Vacuum Arc Deposition in interior cavities (Yan Valsky), Lecture Prof. R..LBoxman

VACUUM ARC DEPOSITION IN INTERIOR CAVITIES Physical and Engineering Principles and Ideas for Interior Implementations Raymond L. Boxman Electrical Discharge and Plasma Laboratory School of Electrical Engineering Tel-Aviv University

Background and Objectives ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Outline ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

I. Physics of the Vacuum Arc – The Arc Discharge ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Difference between Glow and Arc – cathode electron emission process ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Cathode Spot Characteristics ,[object Object],[object Object],[object Object],[object Object],[object Object]

Cathode Spot Plasma Jets ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Cathode Spot Theory ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Beilis Model: Cathode Spot & Cathode Plasma Jet Cathode Cathode Spot Region Hydrodynamic Plasma Flow SHEATH Electron relaxation zone. Ion diffusion Kinetic flow Knudsen Layer Plasma Jet Expansion  Acceleration Region e  i e  a

Beilis Model ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Beilis Model – cont’d ,[object Object],[object Object],[object Object],[object Object],[object Object]

Beilis Model – Hydrodynamic Plasma Expansion ,[object Object],[object Object],[object Object],[object Object],[object Object]

Explosive Electron Emission (Mesyats et al. ) ,[object Object]

EEE (Mesyats et al. ) – cont’d ,[object Object],[object Object]

Macroparticles ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

II. Vacuum Arc Engineering ,[object Object],[object Object],[object Object]

II. Vacuum Arc Engineering ,[object Object],[object Object],[object Object],[object Object]

Arc Ignition ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Controlling Cathode Spot Location and Motion ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Magnetic Control of Cathode Spots

Pulse Control ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Heat Removal ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Heat Removal from Cathode ,[object Object],[object Object],[object Object],[object Object]

Heat Removal from Cathode, cont’d ,[object Object],h c – contact heat transfer coefficient h w – heat transfer coefficient to water

Substrate Temperature Control ,[object Object],[object Object],[object Object],[object Object],[object Object]

Macroparticle Control ,[object Object],[object Object],[object Object],[object Object],[object Object]

Minimize MP Production/Transmission ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Macroparticle Removal ,[object Object],[object Object]

Two quarter-torus filtered arcs at Tel Aviv University

Filtered Arc – Advantages and Disadvantages ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Other Arc Modes ,[object Object],[object Object],[object Object]

III. How can we coat the inside of:

Approach 1: Ignore MPs ,[object Object],[object Object]

Approach 2: Miniature Filter: Example – Welty Rect. Filter

Approach 2: Miniature Filter: Another Example ,[object Object],[object Object],[object Object],[object Object]

Approach III. Beilis “black-body” HRAVA deposition device

Interior Coatings - Considerations ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Summary and Conclusions ,[object Object],[object Object],[object Object],[object Object],[object Object]

Summary and Conclusions, cont’d ,[object Object],[object Object]

Vacuum Arc Deposition in interior cavities (Yan Valsky), Lecture Prof. R..LBoxman

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