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1. GOST R 8.640-2008
State system for ensuring the uniformity of measurements. Radiometers of ultraviolet radiation measurements for
photolithography technological processes testing. Verification methods
ГОСТ Р 8.640-2008
Государственная система обеспечения единства измерений. Радиометры ультрафиолетового излучения для контроля
технологических процессов в фотолитографии. Методика поверки
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