interfaces, and high-quality optical components. He has integrated a silicon nitride
membrane into his S-RuMs (SiNx S-RuMs) and developed the first fully insulating, opti-
cally transparent, and biocompatible rolled-up platform available to Li’s group. In collab-
oration with a University of Wisconsin colleague, Froeter later discovered that their SiNx
S-RuMs exhibited exceptional neuronal outgrowth guidance in cortical neuron cultures.
Currently, Froeter is collaborating with Illinois Professors Martha Gillette and Rashid
Bashir, as well as Wisconsin Professor Justin Williams, to develop cell-triggered, S-RuMs,
in which the cellular traction force exerted on the membrane overwhelms stiction hold-
ing it to the substrate. Their goal is to dynamically self-assemble large networks of cells
while being able to fully functionalize the inner wall of the micro tube.
A finalist for the $20,000 Illinois Innovation Prize from the College of Engineering Tech-
nology Entrepreneur Center (TEC) in 2014, Froeter is most proud of introducing a biology
component into his research group, which had previously focused on electrical and opti-
cal applications. “I would not be where I am without the MNTL facilities and the faculty
and staff that keeps it running,” said Froeter. “I have been able to accomplish the work I
set out, make friends with the staff, and explore collaborations I did not see possible.”
28
RUOCHEN LU, a second-year electrical engineering graduate student in Songbin
Gong’s group, is designing novel RF transformers based on two-port resonators.
Some of the biggest challenges he faces relate to the parasitic capacitance inherent
to electrical circuits. This unavoidable stray capacitance exists in all circuits due to the
close proximity of components that can then cause interference and unreliable oper-
ation.
In the summer of 2015, Lu earned a best poster finalist honor at the 18th Internation-
al Conference on Solid-State Sensors, Actuators and Microsystems (Transducers
2015) for his work on a novel numerical approach to model the thermal nonlinearity in
piezoelectric micro-resonators, which are commonly found in the transceivers of
modern wireless systems. His approach uses an approximation-free algorithm that
more accurately accounts for the complex non-linear dynamics found in MEMS reso-
nators. Lu also won the Electrical  Computer Department’s Lam Outstanding Gradu-
ate Student Research Award.
A graduate of Tsinghua University in China, Lu describes his doctoral experience at
MNTL as amazing because of the great facilities and research collaborations. “The
faculty and local research groups are very close,” Lu said. “We often discuss different
research topics and learn a lot from each other.”
	
Mechanical Science  Engineering doctoral student RITU RAMAN, who works with
Professors Rashid Bashir and Taher Saif, has built a high-resolution 3D printer for
patterning cells and biomaterials with resolutions on the order of single cells—less
than 5 micron patterning. Working with other members of her group, she has also
engineered BioBots, or 3D printed skeletons and muscle actuators, that have been
induced to contract by both electrical and optical stimulation.
Interested in commercializing this technology, Raman won the 2015 Illinois Innova-
tion Prize, a campus-wide student entrepreneur competition. She is using the $15,000
prize to manufacture the biological building blocks, or BioBlocks, required for the Bio-
Bots. The BioBlocks can harness the innate abilities of biological materials to sense,
process, and respond to a variety of dynamic environmental signals in real time.
Raman’s achievements extend beyond the laboratory. In the Fall 2015 semester, she
created and taught a new Bioengineering class (BIOE306), where students learn how
to design and build their own BioBots. “I’m really proud of this because all the cool
stuff I’m learning doesn’t mean anything if I’m the only one that can do it,” she said. “I
want to introduce those materials into every engineer’s toolbox.”
According to Raman, some of her success can be attributed to the collaborative envi-
ronment at Illinois. “You have access to everything and you are always going to find
someone who is an expert in what you’re doing. I write better and more in-depth pa-
pers because I get so much help from other people.”
TRAINING THE NEXT GENERATION OF
SEMICONDUCTOR  BIOMEDICAL LEADERS
MNTL HIGHLIGHTS REPORT 29
ECE doctoral student GLORIA SEE came to the University of Illinois after working in
testing at BAE Systems and the Air Force Research Labs. As a member of Professor
Brian Cunningham’s group, See is conducting research using photonic crystals to en-
hance quantum dot (QD) performance. By developing new methods to control polar-
ization, intensity, and angular output, QDs can be used for improved performance in
large-area displays.
See recently published research results where she successfully embedded QDs in
novel polymer materials that retain strong quantum efficiency, and she used electro-
hydrodynamic jet (e-jet) printing technology to precisely print the QD-embedded poly-
mers onto photonic crystal structures. This research may enable the fabrication of
brighter, cheaper, and more efficient displays.
Currently, See is being funded by Dow Chemical to build upon her novel device struc-
ture and investigate how the integration of photonic crystals into a MEMS device
can produce different methods of controlling QD-output. “I’m really proud of the last
paper that I published, because I don’t think it was very obvious that that structure
would be as effective as we made it,” said See, who graduated in December 2015.
“The [Illinois] faculty and staff are amazing. There hasn’t been anybody who I’ve asked
for help that has not gone way out of their way to be very helpful, or to connect
me with someone who would be better to help me out. That kind of community is a
great thing to have.”
CURTIS WANG’S interest in research began several years ago when he joined Profes-
sor Milton Feng’s group as an undergraduate research assistant, exploring microwave
integrated circuits. As a graduate student, Wang’s research has focused on the tran-
sistor laser, a high-speed, 3-terminal device that his advisor co-invented with Profes-
sor Nick Holonyak Jr. in 2004.
The transistor laser functions like a normal transistor, except that one of its outputs is
infrared light rather than electricity, which could enable next-generation military and
consumer optoelectronic applications. More recently, Wang used MNTL’s state-of-the-
art high-speed measurement equipment to characterize his colleagues’ Vertical Cavi-
ty Surface Emitting Laser (VCSEL), which achieved 52-gigabit/second error-free
transmission—a new record.
In the spring of 2015, Wang received a prestigious National Defense Science and En-
gineering Graduate (NDSEG) fellowship from the Department of Defense, which are
awarded to only 200 promising graduate students nationwide each year. According to
Wang, this fellowship allows him to not only pursue the device physics, layout, design,
and fabrication of high-speed semiconductor lasers, but also the application of ul-
tra-fast data transfer and real-time imaging. “Especially, I am passionate about the
new frontiers that the transistor laser can bring forth in the thriving Internet-of-every-
thing age.”
30
MNTL
KNOWLEDGE
 EXPERTISE
IMPACTS
THE WORLD
MNTL TAKES LEADERSHIP
ROLE IN FOOD SAFETY
Aware of MNTL’s expertise in sensing technology, the National Science Foundation invited
MNTL faculty and staff to lead an international workshop on food safety and expanding the
world’s food supply, which took place in Arlington, VA, in October 2014. Seventy industry, gov-
ernment, and academic experts in the field of global food safety identified the most pressing
gaps in the food safety infrastructure. This workshop has led to research investments by NSF
that impact fundamental new approaches in sensing, take advantage of the emerging capabil-
ities of “big data” networks for managing traceability within global supply chains, and incorpo-
rate new capabilities into food processing equipment and packaging. In addition to co-hosting
the event, MNTL Director Cunningham presented his group’s research progress on developing
microfluidic technologies that can be incorporated into inexpensive plastic cartridges that in-
terface with a smartphone or tablet to perform common quality control tests in the field.
MNTL also co-hosted the October 2014 invitation-only Nanosensor Networks and Exabyte
Analysis Farm to Fork workshop in Urbana, where thought leaders from industry, academia,
and government discussed the development of new technologies in order to feed the world’s 9
billion people over the next 40 years. Participants addressed how to develop and apply a new
class of sensing modalities, which can provide detailed and distributed information about
chemical components, protein makeup, pathogen presence, plant metabolism, and pest inva-
sion, combined with environmental monitoring, that has not been available previously. Already
advancements in nanoscale sensors are achieving unprecedented levels of sensitivity and
specificity. Nanoplasmonics, silicon-based sensors, nanopores, flexible/printable optoelectron-
ics, biodegradable photonic resonators, and protein‐based nanoparticle image contrast agents
all offer the potential for robustness and cost that may enable researchers to produce broadly
distributed arrays of miniature sensors and mobile detection instruments to increase farm ef-
ficiency and food safety.
MNTL HIGHLIGHTS REPORT 31
KNOWLEDGE
TRANSFER
AT ALL LEVELS
The education, training, and outreach efforts at MNTL are conducted by the Center for Nanoscale Sci-
ence  Technology, which resides in MNTL. CNST Executive Director Irfan Ahmad, an Agricultural 
Biological Engineering Professor, and his staff manage educational programs that impact K-12, under-
graduate, and graduate students, as well as young researchers from academia, industry, and govern-
ment labs. For example, CNST hosts annual nanotechnology workshops and symposia, highlighting
the outstanding and innovative research being conducted at MNTL and other laboratories on campus.
These forums attract students, postdocs, faculty, university administrators, members of the public, and
researchers from industry, government labs, and federal agencies. The following events are also man-
aged by CNST.
32
NANOBIOTECHNOLOGY SUMMER INSTITUTE
More than 50 students, post-docs, and junior faculty from around the world participated in
the 2014 + 2015 University of Illinois BioNanotechnology Summer Institute, learning about
cancer nanotechnology, cell mechanics, molecular biology, micro  nano fabrication tech-
niques, and microfluidics. Since its inception in 2009, the Institute has trained more than
300 participants, preparing the next-generation of researchers who can apply engineering
approaches to cancer and biomedical research.
