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Nathan_Orloff

The document summarizes research on characterizing the in-plane relative permittivity of Sr(n+1)Ti(n)O3n+1 Ruddlesden-Popper thin films. It describes how thin film growth enables the study of this material system as a function of thickness and strain. X-ray diffraction measurements show the expected number of diffraction peaks based on the series number n. Future challenges are noted in fully characterizing the materials due to the complexity of the measurements required.

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BROADBAND IN-PLANE RELATIVE PERMITTIVITY CHARACTERIZATION OF Sr(n+1)Ti(n)O(3n+1) RUDDLESDEN-POPPER THIN FILMS N. D. Orloff
This is for Jaclyn, and my Mom, and Dad.
The Story 1. The Setup. 2. The Theory (C. Fennie) 3. The Materials (D. Schlom) 4. The Measurements
Frequency is Important. Electric Field tuning is good.
Thin films enables...           
Thin films enables...         Courtesy of D. Muller   
Sr n+1Ti nO3 n+1/DyScO3/DyScO3(110) Sr n+1Ti nO3 n+1 (110) Ba(1-x)= 5 (x)TiO3 700 Sr n = 5 700 K11(in−plane) at 300 K K11(in−plane) at 300 K n 600 600 n=6 n=6 500 n=4 500 n = 4 400 n = 3 11 400 n = 3 K 300 300 200 200 Im(K11) 100 n = 2 ~ 100 n = 2 0 0 0 05 5 10 10 15 15 20 2 Frequency (GHz) (GHz) Frequency Dispersion means loss.
The Figure of Merit? Multiple Reports & Materials! 200 1 (0) − (V) “FOM” = Figure of Merit tan δ (0) 150 Figure of Merit “FOM” = Q · %Tuning 100 50 0 0 40 80 120 160 200 240 280 320 Temperature [K] Temperature (K)
The Figure of Merit? 200 1 (0) − (V) “FOM” = Figure of Merit tan δ (0) 150 Figure of Merit “FOM” = Q · %Tuning 100 50 BSTO ~ 30 0 0 40 80 120 160 200 240 280 320 Temperature [K] Temperature (K) Bigger FOM is better.
What is strain?            Lattice mismatch = Strain.
Strained STO is awesome!  Peak is Critical Temperature. 
Strained STO is awesome!  Tunability is huge.
Strained STO is awesome?   Losses are terrible. 
Craig Fennie has a great idea. SrTiO3 is the n = ∞ member of a group of materials…
Called “Ruddlesden-Poppers” Sr(n+1)Ti(n)O(3n+1)
A simpler picture...                       
How does ferroelectricity emerge as a function of series number?
Theory predicts that…. Courtesy of T. Birol 0.0% LSAT 1.0% DyScO3 1.7% GdScO3 they should be ferroelectric.
Darrell Schlom says,                        I can grow that with MBE.
How does ferroelectricity emerge as a function of strain?
Successful growth of RPs!                       
# of Peaks is      like n...                  
These are going to be really really hard to measure.      
                
                
We can’t use these at HF... 20 0.1mm Bad 0.325mm Capacitance [pF] 15 0.875mm 1.835mm 2.9mm 10 5 0 6 7 8 10 10 10 Frequency [Hz] they show distributed effects.
                   
                   iω t0 −γ· iω t1 Vo e Vo e e
Propagation Constant (γ) at 300 K 50 180 DyScO3 GHz ) −1 40 Sr7Ti6O19(n = 6) 150 Re[γ](m ) −1 30 120 −1 Im[γ / f ](m 20 90 10 60 0 7 8 9 10 11 10 10 10 10 10 Frequency (Hz)
The effect of the film is really small. So...
A new metrology approach.                                               
What it sort of looks like.                 
The Copper Chuck...                         40 mm        
We measure this...                    for each test wafer.
