1. Basic Preventive Maintenance on Sputtering Systems Basic Preventive Maintenance on Sputtering Systems Produced by Christopher D. Warren

2. Introduction This presentation will consist of a brief familiarization of the training manual that will be utilized by all personnel that operate the Sputtering system

3. Overview and Contents 1. Illustration of a Sputtering system. 2. Illustration of a PVD chamber. 3. Illustration of shield parts for the PVD chamber.

4. Basic Preventive Maintenance on Sputtering Systems In this report you will find: A training manual for performing basic preventive maintenance on sputtering systems. A standard procedure of performing proper maintenance in order to decrease down time of that equipment. To fully understand the proper procedures for maintaining a sputtering system.

5. Basic Preventive Maintenance on Sputtering Systems This report will: 1. Provide instruction combined with certified supervision on how to perform a physical vapor deposition (PVD) kit change as well as a PVD target change. 2. Identify best practices for performing successful and quick turnaround PVD kit change and target preventive maintenance (PM). Provide instruction on performing all procedures associated to process kit change PM.

6. Basic Preventive Maintenance on Sputtering System s What is a sputtering system and what is its purpose? 1. Sputtering is a process that can deposit any material on any substrate. 2. Sputtering, like evaporation, takes place in a vacuum. However, it is a physical, not a chemical process, and is referred to as physical vapor deposition (PVD). It is a metalization process.

7. Basic Preventive Maintenance on Sputtering Systems Before you begin to perform any Pms: 1. Proper procedures include familiarization of functions within the operating system. 2. Prior to any actual maintenance, you must make sure that all required tools and parts are present. This will prevent additional down time.

8. Basic Preventive Maintenance on Sputtering Systems Before you begin to perform any Pms: 1. You must ensure all operators know the proper procedures for placing a tool down. 2. This allows consistent tracking of downtimes for all tools and provide written explanation of actual performance of tools.

9. Basic Preventive Maintenance on Sputtering Systems Once the tool is properly set up for the PM: 1. Perform required steps listed in the report to cool and vent the chamber. This must be performed prior to performing a kit and or a target change. 2. Once conditions have been met prior to opening chamber, you can follow the step-by-step procedure to perform a kit and or target change.

10. Basic Preventive Maintenance on Sputtering Systems While performing operation check for others conditions that may require maintenance : 1.This will decrease the overall down time of the sputter system. 2. Once kit or target changes have been performed, proceed to allow the tool to complete the remaining steps for a proper PM. 3. While the tool is completing the PM process, operators should utilize this time to reassemble kits for future Pms.

11. Basic Preventive Maintenance on Sputtering Systems While performing operation check for others conditions that may require maintenance: 4. Clean the immediate area and return all parts and tools. 5. Operators must be familiar with all of the required steps from start to finish of the PM, in case the final steps require operator assistance.

12. Basic Preventive Maintenance on Sputtering Systems Once the PM is complete: 1. You must condition and qualify the tool before releasing it to full production. 2. This includes running paste (conditioning), particle checks, and checking thickness of film. 3. Without proper conditioning, you run the risk of defect issues.

13. Basic Preventive Maintenance on Sputtering Systems The manual I have developed will allow: 1. Operators to become certified in performing PMs on sputtering systems 2. Allow better utilization of human resources. 3. As the industry increases production, it is important to release maintenance technicians and engineers from having to perform routine PMs.

14. Basic Preventive Maintenance on Sputtering Systems As the need for integrated circuits continues to increase: 1. Having a manual to explain the step-by-step procedures for performing PMs on sputtering systems will provide a resource for those certified 2. And also provide instructions for those operators needing certification.

15. Basic Preventive Maintenance on Sputtering Systems For more detailed information on performing preventive maintenance on sputtering systems, please request a copy of my technical report, Preventive Maintenance in Performing Kit and Target Changes for Sputtering Systems

16. Basic Preventive Maintenance on Sputtering Systems Thank you for your time and attention and are there any questions ?