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DESIGN AND FABRICATION OF A
 MULTIFUNCTIONAL SCANNING PROBE WITH
   INTEGRATED TIP CHANGER FOR FULLY
     AUTOMATED NANOFABRICATION

                        Curtis R. Taylor1 and Kam K. Leang2
               1Department of Mechanical and Aerospace Engineering

                        University of Florida, Gainesville, FL
                      2Department of Mechanical Engineering

                       University of Nevada-Reno, Reno, NV




23rd ASPE Annual Meeting
October 19-24, 2008, Portland, Oregon
Outline
            1. Need for Probe-based Nanoscale Tools
                      •   Challenges for nanoscale fabrication
                      •   Advantages of probe-based tools
                      •   Limitations and challenges of probe-based tools

            2. Automated Tip Changing System Concept
                      •   MEMS Thermally-Actuated Gripper and Integrated Proximity Sensor
                      •   Advantages/Benefits/Novelty
                      •   Key Applications Enabled by System

            3. Design, Modeling, and Fabrication Results
                      •   Cantilever Design
                      •   Dynamic Modeling
                      •   Coupled Electro-Thermo-Mechanical Modeling
                      •   Fabrication Process
                      •   Fabrication of Prototype



23rd ASPE Annual Meeting, Oct. 19-24, 2008     Slide   2
Nanoscale Fabrication Tools
    • TOP DOWN Fab Tools
      Non-Planar Surface Features
    – Mesas, Trench, Line and Hole           FIB
        geometries via:
    – E-beam lithography
    – FIB sculpting
    – Micromachining/fabrication


    • BOTTOM UP Fab Processes
      Strain and Chemical Surface
      Modification                                                 MicroFab
    – Heteroepitaxial Strain
    – Ion Implantation
    – Self-Assembly                                      Self-Assembly
      Expensive Tools
      require large fabs/cleanrooms

     Complex Processes
23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide   3
Advantages of Fabrication Via Probe Tip Tools
               IBM’s Probe-based Memory
               Technology >1 Tb/in2


                                                                                      T. Kenny, 2007




                                                                     Arrays of 1,000s of
                                                                   probes can be used to:
                                                             manipulate, pattern, machine, scribe,
                                                                     write, deposit, and
                                                                 engineer material surfaces
   Mirkin et. al.,                                                 at the nanoscale with:
   Angew. Chem. ,
   2006 (45), 7720
                                                                      <1 nm resolution
                                                                     on diverse materials
                                                             without costly cleanroom processes
       55,000 replicas (88 million nanofeatures) over 1
       cm2 in less than 30 minutes


23rd ASPE Annual Meeting, Oct. 19-24, 2008       Slide   4
Limitations and Challenges for Probe
                     Tip NanoManufacturing
    1. Tip Wear                                                1.
    2. Cross-contamination
    3. Throughput
          •
         single tip
          •
         > 5 minutes to change tip
                                                                     new tip      worn tip
    3.                               nanolithography
                                     tip                      2.
                                                               fouled tip


                                     nanomachining
                                     tip           10 um

                                                                             debris
                                                                      r ~ 10 nm
     • 50+ different probe tips and microscopy modes - no integrated platform/
       manual tip change produces slow throughput

23rd ASPE Annual Meeting, Oct. 19-24, 2008        Slide   5
Probe Tip Changer For Fully
                       Automated Nanofabrication

                                                                     Funded by NSF CMMI Grant #0726778




    To address the critical issues of throughput, tip wear,
                                                               APPLICATIONS:
    repeatability, scalability, and limited functionality of
    probe-based nanofabrication                                • Nanoscale Rapid Prototyping
                                                               • Desktop Nanofactory
    • Enhance throughput                                       • Hybrid Printing of Nanostructures
    • Expand functionality
    • Enable fully automated nanofabrication
    • Provide method for scalability and robust fabrication

23rd ASPE Annual Meeting, Oct. 19-24, 2008       Slide   6
Tip Changing System Concept




23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide   7
Cantilever Design
   Specifications
     • Design Specs and
       Requirements
          – compatible with existing
            AFMs
          – actuation
          – stiffness
          – resonant frequency
          – gripping force and tip
            stability

   • Thermally-Actuated
     Gripper
         – High current density in smaller
           arm results in higher heating
           and thermal expansion.




