Design and implementation of an automated data retrieval, analysis and monitoring software for photolithography tools.

1. A.D.A.M. (Automated Data Archiving and Mining)
for ASML PAS5500
Design and implementation of an automated data retrieval,
analysis and monitoring software for photolithography tools
Advisor:
Prof. Serafino Cicerone
Candidate:
Riccardo Macioce
Tutor:
Armando Rossi

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 Among the
worldwide top 10
semiconductor sales
leaders
 Micron's Avezzano
facility produces
CMOS image sensors
Micron Technology
 Products used in mobile phones, digital and
reflex cameras, etc.

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A. D. A. M.
A.D.A.M.
Automatic
alerts
Data
visualization
Charts
generation
Data
retrieval
Archiving

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IC production process
1. Coating
2. Photolithography
3. Etching
4. Removing photoresist

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A. D. A. M.
 The original release of A.D.A.M. was
developed for an U.S.A. facility (for 300
mm photolithography tools)

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Thesis tasks
 U.S.A. fab uses 300 mm photolithography tools,
while Avezzano fab uses 200 mm tools (AMSL
PAS5500)
– Different performance and calibration tests
– Different report structures and parameters
Goal 1: make the original A.D.A.M. version
usable for PAS systems
Goal 2: design and build new features

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Goal 1
Code Design

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A.D.A.M. Architecture

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Parsing subsystem
 Crontab:
scanning tools
every 10 minutes
 Multithread
system

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Goal 2

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A new module: Air Mounts
 System of shock
absorbers for
vibration isolation
between the
projection system
(“silent world”) and
the external world

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Reports structure
0.002800000 ... 0.348432056 0.000202538 0.000019308...
0.005600000 ... 0.522648084 0.000133590 0.000017341...
0.008400000 ... 0.696864111 0.000077143 0.000023498...
[...]
1.598800000 ... 99.651567944 0.000037273 0.000000088...
1.601600000 ... 99.825783972 0.000028764 0.000000072...
1.604400000 ... 100.00000000 0.000033625 0.000000075...
1.607200000 ... 1.607200000 0.000000000 0.000000000...
1.610000000 ... 1.610000000 0.000000000 0.000000000...
[...]

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Data identification
 Context awareness and knowledge:
– Pink noise as input signal (low-pass filter until
100 Hz)
– Resonance frequency ≈ 2 Hz

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A.D.A.M.

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Project Management
 Extreme Programming (XP) [Beck,
Cunningham]
– Whole team: Customer & Developer
– Tests definition before implementation
– Story Cards
– Story Board & time management
 Risk analysis and mitigation strategies
 Change management

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Numbers
 Original ADAM:
– 14 modules
 New ADAM:
– 9 modules fixed
– 27 new modules
 About 13000 new lines of Perl code
 About 65000 new lines of
PHP/Javascript/jQuery/HTML code

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Beyond numbers
 Communication & interaction:
– Collaboration with people from different fields
– Trainings
 Problem solving:
– Signals theory
– Optics
– Linear regression
– …