Handlers

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Varun Chopra

Wafer Handler Equipment

Technologie Business

Handlers
Semiconductor Wafer
Handling
HCL Technologies

Components
Front End
 Foup / Carrier / Cassette
 Load Port
 Interface
Back End
 Robots
 Sensors
- Power Cut Sensor
- Slot Count Sensor
- Load Port Sensor
 Pre-Aligner
 Stage
HCL Technologies

Foup / Carrier / Cassette
Carrier
HCL Technologies
Carrier

Overhead Transport System
Overhead Transport HCL Technologies

Robots
Frogleg Robot Leapfrog Robot Quadra Robot
Pre-Aligner Robot
HCL Technologies

Carrier
Contains Contains
Wafer
Handler’s Input
Overhead
Transport
HCL Technologies

Calibration & Testing
 Vibration Test
 Up Time of Handler System
 Robot’s Accuracy
 Sensors Test
 Auto Calibration
HCL Technologies

References
 www.Kensigtonlaboratories.com
 www.SEMI.org
 www.wafercare.com
 Owens Instruments
HCL Technologies

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Handlers

1. Handlers Semiconductor Wafer Handling HCL Technologies

2. Introduction HCL Technologies

3. HCL Technologies

4. Purpose HCL Technologies

5. Components Front End  Foup / Carrier / Cassette  Load Port  Interface Back End  Robots  Sensors - Power Cut Sensor - Slot Count Sensor - Load Port Sensor  Pre-Aligner  Stage HCL Technologies

6. Wafer HCL TechnologiesWafer

7. Foup / Carrier / Cassette Carrier HCL Technologies Carrier

8. Overhead Transport System Overhead Transport HCL Technologies

9. Robots Frogleg Robot Leapfrog Robot Quadra Robot Pre-Aligner Robot HCL Technologies

10. Working Recipe HCL Technologies

11. HCL Technologies Working Demo

12. Front End EFEM HCL Technologies

13. Carrier Contains Contains Wafer Handler’s Input Overhead Transport HCL Technologies

14. Back End HCL Technologies

15. HCL Technologies Backend Demo

16. Calibration & Testing  Vibration Test  Up Time of Handler System  Robot’s Accuracy  Sensors Test  Auto Calibration HCL Technologies

17. References  www.Kensigtonlaboratories.com  www.SEMI.org  www.wafercare.com  Owens Instruments HCL Technologies

18. THANK YOU !! HCL Technologies

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