Sr n+1Ti nO3 n+1 2500 Tc 50 nm/DyScO3(110) #1 1 MHz 25 nm/GdScO3(110) #1 2000 K11(in−plane) 1500 1000 n=5 n=4 500 n=3 n=2 0 0 50 100 150 200 250 300 350 400 Temperature (K)
Sr n+1Ti nO3 n+1 400 Critical Temperature (K) DyScO3 #1 350 DyScO3 #2 300 DyScO3 #3 GdScO3 #1 250 200 150 100 50 1 MHz 0 n=2 n=3 n=4 n=5 n=6 n=∞ Series Number ( n)
           +V -V     
Sr7Ti6O19 (n = 6)/DyScO3(110) T = 120K T = 180K K11(in−plane) at 1 MHz 600 800 400 600 400 200 700 1000 T = 240K (Tc) T = 300K 600 800 500 600 400 400 −50 0 50 −50 0 50 Electric Field (kV/cm)
tan(δ11)(in−plane) at 300 K Sr n+1Ti nO3 n+1 DyScO3 #3 1 MHz GdScO3 #1 0.02 0.01 0 n=2n=3n=4n=5 n=6 Series Number (n)
Sr n+1Ti nO3 n+1/DyScO3/DyScO3(110) Sr n+1Ti nO3 n+1 (110) Ba(1-x)= 5 (x)TiO3 700 Sr n = 5 700 K11(in−plane) at 300 K K11(in−plane) at 300 K n 600 600 n=6 n=6 500 n=4 500 n = 4 400 n = 3 400 n = 3 300 300 200 200 FOM = 60 FOM = 2 100 n = 2 ~ 100 n = 2 0 0 0 05 5 10 10 15 15 20 2 Frequency (GHz) (GHz) Frequency We don’t want to see this.
We measure this...                    for each test wafer.
Sr n+1Ti nO3 n+1/DyScO3(110) 700 n=6 K11(in−plane) at 300 K 600 n = 5 500 n = 4 400 n = 3 300 200 100 n=2 0 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
Sr7Ti6O19 (n = 6)/DyScO3(110) 1500 Tc = 240K 1250 K11(in−plane) T = 180K 1000 T = 120K T = 60K 750 T = 300K 500 250 0 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
Sr7Ti6O19 (n = 6)/DyScO3(110) 150 Im( K11)(in−plane) Tc = 240K 100 50 T = 300K 0 T = 120K −50 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
           V   V      
Figure of Merit at 300K Sr n+1Ti nO3 n+1 300 6 GHz to 7 GHz Grey Lines are 250 Min FOM to Max FOM 200 150 100 50 0 n=3 n=4 n=5 n=6 Series Number ( n)
Summing it all up. Developed new on-wafer              metrology. 10 Hz to 40 GHz                                   1st observation of ferroelectric Sr7Ti6O19 (n = 6)/DyScO3(110) T = 120K T = 180K K11(in−plane) at 1 MHz 600 800 400 600 400 RPs (n ≠ ∞). 200 700 1000 T = 240K (Tc) T = 300K 600 800 500 600 400 400 −50 0 50 −50 0 50 Electric Field (kV/cm) Sr n+1Ti nO3 n+1 Strain, and Layering can be 400 Critical Temperature (K) DyScO3 #1 350 DyScO3 #2 300 DyScO3 #3 GdScO3 #1 250 used to control Tc. 200 150 100 50 1 MHz 0 n=2 n=3 n=4 n=5 n=6 n=∞ Series Number ( n) Sr n+1Ti nO3 n+1 Figure of Merit of 140 (n = 6) at Figure of Merit at 300K 300 6 GHz to 7 GHz Grey Lines are 250 Min FOM to Max FOM 200 300 K between 6 GHz and 150 100 50 7 GHz 0 n=3 n=4 n=5 n=6 Series Number ( n)
