1. Sintesis
solid state reaction, sol gel, vacuum system,
chemical reaction
Perlakuan
Karakterisasi
SEM: morfologi, struktur kristal, cacat
kristal, deformasi, grain growth, crystal
growth, dll

2. Scanning Electron Microscope

3. Bagian-bagian SEM

4. Skema SEM

5. General Uses:
•Mengamati permukaan pada M= 10-100000 X,
resolusi permukaan hingga kedalaman 3-100 nm
•Apabila ditambahkan dengan detektor
backscattered, SEM berfungsi untuk:(1)
mengamati grain boundaries pada sampel tanpa
etsa; (2)pengamatan daerah domain pada material
ferromagnetic, (3)evaluasi orientasi kristalografi
grain dengan diameter 2-10 m, (4)pengamatan
fasa lain akibat adanya perbedaan rerata grain

6. Examples of Aplication
• Pengamatan permukaan dengan perbesaran diatas
perbesaran mikroskop optik
• Pengamatan fracture surfaces dan perbedaan
kedalaman permukaan akibat etsa
• Penentuan orientasi kristalografi akibat preparasi
surface, individual grain, fasa presipitat dan
dendrite

7. • Identifikasi elemen kimia dalam ukuran mikron
pada bulk sample,eg; inclusi, fasa presipitate
• Evaluasi gradien komposisi kimia pada
permukaan bulk sample
• Pengamatan pada semikonduktor devices untuk
failure analysis, function control dan verifikasi
desain
Examples of Aplication

8. Sampel
• Form; solid ataupun liquid dengan tekanan
rendah(>10-3 torr atau 0.13 Pa)
• Size: dibatasi oleh kemampuan masing-masing
peralatan biasanya sample dengan luasan 15-20
cm2 atau ukuran 4-8 cm masih mungkin diamati
dengan SEM
• Preparation: standar metalografi berupa teknik
polishing dan etsa yang berlaku untuk material
konduktif. Untuk material non-konduktif biasanya
di-coating dengan lapisan tipis carbon, gold atau
gold alloy hingga ketebalan lapisan 400Å. Sampel
harus terhubung dengan holder biasanya
digunakan pasta perak. Sample harus terbebas dari
uap air, bahan pengotor organik dan minyak

9. Capabilities of related Techniques
• X-ray Diffraction: menyediakan informasi
kristalografi
• Mikroskop Optik: memberikan informasi
awal keadaan permukaan sampel
• Transmission electron microscopy:
memberikan informasi keadaan material
secara spesifik; dislokasi, small angle
boundari distribution and vacancy cluster.

11. Kategori komponen dalam mikroskop elektron
1. Electron column
2. Specimen chamber
3. Vacuum pumping system
4. Electronic control and imaging system

12. Electron Source (GUN)

13. A Thermionic Electron Gun functions in the following manner
1. An positive electrical potential is applied to the anode
2. The filament (cathode) is heated until a stream of electrons is produced
3. The electrons are then accelerated by the positive potential down the column
4. A negative electrical potential (~500 V) is applied to the Whenelt Cap
5. As the electrons move toward the anode any ones emitted from the filament's
side are repelled by the Whenelt Cap toward the optic axis (horizontal center)
6. A collection of electrons occurs in the space between the filament tip and
Whenelt Cap. This collection is called a space charge
7. Those electrons at the bottom of the space charge (nearest to the anode) can exit
the gun area through the small (<1 mm) hole in the Whenelt Cap
8. These electrons then move down the column to be later used in imaging

14. Parameter elektron gun
Brightness,  yang menunjukkan fungsi
material filamen, suhu operasi dan tegangan.
LaB6 adalah material dengan nilai  tertinggi
dimana nilainya 10-20 X lipat dibanding
tungsten
     
2
2
4
/ o
o
d
I
solidangle
area
current


 


15. • The Broers design utilizes a
tungsten coil wrapped around the
pointed end of a long (around 2 cm)
LaB6 rod. This design uses the heat
radiation and electron bombardment
from the tungsten coil to heat the
very end of the tip. The conduction
of heat through the cathode holder,
located at the other end of the rod,
helps to lessen the problems of the
reactivity of the material.
• Vogel proposed a short LaB6 rod
heated directly by passing a current
through the LaB6 rod, perpendicular
to the length of the rod. This is
accomplished by using rigid
electrical connectors that also
provide the support for the rod.
• In the design of Ferris et al.7, a short
LaB6 rod is supported by a ribbon or
strip through which an electrical
current is passed for heating. The
rod is heated by conduction from the
ribbon.

16. Specimen Interaction

17. Backscattered Electrons:
Formation
Caused by an incident electron colliding with an atom in the specimen which is
nearly normal to the incident's path. The incident electron is then scattered
"backward" 180 degrees.
Utilization
The production of backscattered electrons varies directly with the specimen's atomic
number. This differing production rates causes higher atomic number elements to
appear brighter than lower atomic number elements. This interaction is utilized to
differentiate parts of the specimen that have different average atomic number. An
example is shown in the SEM output section, specifically the mechanically alloyed
specimen micrograph

18. Secondary Electrons:
Source
Caused by an incident electron passing "near" an atom in the specimen, near enough
to impart some of its energy to a lower energy electron (usually in the K-shell). This
causes a slight energy loss and path change in the incident electron and the
ionization of the electron in the specimen atom. This ionized electron then leaves
the atom with a very small kinetic energy (5eV) and is then termed a "secondary
electron". Each incident electron can produce several secondary electrons.
Utilization
Production of secondary electrons is very topography related. Due to their low
energy, 5eV, only secondaries that are very near the surface (<10nm) can exit the
sample and be examined. Any changes in topography in the sample that are larger
than this sampling depth will change the yield of secondaries due to collection
efficiencies. Collection of these electrons is aided by using a "collector" in
conjunction with the secondary electron detector. The collector is a grid or mesh
with a +100V potential applied to it which is placed in front of the detector,
attracting the negatively charged secondary electrons to it which then pass through
the grid-holes and into the detector to be counted.

