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1. Micro Electro Mechanical
Systems

2. Materials and Fabrication
 Silicon is the dominate
material used
 Excellent electrical and
mechanical properties
 For High Temp. applications,
SiC is ideal
 Other alternatives include
TiNi (shape memory alloys)

3. Applications
 Both Military and
commercial use
 Automobiles
 Airplanes
 Home Appliances

4. World Market
 Overwhelming
commercial demand
 Drastic Increase in
World-wide Sales