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SULZER Metco Thin Film Technology


Dan Schumacher | 27th July 2011
Who is Sulzer




                MyPresentation | slide 2
Where is Sulzer Metco
                                                          Aufstrebende Märkte
                                                          • Brasilien
                                                          • Russland
                                                          • Indien
                                                          • China




      Productions   Coating machines   Customer service     Sales


                                                              MyPresentation | slide 3
Overview




           MyPresentation | slide 4
Portfolio
                                                                  Arc-PVD
                                        HVOF

             Materials for
                                        Plasma
             PTA*-welding




                                                                                         DC, HF, HCPMS
                                                                          PACVD
                                        Arc
                                                                                                          IONIT    IONIT OX


          Adding of materials for PTA    Adding of materials by   Adding of materials in thin            Thermo chemical processes
                    welding                thermal spraying                 films                            IONIT IONIT OX
                                                                   (PVD, PACVD, Hybrid)




Surface

                   Substrate                     Substrate                Substrate                               Substrate




                                                                                                                         MyPresentation | slide 5
Overview
 General Processes
  CVD and PACVD
  PVD
  – APA Arc, Sputter
  Plasma Heat Treatment
  – Plasma-nitriding


 Special Processes
  Combi Treatment
  – Nitriding + PVD
  Hybrid
  – Combination of two high ionization coating technologies (Arc and Sputter; Arc and
    HPPMS)
  HIPAC



                                                                             MyPresentation | slide 6
Overview
 Two basic processes
  CVD (Chemical Vapour Deposition)
  – One or more chemical precursor gases are used    CVD
  – Chemical reactions in the gas phase
  – PACVD / DLC




                                                    PACVD
  PVD (Physical Vapour Deposition)
  – Arc PVD
  – Sputter

                                                      PVD




                                                            MyPresentation | slide 7
Overview




           MyPresentation | slide 8
CVD




      MyPresentation | slide 9
CVD



                         CVD



  Thermal CVD
  - High-temperature                     PACVD
    (900–1050˚C)                         Plasma-Assisted CVD
  - Medium-temperature
    (720–900˚C)



                               Classic
  Classic                                               DLC layers
                               hardcoating layers
  hardcoating layers                                    (150–250°C)
                               (400–600° C)




                                                               MyPresentation | slide 10
PVD




      MyPresentation | slide 11
PVD



        Vacuum measurement    Process gas
         and control system                             Vacuum
                                                        pumpset


             Circular
           Evaporators

                                                     Window

       Power
      supplies
                                                            Infrared-
                                                          temperature-
                                                          measurement


                                                  Substrate holder
             Coating
             chamber                        BIAS Power supply
                                               (substrate)




                                                                MyPresentation | slide 12
PVD
 PVD coating
  Applied to most metal alloys and galvanised products (metals and plastics)
  Coating thickness: 0,5 -10 µm
  Hardness: 1.000 – 4.000 HV
  Temperature resistance: 300 – 900 °C
  Deposition temperature: 200 – 600 °C
  Structures:
  – Multilayer
  – Nanostructure Layers
  – Modified Layers




                                                                               MyPresentation | slide 13
PVD
  Arc Evaporation:
   Thermal electron beam




__________________________________________________________________


  Sputter:
   DC sputtering
   Magnetron sputtering
   HF sputtering




                                                         MyPresentation | slide 14
PVD
  Coating deposited by a classic circular evaporator
      Arc




________________________________________________________________
  Coating deposited by an evaporator with
  extended magnetic filed
      APA Arc
   faster spot motion
   smaller spot size
   less droplet emission
   higher evaporation rate
   higher target utilization


                                                         MyPresentation | slide 15
Thin Film Coatings
 Coating design and architecture




 substrate    substrate    substrate   substrate   substrate    substrate



                                                               MyPresentation | slide 16
PVD
 Benefits
  Low friction and low adhesion characters
  Strong wear resistance
  High hardness, high oxidation resistance and reduced chemical reactions
  New developments open up economic machining of new materials
  Coating of plastics


