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UTB 2012
Vladimír Bobuský, Jan Mrázek, Ondřej Podrazký
Institute of Photonics and Electronics ASCR v.v.i,
Chaberská 57, 182 51 Prague, Czech Republic
Special optical fibers and fiber
capillaries coated with
Indium-Tin-Oxide
Outline
Introduction
Definition, motivation
Preparation of ITO (Indium-Tin-Oxide) films
Planar substrates, Fiber optics
Characterization
Electrical properties, Optical Properties
Conclusions
SPIE 2013
Goals
UTB 2012
SPIE 2013
• Preparation of ITO thin films from colloidal solution by dip-
coating method
• Characterization of electrical and optical properties and
comparison to other methods
Widely used transparent semiconductor
• Electrically conductive
• Optically transparent
Huge applications in markets:
Introduction – Indium-Tin-Oxide (ITO)
SPIE 2013
OLEDTouch panelsFlat panel displays Solar Cells
Preparation of ITO thin films
Chemical depositionPhysical deposition
Advantage & Drawbacks Phys Chem Colloids
Well tailored thickness
Application inside cavities
Large deposition area
Quick preparation
• Magnetron sputtering • Chemical approaches
• Deposition of colloids
SPIE 2013
Preparation
SPIE 2013
ITO Colloidal
solution
Sigma – Aldrich
Dispersion in isopropanol
Dip-coating
Thermal treatment
150 - 600°C
Characterization
Electrical and Optical
properties
Deposition
• Proportionality of ITO film thickness and the withdrawing speed
SPIE 2013
0 50 100 150 200
200
250
300
350
400
450
500
550
Thickness(nm)
Withdrawing speed (mm⋅min
-1
)
• The withdrawing speed is the most flexible parameter
Electrical properties – Thermal treatment
• Monotonous decrease of resistivity
SPIE 2013
• Chemical approach
Achieved 0,11 Ω*mm
Achieved 5,70 Ω*mm
• Colloidal approach
• DC magnetron sputtering Achieved 0,04 Ω*mm
[1] Thin Solid Films Papers 411(1) (2002) 42 - 45
[2] Thin Solid Films 270 (1995) 37- 42
1
2
SPIE 2013
• Temporal variation of the resistivity
• Investigation of factors responsible for the changing resistivity
Electrical properties – Temporal stability
UTB 2012
SPIE 2013
• Resistivity relative changes due to concentration of water in
atmosphere
4 6 8 10 12 14 16 18
100
200
300
400
500
600
Relativechangesoftheresistivity(%)
Partial pressure of water (kPa)
• Porosity of prepared ITO films
Electrical properties – Humidity interferences
UTB 2012
SPIE 2013
• High porosity showed by AFM and SEM
Morfology of prepared films
• Imprinted nanoparticles shape
AFM scan of ITO film
SEM of ITO film
UTB 2012
SPIE 2013
• Calculated Refractive index
• Value of the refractive index is lower than the value 2,0
400 500 600 700 800
1.4575
1.4580
1.4585
1.4590
1.4595
1.4600
Refractiveindex
Wavelength (nm)
n( λ)=A+
B
λ2
+
C
λ4
Optical properties – Spectral ellipsometry
Cauchy’s dispersion relations
3,4
[3] Vacuum, paper 1191, (1994), 45 (12)
[4] Japanese Journal of Applied Physics, (2009), 48
n –refractive index
A, B, C, - fitted constants
λ -wavelength
n = 1,457 for λ = 632 nm
Planar substrate
UTB 2012
SPIE 2013
• Refractive index of layer n = 1,46
• High porosity of ITO layer 54% pores in coated films
Theory of effective media:
Electrical properties – Optical fibers
UTB 2012
SPIE 2013
0 30 60 90 120 150 180
0
5
10
15
20
25
Resistance(MΩ)
Length (mm)
• Preparation method of ITO films alike on planar substrates
• The optical fiber with diameters lower than 250μm and
inhomogenous ITO layers
• High resistance of ITO films coated on the fibers
Optical properties – Optical fibers
UTB 2012
SPIE 2013
-30 -20 -10 0 10 20 30
0.0
0.2
0.4
0.6
0.8
1.0 ITO coating
PCS fiber
Normalizedoutputpower
Angle of incidence (deg)
Angular distribution of output power – numerical aperture (NA)
• The calculated value of numerical aperture for PCS fiber
• Refractive index of ITO cladding
NA=√ncore
2
−ncladding
2
NA = 0,1078
UTB 2012
SPIE 2013
Summary
High resistivity
Planar substrate 0,11 Ω*mm
Optical fiber 150 MΩ*mm
Colloidal solution ITO
High adsorption properties
Large surface area
High porosity 54%
Refractive index n = 1,457
UTB 2012
SPIE 2013
General Conclusions
Colloidal solution ITO
• ITO thin films prepared on planar substrates and optical fibers by
dip-coating
• Easy and quick preparation of films with determined thickness
• Strong dependence of the resistivity on the humidity
• Preparation inside of capillaries and on the optical fibers
• Homogeneity of ITO layers
• Suitable for sensors
UTB 2012
SPIE 2013
Thank you for your attention
Acknowledgement:
The research was supported by the Grant Agency of the Czech
Republic, project No. 102/10/2139
I thank to my collegues Petra Lebrušková and Zdeňěk Jarchovský for
their help with AFM and SEM analysis.