19. Auger Electrons
Source
Caused by the de-energization of the specimen atom after a secondary electron is
produced. Since a lower (usually K-shell) electron was emitted from the atom
during the secondary electron process an inner (lower energy) shell now has a
vacancy. A higher energy electron from the same atom can "fall" to a lower energy,
filling the vacancy. This creates and energy surplus in the atom which can be
corrected by emitting an outer (lower energy) electron; an Auger Electron.
Utilization
Auger Electrons have a characteristic energy, unique to each element from which
it was emitted from. These electrons are collected and sorted according to energy
to give compositional information about the specimen. Since Auger Electrons have
relatively low energy they are only emitted from the bulk specimen from a depth
of <3

20. X-rays
Source
Caused by the de-energization of the specimen atom after a secondary electron is
produced. Since a lower (usually K-shell) electron was emitted from the atom
during the secondary electron process an inner (lower energy) shell now has a
vacancy. A higher energy electron can "fall" into the lower energy shell, filling the
vacancy. As the electron "falls" it emits energy, usually X-rays to balance the total
energy of the atom so it .
Utilization
X-rays or Light emitted from the atom will have a characteristic energy which is
unique to the element from which it originated. These signals are collected and
sorted according to energy to yield micrometer diameter) of bulk specimens limiting
the point-to-point comparisons available

21. Thin Specimen Interactions
Unscattered Electrons
Source
Incident electrons which are transmitted through the thin specimen without any
interaction occurring inside the specimen.
Utilization
The transmission of unscattered electrons is inversely proportional to the
specimen thickness. Areas of the specimen that are thicker will have fewer
transmitted unscattered electrons and so will appear darker, conversely the
thinner areas will have more transmitted and thus will appear lighter.

22. Elasticity Scattered electrons
Source
Incident electrons that are scattered (deflected from their original path) by atoms in
the specimen in an elastic fashion (no loss of energy). These scattered electrons are
then transmitted through the remaining portions of the specimen.
Utilization
All electrons follow Bragg's Law and thus are scattered according to
Wavelength=2*Space between the atoms in the specimen*sin(angle of scattering).
All incident electrons have the same energy(thus wavelength) and enter the
specimen normal to its surface. All incidents that are scattered by the same atomic
spacing will be scattered by the same angle. These "similar angle" scattered
electrons can be collated using magnetic lenses to form a pattern of spots; each spot
corresponding to a specific atomic spacing (a plane). This pattern can then yield
information about the orientation, atomic arrangements and phases present in the
area being examined.

23. Inelastically Scattered Electrons
Source
Incident electrons that interact with specimen atoms in a inelastic fashion, loosing
energy during the interaction. These electrons are then transmitted trough the rest of
the specimen
Utilization
Inelasticaly scattered electrons can be utilized two ways
•Electron Energy Loss Spectroscopy: The inelastic loss of energy by the incident
electrons is characteristic of the elements that were interacted with. These
energies are unique to each bonding state of each element and thus can be used
to extract both compositional and bonding (i.e. oxidation state) information on
the specimen region being examined.
•Kakuchi Bands: Bands of alternating light and dark lines that are formed by
inelastic scattering interactions that are related to atomic spacings in the
specimen. These bands can be either measured (their width is inversely
proportional to atomic spacing) or "followed" like a roadmap to the "real"
elasticity scattered electron pattern.

25. Pemasangan detektor
This is an image of the broken surface
of a piece of metal, formed using
secondary electron imaging
This is a picture taken inside the sample
chamber. On the left of the secondary
detector is the lens, on the right is the
backscatter detector.

26. Pemasangan detektor
On the far left of the backscatter
detector is the lens, in the center is the
secondary detector. To collect
electrons, the backscatter detector
moves under the lens so the electron
beam can travel through the hole in its
center.
This is an image of an aluminum copper
alloy formed using backscattered
electron imaging. The light area is
mostly copper and the dark area is
mostly aluminum.

27. Keseluruhan detektor pada SEM

28. Sistem Detektor
• Detektor Secondary Electron (SE) untuk
menghasilkan gambar analisis struktur mikro,
analisis produk korosi, patahan, kegagalan
material
• Detektor Backscattered Electron (BSE) untuk
menghasilkan gambar topografi peta struktur
mikro yang gambarnya dibentuk dari perbedaan
nomor atom/densitas yang dikandung oleh bahan.
Daerah cuplikan dengan nomer atom yang lebih
tinggi akan terlihat relatif lebih terang daripada
daerah dengan nomer atom rendah
• Detektor sinar-x (SiLi) dan EDX/EDS untuk
analisis komposisi unsur yang terkandung dalam
orde micrometer dan pemetaan (distribusi unsur)
dalam suatu bahan

29. SKEMA MICROSCOP ELECTRON