 Cost reduction
 Improved product quality
 Longer maintenance intervals
 Reduction of coolants and lubricants
 Increased life time




                                                                            MyPresentation | slide 17
Plasma Heat Treatment




                        MyPresentation | slide 18
Plasma Heat Treatment – Plasma-Nitriding
  Conventional heat treatment
    Annealing, hardening and tempering
  For applications in tribological, corrosive, and mechanical-dynamic systems
________________________________________________________________
  IONIT®: Plasma-nitriding for alloyed steel, cast, sinter, and special materials
  IONIT OX®: Special process for improved corrosion and wear protection




                                                                         MyPresentation | slide 19
Plasma Heat Treatment – Plasma-Nitriding




                                           MyPresentation | slide 20
Plasma Heat Treatment – Plasma-Nitriding
 Plasma heat treatment
   High surface hardness
   Improved resistance against wear, corrosion, and fatigue
   Reproducible nitride structure
   Activation of high-alloyed steels
   High accuracy grade, low distortion
   Reduced adhesion and cold welding
   Environmentally friendly


 Our Service for Customers
   Tailored solutions
   Treatment of big parts (up to 13 metres length, 10 tons, 1.8 metres diameter)
   Long experience (over 40 years)
   Consultant service


                                                                              MyPresentation | slide 21
PACVD - DLC




              MyPresentation | slide 22
PACVD - DLC
 PACVD (Plasma-Assisted Chemical Vapour Deposition)


 Takes place at significantly lower temperatures than thermal CVD


 Differentiable in two application areas
  Deposition of classic hardcoating layers (TiN, TiCN, Al2O3)
  Deposition of hard amorphous carbon layers (DLC)




                                                                    MyPresentation | slide 23
PACVD - DLC
 System for DLC coatings
                           advanced arc module
                             graphite cathode




                                 planetary




                                                 MyPresentation | slide 24
PACVD - DLC
 DLC coatings
  Amorphous Carbon based structure
  At temperatures below 200° on the basis of pulsed glow discharges or high-frequency
                            C
  discharges
  All DLC coatings have an adhesion layer, multilayer possibly
  Coatings can be tailored with respect to:
  – Electrical conductivity
  – Hydrophobic/hydrophilic behaviour


 Applications
  Tribological applications
  Automotive, Racing, Engineering
  Plastic injection and molding
  Optical industries


                                                                          MyPresentation | slide 25
PACVD - DLC
 Hardness




 Coefficient of
 friction




                  MyPresentation | slide 26
PACVD - DLC
 Corrosion test
 Salt spray exhalation test DIN SS 50021 (100% rel. humidity, 35° 5% NaCl)
                                                                 C,




                     New                                   After 192 hours

                                                                             MyPresentation | slide 27
Surface energy




      θ               θ                θ


                                                       Metal
     DLC                  TiN        TiAlN            Carbide




Surface energy is a measure of the affinity to sticking
The lower the value, the less a material will weld or stick to a surface

                                                                           MyPresentation | slide 28
PACVD - DLC
 Benefits:
  High wear resistance
  Low coefficient of friction
  Excellent adhesion
  Corrosion resistance
  Smooth surfaces
  Chemical inertness
  Possibility to run two coated surfaces against each other for optimal performance and
  reliability




                                                                             MyPresentation | slide 29
Combi Treatment




                  MyPresentation | slide 30
Combi Treatment
 Two steps:
   Plasma-nitriding
   Subsequent PVD or DLC coatings
 Plasma-nitrided surfaces considerably improve the supporting effect for PVD
 or DLC coating
 Surface treatment may be applied either in one single or two separate
 processes
              1.2344 CrN                      1.2344 PN + CrN
   [N]                                 [N]




                                       Load
   Load




           Penetration depth: 33 µm           Penetration depth: 6,5 µm
                                                                     MyPresentation | slide 31
Combi Treatment
 Basic precondition for successful combi treatment ensures best adhesion of the
 PVD layer
 Nitriding process usually generates a compound layer that has to be removed
 prior to coating