Prof. D. I. & S. N. Orloff, L. Kaiser, J. Kaiser, Dr. M. & R. Wilson, J. & B. Kaiser, S. & R. London, R. & B. Hoffman, Drs. J. & D. Doran, M. & L. Schriber, M. & M. Orloff, M. & D. Lizmi, E. & S. Dennis, M. Dennis, J. Dennis, F. Orloff, C. J. & J. Long, Dr. E. Engelson, Dr. J. K. Hall, B. Smith, W. Young, A. Gretes, M. Hanlon, J. Mays, J. Kanner, L. Kirn, Dr. J. Miller, Mr. C. & A. McCann, Dr. M. R. Clary, B. Christy, Dr. C. Stark, Dr. K. Gustofson, Dr. R. Artuso, Dr. P. Redl, Prof. B. R. Conrad, Prof. J. Mateu, Dr. S. K. Dutta, Prof. J. R. Simpson, Dr. S. Hemmady, Dr. D. Mercia, Prof. S. C. Lee, Prof. A. Lewandowski, Prof. J. R. Dorfmann, Prof. C. Collado, Mr. E. Rocas, X. Li, Y. Wang, A. Haddock, Dr. S. R. Lee, Dr. S. L. Clement, Dr. D. Gu, Dr. G. C. Hilton, J. A. Beall, Dr. F. Altomare, Dr. P. Dresselhaus, Dr. Y. Xu, Dr. T. M. Wallis, Dr. P. Kabos, L. Vale, Dr. J. Higgins, Dr. M. Janezic, Dr. D. F. Williams, D. Walker, R. Ginley, L. DeSalvo, Dr. D. Schmadel, Dr. G. Jenkins Dr. M. Kelley, S. Rivera, T. Gleason, L. O'Hara, B. Kozlowski, J. Hessing, R. Monkfort, N. K. Morris, Prof. T. Cohen, Prof. S. Wallace, Prof. N. Chant, Prof. H. D. Drew, Prof. J. Goodman, Prof. S. Kamba, Prof. S. Stemmer, Prof. C. J. Fennie, T. Birol, C. H. Lee, Prof. I. Appelbaum, Prof. R. M. Briber, Prof. J. R. Anderson, Prof. S. M. Anlage, Prof. D. G. Schlom, Prof. I. Takeuchi, and Dr. J. C. Booth. I profoundly thank J. P. King for his support during the course of this work and Prof. D. I. Orloff for his critical review of this dissertation. Most of all, I thank my soon to be wife, J. R. Dennis.
Thanks to my advisors...
And the rest of the...

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PhD Defense!

  • 1. BROADBAND IN-PLANE RELATIVE PERMITTIVITY CHARACTERIZATION OF Sr(n+1)Ti(n)O(3n+1) RUDDLESDEN-POPPER THIN FILMS N. D. Orloff
  • 2. This is for Jaclyn, and my Mom, and Dad.
  • 3. The Story 1. The Setup. 2. The Theory (C. Fennie) 3. The Materials (D. Schlom) 4. The Measurements
  • 4. Frequency is Important. Electric Field tuning is good.
  • 5. Thin films enables...           
  • 6. Thin films enables...         Courtesy of D. Muller   
  • 7. Sr n+1Ti nO3 n+1/DyScO3/DyScO3(110) Sr n+1Ti nO3 n+1 (110) Ba(1-x)= 5 (x)TiO3 700 Sr n = 5 700 K11(in−plane) at 300 K K11(in−plane) at 300 K n 600 600 n=6 n=6 500 n=4 500 n = 4 400 n = 3 11 400 n = 3 K 300 300 200 200 Im(K11) 100 n = 2 ~ 100 n = 2 0 0 0 05 5 10 10 15 15 20 2 Frequency (GHz) (GHz) Frequency Dispersion means loss.
  • 8. The Figure of Merit? Multiple Reports & Materials! 200 1 (0) − (V) “FOM” = Figure of Merit tan δ (0) 150 Figure of Merit “FOM” = Q · %Tuning 100 50 0 0 40 80 120 160 200 240 280 320 Temperature [K] Temperature (K)
  • 9. The Figure of Merit? 200 1 (0) − (V) “FOM” = Figure of Merit tan δ (0) 150 Figure of Merit “FOM” = Q · %Tuning 100 50 BSTO ~ 30 0 0 40 80 120 160 200 240 280 320 Temperature [K] Temperature (K) Bigger FOM is better.
  • 10. What is strain?            Lattice mismatch = Strain.
  • 11. Strained STO is awesome!  Peak is Critical Temperature. 
  • 12. Strained STO is awesome!  Tunability is huge.
  • 13. Strained STO is awesome?   Losses are terrible. 
