Week 7 - Course Project Draft - Gagandeep Bedi

Running head: THE IMPACT OF MEMS TECHNOLOGY TODAY
THE IMPACT OF MEMS
TECHNOLOGY ODAY
By:
Gagandeep Bedi
DSI number: D40205815
Taught by Professor Baker
DeVry University
LAS 432 Course

THE IMPACTOF MEMS TECHNOLOGY TODAY
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Abstract
We are thankful for Micro-Electro-Mechanical Systems which has dramatically
lessened the cost and strengthened the ability of electronics. This industry has a lot of
potential to prosper in the area of micromechanics and the Micro-Electro-Mechanical
Systems promises to transform approximately every product in the industry and increases
the reliability of the system. MEMS is a process technology which employs integrated
devices or systems that blend mechanical and electrical mechanisms together. The
MEMS technology has been categorized as one of the most favorable technologies of the
21st century. This technology has great potential to revolutionize both industrial and
consumer products by combining silicon-based microelectronics with micromachining
technology together. These devices have the potential to affect all of our lives and the
way we live today.

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ABSTRACT 1
A BRIEF HISTORY OF THE MEMS TECHNOLOGY 3
Table 1: Chronological History of MEMS Technology 4
Table 2:MEMS applications 4
DESCRIPTION OF MICRO-ELECTRO-MECHANICAL TECHNOLOGY 5
EXPLANATION OF THE ASSOCIATED SCIENCE 5
THE MANUFACTURE OF MEMS OF PROCESS 6
Wet Etching 8
Step 1: Wet Etch 8
Step 2: Rinse 8
Step 3: Drying 9
Dry Etching 9
ANALYSIS OF THE TECHNOLOGY 11
Social impact of MEMS Technology today 11
Cultural impact of MEMS Technology today 12
Political impact of MEMS Technology today 12
Economic impact of MEMS Technology today 13
Environmental impact of MEMS Technology today 14
ETHICAL CONSIDERATIONS ASSOCIATED WITH THE MEMS
TECHNOLOGY 15
The Present MEMS Technology 15
The Risks of MEMS Technology 17
People and MEMS Technology 18
We ought to be worried about our children 19
Who is to blame 19
On The Bright Side 20
CONCLUSION 21
REFERENCES 22

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Introduction
The first commercial usages of the Micro-Electro-Mechanical Systems (MEMS)
Technology were in the automobile, and medical industries. MEMS industry has
blossomed into a wide variety of applications, which has spread throughout numerous
market sectors such as the following biomedicine, pharmaceutical, health,
telecommunication, energy, Information Technology (IT), and security. MEMS
Technology is one of the most promising technologies for the 21st Century, and it has a
possibility to transform both industrial, and consumer products by intermixing silicon-
based microelectronics with micromachining technology. Currently, MEMS Technology
can be found in the many of our consumer electronics such as smart phones, tablets,
video game systems, and other “wearable electronics for the health and fitness”
(AVEM.org, 2016). Mechanical engineers design and build machines and devices that
enable humans to live, and work in space, in the air, on the ground, and underwater
(Department Chair's Message,2016). These machines can prolong our physical abilities,
improve both our well-being and our standard of living, and it has affected the natural
environment in which we live.
A Brief History of the MEMS Technology
In the 1958, Silicon strain gauges were created by Edward E. Simmons and
Arthur C. Ruge to measure strain on an object. The most common type of Silicon strain
gauges is comprised of an insulating flexible backing which supports a metallic foil
pattern. They were glued to the object by a suitable adhesive as the object is deformed,
the foil is deformed and causing its electrical resistance which is known as the gauge
factor.

