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Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology. Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS. After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.
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Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology. Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS. After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.
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Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micromachined devices”.
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mems ppt
1.
MEMS TECHNOLOGY BY
S.APPA RAO
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FABRICATION PROCESS:
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PIEZO-RESISTIVE ACCELEROMETER:
13.
LAYOUT OF THE
RESISTOR:
14.
MASKS that are
used 4 ACCELEROMETER:
15.
FABRICATION PROCESS:
16.
Contd….
17.
INTERFACE ELECTRONIC
CKT
18.
MEMS ACCELEROMETER
19.
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