  • 14. Craig Fennie has a great idea. SrTiO3 is the n = ∞ member of a group of materials…
  • 16. A simpler picture...                       
  • 17. How does ferroelectricity emerge as a function of series number?
  • 18. Theory predicts that…. Courtesy of T. Birol 0.0% LSAT 1.0% DyScO3 1.7% GdScO3 they should be ferroelectric.
  • 19. Darrell Schlom says,                        I can grow that with MBE.
  • 20. How does ferroelectricity emerge as a function of strain?
  • 21. Successful growth of RPs!                       
  • 22. # of Peaks is      like n...                  
  • 23. These are going to be really really hard to measure.      
  • 24.                 
  • 25.                 
  • 26. We can’t use these at HF... 20 0.1mm Bad 0.325mm Capacitance [pF] 15 0.875mm 1.835mm 2.9mm 10 5 0 6 7 8 10 10 10 Frequency [Hz] they show distributed effects.
  • 27.                    
  • 28.                    iω t0 −γ· iω t1 Vo e Vo e e
  • 29. Propagation Constant (γ) at 300 K 50 180 DyScO3 GHz ) −1 40 Sr7Ti6O19(n = 6) 150 Re[γ](m ) −1 30 120 −1 Im[γ / f ](m 20 90 10 60 0 7 8 9 10 11 10 10 10 10 10 Frequency (Hz)
  • 30. The effect of the film is really small. So...
  • 31. A new metrology approach.                                               
  • 32. What it sort of looks like.                 
  • 33. The Copper Chuck...                         40 mm        
  • 34. We measure this...                    for each test wafer.
  • 35. Sr n+1Ti nO3 n+1 2500 Tc 50 nm/DyScO3(110) #1 1 MHz 25 nm/GdScO3(110) #1 2000 K11(in−plane) 1500 1000 n=5 n=4 500 n=3 n=2 0 0 50 100 150 200 250 300 350 400 Temperature (K)
  • 36. Sr n+1Ti nO3 n+1 400 Critical Temperature (K) DyScO3 #1 350 DyScO3 #2 300 DyScO3 #3 GdScO3 #1 250 200 150 100 50 1 MHz 0 n=2 n=3 n=4 n=5 n=6 n=∞ Series Number ( n)
  • 37.            +V -V     
  • 38. Sr7Ti6O19 (n = 6)/DyScO3(110) T = 120K T = 180K K11(in−plane) at 1 MHz 600 800 400 600 400 200 700 1000 T = 240K (Tc) T = 300K 600 800 500 600 400 400 −50 0 50 −50 0 50 Electric Field (kV/cm)
  • 39. tan(δ11)(in−plane) at 300 K Sr n+1Ti nO3 n+1 DyScO3 #3 1 MHz GdScO3 #1 0.02 0.01 0 n=2n=3n=4n=5 n=6 Series Number (n)
  • 40. Sr n+1Ti nO3 n+1/DyScO3/DyScO3(110) Sr n+1Ti nO3 n+1 (110) Ba(1-x)= 5 (x)TiO3 700 Sr n = 5 700 K11(in−plane) at 300 K K11(in−plane) at 300 K n 600 600 n=6 n=6 500 n=4 500 n = 4 400 n = 3 400 n = 3 300 300 200 200 FOM = 60 FOM = 2 100 n = 2 ~ 100 n = 2 0 0 0 05 5 10 10 15 15 20 2 Frequency (GHz) (GHz) Frequency We don’t want to see this.
  • 41. We measure this...                    for each test wafer.