 Plot of hardness for a combi treatment
   CL = Compound layer
   DL = Diffusion layer
   SM = Substrate material




                                                                     MyPresentation | slide 32
Combi Treatment
 Not to be forgotten is a slight roughening of the surfaces during nitriding
 Necessitates intermediate polishing prior to PVD coating therefore permits only
 the classic combi treatment in two separate operations




                                                                         MyPresentation | slide 33
Combi Treatment
 Benefits
   Optimisation of tool and component properties
   Significantly longer tool and component life
   Increased production reliability and delivery reliability
   All types of PVD coatings can be applied (TiN, CrN, CrN-multilayer, CrN-mod, and DLC)
   Improvement of fatigue properties by residual compressive stresses
   Can make PVD coatings affordable for mass production




                                                                            MyPresentation | slide 34
Hybrid




         MyPresentation | slide 35
Hybrid
 Combination of two high ionization coating technologies
   Arc and Sputter
   Arc and HPPMS




    APA Arc module                                         Magnetron sputter




                                                                   MyPresentation | slide 36
Hybrid
 Coating structure


                      Sputtered
                     insulating
                     amorphous
                       coating       1 µm




                     Arc deposited
                      crystalline    2 µm
                         AlTiN




                                            MyPresentation | slide 37
HIPAC




        MyPresentation | slide 38
HIPAC




IOT RWTH Aachen

                  MyPresentation | slide 39
HIPAC
 HIPAC = High Ionisation Plasma for Advanced Coatings
 A slight modification of the HPPMS (or HIPIMS) technology
 Combination of two high ionization coating technologies
  Arc and Sputter
  Arc and HPPMS




 Characteristics
  Low duty time (< 5 %)
  low frequency (< 1000 Hz)
  High peak power (> 0.5 MW)
  Low plasma temperature (possibility to perform low temperature depositions)


                                                                            MyPresentation | slide 40
HIPAC
 Deposition in edges and holes


  By DC processes




  By HIPAC
                        20 mm




                10 mm




                                 MyPresentation | slide 41
HIPAC
 Benefits
  Very high plasma density
  Dense and smooth coatings
  High target utilization
  Very low substrate temperature
  Homogeneous coating thickness in complex substrates
  Deposition inside tubes and trenches with high aspect ratios




                                                                 MyPresentation | slide 42
Pre-Treatment




                MyPresentation | slide 43
Pre-Treatment
 Cleaning of the surfaces
   Wet chemical cleaning of oil, grease and other contaminations
   Rinsing of the parts using de-ionized water in a three stage cascade
   Blown dry using nitrogen or hot dry air, or dried in a tunnel kiln
 Optimization of the roughness profile
 Removal of surface layers, or their systematic
 Adjustment by means of nitriding




                                                                          MyPresentation | slide 44
Pre-Treatment
 AEGD (Arc-Enhanced Glow Distance)
   Ion cleaning: cleaning of the surfaces in plasma
   Performed in vacuum coating machine
   Removal of reaction layers and activation of the surface


  Optimizing adhesion to ensure adequate coating functionality




                                                                 MyPresentation | slide 45
Post-Treatment




                 MyPresentation | slide 46
Post-Treatment
 Procedures can be used for post-treatment, depending on the application:
   Blasting
   Brushing
   Polishing




 Functional layers on tools and components are smoothed
 Thanks to their amorphous structure DLC coatings are already very smooth after
 coating, no pre-treatment is needed




                                                                    MyPresentation | slide 47
Thin Film Equipment




                      MyPresentation | slide 48
Thin Film Equipment
 Modular METAPLAS-DOMINO technology platform
   Magnetron sputter modules
   HIPAC technology
   DLC technology modules (PACVD, PACVD plus PVD)
   Combi Treatments (plasma-nitriding and PVD)
   Hybrid technology (sputtering plus Arc, HPPMS plus Arc)
   AEGD (Arc-Enhanced Glow Distance)
   Different system sizes:
   – 300x300
   – 400x500
   – 600x700
   – 1200x1100 (usable volume)




