This document provides an overview of progress in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) technology and applications. It discusses the growth of the MEMS/NEMS market, successful commercial applications in automobiles and IT, and research at Ritsumeikan University on developing new MEMS/NEMS devices for applications in areas like robotics, medical diagnostics, communication technology, and more sustainable "green MEMS" using biodegradable polymers.

1. Progress of Integration in MEMS and New Industry Creation Prof. Susumu Sugiyama Scientific Expert, JSPS/JAICA Director, Research Institute for Nanomachine System Technology Professor, Ritsumeikan Global Innovation Research Organization Ritsumeikan University Japan http://www.ritsumei.ac.jp/se/~sugiyama/index.html 18, September 2009

4. Research Institute for Nanomachine System Technology ( RINST ) Micro/Nano Fabrication System Integration Micro/Nano Materials Evaluation Design and Simulation CAD Photolithography Electron beam Micro process Synchrotron radiation Completion: 31st March 2002, Total Floor Space: 1350 m 2 (Clean Room:325 m 2 )

5. Nanomachine System Technology Consortium (60 Companies) Research Institute for Nanomachine System Technology ( R I NST ) Industry, Government and Academia MEMS R & D and Commercialization 21 st Century COE Program in the Ministry of Education, Culture, Sports, Science and Technology 2002 ~ 2006 Research Office MITSUBISHI HITACHI PANASONIC NEC FUJITSU SUMITOMO E. DENSO CANON KONICA MINORUTA RICHO EPSON OMRON OLYMPUS BROTHER SHIMADZU ………

7. Micro/Nano Technology Platform Lithography, Etching, Beam Process, Deposition, Epitaxial Growth Molding, Inprinting, Measuring, Evaluation, etc MEMS/NEMS Micro/Nano System Tech. Biology Environment Medical Treatment Welfare Communication Information Tech. Security Safety Bottom Up Tech. Nano Technology Status of MEMS/NEMS Technology 0.1nm 1nm 10nm 100nm 1  m 10  m 100  m 1mm Top Down Tech. Micormachining Micro-Nano System Devices Waveguide Grating Photonic Crystal Modulator Probe for Strage Image Sensor Nano Pillar for DNA Analysis Nano Carrier for DDS Monitoring Device RF-Integrated Device Bio-polymer Chip  -TAS

8. Medical Treatment Diagnosis Robotics, FA Chemical Analysis Environment, Bio Aerospace Information Technology Medical Engineering Sports Production Delivery Transport Factory Agriculture Internet MEMS/NEMS Applications

9. 1987 2000 Passive Devices R & D Microsystems Gas Chromatography (Stanford Univ., 1979) Micro Pressure Sensor (Toyota R&D, 1986) Active Devices Electrostatic Micro Motor (MIT, 1989) Micro Gear (AT&T Bell Lab., 1987) Commercialization 21 st Century Development of MEMS/NEMS Sensors Actuators Sensors + Actuators + Processor Systematization Nano-technology Integrated Pressure Sensor (Toyota R&D, 1983) Closed Loop Accelerometer (Analog Devices) Micro-Nano Systems ) Digital Mirror Device DLP TM (Texas Instruments) )

10. MEMS Moving Devices with Integrated Circuits on a Chip

11. MEMS Moving Devices with Integrated Circuits on a Chip

12. Global MEMS/NEMS market prospect 2005-2010 (Silicon and Quart based devices) (Source: Yole Dévelopement, 8/2006) (US$ 1M  1 億円 )

13. 2005 2010 2015 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ 4.85 1.17 2.40 1 2 3 4 5 6 7 ■ 6.14 MEMS Domestic Market (MMC Data) Semiconductor Domestic Capacity (WST Data May 2008) ■ ＭＥＭＳ市場の伸びは、半導体市場（生産能力）の伸びを上回る。 （ＭＥＭＳが高機能・高集積・知能化部品として、半導体代替の傾向？） 0.44 ■ ● ● ● 5.53 5.75 5.40 5.73 ■ ■ ■ ■ 0 （ 2.2%/Y ） （ 21%/Y ） 兆円 Tera Yen MEMS market exceeds semiconductor market in growth (MEMS will be alternative of ICs as advanced intelligent parts) MEMS Market and Semi. Market Fiscal Yera

14. Successful Applications Using MEMS/NEMS Technology Previous

15. Success in Automobile - Sensors - Full-production began from the 1980s. Production of pressure sensors and accelerometers become more than 10 million/month in scale at present. Accelerometer for Airbag System ( Denso) ３ × ３ mm 2 Pressure Sensor for Electronic Fuel Injection Control System for Engine, Toyota CRDL Gyro Scope Tire Pressure Sensor Rotation Sensor Gas Sensor etc.

16. “ DMD” Projector System Texas Instruments DLP (Digital Light Processing) Success in IT - Digital Mirror Device - Full-production began from the latter half of the 1990s undergo developing for over 10 years. It is competing with LC projector in the digital projection market at present.