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Table 1: Chronological History of MEMS Technology
1958 Silicon strain gauges become commercially available.
1961 First silicon pressure sensor demonstrated.
1970 First silicon accelerometer demonstrated.
1979 First micro machined inkjet nozzle.
Early 1980s First experiments in surface micro machined silicon.
1988 First MEMS conference.
1990s Novel methods of micromachining developed with an aim of improving
sensors.
1993 First surface micro machined accelerometer sold (Analog Devices,
ADXL50).
2000s Massive industrialization and commercialization.
2005 Analog Devices shipped its two hundred millionth MEMS-based inertial
sensors.
This table presents the Chronological History of MEMS Technology from 1958 to 2005.
(Heena, Katyal, Chaturvedi, 2014)
The first silicon pressure sensor was demonstrated in 1961 and the First silicon
accelerometer demonstrated in 1970 and this technology has led to our modern day
Micro-Electro-Mechanical Systems to become smaller, faster, more energy-efficient and
less expensive. As the technology keeps evolving there are many applications for the
MEMS technology which will open it up to unrelated fields such as biology and
microelectronics and may expanded beyond the currently identified or known markets.
Table 2: MEMS applications
Technology/ Sensors Aerospace, Defense and Automotive Applications
Inertial sensors Missile guidance, navigation, laser range finder, Airbags, vehicle
dynamic control, navigation systems, active suspension, roll
detection.
RF MEMS Switches and tunable capacitors for radar and communications
Pressure sensors Flight control systems, cabin pressure, hydraulic systems
Manifold Air Pressure, Tire Pressure Management Systems
Flow sensors Air intake of engine, air quality in cabin
IR sensors Fingerprint sensors for authentication, Security monitoring
Shows where the MEMS applications are used (Heena, Katyal, Chaturvedi, 2014)

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Descriptionof Micro-electro-mechanicalTechnology
The Micro-electro-mechanical Technology was created in a research laboratory in
the 1950’s, but there was no interest in the technology until the1980s. It took
approximately two decades to start the design and manufacturing infrastructure in the
United States. In the United States, it is known as silicon micromachining, which evolved
into Micro-electro-mechanical Technology in the mid-1990s. MEMS Technology began
to appear in many “commercial products and applications including accelerometers used
to control airbag deployment in vehicles, pressure sensors for medical applications, and
inkjet printer heads” (Academia.edu). The Nintendo Wii controller and robotic flying
drones are great examples of the use MEMS Technology, because they allow these
devices to know where they are located in space.
Explanation of the AssociatedScience
The Micro-electro-mechanical Technology are tiny mechanisms that “typically ranges
from 20 micrometers to a millimeter” (EE Times, 2016). However, some of the MEMS
sub-components can range from 1 to 100 micrometers. The MEMS are a combined of
both electrical and mechanical functions into tiny mechanisms and they are typically
assembled upon a silicon substrate. The Micro-electro-mechanical Technology are
frequently used in actuators and as sensors. They can be called transducers. These
devices convert a mechanical physical property into an electrical one, and vice-versa. In
many cases, transducers have the capability to interchange between physical and
electrical properties, the MEMS can be designed to exclusively do one function or the
other.

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The Manufacture of MEMS of process
Fabrication of the Micro-electro-mechanical mechanisms uses the same
technology for creating standard silicon-based circuits and microprocessors. The silicon
has to be refined to a purity of 99.9999999%, since it is needed to grow solid large single
crystals in a high temperature furnace. A seed crystal of pure silicon is dunked into a
revolving crucible of liquefied pure silicon. As the seed crystal is extracted from the
rotating crucible of molten pure silicon, the liquid crystal cools around the large ingot.
This has the same crystal structure at an increased diameter. The ingot is carefully
checked to make sure that there are no flaws in the crystalline structure that would
prevent future growth and sized features. The silicon wafers are cut from a boule, and
then polished to one or two atoms evenness. Sometimes extra doping steps are taken to
make them more conductive in preparation for becoming semiconductors. Micro-electro-
mechanical mechanisms are manufactured in small batches where numerous silicon
wafers can be progressed at the same time. Depending on the chip size Micro-electro-
mechanical mechanisms can be made in a single batch.
There are many manufacturing techniques that can be used in creating Micro-
electro-mechanical mechanisms, such as developing new semiconductors. At different
times of the manufacturing process, material needs to be selectively removed from
within, and around what had previously been laid down. This process can be done by
applying a masking layer to protect the existing circuits. The pattern of the desired
features can be burned into this masking layer by exposing it to UV light, an electron
beam, or X-Ray radiation. This locally modifies the masking layer so that the desired
pattern is revealed. The masking layer provides an etching mask which allows different
techniques to be used to expose the newly formed areas. The electrochemical etching is