                                                             MyPresentation | slide 49
Thin Film Coatings




                     MyPresentation | slide 50
Thin Film Coatings
 Coating design and architecture




 substrate    substrate    substrate   substrate   substrate    substrate



                                                               MyPresentation | slide 51
Thin Film Coatings
 Classic PVD coatings
   TiN, TiCN, TiCNgrad
   CrN, CrNmulti, CrNmod


 Special PVD coatings
   AlTiN, AlTiN Saturn
   W-C:H


 Micro alloyed coatings
   M A C for Plastics, Forming, Machining


 Amorphous coatings
   PACVD coatings
   – Cavidur®
   – DYLYN®, DYLYN® Plus


                                            MyPresentation | slide 52
TiN
 Monolayer structure
 Coating thickness 2 to 7 m; Hardness 2500
 High oxidation resistance
 Very good adhesive properties of the coating


______________________________________
TiCN
 Multilayer structure
 Coating thickness 3 to 7 m; Hardness 2800
 High degree of oxidation resistance
 Excellent adhesive properties of the coating




                                                MyPresentation | slide 53
Thin Film Coatings
 CrN
   Monolayer structure
   Coating thickness 2 to 7 m; Hardness 2300
   High oxidation resistance
   Very good adhesive properties of the coating
   Resistant to solvents
 _______________________________________
 CrNmulti
   Multilayer structure
   Coating thickness 3 to 7 m; Hardness 2500
   High degree of oxidation resistance
   Very smooth surface
   Excellent adhesive properties of the coating
 ________________________________________
 CrNmod
   Multilayer structure with a glass-like cover coating
   Coating thickness 3 to 7 m; Hardness 2500
   Extremely low tendency of sticking
   Very low tendency of cold welding


                                                          MyPresentation | slide 54
Thin Film Coatings
 Builds of the CrN layers




                CrN
                Chrom




 Applications

 - PE, PP, PET, POM         - PVD extrusion   - die casting
 - versatile usable         - die casting     - PUR




                                                              MyPresentation | slide 55
Thin Film Coatings
 AlTiN
   Monolayer
   Coating thickness 1 to 7 m; Hardness 3400
   High degree of oxidation resistance
   Very good adhesion
   Solvent resistant
   Insensitive to fingerprints
 ________________________________________
 AlTiN Saturn
   Monolayer
   Coating thickness 1 to 7 m; Hardness 3400
   High aluminium content
   Extremely high oxidation resistance
   Very smooth surface
   Nanocrystalline morphology
   Excellent adhesion
   Combination of high hardness and fracture toughness

                                                         MyPresentation | slide 56
Thin Film Coatings
 Micro Alloyed Coatings (M A C)
   Based on APA evaporation technology
   Individually adjustable coating design by micro alloying
   Targeted optimisation of particle size, ductility, oxidation resistance, hot hardness, wear
   resistance, thermal conductivity




  Extended tool life, energy efficiency, and environmentally sensible savings




                                                                                 MyPresentation | slide 57
Thin Film Coatings
 Plastics
   Longer lifetime
   Extended cleaning intervals
   Prevention of adhesion and sticking

 _______________________________________
 Forming
   Higher forming speeds
   Improved quality of parts
   Prevention of cold welding and sticking

 _______________________________________
 Machining
   Higher cutting rates
   Higher rates of feed
   Reduction of wear and friction




                                             MyPresentation | slide 58
Thin Film Coatings
 W-C:H
   Cutting of Al and non ferrous metals
   Coating temperature: 150 – 200 °C
   Hardness: 1000 – 1200 HV
   multilayer structure with a
   – Cr adhesion layer;
   – WC supporting layer
   – and a functional layer WC/C Multilayer
   the coating thickness can be adjusted