BRADLEY ELLIS
SENIOR, UNIVERSITY OF NOTRE DAME
Why did you choose to attend the Summer Institute?
 I wanted to get a jump-start on graduate school.
What’s the most valuable thing you’ve learned so far?
 Probably how different disciplines work together, just this week we
learned how materials science concepts work together with electri-
cal engineering processes for applications in medicine.
What are your plans after the Summer Institute?
 I want to continue on into academia, get into exciting research, and
eventually teach as a professor.
HUMA RASHEED
RESEARCH SCHOLAR, AMPLITECH, INC.
Why did you choose to attend the Summer Institute?
 The summer institute offers instruction on applying advanced technolo-
gy into biology and other sciences, like nanomedicine.
What’s the most valuable thing you’ve learned so far?
 I have a pharmacology background and am most interested in micro
cell biology and encapsulated drug delivery. There have been a series of
lectures on the applications of nanoparticles in curing cancer that I have
found very valuable.
What are your plans after the summer institute?
 I want to take some of the advanced techniques I have learned here,
back to my native field of targeted drug therapy and pharmacology.
MNTL HIGHLIGHTS REPORT 33
STEM TEACHERS ENHANCE THEIR INSTRUCTION
THROUGH RESEARCH AT MNTL
During the last two summers, 16 middle school, high school, and community
college STEM faculty from across the nation conducted cutting-edge research
in nanotechnology through the NSF-funded nano@Illinois Research Experience
for Teachers (RET) program at MNTL. The goal of RET is to provide the teachers
with hands-on experience and nanotechnology knowledge, which they can use to
enhance their classroom instruction and even develop a curriculum module.
“I teach in a very small school with limited resources, so one of the best things
that I can do is have experiences and then bring them back to the classroom,” said
Villa Grove, IL, biology teacher Aubrey Wachtel, who worked in Professor Andrew
Smith’s lab on the quantitative analysis of cellular uptake of quantum dots. Added
fellow 2014 participant Terry Koker: ““My work in Dr. Goddard’s lab on photoelec-
trochemical etching of silicon was one of the most rewarding educational and
scientific experiences of my career.”
In addition to Smith and Goddard, faculty participants included Aleksei
Aksimentiev (Physics), Can Bayram (ECE), Paul Braun (MatSci), Songbin Gong
(ECE), Princess Imoukhuede (BioE), Xiuling Li (ECE), Nadya Mason (Physics),
Umberto Ravaioli (ECE), Steve Sligar (BioChem), and Dan Wasserman (ECE).
UNDERGRADUATES GAIN VALUABLE
RESEARCH EXPERIENCE
Twenty-six undergraduate students from across the nation conducted 10-week re-
search projects through CNST’s NSF-funded Research Experience for Undergrad-
uates program and the NSF-funded Science and Technology Center for Emergent
Behaviors of Integrated Cellular Systems (EBICS) at MNTL. In addition to introduc-
ing the students to research, the REU program trains them in critical elements of
leadership, ethics, teamwork, mentoring, and outreach, and it improves their ability
to communicate their research results to professional and lay audiences.
“This REU gave me the opportunity to develop professional skills, improve my re-
search writing, and synthesize devices all in one summer,” noted 2014 student
Mohammad Jaber.
The following faculty served as mentors to the undergraduate students: Aleksei
Aksimentiev (Physics), Ryan Bailey (Chem), Rashid Bashir (BioE), Rohit Bharga-
va (BioE), Paul Braun (MatSci), Brian Cunningham (ECE), Lynford Goddard (ECE),
Brendan Harley (Chem  Biomolecular Engr), Princess Imoukhuede (BioE), Hyun-
joon Kong (Chem  Biomolecular Engr), Mary Kraft (Chemistry), Xiuling Li (ECE), Yi
Lu (Chemistry), Catherine Murphy (Chemistry), Sungwoo Nam (MechSci  Engr),
Gabriel Popescu (ECE), Taher Saif (MechSci  Engr), Sameh Tawfick (MechSci 
Engr), and Dan Wasserman (ECE).
ILLINOIS MICRO + NANOTECHNOLOGY LAB
MICRO + NANOTECHNOLOGY LAB
UNIVERSITY OF ILLINOIS
208 N. WRIGHT STREET
URBANA, IL 61801
PH 217.333.3097
MNTL.ILLINOIS.EDU
MNTL.ILLINOIS.EDU
ELEMNTL

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Univ of IL Micro + Nanotechnology Lab highlights

  • 1. MNTL HIGHLIGHTS REPORT 1 HIGHLIGHTS REPORT ENGINEERING AT ILLINOIS
  • 2. 2
  • 3. MNTL HIGHLIGHTS REPORT 3 FOUNDED MORE THAN 25 YEARS AGO AS A III-V COMPOUND SEMICONDUCTOR MATERIALS AND DEVICES RESEARCH AND INNOVATION FACILITY, THE MICRO + NANOTECHNOLOGY LAB HAS ENABLED UNIVERSITY OF ILLINOIS RESEARCHERS TO ADVANCE TECHNOLOGY IN HIGH-SPEED DATA COMMUNICATIONS, HIGH-EFFICIENCY LIGHTING, SOLAR POWER, FLEXIBLE ELECTRONICS, AND NOVEL MICROELECTRONICS/PHOTONICS CONCEPTS FOR NEXT-GENERATION COMPUTING ARCHITECTURES. WITH THE ADDITION OF THE BIO-NANOTECHNOLOGY LAB COMPLEX IN 2007, OUR RESEARCHERS ARE ALSO MAKING ADVANCES IN BIOMEDICAL IMAGING, BIOMEDICAL DIAGNOSTICS, AND ENVIRONMENTAL MONITORING, WHILE DEVELOPING NEW TOOLS FOR LIFE SCIENCE RESEARCH. THROUGHOUT THE YEARS, WE HAVE BEEN ONE OF THE PREMIER BIO- AND NANOTECHNOLOGY TRAINING SITES FOR YOUNG SCIENTISTS AND ENGINEERS, PREPARING THEM TO TACKLE NEW RESEARCH PROBLEMS AND CREATE NOVEL PRODUCTS AND PROCESSES. THIS REPORT SUMMARIZES THE BREADTH AND DEPTH OF THE RESEARCH AND TRAINING PROGRAMS AT MNTL, WHICH IS ONE OF THE MOST IMPACTFUL UNIVERSITY-BASED RESEARCH LABORATORIES IN THE WORLD.
