Susceptibility of different slurry types to agglomeration

Susceptibility of Different Slurry Types to Agglomeration Mark Litchy 1 , Don Grant 1 , and Reto Schoeb 2 1 CT Associates, Inc. 2 Levitronix GmbH Levitronix CMP Users Conference 2009 February 10, 2009

Introduction ,[object Object],[object Object],[object Object],[object Object],[object Object]

Experiment performed ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Experiment details ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

9 CMP Slurries Evaluated ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Pumps Evaluated ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Pump Comparison ,[object Object],[object Object],[object Object],[object Object]

Working particle size distributions (PSDs) ,[object Object]

Silica slurry: Example of UFA/SMPS measurement ,[object Object],[object Object],[object Object],[object Object],[object Object]

S1 slurry: Working PSD measurements (DLS)

A1 slurry: Working PSD measurements (DLS)

Summary of changes in working PSD

Large Particle Tail PSDs in As-Received Slurry

S1 slurry: BPS-200/BPS-600 Pumps

S1 slurry: BPS-4, bellows, and diaphragm pumps

Concentration increases measured after 100 turnovers

Concentration increases measured after 100 turnovers (cont’d)

Concentration increases measured after 1,000 turnovers

Concentration increases measured after 1,000 turnovers (cont’d)

Summary of changes in large particle concentrations

Summary ,[object Object],[object Object],[object Object]

Summary of effect of pumps on slurry properties ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],Diaphragm and Bellows pumps ,[object Object],[object Object],[object Object],BPS-4 pump Other Slurry Parameters Large Particle Tail Working PSD Pump Type PSD

Susceptibility of different slurry types to agglomeration

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Susceptibility of different slurry types to agglomeration