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vital in microsystems production because it, “is the basis of the bulk micromachining
process. Bulk micromachining etches away relatively large portions of the silicon
substrate leaving behind the desired structures” (SCME 2008). Micromachining has
continued to be very dominant in the creation of micromechanical mechanisms such as
“micro-fluidic channels, nozzles, diaphragms, suspension beams, and other moving or
structural elements” (SCME 2008). In the production of Micro-electro-mechanical
mechanisms, there are two methods that are currently being used in the etching of a
silicon wafer.
The first one is to submerge the silicon wafer into a liquid bath of a chemical etchant
agent. This is known as wet etching, and the chemical etchant agent eat away substrate
material. “The most common form of isotropic silicon etch is HNA, which comprises a
mixture of hydrofluoric acid (HF), nitric acid (HNO3) and acetic acid (CH3COOH).
Isotropic etchants are limited by the geometry of the structure to be etched. Anisotropic
etchants etch faster in a preferred direction. Potassium hydroxide (KOH) is the most
common anisotropic etchant as it is relatively safe to use. Structures formed in the
substrate are dependent on the crystal orientation of the substrate or wafer”
(Academia.edu, 2002).

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Wet Etching
Step 1: Wet Etch
 Wafers to be etched are placed in a wafer carrier, also known as a "boat”.
 The carrier is lowered into the tank containing the heated etchant solution.
 The wafers are left in the solution for a calculated amount of time.
Etch -The carrier with wafers is lowered into a tank of liquid etchant [Photo courtesy of Bob Willis]
From (SCME), 2008
Step 2: Rinse
Once the etch time expires, the wafer carrier is lifted out of the tank and transferred to another tank
where it is rinsed with ultra - clean deionized water. The graphic shows a quick – dump - rinse
(QDR) in the "rinse" cycle.
From (SCME), 2008

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Step 3: Drying
Typically, the wafers are placed in a Spin Rinse Dryer (SRD) (see photo) where they are rinsed and
dried. The SRD's operation is similar to a centrifuge. The wafer carrier is placed in the machine and
rotated while being rinsed with deionized water. After the rinse, the water is turned off. The carrier
continues to spin but at a higher rotational speed. Heated nitrogen is introduced, removing any
remaining water on the wafer.
Loading cassette into Spin - Rinse - Dryer (SRD)
[Photo courtesy of Bob Willis]
From (SCME), 2008
The second method is to use vapor phase or plasma at high temperatures. This
method is known as Dry etching. Reactive and deep ion etching are a “process in which
radio frequency is applied to the plasma in order to achieve a higher aspect ratio”
(Academia.edu, 2002). This technique is most often used for special applications,
because it is appropriate for high volume production.
Dry Etching
Physical etch is very similar to the sputtering deposition process. It may be referred to as "ion beam
etching", "sputtering" or "ion milling". Ions bombard the surface of the wafer, causing molecules to
sputter off the surface. It is entirely a physical process, with no chemical reaction occurring (see
graphic).
Physical Etch -Ion Bombardment

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causing molecules to sputter off the exposed surface.
(Academia.edu, 2002).
 Wafers are placed on a negatively grounded holder in a vacuum chamber.
 A gas is introduced into the RF - powered chamber under low pressure (e.g., <50 mTorr). A
plasma is struck (ignited).
 In the chamber, the gas molecules pass through the plasma and collide with high energy
electrons. The energy is transferred from the electrons to the gas etchant molecules.
 These collisions result in high - energy state ions.
 These gas ions have a positive charge and are attracted to the negatively - grounded holder.
  The ions accelerate as they move toward the wafer holder.
  When the ions hit the wafer, surface layer molecules are removed.
  This process continues until the pattern is etched through the surface layer, exposing the
underlying layer.
From (SCME), 2008
These methods are very similar to how a complementary metal oxide
semiconductor (CMOS) is created, because of their similarity in design signal
conditioning. Logic level circuitry can be added to the same piece of silicon substrate
while the MEMS structures are made. This reduces the cost of having additional circuits
added to the finished device.

