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Nanotechnology Tools for Life Sciences

Harry Heinzelmann
VP Nanotechnology & Life Sciences

Neuchâtel, June 2009




                                         v1.19
CSEM profile


               Privately held Innovation Center, incorporated, not for profit
               Privately held Innovation Center, incorporated, not for profit
                   since 1984, from watchmaking
                   since 1984, from watchmaking
                   about 70 shareholders (mostly private)
                   about 70 shareholders (mostly private)

               2008:
               2008:
                  >65 Mio. CHF annual turnover, 395 employees
                  >65 Mio. CHF annual turnover, 395 employees
                  30 start-ups created since 2000
                  30 start-ups created since 2000

               Activities:
               Activities:
                   Applied research (contract with Swiss Government)
                   Applied research (contract with Swiss Government)
                   Industrialization of technologies, product development
                   Industrialization of technologies, product development

               Technologies:
               Technologies:
                  Micro- and Nanotechnology, Information Technology,
                   Micro- and Nanotechnology, Information Technology,
                  and System Engineering
                   and System Engineering



                                      Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 1
CSEM profile

Bridge from Science to Innovation




                                Applied                           Product
              Basic Research   Res & Dev                        Development            Marketing
            PhD programs                   Industrialisation                            Sales
           Teaching                                                                       Customers


         Science &                                                                                Market
         Education                                                                                Success




• technologies
  for innovations


• research partners:

                                                 Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 2
CSEM profile

Bridge from Science to Innovation

• wide range of technologies, large experience and network                        innovative solutions
• highly qualified and experienced staff        fast developments
• IP portfolio to support the customers’ application               protected business



• shareholders include



• technologies for Green Solutions




                                           Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 3
CSEM profile

Technologies I (divisions in Neuchâtel)

                Microelectronics
                    Circuit Design, RF, Information Processing


                Nanotechnology & Life Sciences
                    Optical and Bio MNT, Self-assembly, Sensors


                Systems Engineering
                    Mechatronics, Signal Processing, Communication


                Time and Frequency
                    Atomic Clocks, Optical Advanced Systems


                Microsystems
                    MEMS, Cleanroom Infrastucture, Microscopy & Analysis



                                     Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 4
CSEM profile

Technologies II (divisions outside Neuchâtel)

                Photonics (Zurich)
                    Image Sensing, Optoelectronics


                Robotics (Alpnach)
                    Lab Automation, Packaging, Assembly


                Thin Film Optics (Basel)
                    Optoelectronics, Replicated Optics


                Nano Medicine (Landquart)
                    Imaging, Medical Sensors


                CSEM UAE

                CSEM Brazil

                                     Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 5
Technologies and Applications

Nanostructuring

• extended experience in self-assembly of
  polymer and nanoparticle systems
• block copolymer microphase separation
  and copolymer lithography / MEMS
• molecular grafting chemistries, from and to
• controlled self-assembly of beads




• partnerships & projects:


• industrial collaborations:


                                        Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 6
Nanostructuring

Top-Down vs. Bottom-Up


           10
                    classical (micro-) fabrication
           1 mm

           100      MEMS: Micro Electro Mechanical Systems
                    lithography:
           10
                     VIS
           1 µm
                     UV, X-ray, e – beam
           100      FIB (serial)
           10

           1 nm
                  molecular self-assembly
           1 Å    “molecular nanotechnology”                               250 nm
                                                                                                          4 µm



                                      Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 7
Nanostructuring

Polymeric Self-Assembly I : Polymer Demixing
                                                       50% PMMA / 50% PS              90% PMMA / 10% PS

• demixing of immiscible polymer blends
• qualitative structures on the micron scale
• control over feature size and properties
• large variety of polymers available
                                                                            80 µm                           5 µm



                            • simple deposition technique
                            • selective solvent can remove one polymer type
                            • scalable to
                              large surfaces

                                                 large 5µm               med 2µm               small <1µm

   inexpensive and flexible method to control surface properties on a micron scale

                                          Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 8
Nanostructuring – Polymer Demixing

Nanoporous Layers for Ink-jet Printer Paper

 Polymer paper                               Nanoporous paper
                                                                                        Nanoporous layer
                            Polymer layer                                               (Alumina film)
                              Cellulose                                                  Cellulose

    stable images                                  fast up-take, small spot size
    slow ink uptake, big spot size                 image fading (light, gas,…)



                                                                                                  polymer film
                                                                                                  transferred
                                                                                                  on paper




paper, 5 µm x 5 µm          polymer on Si



                                            Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 9
Nanostructuring – Polymer Demixing

Security Features for Anti-Counterfeiting Applications

• market size for counterfeit goods (2004): 500 Bill. US$
  for art pieces: >10 Bill. US$ (Europe)