23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide   8
Thermally-Actuated
              Cantilever Design Concepts


                                                                                              V-flexure



                                                                flexures


   Single Flexure                            Multiple Flexure             V-Flexure
        High current density in smaller arm results in higher heating and thermal expansion



23rd ASPE Annual Meeting, Oct. 19-24, 2008          Slide   9
Static/Dynamic Modeling




23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide 10
Analytical Model of Cantilever Thermal-Actuation




     Huang et. al., J. Micromech. Microeng., 9 (1999) 64-70




                                                                   dT    2              dT                T − Ts
                                                              −kA   + J ρ AΔx = −k p A             + SΔxw
                                                                   dx  x                dx  x + Δx          RT
                                                                 joule heating             conductive heat transfer


                                                                                           (
                                                                                 ΔL = α L T − Tref   )

                                                                                       δ
                                                                                     deflection

23rd ASPE Annual Meeting, Oct. 19-24, 2008                    Slide 11
FEA Electro-Thermal-Mechanical Model

   COMSOL                                                Q                                   T
                                                                                                                               δ
   Multiphysics                                      joule heating                       temperature
                                                                                                                              deflection

                           electric potential distribution,               conduction,              thermal strain, Hooke’s
                                   current density                      convection heat                law, deflection
                                                                     transfer, temperature
                                   r    r                                          h                     σ = Dε
   Governing                       J = σE
   Equation                        r r
                                                              −∇gk∇T ) = Q +
                                                                (                    (Text − T )
                                                                                  dA                     −∇g = F
                                                                                                            σ
                                   Jg = Q
                                     E



    Constants                     V, ρ(T )                                 k, h                            α ,Ε



    B.C.s                        V (0) = 0                      T (0) = T (L) = 298K                      δ (0) = δ (L) = 0
                                 V (L) = V0                     heat flux on other boundaries




23rd ASPE Annual Meeting, Oct. 19-24, 2008                           Slide 12
Comparison of FEA and Analytical Model




      Same dimensions and parameters used in
                  Huang model


   Results of ‘multiphysics’ FEA model in agreement with analytical model
                                    *Note: FEA model includes convective contribution


23rd ASPE Annual Meeting, Oct. 19-24, 2008             Slide 13
Application of FEA Model to Design of Cantilevers
                                     Q                                  T
                               joule heating                       temperature
                                                                                                     δ
                                                                                                   deflection
        electric potential                          conduction,                  thermal strain,
       distribution, current                      convection heat                 Hooke’s law,
              density                          transfer, temperature               deflection




23rd ASPE Annual Meeting, Oct. 19-24, 2008                   Slide 14
FEA Modeling of Design Concepts
                                                           V-flex fails by contact of hot arms




                                                                   max ~ 3
                                                                    um




                                             1200 K = thermal                      max ~
                                                  failure                           2V

 single                     multiple
  flex                        flex


23rd ASPE Annual Meeting, Oct. 19-24, 2008          Slide 15
Fabrication of Prototype

    •      3 mask, SOI process




23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide 16
Prototype Fabrication
      • Rapid Prototyping of Cantilever
        concept has been performed
      • Prototype of Silicon probe
        fabricated
      Future Work
      • Testing
      • Optimization
      • Modular Tip Design and Fab




23rd ASPE Annual Meeting, Oct. 19-24, 2008   Slide 17
Summary
            1. Need for Probe-based Nanoscale Tools
                       •   Sub 1 nm resolution
                       •   Low cost versus energetic beam tools and bottom up processes

            2. Automated Tip Changing System Concept
                       •   Addresses key issues of tip wear, cross-contamination, and
                           throughput
                       •   MEMS Thermally-Actuated Gripper and Integrated Proximity Sensor
                       •   Key Applications Enabled by System
                            • Nanoscale Rapid Prototyping
                            • Nanofactory

            3. Design, Modeling, and Fabrication Results
                       •   Prototype cantilever designed
                       •   Coupled Electro-Thermo-Mechanical model developed and validated
                       •   Fabrication of prototype


23rd ASPE Annual Meeting, Oct. 19-24, 2008      Slide 18

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Design and Fabrication of a Multifunctional Scanning Probe