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Analysis of the technology
Social impact of MEMS Technology today
The Micro-electro-mechanical technology (MEMS) is a misunderstood
technology that does not have a universal definition or understanding by the lay man,
however there are many products and services that use Micro-electro-mechanical
technology today.
This technology is still emerging and is not widely accepted it is human nature to
take a carefully attitude to the new or unknown. MEMS are miniature in size, which
instantaneously causes paranoia that weighs greatly on our understanding and acceptance
to potential products that are used this technology by the general public. For example, the
first Micro-electro-mechanical accelerometer was demonstrated in 1979 at Stanford
University. The Micro-electro-mechanical accelerometer was not used for nearly fifteen
years until automotive industry began to use Micro-electro-mechanical accelerometer in
automotive air bag safety systems. At the time of the demonstration Micro-electro-
mechanical accelerometer was still it early stages but the automotive industry quickly
recognized its potential. The confidence was gradually gained through many rounds of
testing and redesigning which helped in development of the current Micro-electro-
mechanical technology used today.
Bosch is a good example of a company who dominates the automotive sensor
market and in 2005 they launched a subsidiary company called Bosch Sensortec which is
leveraging automotive leadership capabilities to consumer space travel industry. Bosch
MEMS technology can be found crash sensing technology for air bag control, “vehicle
dynamic control systems help the driver regain control of the automobile when it starts to
skid” (Sensorsmag.com, 2016) Rollover Detection, Antitheft Systems, Electronic Parking

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Brake Systems, and Vehicle Navigation Systems. The only thing holding the MEMS
technology back is the proprietary information and developments which are extremely
protected by the powerful corporations as well as the government due to the amount
funding needed to advance a technology.
Cultural impact of MEMS Technology today
Technology is in our daily lives and we frequently use some form of technology
when we get up in the morning and turn on the radio or television to listen to the weather
report or the news, when we brew a cup of coffee are we using technology to do so.
Nearly everyone today has a smart phone or tablet which we use for work or personal.
Uses of these devices range from entertainment, shopping, researching products, to using
them to communicate with our friend and family. As technology continues to advance it
makes it possible to do the thing that we thought were impossible many years ago and
that we only dreamed of. In the old days of satellite phones were bricks with the current
MEMS technology these phones have become smaller, thinner, faster, and has reduced
weight of the current cell phone so much so that these phones now can fit into any
pocket. Now cell phones help us do our daily tasks more quickly. In society everything
we see and do is affected by MEMS technology from medical industry to the media.
Political impact of MEMS Technology today
The MEMS technology can be found throughout the world in many different
industries today and this technology has sparked interest with the United States and
Overseas governments who are trying to take advantage of this technology. The United
States and Overseas governments are looking at ways to deploy this technology for their
advantage. It has been found that there are many different military applications for them,
such as chemical attack warning sensor, friend or foe identification, and distributed

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battlefield sensor net.
Figure 1: It depicts the technology that have been created by using the MEMS technology
(SEMI.ORG, 2016).
Economic impact of MEMS Technology today
Over the last several years the manufacturing of the MEMS technology has been
getting smaller and this technology is transforming every products and industry. The
MEMS technology is a combination of micromachining technology and silicon-based
microelectronics and they are being used to lower the cost of production. There is wide
variety of uses for the MEMS technology such as industrial application,
telecommunication, medical, automotive and space industry and in consumer electronics
which has led the MEMS sector to “nearly $12 billion in business in 2013, with more
than 10 percent growth from 2012, according to a study by Yole Development. In the