                                              MyPresentation | slide 59
Thin Film Coatings
 W-C:H
   tribological coatings


                                       wind power application




       uncoated                                          W-C:H coated
        Load: 1500 N/mm2; 1.35 x 106 cycles              Load: 2000N/mm2; 5.4 x 107 cycles



   W-C:H provides plus 30% power density



                                                                                             MyPresentation | slide 60
Thin Film Coatings
 Cavidur® for Racing
   Amorphous PACVD coating
   Coating takes place in a clean room
   Coating temperature from 180 – 350 °C
   Very high adhesion and hardness
   Extremely low friction




                                           MyPresentation | slide 61
Thin Film Coatings
 Benefits
   Extending component life
   Performance boost
   Increased hardness
   Reduces wear on counter parts


 Coating mostly used on engine parts, gears




                                              MyPresentation | slide 62
Thin Film Coatings
 DYLYN®, DYLYN® Plus
   Amorphous PACVD coating
   Coating takes place in a clean room
   Coating temperature from 200 – 390 °C
   High hardness
   Low friction
   High wear resistance




 Little or no lubricants needed
 Less production stops
 No change of design needed
 Less maintenance



                                           MyPresentation | slide 63

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Sulzer Thin Film Presentation July 28 2011

  • 1. SULZER Metco Thin Film Technology Dan Schumacher | 27th July 2011
  • 2. Who is Sulzer MyPresentation | slide 2
  • 3. Where is Sulzer Metco Aufstrebende Märkte • Brasilien • Russland • Indien • China Productions Coating machines Customer service Sales MyPresentation | slide 3
  • 4. Overview MyPresentation | slide 4
  • 5. Portfolio Arc-PVD HVOF Materials for Plasma PTA*-welding DC, HF, HCPMS PACVD Arc IONIT IONIT OX Adding of materials for PTA Adding of materials by Adding of materials in thin Thermo chemical processes welding thermal spraying films IONIT IONIT OX (PVD, PACVD, Hybrid) Surface Substrate Substrate Substrate Substrate MyPresentation | slide 5
  • 6. Overview General Processes CVD and PACVD PVD – APA Arc, Sputter Plasma Heat Treatment – Plasma-nitriding Special Processes Combi Treatment – Nitriding + PVD Hybrid – Combination of two high ionization coating technologies (Arc and Sputter; Arc and HPPMS) HIPAC MyPresentation | slide 6
  • 7. Overview Two basic processes CVD (Chemical Vapour Deposition) – One or more chemical precursor gases are used CVD – Chemical reactions in the gas phase – PACVD / DLC PACVD PVD (Physical Vapour Deposition) – Arc PVD – Sputter PVD MyPresentation | slide 7
  • 8. Overview MyPresentation | slide 8
  • 9. CVD MyPresentation | slide 9
  • 10. CVD CVD Thermal CVD - High-temperature PACVD (900–1050˚C) Plasma-Assisted CVD - Medium-temperature (720–900˚C) Classic Classic DLC layers hardcoating layers hardcoating layers (150–250°C) (400–600° C) MyPresentation | slide 10
  • 11. PVD MyPresentation | slide 11
  • 12. PVD Vacuum measurement Process gas and control system Vacuum pumpset Circular Evaporators Window Power supplies Infrared- temperature- measurement Substrate holder Coating chamber BIAS Power supply (substrate) MyPresentation | slide 12
  • 13. PVD PVD coating Applied to most metal alloys and galvanised products (metals and plastics) Coating thickness: 0,5 -10 µm Hardness: 1.000 – 4.000 HV Temperature resistance: 300 – 900 °C Deposition temperature: 200 – 600 °C Structures: – Multilayer – Nanostructure Layers – Modified Layers MyPresentation | slide 13
  • 14. PVD Arc Evaporation: Thermal electron beam __________________________________________________________________ Sputter: DC sputtering Magnetron sputtering HF sputtering MyPresentation | slide 14