Characterization of ITO films
UTB 2012
SPIE 2013
Multimeter
TD2000
Profilometer
Tercor Alfa
Ellipsometery
Sentech 850SE spectral ellipsometer
RTA
AFM
SEM
Lyra 3 Tescan
UTB 2012
SPIE 2013
Contact:
Vladimír Bobuský
Vladimir.bobusky@gmail.com
732286880

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Special optical fibers and fiber capillaries coated with Indium-Tin-Oxide

  • 1. UTB 2012 Vladimír Bobuský, Jan Mrázek, Ondřej Podrazký Institute of Photonics and Electronics ASCR v.v.i, Chaberská 57, 182 51 Prague, Czech Republic Special optical fibers and fiber capillaries coated with Indium-Tin-Oxide
  • 2. Outline Introduction Definition, motivation Preparation of ITO (Indium-Tin-Oxide) films Planar substrates, Fiber optics Characterization Electrical properties, Optical Properties Conclusions SPIE 2013
  • 3. Goals UTB 2012 SPIE 2013 • Preparation of ITO thin films from colloidal solution by dip- coating method • Characterization of electrical and optical properties and comparison to other methods
  • 4. Widely used transparent semiconductor • Electrically conductive • Optically transparent Huge applications in markets: Introduction – Indium-Tin-Oxide (ITO) SPIE 2013 OLEDTouch panelsFlat panel displays Solar Cells
  • 5. Preparation of ITO thin films Chemical depositionPhysical deposition Advantage & Drawbacks Phys Chem Colloids Well tailored thickness Application inside cavities Large deposition area Quick preparation • Magnetron sputtering • Chemical approaches • Deposition of colloids SPIE 2013
  • 6. Preparation SPIE 2013 ITO Colloidal solution Sigma – Aldrich Dispersion in isopropanol Dip-coating Thermal treatment 150 - 600°C Characterization Electrical and Optical properties
  • 7. Deposition • Proportionality of ITO film thickness and the withdrawing speed SPIE 2013 0 50 100 150 200 200 250 300 350 400 450 500 550 Thickness(nm) Withdrawing speed (mm⋅min -1 ) • The withdrawing speed is the most flexible parameter
  • 8. Electrical properties – Thermal treatment • Monotonous decrease of resistivity SPIE 2013 • Chemical approach Achieved 0,11 Ω*mm Achieved 5,70 Ω*mm • Colloidal approach • DC magnetron sputtering Achieved 0,04 Ω*mm [1] Thin Solid Films Papers 411(1) (2002) 42 - 45 [2] Thin Solid Films 270 (1995) 37- 42 1 2
  • 9. SPIE 2013 • Temporal variation of the resistivity • Investigation of factors responsible for the changing resistivity Electrical properties – Temporal stability
  • 10. UTB 2012 SPIE 2013 • Resistivity relative changes due to concentration of water in atmosphere 4 6 8 10 12 14 16 18 100 200 300 400 500 600 Relativechangesoftheresistivity(%) Partial pressure of water (kPa) • Porosity of prepared ITO films Electrical properties – Humidity interferences
  • 11. UTB 2012 SPIE 2013 • High porosity showed by AFM and SEM Morfology of prepared films • Imprinted nanoparticles shape AFM scan of ITO film SEM of ITO film
  • 12. UTB 2012 SPIE 2013 • Calculated Refractive index • Value of the refractive index is lower than the value 2,0 400 500 600 700 800 1.4575 1.4580 1.4585 1.4590 1.4595 1.4600 Refractiveindex Wavelength (nm) n( λ)=A+ B λ2 + C λ4 Optical properties – Spectral ellipsometry Cauchy’s dispersion relations 3,4 [3] Vacuum, paper 1191, (1994), 45 (12) [4] Japanese Journal of Applied Physics, (2009), 48 n –refractive index A, B, C, - fitted constants λ -wavelength n = 1,457 for λ = 632 nm
  • 13. Planar substrate UTB 2012 SPIE 2013 • Refractive index of layer n = 1,46 • High porosity of ITO layer 54% pores in coated films Theory of effective media:
  • 14. Electrical properties – Optical fibers UTB 2012 SPIE 2013 0 30 60 90 120 150 180 0 5 10 15 20 25 Resistance(MΩ) Length (mm) • Preparation method of ITO films alike on planar substrates • The optical fiber with diameters lower than 250μm and inhomogenous ITO layers • High resistance of ITO films coated on the fibers
  • 15. Optical properties – Optical fibers UTB 2012 SPIE 2013 -30 -20 -10 0 10 20 30 0.0 0.2 0.4 0.6 0.8 1.0 ITO coating PCS fiber Normalizedoutputpower Angle of incidence (deg) Angular distribution of output power – numerical aperture (NA) • The calculated value of numerical aperture for PCS fiber • Refractive index of ITO cladding NA=√ncore 2 −ncladding 2 NA = 0,1078
  • 16. UTB 2012 SPIE 2013 Summary High resistivity Planar substrate 0,11 Ω*mm Optical fiber 150 MΩ*mm Colloidal solution ITO High adsorption properties Large surface area High porosity 54% Refractive index n = 1,457
  • 17. UTB 2012 SPIE 2013 General Conclusions Colloidal solution ITO • ITO thin films prepared on planar substrates and optical fibers by dip-coating • Easy and quick preparation of films with determined thickness • Strong dependence of the resistivity on the humidity • Preparation inside of capillaries and on the optical fibers • Homogeneity of ITO layers • Suitable for sensors
  • 18. UTB 2012 SPIE 2013 Thank you for your attention Acknowledgement: The research was supported by the Grant Agency of the Czech Republic, project No. 102/10/2139 I thank to my collegues Petra Lebrušková and Zdeňěk Jarchovský for their help with AFM and SEM analysis.
  • 19. Characterization of ITO films UTB 2012 SPIE 2013 Multimeter TD2000 Profilometer Tercor Alfa Ellipsometery Sentech 850SE spectral ellipsometer RTA AFM SEM Lyra 3 Tescan
  • 20. UTB 2012 SPIE 2013 Contact: Vladimír Bobuský Vladimir.bobusky@gmail.com 732286880

Editor's Notes

  1. First of all, I would like to initiate you into the field of ITO films
  2. Připravit vrstvy Charakterizace vrstev – Porovnání
  3. As you already know
  4. The ITO film are usually prepared by the sophisticated methods…
  5. Colloidal solution of ITO nanoparticles dispersed in isopropanol was used to prepare thin films.
  6. As we expected
  7. Resistivity monotonously decrease
  8. Relative changes of resistivity was mainly influenced by concentration of water in atmosphere Increasing concentration of water cause the increasing resistivity
  9. AFM and SEM show the high porosity of the prepared films Water is absorbed inside pores of ITO films and affects the conductivity The nanoparticles shape is imprinted to the layer
  10. Pro 632 nm – udává se.
  11. Preparation of ITO film on the planar substrates are highly reproducible The ITO layers are homogenous This theory has a logical implication that the final refractive index is a linear combination of both refractive indexes of solid ITO and air, depending on molar fraction of particular phase in substance x –molar fraction of particular phase Upravit obrázek – air 1,0 ito – 2.0
  12. ITO films on optical fibers were prepared alike on planar substrates No homogenous ITO layers were coated on the fiber with diameters lower than 250μm – sufrace tension – inappropriate adhesion
  13. The value of numerical aperture for PCS fiber and refractive index of ITO cladding were calculated Udělat tlustý čary
  14. Strong dependence of the resistivity of prepared ITO films on the humidity was observed The resistivity of prepared optical fiber and planar substrate were below 0,15 MΩ*m and 0,00011 Ω*m Refractive index of prepared films was 1,458
  15. Strong dependence of the resistivity of prepared ITO films on the humidity was observed Dotat větu o vhodnosti na senzory Vyjmenovat pozitiva Schůdnost Snadnost přípravy
  16. Připravit vrstvy Charakterizace vrstev – Porovnání