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years ahead, Yole estimates that the MEMS market will nearly double and reach $22.5
billion by 2018” (AVEM.org, 2016).
Figure 2: Shows how the MEMS technology is helping reduce our power consumption
(SEMI.org, 2016).
MEMS technology has developed a lot over the last several years and some of
these technology trends are worth investigating and offer many opportunities for the
MEMS field to flourish even further and it is worth considering especially in
nanotechnology.
Environmental impact of MEMS Technology today
The MEMS technology is used in many devices from smartphones, tablets, the
largest wind turbines, to the vacuum industry. These technologies have made many
positive impact on the environment which has reduce the manufacturing waste, reduces
energy consumption, lower materials costs, help in monitoring efforts and has opened the
door for nanotechnology to be created.

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The downside to the production is MEMS technology is the waste they
produced at every stage of production. MEMS demand materials such as silicon and
many types metals for their fabrication, which can be harming if not managed properly in
the production process and when these devices become obsolete they become part of the
waste.
Ethical considerations associatedwith the MEMS technology
In the past several decades’ technology has basically altered the way live: from
the way we work, to the way we communicate with each other, and how we fight wars.
The MEMS technology has given birth to Nanotechnology which is still a developing
engineering discipline. There many fears and risks associated with this technology today,
there are many arguments for and against this technology.
The Present MEMS Technology
The MEMS technology began to appear in the Biomedical industry in the 1980s
and this technology has led to many disposable and reusable blood pressure sensors to
monitor intraocular pressure, intracranial pressure, intrauterine pressure, and angioplasty.
The effects of these gadgets inside the human body is still unknown but this technology
has unlocked unprecedented possibilities in the medical industry by helping create
polymer membranes that “could be used in devices like diagnostic tests and smart
prosthetics. There are already bionic limbs that can respond to stimuli from an amputee's
nervous system and the external environment, and prosthetic bladders that regulate
urination for people paralyzed below the waist” (Science Daily, 2016). This type of
technology does not affect with the human body, but there are many moral and ethical
questions that come into play when they are combined into larger gadgets:

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 Inertial Sensors for defibrillators and pacemakers which is used determine if the
person has a chaotic heart beat
 Hearing-Aid Transducer “is an electroacoustic device used to receive, amplify
and radiate sound into the ear” (Solid State Technology, 2014).
 Microfluidics for diagnostics involve movement, mixing and control of small
volumes … of fluids. A typical microfluidic system is comprised of needles,
channels, valves, pumps, mixers, filters, sensors, reservoirs, and dispensers.
Microfluidics enable … point-of-care … medical diagnosis (Solid State
Technology, 2014).
There are many moral dilemma concerning the modern MEMS technology and
nanotechnology that is being placed the human body today, many visionaries expect a
utopian outlook to appear in the near future. Many of the utopians argue that this
technology could be employed to create a cheap high-quality product this means
technology could be used to construct food rather than cultivate it. The medical industry
is hopeful that nanotechnology can be programmed travel through a person’s blood
stream to fight against unwanted viruses, fatty deposits and to lessen the chance of a
cardio-vascular disease. Humanity is continuously looking for ways improve themselves
but where do we draw the line in the sand because the gap keeps getting wider. A good
example of this is the divide between the rich and the poor. The rich keep getting richer
and the poor continue to get poorer and poorer. Some people see the new technology as
placing society on an even playing field, but history of technology itself has shown it
tends to draw out the haves and the have-nots with-in societies around the globe.