  • 4. MNTL HIGHLIGHTS REPORT 2014-2015 PROJECT MANAGER Laura Schmitt CONTRIBUTING WRITERS Liz Ahlberg, Meg Dickinson, Rick Kubetz, Jonathan Lin, Laura Schmitt DESIGN Winter Agency IMAGES Brian Stauffer, Greg Pluta, Thompson • McClellan, Jonathan Lin, Janet Sinn-Hanlon, Design Group@VetMed (pg 12) MNTL ADMINISTRATION DIRECTOR Brian T. Cunningham INDUSTRY AFFILIATES PROGRAM MANAGING DIRECTOR Greg Pluta FACILITIES MANAGER Ken Tarman BUSINESS OFFICE MANAGER Nandini Topudurti BIONANOTECHNOLOGY LAB MANAGER Angana Senpan ASSISTANT DIRECTOR OF COMMUNICATIONS Laura Schmitt CENTER ADMINISTRATION Center for Nanoscale Science & Technology Executive Director and Research Faculty Agricultural & Biological Engineering IRFAN AHMAD Center for Nanoscale Science & Technology and NSF Science & Technology Center: Emergent Behavior of Integrated Cellular Systems Program Coordinator CARRIE KOUADIO Center for Innovative Instrumentation Technology (NSF I/UCRC) Managing Director GREG PLUTA RESEARCH BRIEFS FACULTY AWARDS INDUSTRY AFFILIATES PROGRAM RESEARCH FUNDING STUDENT RESEARCH MNTL IMPACT 19 18 8 24 27 30
  • 5. MNTL HIGHLIGHTS REPORT 5 The technologies being developed by the faculty and students who conduct their research in the Micro + Nanotechnology Lab (MNTL) have been essential to many important developments in our society—from high-speed optoelectronic devices that enable the Internet, to materials and structures that form the foun- dations of high-speed computation, to photonic nanostructures used in biosensors for medical diagnos- tics, to microelectromechanical transducers that form the basis for radio frequency filters. In nearly every case, these technologies required a cycle of incubation, iteration, and demonstration as we moved from understanding their fundamental properties to realizing their performance potential. While we publicize important breakthroughs in this 2014-15 MNTL highlights report, we know that each break- through actually took a great deal of effort over many months to convert a novel idea into a demonstrated reality. It takes even longer to turn these innovations into products. We engage with our faculty, students, alumni, and industry partners for the entire process. In fact, we are launching a new Industry Affiliates Program in 2016 to better facilitate our technical interactions, communication, and funding of our research with a broad range of companies. AS YOU READ OUR MNTL HIGHLIGHTS REPORT, YOU WILL NOTICE THAT OUR RESEARCH IS INCREASINGLY INTERDISCIPLINARY. FOR EXAMPLE, >> We recently established an Illinois Partnership for Vision Engineering that brings together MNTL scientists with clinical ophthalmologists and engineers at the University of Illinois in Chicago. This collaboration aims to solve grand challenges in the implementation of targeted nanoparticle drug delivery, sensor-integration with artificial corneas, and electronic-biological interfaces. While some of our faculty are working with colleagues who specialize in the circuits and systems that form the fabric of next-generation low power computation systems, others are working with specialists in infectious disease or cancer to develop point-of-care diagnostic tests. The possibilities are endless, as materials and structures we can create on the nanometer scale are the enablers of systems that manipulate photons, elec- trons, biomolecules, and cells. Some of our researchers are investigating a new semiconductor fabrication paradigm, where pulses of light catalyze electrochemical reactions that dope, etch, and metallize circuit patterns onto a semiconductor wafer with high resolution—making it possible to prototype new devices more quickly and cheaply. One of our core missions is to educate, inspire, and train students to become the next generation of innovative leaders in these multidisciplinary fields. You will see in this report that MNTL’s outreach is enormous. During 2014 and 2015, with leadership provided by the Center for Nanoscale Science and Technology (CNST), we welcomed more than 50 researchers to our BioNanotechnology Summer Institute, 16 middle high school and community college STEM faculty to our Research Experience for Teachers program, and 26 students to our Research Expe- rience for Undergraduates program. 2016 promises to be another outstanding year at MNTL. We were fortunate to bring in several new faculty—Wen- juan Zhu, Can Bayram, and Arend van der Zande—who are establishing their research groups to create innova- tions in flexible optoelectronics, novel 2-dimensional materials devices, and novel photonic device architectures. Please read on to learn more about how we are turning nano-scale discoveries into world-changing technologies. Brian T. Cunningham MNTL Director
  • 6. 6 A JEWEL IN THE UNIVERSITY OF ILLINOIS COLLEGE OF ENGINEERING CROWN, THE MICRO + NANOTECHNOLOGY LAB PROVIDES 300 STUDENTS AND DOZENS OF FACULTY RESEARCHERS WITH ALL THE ADVANCED TOOLS THEY NEED FOR CONDUCTING PHOTONICS, MICROELECTRONICS, BIOTECHNOLOGY, AND NANOTECHNOLOGY RESEARCH. MNTL IS ONE OF THE ONLY UNIVERSITY-BASED RESEARCH FACILITIES IN THE COUNTRY TO HAVE STATE-OF-THE-ART CLEANROOMS AND A BIOSAFETY LEVEL-2 COMPLEX ALL UNDER ONE ROOF, ENABLING OUR RESEARCHERS TO CONDUCT GROUNDBREAKING WORK AT THE INTERSECTION OF ENGINEERING AND BIOLOGY. MNTL RESEARCHERS DESIGN, BUILD, AND TEST INNOVATIVE NANOSCALE TECHNOLOGIES, SPANNING SIZES FROM ATOMS TO ENTIRE SYSTEMS. E
  • 7. MNTL HIGHLIGHTS REPORT 7 EXPERIMNTL
  • 8. 8 SELF-ROLLED-UP MEMBRANE HAS MEDICAL AND ELECTRONIC APPLICATIONS ECE Professors John Dallesasse and Milton Feng have created a transistor-injected quantum cascade laser, which is a hybrid of an heterojunction bipolar transistor (HBT) and quantum cascade laser (QCL). This 3-terminal device emits light between the mid-infra- red and terahertz frequencies, can be made on many substrates, and can be manufactured easily in a commercial GaAs foundry. “We think the advantages of our device are compelling because the [TI-QCL] will allow not only a lot of conventional QCL uses like gas detection, chemical sensing, and process monitoring, but it will also enable some interesting communications applications for free- space links,” said Dallesasse. “Applications in the THz region might also open up because of our device.” ECE Professor Xiuling Li and Cell Developmental Biology Professor Martha Gillette led a team of researchers who created a neuron cell culturing platform that consists of arrays of ordered microtubes (2.7- 4.4μm in diameter) formed by strain-induced self-rolled-up nanomembrane (s-RUM) technology using ultrathin (40 nm) silicon nitride (SiNx) film on transparent substrates. This patented tech- nique helps neuron cells grow 20x faster than conventional methods. Someday these microtubes may be implanted like stents to promote neuron regrowth at injury sites or to treat disease. Several years ago, Li’s group used the s-RUM technique to make an inductor, a key integrated circuit element, 100x smaller without sacrificing performance. Pro- cessed while flat, the inductors then roll themselves up on their own, taking up much less space on a chip. NOVEL PATENTED LASER HAS ENVIRONMENTAL, HEALTH, AND MANUFACTURING APPLICATIONS
  • 9. MNTL HIGHLIGHTS REPORT 9 NEW SYNTHETIC TUMOR ENVIRONMENTS MAKE CANCER RESEARCH MORE REALISTIC Materials Science and Engineering Assistant Professor Kris Kilian and Illinois colleagues have developed a new technique to create a cell habitat of squishy fluids, called hydrogels, which can realistically and quickly recreate microenvi- ronments found across biology. To illustrate the potential of their technique, the Illinois team mixed breast cancer cells and cells called macrophages that signal cancer cells to spread and grow into a tumor. They were able to observe how differently cells act in the three-dimensional, gel-like environment, which is much more like body tissues than current options—a flat, hard plastic plate or expensive mouse avatars that are created by injecting human tumor cells into mice. “This is really the first time that it’s been demonstrated that you can use a rapid methodology like this to spatially define cancer cells and macrophages,” said Kilian, noting the importance of the architecture to answering fundamental biological questions. What sets the team’s model apart from mouse avatars and hard plastic plates is that it can replicate much more accurately the sizes and shapes of the microen- vironment within the patient’s problem area. The materials that pharmaceutical companies use to test drugs’ effects on cells don’t allow for three-dimensional vascularization, a network of capillaries that carry drugs and other materials throughout the body. The team’s model does, creating networks that go from straight, to snakelike, to any shape.
  • 10. 10 WHEN THE NEW CARLE ILLINOIS COLLEGE OF MEDICINE WELCOMES ITS FIRST CLASS OF 25 STUDENTS IN THE FALL OF 2018, IT WILL BE THE FIRST SUCH COL- LEGE IN THE COUNTRY TO BE SPECIFICALLY DESIGNED AT THE INTERSECTION OF ENGINEERING AND MEDICINE. MNTL DIRECTOR BRIAN CUNNINGHAM ENVISIONS THE COLLEGE OF MEDICINE WILL HELP FACILITATE NEW INTERACTIONS BETWEEN MNTL RESEARCHERS AND THE MEDICAL COMMUNITY. “The new College of Medicine will bring clinical researchers from many disciplines into closer proximity with MNTL faculty, providing opportunities for discussions that lead to research collaborations, and for research collaborations to translate into clinical practice,” said Cunningham, who recently led the formation of a new Illinois Partnership for Ophthalmology Engineering, which brings ophthalmologist faculty at the U of I Chicago campus together with Urbana engineering faculty for research collaborations aimed at drug delivery, diagnostic tests, surgical tools, and implanted devices. Bioengineering Department Head Rashid Bashir, a former MNTL director, was a key member of the team that helped develop plans for the medical school and guided the proposal through the campus and Board of Trustees approval process. “Microfluidics and nanotechnology as applied to biology and medicine will be im- portant technology pillars of the new College of Medicine—both from a curriculum and research perspective,” said Bashir, who will co-chair the Carle Illinois College of Medicine’s core curriculum committee. “MNTL’s Bionanotechnology Lab and cleanrooms provide unique research and educational facilities for the physician inventors and innovators of tomorrow trained in the new College of Medicine.” NEW COLLEGE OF MEDICINE TO ENHANCE RESEARCH OPPORTUNITIES
  • 11. MNTL HIGHLIGHTS REPORT 11 Many MNTL faculty are leaders in the photonics and nanoelectron- ics areas, and are known for creating the highest speed transistors, solid-state lasers, and integration of optical components for opti- cal fiber communications. With the new College of Medicine, these technologies will provide opportunities for cross-disciplinary col- laboration that can include laser-based therapies, optical devices for monitoring physiological health conditions, and light sources for biomedical imaging. PROFESSORS RASHID BASHIR, LOGAN LIU, AND BRIAN CUNNINGHAM are working on high sensitivity biosensor technology that can be operated by miniature detection in- struments for applications known as the “point of care.” These detection technologies will enable doctors to perform tests and get quick results in remote health clinics, phar- macies, and in some cases, even in the patients’ home. Currently, such tests are per- formed in clinical diagnostic laboratories and often take hours or days to yield results. MATERIALS SCIENCE ENGINEERING ASSISTANT PROFESSOR KRIS KILIAN is develop- ing innovative approaches to regenerative medicine—a new, promising area that has the potential to heal damaged tissue and organs. His group is developing materials that mimic the cellular environment to better understand the stem cell differentiation process, which is key to restoring tissue structure and function caused by injury or disease. ECE PROFESSOR KEVIN KIM’S GROUP has developed a way to encapsulate drugs in biodegradable polymer microspheres that control the release of pharmaceutical com- pounds directly into their target tissues for high efficacy and reduced side effects. ECE PROFESSOR XIULING LI has developed stents only a few microns in diameter that can speed up and direct neuron growth. These tiny structures might someday help patients with Alzheimer’s or traumatic brain injury. BIOENGINEERING ASSISTANTPROFESSOR ANDREWSMITH isdevelopinganovelclassof medical image contrast agents called quantum dots that will be used in many forms of tissue pathology to increase the contrast with which doctors can visualize disease. Applications include early cancer detection, cancer treatment, cardiac monitoring, and metabolite tracking. BIOENGINEERING PROFESSOR ROHIT BHARGAVA led a team that has developed an advanced imaging technique that scans a tissue sample with infrared light to directly measure the chemical composition of the cells without using any chemical stains. This new technique could help doctors and researchers more quickly assess cancer tissue without damaging the cells. IN ADDITION, SEVERAL MNTL RESEARCHERS ARE ALREADY DIRECTLY ENGAGED IN DEVELOPING TECHNOLOGY THAT WILL HAVE AN IMPACT ON FUTURE MEDICAL PRACTICE.