• nanoscale structures are
  difficult to counterfeit,
  and are mass-producible

• self-assembly structures are random and unique

                                                                                      *patent
                                                                                      pending




• security features can be mass produced at low cost, both for mass id and unique fingerprints

                                              Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 10
Nanostructuring – Polymer Demixing

Topography Gradients for Surface Interaction Screening




PMMA / P2VP demixing on a pre-prepared surface chemistry gradient

• surface coatings with controlled properties,
  varying over short length scales

• combinatorial studies of cell-substrate interactions: effect of surface
  roughness on cell adhesion and proliferation, with gradients adapted
  to typical distances travelled by cells study of cell locomotion

     Blondiaux et al., submitted

                                                     Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 11
Nanostructuring

Polymeric Self-Assembly II : Microphase Separation

• block copolymer A-b-B

                                    -A-A-A- -B-B-B-
• Microphase Separation
      • inexpensive & flexible method to generate
                                                                                10 -100 nm
        ordered structures on the molecular scale
      • wide choice of functions and chemistries:
        mechanical, chemical / catalytic,
        optical, electrical, magnetic, …


high                                                                                                       high
A-fraction                                                                                                 B-fraction


     Krishnamoorthy et al., materials today (September 2006)

                                                   Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 12
Nanostructuring – Copolymer Microphase Separation

(Random) Nanostructures with Order and Function

Function:                                                      Order:
• PI-b-PFS poly(isoprene-b-ferrocenylsilane)                   • random and short range
• spincoating of 30nm thin film, plasma etch                   • can be improved by templating
• high density magnetic pattern: 4 1011 /cm2                   • topographical, chemical, temp, fields, …
                                                      H
                                           CH3   Fe
                                           Si

                                           CH3
                              n-Bu     m              n



                                     PI-b-PFS




   different FexOy stochiometries                                    PS-PFS
            from Korczagin, Vancso et al., Mesa+                                from Stoykovich et al., Science (2005)


                                                          Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 13
Nanostructuring – Copolymer Microphase Separation

Copolymer Lithography for Nano-Pillars and Nano-Pores

                            etch mask from
                                                                                        inverted micelles etch mask
                            copolymer patterns
                            from polymer
                            constituents with
                            different etch rates

                            in some cases it is
                            necessary to provide
                            an “amplification” of                    RIE
                            the etch contrast




    Krishnamoorthy et al., Nanotechnology (2008)

                                                    Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 14
Nanostructuring – Copolymer Microphase Separation

Non-Wetting Surfaces with Nanopillar Structures

                                                           • self-cleaning surfaces by functionalization
                                                             with perfluorosilane (wet or PVD)
                                                              transition from Wenzel to Cassie-Baxter wetting mode
                                                              for structure aspect ratio > 2:1
planar SiNx silanised
with perfluorosilane:
contact angle 111°




Nanopillars in SiNx, 90nm high, 100nm periodicity
silanised with perfluorosilane:
water contact angle 150˚, highly mobile drop
                                                               WCA adv 160° (compare to 110° on a flat surface)
    Krishnamoorthy et al., Nanotechnology (2008)                    hysteresis 5°, rolling angle 6°, 10ml droplet

                                                    Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 15
Nanostructuring – Nanoporous Membranes

Osmotic Biosensor based on Nanoporous Membranes

• nanoporous membranes from
  copolymer lithography
• macro prototyping of osmotic sensor
• size selectivity supported specific
  binding chemistry




                                         Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 16
Nanostructuring – Nanoporous Membranes

Wafer Scale Replication of Copolymer Lithography Patterns

• replication by polymer casting              • replication by embossing into PC foil
                                                master by Ni electroplating




  wafer scale PDMS casting

• PMMA nanoporous membranes

                                                        small                 medium                 large



                                              • nanostructured surfaces for cell studies
                                                                          influence on:
                                                                          • cell growth
                                                                          • protein expression
                                                                          • cytoskeleton organ.



                                         Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 17
Technologies and Applications

BioMEMS for Nanotoxicity Tests

• experience in cell handling
  dedicated infrastructure
• established knowledge in microfabrication
  and replication technologies, in house fab
• nanotechnology / nanoparticle handling
• microfluidics design and prototyping




• partnerships & projects:                                                        InLiveTox


• industrial collaborations:


                                         Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 18
BioMEMS

Nanotoxicology – Risks of Nanoparticle Technology

• molecular nanotechnology “hype”        • new class of nano-materials with “unknown”
• “grey goo” & “green goo”                 properties: carbon (CNT, buckyballs, …),
                                           TiO2, SiO2, metallic (Au…), quantum dots
                                           (CdS, CdSe, CdTe, etc.), polymeric…
                                               gold