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The Risks of MEMS Technology
Humans have flourished on new technology for their pleasure and to say they
have the newest gadget on the market this technology has caused a moral and ethical
issues over time. “Technology undermines human freedom … insofar as it reduces any
human being to a machine and nothing more?” (Lawler, 2014). Everybody believes that
we are a free will being that is influenced by on technology to run our daily lives. What if
the machines we use today turned tables on us by controlling what we are able to do in
our daily lives? Who would have thought that the MEMS technology could be combined
into bigger mechanisms and be compatible with the human body? The MEMS technology
has led to a perfect and potential “use in medical devices like bionic limbs and other
artificial body parts.” (Johnson, 2012). This technology has played a vital part in laying
the groundwork for creating bio-circuitry which is a combination of real tissue and
electronic control thus allowing the human body to be governed by a microchip which
makes the delivery drug much faster.
Figure 5: The JewelPUMP uses MEMS technology to deliver the precise amount of a drug to the
blood-steam (Solid State Technology. 2014).
The biggest question that arise out of this technology is “Are we playing God?”
There many people who say this technology has gone too far and we need take step back.

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We need look at ourselves to see kind of humanity we want Humanity with technology or
a Humanity with technology.
People and MEMS Technology
In today society MEMS technology is everywhere from medical and personal
devices that we use every day and it is altering the way we are raising our children. Over
the last several decades’ technology has changed from a computer room to hand tool the
we use daily. Today our children use some sort of technology before they one such as
game consoles, MP3 players, and laptops.
Figure 6: Resource:“Digital is Just a Small Part of the Media Mix for Today's Children” (Ward,
2010)
According to a survey done by Fly Research show us how many children aged 5-16 are
using technology such as computers, gaming consoles, smartphone to play playing games,
chatting with their friends and family, and watch online videos.” 21% of kids appear to be hooked
by social networking, spending six hours or more on sites such as Bebo, Facebook or Myspace”
(Ward, 2010).

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We ought to be worried about our children
Our children are becoming very familiar with the different types of media
platforms that containing the MEMS Technology that are in today society this mean that
our children are losing their imaginative and physical play and weakening their social
skills, empathy for others which is important for the child’s growth.
Many of our teenagers today are having trouble connecting and identifying
emotions in their peers due to their lack of ability to feel sympathy for others who are in
mourning, who might be in pain, or who might be upset, and this is causing a huge
concern “that excessive viewing of real or contrived violence online and/or playing video
games that are violent or contain other age-inappropriate content could be numbing the
sensitivities of young people, immunizing them from experiencing compassion and
caring for others” (Sara, 2013). All of these devices use some form of the MEMS
Technology today.
Who is to blame
In today’s society parents and adults are strongly encouraged to monitor their
children’s media content since they spend lot time texting and posting pictures to
Facebook, Myspace another social media. Parents need to create a balance between
technology and help their children build moral fiber as they are grow up. In today’s
culture parents often put their kids in front of some sort of wireless device to keep them
out of their hair while they cleaning, cooking, and more. This trend has been going on for
a long time and this has become a critical issue in schools these days because many of
our children are struggling with grammar punctuation and spelling due to the MEMS
technology which offers the user choice words when they misspell it or spell it

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phonetically. Most often the blame falls on the educators when the blame should belong
on parents.
This technology poses another big problem for parents these days which is cyber-
bullying since everyone now carries a smartphone or tablet they can post any kind of
rude, hurtful comments about the person height, weight, looks, etc.… before the MEMS
technology, cyber-bullying was non-existent but recently cyber-bullying attacks are
continuing to go up and these attack are due to everyone having a smartphone or tablet
which has led to some of the teenager killing themselves.
On The Bright Side
There is a lot of concern when it comes to letting our children use this technology
because they losing their social skills due fact they are spending time behind the MEMS
technology. The only way to comfort this is to stimulate this age group with mental
games, social problems, and physical active for their well-being. Parents should enroll
their kids in after school sports, create a family active like biking or play exercising
programs on their gaming consoles and some adults are this way too.
In this time of advancing technology, the parents have forgotten many of the
lesson that we learned growing up and all of our choices consequences. Many authorities
agree that we as parents have to make our responsibility for safeguarding our children has
technology containing MEMS technology continues to be produced. It is our
responsibility to teach our children right from wrong and this is only way maintain
healthy content.