  • 12. 12 Bioengineering Professor Rashid Bashir and Mechanical Science Engineering Professor Taher Saif have demonstrated a class of tiny walking (less than a centimeter in size) bio-bots powered by muscle cells and controlled with elec- trical pulses. “Biological actuation driven by cells is a fundamental need for any kind of biological machine you want to build,” said Bashir, the Abel Bliss Pro- fessor and Bioengineering department head. “We’re trying to integrate these principles of engineering with biology in a way that can be used to design and develop biological machines and systems for environmental and medical ap- plications.” Previously, Bashir and his collaborators, including Chemical Biomolecular Engineering Associate Professor Hyunjoon Kong, demonstrated bio-bots that “walk” on their own, powered by beating heart cells from rats. However, heart cells constantly contract, denying researchers control over the bot’s motion. This makes it difficult to use heart cells to engineer a bio-bot that can be turned on and off, sped up or slowed down. The new bio-bots are powered by a strip of skeletal muscle cells, which are trig- gered by an electric pulse. This gives the researchers a simple way to control the bio-bots and opens the possibilities for other forward design principles, so engineers can customize bio-bots for specific applications. “Skeletal muscles cells are very attractive because you can pace them using external signals,” Bashir said. “For example, you would use skeletal muscle when designing a device that you wanted to start functioning when it senses a chemical or when it received a certain signal. To us, it’s part of a design toolbox. We want to have different options that could be used by engineers to design these things.” PIONEERING BIOLOGICAL MACHINES
  • 13. MNTL HIGHLIGHTS REPORT 13 ENHANCING SOLAR CELL PERFORMANCE One way to improve the light absorption of solar cells is to create anti-reflection material layers on the photovoltaic wafer. However, all the possible approaches—multilayer dielectric film, nanoparticle sludges, microtextures, and 3D silicon nanostructure arrays, to name a few—are costly and often times incompatible with industry stan- dards. ECE Associate Professor Gang Logan Liu has developed a new nano-manufacturing technique called Simultaneous Plasma-En- hanced Reactive Ion Synthesis Etching (SPERISE) that offers a bet- ter anti-reflection solution while possibly increasing the p-n junction surface area. SPERISE improves the overall efficiency and lowers the manufacturing costs of solar cells. In fact, Liu’s group made a solar cell with its single-step process that performed 18.3 % better than a cell fabricated by standard industrial processes. NANOTECHNOLOGY ENHANCES DRUG DELIVERY ECE Professors Kevin Kim and Hyungsoo Choi have created medi- cine-laced nanoparticles that can be administered nasally to bypass the blood-brain barrier. These nanoparticles target damaged brain tis- sue and may provide a longer treatment window for stroke patients. In one lab experiment, the drug molecules were encapsulated in gela- tin nanoparticles and safely transported to the brain for the treatment of ischemic stroke. A fundamental understanding of the way gelatin nanoparticles interact with the brain may allow this technology to someday be applied to humans. TINY LASER GIVES BIG BOOST ECE Professor Milton Feng developed an oxide-confined vertical-cav- ity surface-emitting laser (VCSEL) that transmits error-free data over a fiber-optic network at a blazing fast 57 gigabits per second, making it the fastest directly modulated laser in the United States. This VC- SEL’s data-transfer capability will enhance telemedicine, tele-instruc- tion, and cloud computing. The VCSEL’s compact size also makes it very energy efficient—it uses 100 times less energy than electrical wires. Feng’s research group is working on fine-tuning the VCSEL’s design so it can operate in the very hot environment of data centers. He anticipates pushing the VCSEL to about 60 Gbps.
  • 14. 14 CHIP-SCALE HYBRID MICROSYSTEMS FOR RF COMMUNICATION, SENSING, AND IMAGING APPLICATIONS ECE Assistant Professor Songbin Gong has demonstrated a new type of multi-fre- quency RF filter based on two-port laterally vibrating lithium niobate MEMS resona- tors. The new filter, which operates on most broadband radio and tv, cellphone, and Wi-Fi signals, exhibits electromechanical coupling coefficients of 8% at 500 MHz and 14.6% at 750 MHz, enabling low loss and wideband filtering. This filter may pro- vide a viable path to implement chip-scale reconfigurable front-ends, which includes all the components in the receiver that process the signal at the original incoming radio frequency—a solution desired by the telecommunications industry. PROVIDING A BETTER UNDERSTANDING OF TOPOLOGICAL INSULATORS ECE Associate Professor MatthewGilbert and Physics faculty colleague NadyaMason areinvestigating novel materials called topological insulators and how they differ from traditional semiconducting materials—an important step toward post-CMOS applications. Topological insulators have insulating interiors but surfaces that allow for the flow of electrons. They have far different physical qualities than standard semiconducting materials like silicon. Their research focuses on conductance oscillations in nanowires made of the topo- logical insulator Bi2Se3, demonstrating that conduction occurs only on the surface, which may eliminate the resistivity and related power dissipation due to bulk scat- tering that occurs in typical device materials such as copper and silicon. In addition, they found conductance behavior consistent with a “topological mode” that can be turned on and off with a magnetic field. This unique topological mode is a necessary component of proposed fault-tolerant quantum computing using these materials, yet has not previously been demonstrated in nanowires. BRIGHTNESS EQUALIZED QUANTUM DOTS IMPROVE BIOLOGICAL IMAGING Bioengineering Assistant Professor Andrew Smith has introduced a new class of light-emitting quantum dots (QDs) with tunable and equalized fluorescence bright- ness across a broad range of colors. This results in more accurate measurements of molecules in diseased tissue and improved quantitative imaging capabilities. “Previously light emission had an unknown correspondence with molecule number,” explained Smith. “Now it can be precisely tuned and calibrated to accurately count specific molecules. This will be particularly useful for understanding complex pro- cesses in neurons and cancer cells to help us unravel disease mechanisms, and for characterizing cells from diseased tissue of patients.” According to the researchers, these new materials will be especially important for imaging in complex tissues and living organisms where there is a major need for quantitative imaging tools that can provide a consistent and tunable number of pho- tons per tagged biomolecule. They are also expected to be used for precise color matching in light-emitting devices and displays, and for photon-on-demand encryp- tion applications. The same principles should be applicable across a wide range of semiconducting materials.
  • 15. MNTL HIGHLIGHTS REPORT 15 It can take 20 years between the creation of a new material in the lab and the fab- rication of next-generation consumer electronic devices that employ the material. Thanks to a $1.5 million NSF cyber-infrastructure grant, University of Illinois researchers are working to speed up the technology transfer process by up to 50 percent. The Data Infrastructure Building Blocks (DIBBs) program will transform materials-to- device processes by creating new data infrastructure that would enable researchers to better collect, curate and correlate scientific data generated during material creation and device fabrication processes. Illinois researchers are collecting and curating digital data from selected materials-making / characterization and device-fabrication instruments at MNTL and the Materials Research Lab on campus. Co-principal investigators include Materials Science Engineering Director John Rogers and MNTL Director Brian Cunningham. “We have scientists who are producing cutting-edge materials accompanied by enormous amounts of digital data from high-end instruments, and then writing down results in a note- book or storing them on local disks. Only the most interesting results are published, while others get deleted or stored in a drawer for 10 years,” said Computer Science Professor Klara Narhstedt, the principal investigator of the grant and director of the Coordinated Sci- ence Laboratory (CSL). “Our goal with the NSF DIBBs grant is to make sure this innovative research is not only preserved, but that it’s also easy for other scientists, such as circuit and device builders, to access and build upon their work.” ACCELERATING MATERIALS-TO-DEVICES CYCLE
  • 16. 16 ELECTRONIC DEVICE PERFORMANCE ENHANCED WITH NEW TRANSISTOR ENCASING METHOD While silicon-based transistors have been the foundation of modern electronics for more than 60 years, carbon nanotube wires show promise in someday replacing silicon because they can operate ten times as fast and are more flexible. However, they have an important gap to cross. ECE Professor Joe Lyding has created a more effective method for closing gaps in atomically small wires, further opening the doors to a new transistor technology. “The connection between the nanotubes is highly resistive and results in slowing the operation of the transistor down,” Lyding said. “When electrons go past that junction, they dissipate a lot of energy.”The resistance results in heat pooling at the junctions between the tubes, providing researchers with the perfect opportunity to “solder” these connections using a material that reacts with heat to deposit metal across the junctions. Once the current runs through, the deposited metal reduces the junction resistance, effectively stopping the energy loss. Lyding’s technique, which is transferable to conventional silicon transistor manufac- turing equipment, involves applying a thin layer of solution made from compounds that contain the metal needed to solder the junctions together. “With [our] method, you just send current through the nanotubes and that heats the junctions. From there, chemistry occurs inside that layer, and then we’re done. You just have to rinse it off,” Lyding said. “You don’t need a custom, expensive vacuum chamber.” FACULTY PLAY KEY ROLE IN ENGINEERING- OPHTHALMOLOGY INITIATIVE Several MNTL faculty are involved in a new collaboration between the Department of Ophthalmology and Visual Sci- ences and the College of Engineering at the University of Illinois at Chicago and the College of Engineering in Urbana. The Illinois Partnership for Ophthalmology Engineering will bring together vision scientists, clinicians, and engineers to address important unsolved challenges in vision research. During 2015, MNTL faculty and staff helped organize two meetings, where clinicians and doctors shared research interests and capabilities in retinal imaging, drug delivery, engi- neered surfaces for medical implants, minimally invasive diagnostics, tissue engineering, sensors, and neural interfac- es. As a result, the three key units have requested seed funding from the university administration, which will facilitate the development of proposals to NSF, NIH, and DoD. In fact, an NSF NRT training grant letter of intent was submitted to the funding agency in November, and three more major proposals are in development.