  • 15. PVD Coating deposited by a classic circular evaporator Arc ________________________________________________________________ Coating deposited by an evaporator with extended magnetic filed APA Arc faster spot motion smaller spot size less droplet emission higher evaporation rate higher target utilization MyPresentation | slide 15
  • 16. Thin Film Coatings Coating design and architecture substrate substrate substrate substrate substrate substrate MyPresentation | slide 16
  • 17. PVD Benefits Low friction and low adhesion characters Strong wear resistance High hardness, high oxidation resistance and reduced chemical reactions New developments open up economic machining of new materials Coating of plastics Cost reduction Improved product quality Longer maintenance intervals Reduction of coolants and lubricants Increased life time MyPresentation | slide 17
  • 18. Plasma Heat Treatment MyPresentation | slide 18
  • 19. Plasma Heat Treatment – Plasma-Nitriding Conventional heat treatment Annealing, hardening and tempering For applications in tribological, corrosive, and mechanical-dynamic systems ________________________________________________________________ IONIT®: Plasma-nitriding for alloyed steel, cast, sinter, and special materials IONIT OX®: Special process for improved corrosion and wear protection MyPresentation | slide 19
  • 20. Plasma Heat Treatment – Plasma-Nitriding MyPresentation | slide 20
  • 21. Plasma Heat Treatment – Plasma-Nitriding Plasma heat treatment High surface hardness Improved resistance against wear, corrosion, and fatigue Reproducible nitride structure Activation of high-alloyed steels High accuracy grade, low distortion Reduced adhesion and cold welding Environmentally friendly Our Service for Customers Tailored solutions Treatment of big parts (up to 13 metres length, 10 tons, 1.8 metres diameter) Long experience (over 40 years) Consultant service MyPresentation | slide 21
  • 22. PACVD - DLC MyPresentation | slide 22
  • 23. PACVD - DLC PACVD (Plasma-Assisted Chemical Vapour Deposition) Takes place at significantly lower temperatures than thermal CVD Differentiable in two application areas Deposition of classic hardcoating layers (TiN, TiCN, Al2O3) Deposition of hard amorphous carbon layers (DLC) MyPresentation | slide 23
  • 24. PACVD - DLC System for DLC coatings advanced arc module graphite cathode planetary MyPresentation | slide 24
  • 25. PACVD - DLC DLC coatings Amorphous Carbon based structure At temperatures below 200° on the basis of pulsed glow discharges or high-frequency C discharges All DLC coatings have an adhesion layer, multilayer possibly Coatings can be tailored with respect to: – Electrical conductivity – Hydrophobic/hydrophilic behaviour Applications Tribological applications Automotive, Racing, Engineering Plastic injection and molding Optical industries MyPresentation | slide 25
  • 26. PACVD - DLC Hardness Coefficient of friction MyPresentation | slide 26
  • 27. PACVD - DLC Corrosion test Salt spray exhalation test DIN SS 50021 (100% rel. humidity, 35° 5% NaCl) C, New After 192 hours MyPresentation | slide 27
  • 28. Surface energy θ θ θ Metal DLC TiN TiAlN Carbide Surface energy is a measure of the affinity to sticking The lower the value, the less a material will weld or stick to a surface MyPresentation | slide 28
  • 29. PACVD - DLC Benefits: High wear resistance Low coefficient of friction Excellent adhesion Corrosion resistance Smooth surfaces Chemical inertness Possibility to run two coated surfaces against each other for optimal performance and reliability MyPresentation | slide 29
  • 30. Combi Treatment MyPresentation | slide 30
  • 31. Combi Treatment Two steps: Plasma-nitriding Subsequent PVD or DLC coatings Plasma-nitrided surfaces considerably improve the supporting effect for PVD or DLC coating Surface treatment may be applied either in one single or two separate processes 1.2344 CrN 1.2344 PN + CrN [N] [N] Load Load Penetration depth: 33 µm Penetration depth: 6,5 µm MyPresentation | slide 31