17. R & D Applied MEMS/NEMS Technology

18. Application into Robotics and Automation Pressure sensor Tactile Sensor Force Sensor Accelerometer Gyroscope ５ mm

19. Si Piezoreesistive Pressure Sensor Packaged sensor

20. 6-DOF Micro Force-Moment Sensor Fabricated by D-RIE on SOI sub. Diffused piezoresistors. Center of the beam = force-applying point. Application: Fingertip sensor Tactile sensor Sophisticated robot area Mx My Fz Fx Fy Mz ５ mm

21. 1 mm 3mm x 3mm 0.5mm x 0.5mm 3-D Accelerometer Sensing beam Frame Seismic mass Silico n

22. Piezoelectric pump nozzle orifice Si sensing chip Gas Rate Gyroscope Hot wire Laminar Jet Resolution=0.04(deg/sec) Ne Application to stability controller system of ship and automobile. Si sensing chip Pump Nozzle orifice Sensing chip Aluminum Case Hotwire detects the deflection of gas flow induced by Coriolis force. (L x W x T) 400 x 4 x 2  m 3 L

23. Blood Testing Chip Home Hospital Application into Medical Diagnosis For QOL On Site Diagnosis Wireless Internet 在宅 病院

24. 【 2  m-depth Chip 】 Flow test sample ： Control blood LC-TROL16P NORMAL (made in U.S.) Sensing area Blood Plasma Separation Structure of Plasma Separation Chip 赤血球： 380-530 万個 /  L 血漿 血小板： 15-34 万個 /  L 白血球： 4000-9000 個 /  L Inlet Gras Cover Si-sub Channel Filter Capillary Force Blood Blood Plasma

25. Antenna Display Micro Switches Variable Capacitors /Inductors Variable Filters Integrated Microphone Application into ICT Advanced Smart Cellular Phone Accelerometer / Vibrating Sensor Altimeter / Pressure Sensor

26. Application into Garment Pressure Sensor / Tactile Sensor Accelerometer Energy Harness Temp. Sensor Thermopile Power Generator ５ mm Cu Ni Heat dissipation film Polyimide Hot junction Heat absorption film Cold junction 45 ° Cu Ni Heat dissipation film Polyimide Hot junction Heat absorption film Cold junction 45 °

27. S-chip ID, Data user S-chip S-chip LAN ID recognition Internet user S-chip user Ubiquitous sensor environment SNA-MEMS ( S mart Na no-MEMS) SNA-MEMS Card SNA-MEMS Cube SNA-MEMS Chip 13.56MHz 2004 54x86mm 2 2005 10x10mm 2 2006 ～ 2.5x2.5mm 2 0.5 mm x 0.5mm Si Nano wire piezoresistor W=55nm 2.45GHz Wireless! Batteryless! Final Goal 0.5x0.5x0.5 mm 2 Logic CPU Sensor Actuator Power storage RF Circuit (GHz) A/D Memory ID I/O Server Server

28. SNA-MEMS Cube Packaging 21 st Century COE Program 1 cm cubic Control logic Sensor Amp. Sensor Amp. Switch circuit RF circuit Power circuit 3-D A-sensor T-sensor Electrodes/Antenna C ube

30. Rotational comb actuators Anti-reverse Mechanism Rotated Motor Combining Latch Mechanism with Comb Drive Electrostatic Actuator Outer ratchet ring Gear

31. Straight module T-Junction module Turning module Departure module Directional-switching lever Comb actuator Si Micro Transportation System In Biotechnology / Medical Science, very-small-quantity substances such as bio-cells and molecular samples under the microscope inspection

33. Micro Reciprocating Engine Packaged engine for operation ・ P= 0.45MPa ・ Q= 105ml/s ・ F= 2Hz Energy Harness Magnet (Nd-Fe-B) Generator Core Cylinder case (Si) 1 [mm] 10 [mm] 15 [mm] Piston (Si) Exhaust vent Pressure pump Combustion chamber Upper plate (glass)

34. MEMS/NEMS Devices Production Utilized Bio-based Polymer (Green MEMS/NEMS ) ・ Adaptation to global issues such as progress of global warming and climate change ・ Establishment of sustainable production system ・ Breakaway from extreme oil dependence of energy resources ・ Recyclable resources, carbon-neutral production system ＜ Background of the Research ＞ ・ Reduction of nanotechnology research results to the society ・ Since MEMS production uses the same system as a semiconductor/IC, the cost is high （ down to 1/10 ） ・ Bio-compatibility of a device, and disposable problem in medical use Shift to the bio-base material originated plant from petrochemicals Progress of micro/nano process technology Conformity to a limited production with a wide variety Research for MEMS Devise Production Utilized Bio-based Polymer ＋ Comparison to Si of PMMA Young's modulus 1/50 Density 1/2 Thermal expansion coefficient X15 Insulating property Transparency High aspect ratio (15 (2µm×30µm ) structures by Nano-imprinting Utilizing material properties Characteristic improvement technology of material Stable production micro/nano process technology Establishment of sustainable production system Application High Functional Micro Devices Microsensors, Actuators, μ-TAS, DDS, Artificial Organs Industry ICT, Automobile, Bio-medical, Precision Instruments 2008-12-02 R-GIRO S.Sugiyama Development of fabrication technology Nano-imprinting ＋ Assembly Development of material generation technology Composition of bio-base polymer 20µm 5µm Biomass grain Starch Glucose Lactic acid Poly-lactic acid Lactic acid CO 2 ・ H ２ O Photosynthesis Biodegradation Hydrolysis Enzyme decomposition Lactic acid fermentation Polymerization Biology Industry Circulation cycle of poly-lactic acid (PLA)

36. 100V@5Hz Mirror device Incident laser beam Reflected laser Mirror Device Driving Test Device Under Test Laser beam scanning by mirror device driving

37. 100V@100Hz 100V@5Hz Polymer MEMS is driven like Si device Laser Beam Track Reflected by Mirror Device Mirror Device Driving Test

38. THANK YOU FOR KIND ATTENTION ! Prof. Susumu Sugiyama Scientific Expert, JSPS/JAICA Director, Research Institute for Nanomachine System Technology Professor, Ritsumeikan Global Innovation Research Organization Ritsumeikan University Japan http://www.ritsumei.ac.jp/se/~sugiyama/index.html 18, September 2009