  • 17. MNTL HIGHLIGHTS REPORT 17 Vertical-cavity surface-emitting lasers (VCSELs) are the semiconductor la- ser workhorse of short-distance optical interconnects in data centers, server clusters, the Internet infrastructure, and supercomputer applications. How- ever, as bandwidth demand increases and data centers grow larger, the opti- cal interconnects will need to achieve high bandwidth over longer fiber-optic transmission distances, requiring VCSELs with narrow spectral width, suffi- cient output power, and higher modulation efficiency. ECE Professor Kent Choquette  has developed multiple research strategies to address these challenges. First, his research group has developed photonic crystal VCSELs that exhibit record bandwidth distance performance by in- corporating a periodic index profile to control the optical modes of the laser. Second, his group has demonstrated a novel coherently coupled VCSEL array structure that achieves both requirements by using monolithic feedback en- hancement to create record high modulation bandwidth with a potential path toward 100 Gb/s data rate. The photonic crystal VCSEL phased arrays are also appropriate for other applications, such as electronic beam steering, high brightness laser sources, and novel optical beam production. NOVEL VCSEL DESIGNS TO ENABLE HIGH-PERFORMANCE OPTICAL TRANSMISSION OF DIGITAL DATA LASERS SHED LIGHT ON INTERACTIONS BETWEEN BIOLOGICAL MOLECULES ECE Professor Gary Eden and his students have recently conducted stud- ies that may provide a new way to observe interactions between biological molecules. In one experiment, the group obtained laser action from several biomolecules, demonstrating that their emission spectra and other optical properties are sensitive to interactions of the lasing molecules with their en- vironment. Specifically, the group reported lasing from flavin mononucleotide, which is a co-enzyme derived from Vitamin B2 (riboflavin). The laser spectrum and the polarization of the laser radiation emitted by the biomolecules were shown to be extraordinarily sensitive to the solvent, thus providing a powerful diag-nostic of molecule-molecule interactions. In related experiments, the team has shown that optical energy can be ex- changed between two molecules that are connected by biotin-streptavidin, a biological complex to which molecules, quantum dots, or nanoparticles can be attached (“docked”) and separated by a precisely-known distance.
  • 18. 18 MNTL FACULTY AFFILIATES ELECTED TO NATIONAL ACADEMY OF SCIENCES Chemistry Professor Catherine Murphy and Materials Science Engineering Professor John Rogers were elected to the National Academy of Sciences in 2015. Murphy, who is associate director of the Frederick Seitz Materials Research Lab (MRL) on campus, works to develop inorganic nanomaterials for applications in biology and technology. Her group develops methods to manufacture tiny nanorods made of metals such as gold, silver and copper, and she investigates their uses for imaging cells, chemical sens- ing and photothermal therapy. She also studies the environmental impact of nanoparti- cles and how their properties influence their behavior. Rogers, who is the director of the Frederick Seitz MRL, is a pioneer of flexible, stretch- able and transient electronics. He combines soft, stretchable materials with microscale and nanoscale electronic components to create classes of devices with a wide range of practical applications from medicine to sensing to solar energy. MNTL FACULTY RESEARCHER ELECTED TO NAE ECE Professor J. Gary Eden was elected to the National Academy of Engineering, one of the highest professional honors an engineer can receive. Eden, who uses lasers to study how visible and ultraviolet light interact with matter, was honored for development and commercialization of micro-plasma technologies and excimer lasers. His work has led to advances in multiple areas of application. For example, excimer lasers, a class of ultraviolet lasers Eden developed, are used industrially in semiconductor manufactur- ing and clinically for eye surgeries. His work also has advanced such areas as ultrafast spectroscopy, which uses laser pulses to study the interactions between atoms and mol- ecules, and photochemical vapor deposition, which uses lasers to deposit thin films of semiconductors and other materials on a surface. FACULTY AWARDS UNDERSTANDING THE PHYSICS OF A NEW TYPE OF PHOTONIC BIOSENSOR A whispering gallery mode (WGM) resonator is a miniature optical device that re- circulates light. A biosensor can be made by functionalizing a WGM device and looking for small changes in its resonance wavelengths due to binding events of chemicals and biological agents. However, the device’s effectiveness is hampered by its inability to detect very small concentrations of analytes. ECE Associate Professor Lynford Goddard and his students have conducted simulations to explain the fundamental physics of a new type of WGM biosen- sor that incorporates gold nanoparticles around the circumference of the WGM waveguide. The nanoparticles form a plasmonic chain ring resonator (PCRR), a structure that experiences a collective oscillation in the presence of light. The integrated WGM-PCRR biosensor creates a wavelength shift that is a few or- ders of magnitude larger than the conventional WGM biosensor because of the way that light is localized in the PCRR for specific sizes and spacings of nanopar- ticles. The enhanced sensitivity should enable the detection of a single binding event of a small protein such as a Thyroglobulin cancer marker protein.
  • 19. MNTL HIGHLIGHTS REPORT 19 WITH MEMBERSHIP RATES BASED ON COMPANY SIZE AND LEVEL OF INTEREST, THE IAP WILL ENABLE COMPANIES TO PARTNER WITH FACULTY ON PRE-COMPETITIVE RESEARCH PROJECTS, PROVIDING A COST-EFFECTIVE APPROACH FOR GAINING INSIGHT INTO COM- MERCIAL APPLICATIONS OF UNIVERSITY RESEARCH. THE IAP WILL ALSO DEVELOP AN MNTL GRADUATE STUDENT INDUSTRY-RECRUITING PIPELINE, CONNECTING UNIQUELY QUALIFIED STUDENTS WITH COMPANY INTERNSHIPS AND FULL-TIME JOBS. NEW INDUSTRY AFFILIATES PROGRAM MNTL IS LAUNCHING A NEW INDUSTRY AFFILIATES PROGRAM (IAP) IN 2016 TO FACILITATE TECHNICAL INTERACTIONS BETWEEN COMPANY RESEARCHERS AND ILLINOIS FACULTY AND STUDENTS.
  • 20. 20 ILLINOIS LED PIONEERS RECEIVE MOST PRESTIGIOUS U.S. ENGINEERING AWARD ECE Professor Emeritus Nick Holonyak Jr. and two of his former students, George Craford and Russ Dupuis, were awarded the 2015 Charles Stark Draper Prize for Engineering. They shared the prize with Isamu Akasaki and Shuji Nakamura for the invention, development, and commercialization of materials and processes for light-emitting diodes (LEDs). LEDs are used by billions of people on a daily basis through applications like computer monitors, cellphone screens, TVs, traffic lights, home lighting, digital watch displays, medical applications, and many more. In third-world areas without electricity, LEDs combined with solar cells are bringing light to people who’d previously relied on fire and kerosene lamps. The $33 billion LED industry has stimulated global job growth and dramatically lowered the cost of energy. In 2012 alone, more than 49 million LEDs were installed in the U.S., with an estimated annual savings of $675 million in energy costs. In 2013, LEDs saw rapid growth in general lighting applications, reducing U.S. CO2 emissions by more than 12 million tons. LEDs also produce the greatest amount of light for the energy used, and have the longest lifetime of any lighting source available.