  • 1. DESIGN AND FABRICATION OF A MULTIFUNCTIONAL SCANNING PROBE WITH INTEGRATED TIP CHANGER FOR FULLY AUTOMATED NANOFABRICATION Curtis R. Taylor1 and Kam K. Leang2 1Department of Mechanical and Aerospace Engineering University of Florida, Gainesville, FL 2Department of Mechanical Engineering University of Nevada-Reno, Reno, NV 23rd ASPE Annual Meeting October 19-24, 2008, Portland, Oregon
  • 2. Outline 1. Need for Probe-based Nanoscale Tools • Challenges for nanoscale fabrication • Advantages of probe-based tools • Limitations and challenges of probe-based tools 2. Automated Tip Changing System Concept • MEMS Thermally-Actuated Gripper and Integrated Proximity Sensor • Advantages/Benefits/Novelty • Key Applications Enabled by System 3. Design, Modeling, and Fabrication Results • Cantilever Design • Dynamic Modeling • Coupled Electro-Thermo-Mechanical Modeling • Fabrication Process • Fabrication of Prototype 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 2
  • 3. Nanoscale Fabrication Tools • TOP DOWN Fab Tools Non-Planar Surface Features – Mesas, Trench, Line and Hole FIB geometries via: – E-beam lithography – FIB sculpting – Micromachining/fabrication • BOTTOM UP Fab Processes Strain and Chemical Surface Modification MicroFab – Heteroepitaxial Strain – Ion Implantation – Self-Assembly Self-Assembly Expensive Tools require large fabs/cleanrooms Complex Processes 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 3
  • 4. Advantages of Fabrication Via Probe Tip Tools IBM’s Probe-based Memory Technology >1 Tb/in2 T. Kenny, 2007 Arrays of 1,000s of probes can be used to: manipulate, pattern, machine, scribe, write, deposit, and engineer material surfaces Mirkin et. al., at the nanoscale with: Angew. Chem. , 2006 (45), 7720 <1 nm resolution on diverse materials without costly cleanroom processes 55,000 replicas (88 million nanofeatures) over 1 cm2 in less than 30 minutes 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 4
  • 5. Limitations and Challenges for Probe Tip NanoManufacturing 1. Tip Wear 1. 2. Cross-contamination 3. Throughput • single tip • > 5 minutes to change tip new tip worn tip 3. nanolithography tip 2. fouled tip nanomachining tip 10 um debris r ~ 10 nm • 50+ different probe tips and microscopy modes - no integrated platform/ manual tip change produces slow throughput 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 5
  • 6. Probe Tip Changer For Fully Automated Nanofabrication Funded by NSF CMMI Grant #0726778 To address the critical issues of throughput, tip wear, APPLICATIONS: repeatability, scalability, and limited functionality of probe-based nanofabrication • Nanoscale Rapid Prototyping • Desktop Nanofactory • Enhance throughput • Hybrid Printing of Nanostructures • Expand functionality • Enable fully automated nanofabrication • Provide method for scalability and robust fabrication 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 6
  • 7. Tip Changing System Concept 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 7
  • 8. Cantilever Design Specifications • Design Specs and Requirements – compatible with existing AFMs – actuation – stiffness – resonant frequency – gripping force and tip stability • Thermally-Actuated Gripper – High current density in smaller arm results in higher heating and thermal expansion. 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 8
  • 9. Thermally-Actuated Cantilever Design Concepts V-flexure flexures Single Flexure Multiple Flexure V-Flexure High current density in smaller arm results in higher heating and thermal expansion 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 9
  • 10. Static/Dynamic Modeling 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 10
  • 11. Analytical Model of Cantilever Thermal-Actuation Huang et. al., J. Micromech. Microeng., 9 (1999) 64-70  dT  2  dT  T − Ts −kA   + J ρ AΔx = −k p A   + SΔxw  dx  x  dx  x + Δx RT joule heating conductive heat transfer ( ΔL = α L T − Tref ) δ deflection 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 11
  • 12. FEA Electro-Thermal-Mechanical Model COMSOL Q T δ Multiphysics joule heating temperature deflection electric potential distribution, conduction, thermal strain, Hooke’s current density convection heat law, deflection transfer, temperature r r h σ = Dε Governing J = σE Equation r r −∇gk∇T ) = Q + ( (Text − T ) dA −∇g = F σ Jg = Q E Constants V, ρ(T ) k, h α ,Ε B.C.s V (0) = 0 T (0) = T (L) = 298K δ (0) = δ (L) = 0 V (L) = V0 heat flux on other boundaries 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 12
  • 13. Comparison of FEA and Analytical Model Same dimensions and parameters used in Huang model Results of ‘multiphysics’ FEA model in agreement with analytical model *Note: FEA model includes convective contribution 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 13
  • 14. Application of FEA Model to Design of Cantilevers Q T joule heating temperature δ deflection electric potential conduction, thermal strain, distribution, current convection heat Hooke’s law, density transfer, temperature deflection 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 14
  • 15. FEA Modeling of Design Concepts V-flex fails by contact of hot arms max ~ 3 um 1200 K = thermal max ~ failure 2V single multiple flex flex 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 15
  • 16. Fabrication of Prototype • 3 mask, SOI process 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 16
  • 17. Prototype Fabrication • Rapid Prototyping of Cantilever concept has been performed • Prototype of Silicon probe fabricated Future Work • Testing • Optimization • Modular Tip Design and Fab 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 17
  • 18. Summary 1. Need for Probe-based Nanoscale Tools • Sub 1 nm resolution • Low cost versus energetic beam tools and bottom up processes 2. Automated Tip Changing System Concept • Addresses key issues of tip wear, cross-contamination, and throughput • MEMS Thermally-Actuated Gripper and Integrated Proximity Sensor • Key Applications Enabled by System • Nanoscale Rapid Prototyping • Nanofactory 3. Design, Modeling, and Fabrication Results • Prototype cantilever designed • Coupled Electro-Thermo-Mechanical model developed and validated • Fabrication of prototype 23rd ASPE Annual Meeting, Oct. 19-24, 2008 Slide 18