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Conclusion
The MEMS technology is incorporated in many of the products that we use today.
This technology allows the device to control and sense the environment. This technology
will continue evolve over time as the technology get more advanced the current industry
needs federal oversite, federal funding and a standard way to produce large qualities of
MEMS which benefits the consumer markets, the medical and space industry or the
automotive industry.
The MEMS technology is being used in the many industries to create devices that
save many people’s lives and to fulfill real business and consumer needs. However,
consumers need to constantly be aware of the effects of this technology on their
environment. The only road block that the MEMS technology faces today is that it lacks
of public trust but some people do trust this technology and have accepted it into their
lives. The MEMS technology has given an amputee his or her life back by allow doctors
to create prosthetic limbs so they could walk, run and jump and in the medical industry
the MEMS technology has also saved countless lives by the development of the
pacemaker which helps shock the heart back into rhythm.

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References
Academia.edu (2016). An Introduction to MEMS (Micro-electromechanical Systems.
(2002). PRIME Faraday Partnership. Retrieved from
http://www.academia.edu/5077471/Prime_Faraday_Technology_Watch_ISBN_1-
84402- 020-_An_Introduction_to_MEMS_An_Introduction_to_MEMS_Micro-
electromechanical_Systems_PRIME_Faraday_Partnership_PRIME_Faraday_Part
nership
AVEM.org (2016). The Growth of MEMS Technology and the Benefits to the Vacuum
Industry. Retrieved from http://www.avem.org/press-releases/featured-
articles/item/76-the-growth-of-mems-technology-and-the-benefits-to-the-vacuum-
industry
Department Chair's Message. (2016). Yale School of Engineering & Applied Science.
Retrieved 2 September 2016, from http://seas.yale.edu/departments/mechanical-
engineering-and-materials-science/undergraduate-study/department-chairs-messa
EE Times. (2016). MEMS Technology and Manufacturing on the Microscale, EETimes.
Retrieved 2 September 2016, from
http://www.eetimes.com/author.asp?doc_id=1327742
Heena, S. R. M., Katyal, A., Chaturvedi, S.K. (2014) Application for MEMS in Space.
International Review of Applied Engineering Research. Retrieved, from
http://www.ripublication.com/iraer-spl/iraerv4n4spl_03.pdf
Johnson, R. C. (2015, January 11). MEMS Market to Top $22 billion by 2018 | EE
Times. Retrieved from http://www.eetimes.com/document.asp?doc_id=1320035

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Lawler, P. (2014). Technology and Mechanization Today. Society, 51(6), 595.
doi:10.1007/s12115-014-9831-9
Sara, f. I. (2013, September 8). Children and Technology – Should you be Concerned.
Retrieved from Care2: http://www.care2.com/greenliving/children-and-
technology-should-you-be-concerned.html
Science Daily (2016). Micro-machines for the human body: Researchers adapt
microscopic technology for bionic body parts and other medical devices. Retrieved 29
September 2016, from
https://www.sciencedaily.com/releases/2013/08/130807134237.htm
SEMI.ORG. (2016). MEMS Market Can Expect Steady Growth, Structural Change.
Retrieved 21 September 2016, from http://www.semi.org/en/mems-market-can-
expect-steady-growth-structural-change-1
Sensorsmag.com (2016). MEMS Sensors Are Driving the Automotive Industry.
Retrieved 21 September 2016, from
http://www.sensorsmag.com/automotive/mems-sensors-are-driving-automotive-
industry-1088
Solid State Technology. (2014). MEMS devices for biomedical applications.
Electroiq.com. Retrieved 29 September 2016, from
http://electroiq.com/blog/2013/10/mems-devices-for-biomedical-applications/
Southwest Center for Microsystems Education (SCME), 2008 - 2010. Retrieved, from
http://web.eng.fiu.edu/npala/EEE4996/Read_assgn_10_Etch_Overview_LM_PG.
pdf

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Ward, G. (2010). Digital is just a small part of the media mix for today's children. New
Media Age, 9

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