  • 21. MNTL HIGHLIGHTS REPORT 21 Holonyak created the world’s first visible red LED in 1962 while working at General Electric. Although most researchers at the time were trying to make light-emitters from gallium arse- nide, which produces infra-red light, Holonyak made his visible LED from an unconventional mixture of gallium, arsenide, and phosphide (GaAsP)—an alloy that underpins all high-bright- ness LEDs made today. While at Monsanto in the early 1970s, Craford invented the first yellow LED and significantly increased the brightness of red LEDs by adding nitrogen to Holonyak’s GaAsP LED technolo- gy. Later at Hewlett-Packard, Craford’s team pioneered the development of another new LED technology (AlInGaP), which led to applications in traffic lights and automobiles. At Philips Lumileds Lighting Company, Craford oversaw the development of the first high-power white LEDs, which are widely used today in general lighting, car headlights, and cell phone flash. A researcher at Rockwell International, Dupuis developed and refined a process called metal organic chemical vapor deposition (MOCVD) in 1977, which enabled production of high-brightness LEDs. Dupuis’ MOCVD growth technology is the basis of virtually all produc- tion of high-brightness LEDs, laser diodes, solar cells, and high-speed optoelectronic (light controlling) devices. Today, Dupuis is an engineering faculty member at Georgia Tech. NICK HOLONYAK, JR. RUSS DUPUIS GEORGE CRAFORD
  • 22. 22 FACULTY AWARDS ILESANMI ADESIDA has been selected to receive the 2016 Functional Materials John Bardeen Award presented by the Minerals, Metals and Materials Society for his contri-butions to and leadership in the electronic materials field. JEAN PAUL ALLAIN was selected as a U.S. Fulbright Scholar to Colombia and awarded the 2015-2016 Fulbright–Colciencias Innovation and Technology Award. He will conduct research with collaborators from the Universidad de Antioquia in Medellin aimed at developing functional nanomaterials for biotechnology and energy applications through multiple short-term visits to this country. RASHID BASHIR was elected a Fellow of the International Academy of Medical Bi- ological Engineering (IAMBE) and the BiomedicalEngineering Society (BMES) in 2015. Bashir’s research interests include bionanotechnology, biomicroelectromechanical systems, laboratory on a chip, interfacing biology and engineering from molecular to tissue scale, and applications of semiconductor fabrication to biomedical engineering. CAN BAYRAM received the 2014 IEEE Electron Devices Society (EDS) (EDS) Early Career Award—one of EDS’s highest honors—for his early career technical achievements. Before joining the Illinois faculty in 2015, Bayram was a post- doctoral researcher at IBM’s T.J. Watson Research Center where he developed thin- film LEDs. At MNTL, Bayram is developing a novel, vertical LED architecture for biological and solid-state lighting applications. KENT CHOQUETTE was elected president of the IEEE Photonics Society, a role that he begins in 2016. As president, Choquette aims to improve the way research is released to the public, making it less expensive and more quickly accessible for researchers. ECE PROFESSOR EMERITUS JIM COLEMAN received a 2015 University of Illinois Electrical Computer Engineering Distinguished Alumni award for research accomplishments in the field of compound semiconductor crystal growth, teaching, and service. A faculty member for 31 years, Coleman retired in 2013. He is currently an electrical engineering faculty member at the University of Texas at Dallas. In 2014, Coleman was elected a Fellow of the National Academy of Inventors. BRIAN CUNNINGHAM was invested as Donald Biggar Willett Professor of Engineer- ing, recognizing his intellectual leadership and outstanding research. Cunningham is internationally recognized for his contributions to the advancement of photonic crys- tal-based biosensing. He was also selected as a 2014 Fellow of the Optical Society of America for the invention, development, and commercialization of biosensors and de- tection instrumentation based on nanostructured surfaces and for the development of biological applications. JOHN DALLESASSE was elected a 2015 IEEE Fellow for contributions to the oxidation process of III-V semiconductors used in photonic device manufacturing. GARY EDEN was inducted into the National Academy of Inventors, a distinction accorded to academic inventors. Eden has more than 70 patents, including several that he’s licensed to two start-up companies he co-founded—Eden Park Illumination and EP Purification. ADESIDA ALLAIN BASHIR DALLESASSE
  • 23. MNTL HIGHLIGHTS REPORT 23 MATTHEW GILBERT received a 2014 NSF CAREER award—one of the agency’s most prestigious awards for junior faculty. Gilbert will use the research funding to determine the potential of topological materials to make information processing systems by un- derstanding the light-matter interactions and high-frequency responses in topological nanosystems. SONGBIN GONG received a prestigious 2014 DARPA Young Faculty award for a concept that aims to develop an integrated circuit design that replaces conventional CMOS transistor technology. Specifically, he aims to develop a system that dissipates very little energy as waste heat, and which can recover and reuse the most of the heat as additional energy. NICK HOLONYAK JR. received the University of Illinois Alumni Achievement Award for pioneering and world-renowned achievements in optoelectronics. The inventor of the first practical semiconductor LED and laser, Holonyak earned three electrical engi- neering degrees from Illinois (BS 1950, MS 1951, PhD 1954), conducting his doctoral research under two-time Nobel laureate John Bardeen. XIULING LI, JIANJUN CHENG, AND JOHN ROGERS were selected as the first class of College of Engineering Faculty Entrepreneurial Fellows to develop technology and test its commercial applications. Li also received a Donald Biggar Willett Faculty Schol- ar award, which recognizes mid-career College of Engineering faculty who excel in their contributions to the university. An Illinois faculty member since 2007, Li’s research is focused on nanostructured semiconductor materials and devices. LOGAN LIU was elected a 2015 Fellow of the American Institute for Medical and Biological Engineering (AIMBE) for contributions to biomolecular sensing and imaging nanotechnology, enabling new medical and environmental health research and applications. WILLIAM KING was elected a Fellow of the American Physical Society in 2014 for distinguished contributions to the applied physics of nanometer-scale thermal and mechanical property measurements, and the translation of this work to numerous ap- plications in materials science and nanotechnology. JOE LYDING received the 2014 Foresight Institute Feynman Prize for his pioneering work in the development of scanning tunneling microscope (STM) technology. Lyding is also known for developing hydrogen depassivation li- thography, a generic patterning technique using a resist that allows pattern transfer to enable many different types of structures and functionalization of surfaces, all while maintaining atomic resolution and precision. Lyding was also elected a 2014 Fellow of the American Association for the Advancement of Science for distinguished contribu- tions in nanotechnology and discovery of the giant deuterium isotope effect. GABRIEL POPESCU was selected as a 2015 Optical Society/OSA Fellow for novel quantitative nanoscale phase imaging of cells and tissues. Popescu’s group develops novel optical methods based on light scattering, interferometry, and microscopy, to image cells and tissues quantitatively and with nanoscale sensitivity.GONG LI CHENG GILBERT
  • 24. 24 Rashid Bashir, Massachusetts General Hospital, A Microfluidic Biochip to Perform Complete Blood Cell Count at Point of Care, April 2015—April 2016, $145,000. Kent Choquette, NSF, Optical Phased Laser Arrays and Their Functionality, September 2015—August 2018, $350,000. Brian Cunningham, Brendan Harley, and Mary Kraft, National Institute of Biomedical Imaging Bioengineering, Label Free Interrogation of Heterogeneties in HSC Fate Decision Signatures, April 2015—January 2017, $193,000. Brian Cunningham, NSF, Multiresonator Photonic Crystal En- hanced Fluorescence and SERS, May 2015—April 2018, $600,000. A collaboration with Washington University in St. Louis. Brian Cunningham, Rashid Bashir, Steve Lumetta, and Ian Brooks, NSF, Pathtracker: A smartphone-based system for mo- bile infectious disease detection and epidemiology, September 2015, $1,000,000. Brian Cunningham, NIH, Rapid Disease Diagnostics using Pho- tonic Crystal Enhanced Antigen Biomarker, June 2014—May 2018, $448,000. Brian Cunningham, NSF, Multiresonator Photonic Crystal En- hanced Fluorescence and SERS, May 2015—April 2018, $600,000. A collaboration with Washington University in St. Louis. John Dallesasse Brian Cunningham, NSF, EAGER: Lab in a Smartphone Sept, Sept. 2014—Aug. 2016, $300,000. John Dallesasse, NSF, Transistor Injected Quantum Cascade La- ser: An Improved Coherent Mid-IR Source, Aug. 2014—July 2017, $400,000. Gary Eden, II-VI Foundation, Microplasma Array-Pumped Wave- guide Lasers, July 2014—June 2015, $95,000. Gary Eden, AFOSR, Synthesis and Control of Coherent Structures in Low-Temperature Plasmas for Reconfigurable Electromagnetic Devices, $412,000. Gary Eden, AFOSR, Plasma-chemical Synthesis and Probing of Plasma-Surface Interactions in Microcavity Plasmas, $301,000. Gary Eden, AFOSR, Laser and Gas Chromatography Systems for Studies of Excited Molecular Complexes and Phased Arrays of Microlasers, dates, $918,000. Milton Feng, Army Research Office, Bit Error Rate Test Equip- ment for High-Speed Vertical Cavity Transistor Laser-Microcavity VCSEL and Photoreceiver, Sept. 2014—Aug. 2015, $200,000. Milton Feng, AFOSR, Complex Material and Devices RTD GHz – THz Electronics, March 2015—February 2018, $657,000. Matthew Gilbert, NSF CAREER award, Global Quantum Modeling of Topological Nanosystems for Energy-Efficient Devices, June 2014—May 2019, $400,000. Matthew Gilbert, ONR, High-Frequency Topological Nanosys- tems, $314,000. Lynford Goddard, NSF, Spectrally and Temporally Engineered Processing Using PhotoElectroChemistry (STEP-PEC), June 2015—May 2018, $370,000. Songbin Gong, DARPA, Resonance Enhanced Authentication Communication and Charging Reach, Jan. 2015—July 2016, $525,000. Songbin Gong, DARPA, Parametrically Excited Resonant Com- puting Systems (PERCS), $250,000. Xiuling Li, NSF, Programmable Metal-Assisted Chemical Etching for Three Dimensional Functional Metamaterials, May 2015— April 2018, $180,000. A collaborative project with the University of Texas-Arlington. Xiuling Li and Lynford Goddard, NSF, Research Experience for Teachers, May 2014—April 2017, $500,000. Catherine Murphy, NSF, Summer Nanotechnology Research Experience for Undergraduates, March 2014—March 2017, $375,000. Klara Nahrstedt and Brian Cunningham, NSF, Timely and Trust- ed Curator and Coordinator Data Building Blocks, October 2014 – September 2017, $1,500,000. Dan Wasserman, NSF, EAGER: Novel Approaches for Generating and Controlling Light in the Optical No Man’s Land of the Far IR, June 2014—Nov. 2015, $112,000. RESEARCH FUNDING
  • 25. MNTL HIGHLIGHTS REPORT 25 FUNDAMNTL