  • 32. Combi Treatment Basic precondition for successful combi treatment ensures best adhesion of the PVD layer Nitriding process usually generates a compound layer that has to be removed prior to coating Plot of hardness for a combi treatment CL = Compound layer DL = Diffusion layer SM = Substrate material MyPresentation | slide 32
  • 33. Combi Treatment Not to be forgotten is a slight roughening of the surfaces during nitriding Necessitates intermediate polishing prior to PVD coating therefore permits only the classic combi treatment in two separate operations MyPresentation | slide 33
  • 34. Combi Treatment Benefits Optimisation of tool and component properties Significantly longer tool and component life Increased production reliability and delivery reliability All types of PVD coatings can be applied (TiN, CrN, CrN-multilayer, CrN-mod, and DLC) Improvement of fatigue properties by residual compressive stresses Can make PVD coatings affordable for mass production MyPresentation | slide 34
  • 35. Hybrid MyPresentation | slide 35
  • 36. Hybrid Combination of two high ionization coating technologies Arc and Sputter Arc and HPPMS APA Arc module Magnetron sputter MyPresentation | slide 36
  • 37. Hybrid Coating structure Sputtered insulating amorphous coating 1 µm Arc deposited crystalline 2 µm AlTiN MyPresentation | slide 37
  • 38. HIPAC MyPresentation | slide 38
  • 39. HIPAC IOT RWTH Aachen MyPresentation | slide 39
  • 40. HIPAC HIPAC = High Ionisation Plasma for Advanced Coatings A slight modification of the HPPMS (or HIPIMS) technology Combination of two high ionization coating technologies Arc and Sputter Arc and HPPMS Characteristics Low duty time (< 5 %) low frequency (< 1000 Hz) High peak power (> 0.5 MW) Low plasma temperature (possibility to perform low temperature depositions) MyPresentation | slide 40
  • 41. HIPAC Deposition in edges and holes By DC processes By HIPAC 20 mm 10 mm MyPresentation | slide 41
  • 42. HIPAC Benefits Very high plasma density Dense and smooth coatings High target utilization Very low substrate temperature Homogeneous coating thickness in complex substrates Deposition inside tubes and trenches with high aspect ratios MyPresentation | slide 42
  • 43. Pre-Treatment MyPresentation | slide 43
  • 44. Pre-Treatment Cleaning of the surfaces Wet chemical cleaning of oil, grease and other contaminations Rinsing of the parts using de-ionized water in a three stage cascade Blown dry using nitrogen or hot dry air, or dried in a tunnel kiln Optimization of the roughness profile Removal of surface layers, or their systematic Adjustment by means of nitriding MyPresentation | slide 44
  • 45. Pre-Treatment AEGD (Arc-Enhanced Glow Distance) Ion cleaning: cleaning of the surfaces in plasma Performed in vacuum coating machine Removal of reaction layers and activation of the surface Optimizing adhesion to ensure adequate coating functionality MyPresentation | slide 45
  • 46. Post-Treatment MyPresentation | slide 46
  • 47. Post-Treatment Procedures can be used for post-treatment, depending on the application: Blasting Brushing Polishing Functional layers on tools and components are smoothed Thanks to their amorphous structure DLC coatings are already very smooth after coating, no pre-treatment is needed MyPresentation | slide 47
  • 48. Thin Film Equipment MyPresentation | slide 48
  • 49. Thin Film Equipment Modular METAPLAS-DOMINO technology platform Magnetron sputter modules HIPAC technology DLC technology modules (PACVD, PACVD plus PVD) Combi Treatments (plasma-nitriding and PVD) Hybrid technology (sputtering plus Arc, HPPMS plus Arc) AEGD (Arc-Enhanced Glow Distance) Different system sizes: – 300x300 – 400x500 – 600x700 – 1200x1100 (usable volume) MyPresentation | slide 49
  • 50. Thin Film Coatings MyPresentation | slide 50
  • 51. Thin Film Coatings Coating design and architecture substrate substrate substrate substrate substrate substrate MyPresentation | slide 51