  • 42. Sr n+1Ti nO3 n+1/DyScO3(110) 700 n=6 K11(in−plane) at 300 K 600 n = 5 500 n = 4 400 n = 3 300 200 100 n=2 0 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
  • 43. Sr7Ti6O19 (n = 6)/DyScO3(110) 1500 Tc = 240K 1250 K11(in−plane) T = 180K 1000 T = 120K T = 60K 750 T = 300K 500 250 0 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
  • 44. Sr7Ti6O19 (n = 6)/DyScO3(110) 150 Im( K11)(in−plane) Tc = 240K 100 50 T = 300K 0 T = 120K −50 0 1 2 3 4 5 6 7 8 9 10 11 10 10 10 10 10 10 10 10 10 10 10 10 Frequency (Hz)
  • 45.            V   V      
  • 46. Figure of Merit at 300K Sr n+1Ti nO3 n+1 300 6 GHz to 7 GHz Grey Lines are 250 Min FOM to Max FOM 200 150 100 50 0 n=3 n=4 n=5 n=6 Series Number ( n)
  • 47. Summing it all up. Developed new on-wafer              metrology. 10 Hz to 40 GHz                                   1st observation of ferroelectric Sr7Ti6O19 (n = 6)/DyScO3(110) T = 120K T = 180K K11(in−plane) at 1 MHz 600 800 400 600 400 RPs (n ≠ ∞). 200 700 1000 T = 240K (Tc) T = 300K 600 800 500 600 400 400 −50 0 50 −50 0 50 Electric Field (kV/cm) Sr n+1Ti nO3 n+1 Strain, and Layering can be 400 Critical Temperature (K) DyScO3 #1 350 DyScO3 #2 300 DyScO3 #3 GdScO3 #1 250 used to control Tc. 200 150 100 50 1 MHz 0 n=2 n=3 n=4 n=5 n=6 n=∞ Series Number ( n) Sr n+1Ti nO3 n+1 Figure of Merit of 140 (n = 6) at Figure of Merit at 300K 300 6 GHz to 7 GHz Grey Lines are 250 Min FOM to Max FOM 200 300 K between 6 GHz and 150 100 50 7 GHz 0 n=3 n=4 n=5 n=6 Series Number ( n)
  • 48. Prof. D. I. & S. N. Orloff, L. Kaiser, J. Kaiser, Dr. M. & R. Wilson, J. & B. Kaiser, S. & R. London, R. & B. Hoffman, Drs. J. & D. Doran, M. & L. Schriber, M. & M. Orloff, M. & D. Lizmi, E. & S. Dennis, M. Dennis, J. Dennis, F. Orloff, C. J. & J. Long, Dr. E. Engelson, Dr. J. K. Hall, B. Smith, W. Young, A. Gretes, M. Hanlon, J. Mays, J. Kanner, L. Kirn, Dr. J. Miller, Mr. C. & A. McCann, Dr. M. R. Clary, B. Christy, Dr. C. Stark, Dr. K. Gustofson, Dr. R. Artuso, Dr. P. Redl, Prof. B. R. Conrad, Prof. J. Mateu, Dr. S. K. Dutta, Prof. J. R. Simpson, Dr. S. Hemmady, Dr. D. Mercia, Prof. S. C. Lee, Prof. A. Lewandowski, Prof. J. R. Dorfmann, Prof. C. Collado, Mr. E. Rocas, X. Li, Y. Wang, A. Haddock, Dr. S. R. Lee, Dr. S. L. Clement, Dr. D. Gu, Dr. G. C. Hilton, J. A. Beall, Dr. F. Altomare, Dr. P. Dresselhaus, Dr. Y. Xu, Dr. T. M. Wallis, Dr. P. Kabos, L. Vale, Dr. J. Higgins, Dr. M. Janezic, Dr. D. F. Williams, D. Walker, R. Ginley, L. DeSalvo, Dr. D. Schmadel, Dr. G. Jenkins Dr. M. Kelley, S. Rivera, T. Gleason, L. O'Hara, B. Kozlowski, J. Hessing, R. Monkfort, N. K. Morris, Prof. T. Cohen, Prof. S. Wallace, Prof. N. Chant, Prof. H. D. Drew, Prof. J. Goodman, Prof. S. Kamba, Prof. S. Stemmer, Prof. C. J. Fennie, T. Birol, C. H. Lee, Prof. I. Appelbaum, Prof. R. M. Briber, Prof. J. R. Anderson, Prof. S. M. Anlage, Prof. D. G. Schlom, Prof. I. Takeuchi, and Dr. J. C. Booth. I profoundly thank J. P. King for his support during the course of this work and Prof. D. I. Orloff for his critical review of this dissertation. Most of all, I thank my soon to be wife, J. R. Dennis.
  • 49. Thanks to my advisors...
  • 50. And the rest of the...