  • 26. 26 OUR RESEARCHERS ARE PART OF A HISTORIC SEMICONDUCTOR LEGACY THAT BEGAN WITH ENGINEERING GIANTS JOHN BARDEEN, NICK HOLONYAK JR., AND CHIH-TANG SAH, WHOSE GROUNDBREAKING WORK HELPED LAUNCH AND AD- VANCE TODAY’S INFORMATION TECHNOLOGY REVOLUTION. THEY AND THEIR ELECTRICAL ENGINEERING COLLEAGUES FROM THE STORIED ELECTRICAL ENGI- NEERING RESEARCH LAB—THE PRECURSOR TO THE MICRO NANOTECHNOLOGY LAB—SET A STANDARD OF EXCELLENCE THAT TODAY’S FACULTY STRIVE TO MEET. WE PROUDLY INTRODUCE THREE NEW FACULTY. WENJUAN ZHU is identifying the unique electronic and photonic properties of 2D mate- rials and fabricating nanoscale devices. She and her students are taking advantage of the high carrier mobility of metallic 2D materials like graphene to build plasmonic devices and solar cells with transparent electrodes. For semiconducting 2D materials, such as MoS2 and WSe2, they are making sub-10nm transistors for computing. Zhu and her group are also combining 2D materials with traditional semiconducting materials and exploring their applications in computation, communications, energy, and medical areas. Before joining the Illinois faculty in August 2014, Zhu spent 11 years at IBM, where she made key contributions to 65 nm and 32 nm CMOS technology and explored the funda- mental properties of 2D materials like graphene and layered transition metal dichalco- genides (LTMD) and made devices and circuits. CAN BAYRAM is developing efficient, high-power compact ultra-violet AlGaInN LEDs to detect and eliminate biological agents like anthrax, plague, and ebola, and may be used to enable clean drinking water in underdeveloped areas. He and his students are also creat- ing light sources that are tunable from UV to visible (200-750nm) wavelengths for general lighting, visualization, and biological applications. In the electronics area, he and his group are creating GaN-based transistors for next generation power transistors. Before joining the Illinois faculty in August 2014, Bayram spent three years at IBM, where he was part of the team that developed a record-breaking specific power solar cell, which was featured on the cover of Advanced Energy Materials in May 2013. Bayram also created a technique to grow GaN material that is compatible with conventional CMOS fabrication technology. AREND VAN DER ZANDE, who joined the Illinois faculty in August 2015, is investigating the properties of 2-dimensional (2D) materials and building novel devices from them. While his group has grown isolated layers of molybdenum disulfide (MoS2), their goal is to grow large-scale uniform MoS2 and other 2D materials. They’ve begun building a metal-organic chemical vapor deposition (MOCVD) system at MNTL that can produce uniform 2D materials on four-inch wafers. Van der Zande earned his doctorate in physics at Cornell University. He spent four years as a post-doctoral researcher at Columbia University, where he isolated and engineered the first graphene mechanical membrane. Because of its strength and flexibility, he and colleagues were able to build nanomechanical systems like electrostatically tunable drum- head resonators and impermeable gas membranes. OUR NEWEST FACULTY
  • 27. MNTL HIGHLIGHTS REPORT 27 TRAINING THE NEXT GENERATION OF SEMICONDUCTOR BIOMEDICAL LEADERS THROUGHOUT ITS 25-YEAR HISTORY, MNTL HAS TRAINED AND EDU- CATED MORE THAN 1,100 STUDENTS SO THEY ARE PREPARED FOR CA- REERS IN INDUSTRY, ACADEMIA, AND GOVERNMENT IN THE AREAS OF PHOTONICS, MICROELECTRONICS, BIOTECHNOLOGY, AND NANOTECH- NOLOGY. WE PROUDLY INTRODUCE YOU TO SEVERAL OF OUR STU- DENTS WHO REPRESENT THE EXCEPTIONAL CALIBER OF OUR YOUNG RESEARCHERS. A member of Professor Xiuling Li’s group, ECE doctoral student PAUL FROETER is growing III-V semiconductors and insulators via Metal Organic Chemical Vapor Phase Deposition (MOCVD) and Plasma Enhanced Chemical Vapor Deposition, respectively, to make Self-rolled-up Membranes (S-RuM). These membranes can self-assemble into 3D structures through controlled strain relaxation. Froeter’s research opened routes to realizing miniaturized RF components, biocompati- ble interfaces, and high-quality optical components. He has integrated a silicon nitride membrane into his S-RuMs (SiNx S-RuMs) and developed the first fully insulating, opti- cally transparent, and biocompatible rolled-up platform available to Li’s group. In collab- oration with a University of Wisconsin colleague, Froeter later discovered that their SiNx S-RuMs exhibited exceptional neuronal outgrowth guidance in cortical neuron cultures. Currently, Froeter is collaborating with Illinois Professors Martha Gillette and Rashid Bashir, as well as Wisconsin Professor Justin Williams, to develop cell-triggered, S-RuMs, in which the cellular traction force exerted on the membrane overwhelms stiction hold- ing it to the substrate. Their goal is to dynamically self-assemble large networks of cells while being able to fully functionalize the inner wall of the micro tube. A finalist for the $20,000 Illinois Innovation Prize from the College of Engineering Tech- nology Entrepreneur Center (TEC) in 2014, Froeter is most proud of introducing a biology component into his research group, which had previously focused on electrical and opti- cal applications. “I would not be where I am without the MNTL facilities and the faculty and staff that keeps it running,” said Froeter. “I have been able to accomplish the work I set out, make friends with the staff, and explore collaborations I did not see possible.”
  • 28. 28 RUOCHEN LU, a second-year electrical engineering graduate student in Songbin Gong’s group, is designing novel RF transformers based on two-port resonators. Some of the biggest challenges he faces relate to the parasitic capacitance inherent to electrical circuits. This unavoidable stray capacitance exists in all circuits due to the close proximity of components that can then cause interference and unreliable oper- ation. In the summer of 2015, Lu earned a best poster finalist honor at the 18th Internation- al Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015) for his work on a novel numerical approach to model the thermal nonlinearity in piezoelectric micro-resonators, which are commonly found in the transceivers of modern wireless systems. His approach uses an approximation-free algorithm that more accurately accounts for the complex non-linear dynamics found in MEMS reso- nators. Lu also won the Electrical Computer Department’s Lam Outstanding Gradu- ate Student Research Award. A graduate of Tsinghua University in China, Lu describes his doctoral experience at MNTL as amazing because of the great facilities and research collaborations. “The faculty and local research groups are very close,” Lu said. “We often discuss different research topics and learn a lot from each other.” Mechanical Science Engineering doctoral student RITU RAMAN, who works with Professors Rashid Bashir and Taher Saif, has built a high-resolution 3D printer for patterning cells and biomaterials with resolutions on the order of single cells—less than 5 micron patterning. Working with other members of her group, she has also engineered BioBots, or 3D printed skeletons and muscle actuators, that have been induced to contract by both electrical and optical stimulation. Interested in commercializing this technology, Raman won the 2015 Illinois Innova- tion Prize, a campus-wide student entrepreneur competition. She is using the $15,000 prize to manufacture the biological building blocks, or BioBlocks, required for the Bio- Bots. The BioBlocks can harness the innate abilities of biological materials to sense, process, and respond to a variety of dynamic environmental signals in real time. Raman’s achievements extend beyond the laboratory. In the Fall 2015 semester, she created and taught a new Bioengineering class (BIOE306), where students learn how to design and build their own BioBots. “I’m really proud of this because all the cool stuff I’m learning doesn’t mean anything if I’m the only one that can do it,” she said. “I want to introduce those materials into every engineer’s toolbox.” According to Raman, some of her success can be attributed to the collaborative envi- ronment at Illinois. “You have access to everything and you are always going to find someone who is an expert in what you’re doing. I write better and more in-depth pa- pers because I get so much help from other people.” TRAINING THE NEXT GENERATION OF SEMICONDUCTOR BIOMEDICAL LEADERS
  • 29. MNTL HIGHLIGHTS REPORT 29 ECE doctoral student GLORIA SEE came to the University of Illinois after working in testing at BAE Systems and the Air Force Research Labs. As a member of Professor Brian Cunningham’s group, See is conducting research using photonic crystals to en- hance quantum dot (QD) performance. By developing new methods to control polar- ization, intensity, and angular output, QDs can be used for improved performance in large-area displays. See recently published research results where she successfully embedded QDs in novel polymer materials that retain strong quantum efficiency, and she used electro- hydrodynamic jet (e-jet) printing technology to precisely print the QD-embedded poly- mers onto photonic crystal structures. This research may enable the fabrication of brighter, cheaper, and more efficient displays. Currently, See is being funded by Dow Chemical to build upon her novel device struc- ture and investigate how the integration of photonic crystals into a MEMS device can produce different methods of controlling QD-output. “I’m really proud of the last paper that I published, because I don’t think it was very obvious that that structure would be as effective as we made it,” said See, who graduated in December 2015. “The [Illinois] faculty and staff are amazing. There hasn’t been anybody who I’ve asked for help that has not gone way out of their way to be very helpful, or to connect me with someone who would be better to help me out. That kind of community is a great thing to have.” CURTIS WANG’S interest in research began several years ago when he joined Profes- sor Milton Feng’s group as an undergraduate research assistant, exploring microwave integrated circuits. As a graduate student, Wang’s research has focused on the tran- sistor laser, a high-speed, 3-terminal device that his advisor co-invented with Profes- sor Nick Holonyak Jr. in 2004. The transistor laser functions like a normal transistor, except that one of its outputs is infrared light rather than electricity, which could enable next-generation military and consumer optoelectronic applications. More recently, Wang used MNTL’s state-of-the- art high-speed measurement equipment to characterize his colleagues’ Vertical Cavi- ty Surface Emitting Laser (VCSEL), which achieved 52-gigabit/second error-free transmission—a new record. In the spring of 2015, Wang received a prestigious National Defense Science and En- gineering Graduate (NDSEG) fellowship from the Department of Defense, which are awarded to only 200 promising graduate students nationwide each year. According to Wang, this fellowship allows him to not only pursue the device physics, layout, design, and fabrication of high-speed semiconductor lasers, but also the application of ul- tra-fast data transfer and real-time imaging. “Especially, I am passionate about the new frontiers that the transistor laser can bring forth in the thriving Internet-of-every- thing age.”