  • 52. Thin Film Coatings Classic PVD coatings TiN, TiCN, TiCNgrad CrN, CrNmulti, CrNmod Special PVD coatings AlTiN, AlTiN Saturn W-C:H Micro alloyed coatings M A C for Plastics, Forming, Machining Amorphous coatings PACVD coatings – Cavidur® – DYLYN®, DYLYN® Plus MyPresentation | slide 52
  • 53. TiN Monolayer structure Coating thickness 2 to 7 m; Hardness 2500 High oxidation resistance Very good adhesive properties of the coating ______________________________________ TiCN Multilayer structure Coating thickness 3 to 7 m; Hardness 2800 High degree of oxidation resistance Excellent adhesive properties of the coating MyPresentation | slide 53
  • 54. Thin Film Coatings CrN Monolayer structure Coating thickness 2 to 7 m; Hardness 2300 High oxidation resistance Very good adhesive properties of the coating Resistant to solvents _______________________________________ CrNmulti Multilayer structure Coating thickness 3 to 7 m; Hardness 2500 High degree of oxidation resistance Very smooth surface Excellent adhesive properties of the coating ________________________________________ CrNmod Multilayer structure with a glass-like cover coating Coating thickness 3 to 7 m; Hardness 2500 Extremely low tendency of sticking Very low tendency of cold welding MyPresentation | slide 54
  • 55. Thin Film Coatings Builds of the CrN layers CrN Chrom Applications - PE, PP, PET, POM - PVD extrusion - die casting - versatile usable - die casting - PUR MyPresentation | slide 55
  • 56. Thin Film Coatings AlTiN Monolayer Coating thickness 1 to 7 m; Hardness 3400 High degree of oxidation resistance Very good adhesion Solvent resistant Insensitive to fingerprints ________________________________________ AlTiN Saturn Monolayer Coating thickness 1 to 7 m; Hardness 3400 High aluminium content Extremely high oxidation resistance Very smooth surface Nanocrystalline morphology Excellent adhesion Combination of high hardness and fracture toughness MyPresentation | slide 56
  • 57. Thin Film Coatings Micro Alloyed Coatings (M A C) Based on APA evaporation technology Individually adjustable coating design by micro alloying Targeted optimisation of particle size, ductility, oxidation resistance, hot hardness, wear resistance, thermal conductivity Extended tool life, energy efficiency, and environmentally sensible savings MyPresentation | slide 57
  • 58. Thin Film Coatings Plastics Longer lifetime Extended cleaning intervals Prevention of adhesion and sticking _______________________________________ Forming Higher forming speeds Improved quality of parts Prevention of cold welding and sticking _______________________________________ Machining Higher cutting rates Higher rates of feed Reduction of wear and friction MyPresentation | slide 58
  • 59. Thin Film Coatings W-C:H Cutting of Al and non ferrous metals Coating temperature: 150 – 200 °C Hardness: 1000 – 1200 HV multilayer structure with a – Cr adhesion layer; – WC supporting layer – and a functional layer WC/C Multilayer the coating thickness can be adjusted MyPresentation | slide 59
  • 60. Thin Film Coatings W-C:H tribological coatings wind power application uncoated W-C:H coated Load: 1500 N/mm2; 1.35 x 106 cycles Load: 2000N/mm2; 5.4 x 107 cycles W-C:H provides plus 30% power density MyPresentation | slide 60
  • 61. Thin Film Coatings Cavidur® for Racing Amorphous PACVD coating Coating takes place in a clean room Coating temperature from 180 – 350 °C Very high adhesion and hardness Extremely low friction MyPresentation | slide 61
  • 62. Thin Film Coatings Benefits Extending component life Performance boost Increased hardness Reduces wear on counter parts Coating mostly used on engine parts, gears MyPresentation | slide 62
  • 63. Thin Film Coatings DYLYN®, DYLYN® Plus Amorphous PACVD coating Coating takes place in a clean room Coating temperature from 200 – 390 °C High hardness Low friction High wear resistance Little or no lubricants needed Less production stops No change of design needed Less maintenance MyPresentation | slide 63