  • 30. 30 MNTL KNOWLEDGE EXPERTISE IMPACTS THE WORLD MNTL TAKES LEADERSHIP ROLE IN FOOD SAFETY Aware of MNTL’s expertise in sensing technology, the National Science Foundation invited MNTL faculty and staff to lead an international workshop on food safety and expanding the world’s food supply, which took place in Arlington, VA, in October 2014. Seventy industry, gov- ernment, and academic experts in the field of global food safety identified the most pressing gaps in the food safety infrastructure. This workshop has led to research investments by NSF that impact fundamental new approaches in sensing, take advantage of the emerging capabil- ities of “big data” networks for managing traceability within global supply chains, and incorpo- rate new capabilities into food processing equipment and packaging. In addition to co-hosting the event, MNTL Director Cunningham presented his group’s research progress on developing microfluidic technologies that can be incorporated into inexpensive plastic cartridges that in- terface with a smartphone or tablet to perform common quality control tests in the field. MNTL also co-hosted the October 2014 invitation-only Nanosensor Networks and Exabyte Analysis Farm to Fork workshop in Urbana, where thought leaders from industry, academia, and government discussed the development of new technologies in order to feed the world’s 9 billion people over the next 40 years. Participants addressed how to develop and apply a new class of sensing modalities, which can provide detailed and distributed information about chemical components, protein makeup, pathogen presence, plant metabolism, and pest inva- sion, combined with environmental monitoring, that has not been available previously. Already advancements in nanoscale sensors are achieving unprecedented levels of sensitivity and specificity. Nanoplasmonics, silicon-based sensors, nanopores, flexible/printable optoelectron- ics, biodegradable photonic resonators, and protein‐based nanoparticle image contrast agents all offer the potential for robustness and cost that may enable researchers to produce broadly distributed arrays of miniature sensors and mobile detection instruments to increase farm ef- ficiency and food safety.
  • 31. MNTL HIGHLIGHTS REPORT 31 KNOWLEDGE TRANSFER AT ALL LEVELS The education, training, and outreach efforts at MNTL are conducted by the Center for Nanoscale Sci- ence Technology, which resides in MNTL. CNST Executive Director Irfan Ahmad, an Agricultural Biological Engineering Professor, and his staff manage educational programs that impact K-12, under- graduate, and graduate students, as well as young researchers from academia, industry, and govern- ment labs. For example, CNST hosts annual nanotechnology workshops and symposia, highlighting the outstanding and innovative research being conducted at MNTL and other laboratories on campus. These forums attract students, postdocs, faculty, university administrators, members of the public, and researchers from industry, government labs, and federal agencies. The following events are also man- aged by CNST.
  • 32. 32 NANOBIOTECHNOLOGY SUMMER INSTITUTE More than 50 students, post-docs, and junior faculty from around the world participated in the 2014 + 2015 University of Illinois BioNanotechnology Summer Institute, learning about cancer nanotechnology, cell mechanics, molecular biology, micro nano fabrication tech- niques, and microfluidics. Since its inception in 2009, the Institute has trained more than 300 participants, preparing the next-generation of researchers who can apply engineering approaches to cancer and biomedical research. BRADLEY ELLIS SENIOR, UNIVERSITY OF NOTRE DAME Why did you choose to attend the Summer Institute? I wanted to get a jump-start on graduate school. What’s the most valuable thing you’ve learned so far? Probably how different disciplines work together, just this week we learned how materials science concepts work together with electri- cal engineering processes for applications in medicine. What are your plans after the Summer Institute? I want to continue on into academia, get into exciting research, and eventually teach as a professor. HUMA RASHEED RESEARCH SCHOLAR, AMPLITECH, INC. Why did you choose to attend the Summer Institute? The summer institute offers instruction on applying advanced technolo- gy into biology and other sciences, like nanomedicine. What’s the most valuable thing you’ve learned so far? I have a pharmacology background and am most interested in micro cell biology and encapsulated drug delivery. There have been a series of lectures on the applications of nanoparticles in curing cancer that I have found very valuable. What are your plans after the summer institute? I want to take some of the advanced techniques I have learned here, back to my native field of targeted drug therapy and pharmacology.
  • 33. MNTL HIGHLIGHTS REPORT 33 STEM TEACHERS ENHANCE THEIR INSTRUCTION THROUGH RESEARCH AT MNTL During the last two summers, 16 middle school, high school, and community college STEM faculty from across the nation conducted cutting-edge research in nanotechnology through the NSF-funded nano@Illinois Research Experience for Teachers (RET) program at MNTL. The goal of RET is to provide the teachers with hands-on experience and nanotechnology knowledge, which they can use to enhance their classroom instruction and even develop a curriculum module. “I teach in a very small school with limited resources, so one of the best things that I can do is have experiences and then bring them back to the classroom,” said Villa Grove, IL, biology teacher Aubrey Wachtel, who worked in Professor Andrew Smith’s lab on the quantitative analysis of cellular uptake of quantum dots. Added fellow 2014 participant Terry Koker: ““My work in Dr. Goddard’s lab on photoelec- trochemical etching of silicon was one of the most rewarding educational and scientific experiences of my career.” In addition to Smith and Goddard, faculty participants included Aleksei Aksimentiev (Physics), Can Bayram (ECE), Paul Braun (MatSci), Songbin Gong (ECE), Princess Imoukhuede (BioE), Xiuling Li (ECE), Nadya Mason (Physics), Umberto Ravaioli (ECE), Steve Sligar (BioChem), and Dan Wasserman (ECE). UNDERGRADUATES GAIN VALUABLE RESEARCH EXPERIENCE Twenty-six undergraduate students from across the nation conducted 10-week re- search projects through CNST’s NSF-funded Research Experience for Undergrad- uates program and the NSF-funded Science and Technology Center for Emergent Behaviors of Integrated Cellular Systems (EBICS) at MNTL. In addition to introduc- ing the students to research, the REU program trains them in critical elements of leadership, ethics, teamwork, mentoring, and outreach, and it improves their ability to communicate their research results to professional and lay audiences. “This REU gave me the opportunity to develop professional skills, improve my re- search writing, and synthesize devices all in one summer,” noted 2014 student Mohammad Jaber. The following faculty served as mentors to the undergraduate students: Aleksei Aksimentiev (Physics), Ryan Bailey (Chem), Rashid Bashir (BioE), Rohit Bharga- va (BioE), Paul Braun (MatSci), Brian Cunningham (ECE), Lynford Goddard (ECE), Brendan Harley (Chem Biomolecular Engr), Princess Imoukhuede (BioE), Hyun- joon Kong (Chem Biomolecular Engr), Mary Kraft (Chemistry), Xiuling Li (ECE), Yi Lu (Chemistry), Catherine Murphy (Chemistry), Sungwoo Nam (MechSci Engr), Gabriel Popescu (ECE), Taher Saif (MechSci Engr), Sameh Tawfick (MechSci Engr), and Dan Wasserman (ECE).
  • 34. ILLINOIS MICRO + NANOTECHNOLOGY LAB MICRO + NANOTECHNOLOGY LAB UNIVERSITY OF ILLINOIS 208 N. WRIGHT STREET URBANA, IL 61801 PH 217.333.3097 MNTL.ILLINOIS.EDU