                                                                             latex

                                                                             Catalytic CO Oxidation by a Gold
                                                  CNTs                       Nanoparticle, N. Lopez and J.K.
                                                                             Norskov, J.Am.Chem.Soc.(2002)




                                         • … in widespread applications: catalysts,
                                           sunscreens, fuel cells, solar panels, …

                                    Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 19
BioMEMS - Nanotoxicology

   Translocation Measurement Device – EU IP Nanosafe2

   • problem: unknown effects of nanoparticles on human organisms
   • microfabricated chip for the in vitro study of model epithelia transport properties

   nanoparticle suspension
   coming in




confluent layer of
epithelial cells


                                                                porous Si3N4
     electrodes for TEER                                        membrane
     measurements                 detection of nanoparticles
                                  that cross the cell layer


                             detection of inorganic nanoparticles off-line using inductively
                             coupled plasma mass spectrometry (ICP-MS)

                                                        Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 20
BioMEMS - Nanotoxicology

On-Chip Electrical Characterization of Cell Layers

• microfabricated chip with cell culture wells
• porous membranes at the basis of each well
  to allow toxins or drugs to pass through
• TransEpithelial Electrical Resistance (TEER)
  to determine the tightness of a cell layer
                                                                     Calu-3 cells grown in one of five wells

                            • electrical contacts
                            • plastic holder
                            • glass support, to seal the
                              fluidic network
                            • PDMS fluidics
                            • SiN membrane
                            • PDMS in plastic holder,
                              electrical contacts at the bottom


                                          Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 21
BioMEMS - Nanotoxicology

Intestinal, Liver & Endothelial NP Toxicity – InLiveTox

• CSEM, 4 university partners, Helmholtz Zentrum Berlin, Kirkstall Ltd, Alma
• objectives:
  • develop in vitro test system to reduce/replace animal tests of nanoparticle toxicity
  • replace the “lab rat”
                               ‘Gastro Intestinal tract’                                   ‘Intestinal epithelium’
    by a setup of                                                                          (co-culture of epithelial cells,
                                 ‘Bloodstream’
     • microfluidics and                                                                   monocytes and dendritic cells)

     • cell cultures                                                                       ‘Vascular endothelium’
        of model organs                                                                    (endothelial cells)
                                                                                           ‘Liver’ (hepatocytes)

                                         Nanoparticles              Sampling ports


• 3Rs: Replace, Reduce and Refine animal tests
• REACH: Registration, Evaluation, Authorisation & Restriction of Chemical Substances


                                                           Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 22
Nanotools

Probe Array Technology – PROBART

                                     • speed up single probe operation
                                       by parallel
                                       imaging and
                                       sensing




                                     • PROBART for Life Science applications, for
                  nisenet.org            - bioarrays
                                         - cells


                                         but: operation in liquids!




                                Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 23
Nanotools – Probe Arrays

Force Spectroscopy on Cells

                                   • information about adhesion proteins,
                                     cell mechanics, kinetics, …
                                   • cell-surface, cell-cantilever, cell-cell
                                   • meaningful only with sufficient
                                     statistics, which makes experiments
                                     rather tedious
                                   • at current rate of a few cells per day,
                                     not useful for screening formats


                                   • array format would improve statistics
                                     and make high throughput screening
                                     formats more accessible
 source: JPK

                              Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 24
Nanotools – Probe Arrays

PROBART for Parallel Imaging


                                                                     VEE (- 6V)
                                                                                            Rlever
                                                                    Rref                    (~ 20 kohm)

                                                      R ref                     Vout
                                                                           R1          R2
                                   R lever




                           probe
                           #6                                                   4x4 array imaging in
                                                                                buffer solution with
                           probe                                                continuous zoom-in
                           #13

                           probe
                           #15




                                      Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 25
Nanotools – Probe Arrays

Cell Adhesion Forces


similar adhesion forces for cells in all
phases of the cell cycle (thus no need
for synchronization in future studies)




Human osteoblasts, growing on
hemispherical pits (a, diameter 27 µm) and
nanopillars (b, 45nm high, replicated in a non-
metallic bone implant material

                                                  Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 26
Technologies and Applications

Nanotools for Ultimate Pipetting

• vast experience in Scanning Probe Methods
• MEMS design and fabrication in house
• fluidics design and fabrication
• surface chemistry and characterization
• experience in handling biomaterials,
  nanoparticles in solutions




• partnerships & projects:


• industrial collaborations: first contacts with instrument makers


                                         Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 27
Nanotools – Nanoscale Dispensing

Nanoscale Dispensing – NADIS


                            deposition of liquids
                            in ultrasmall volumes
                            from microscopic tips



                             • functional biomolecules for microarrays, such as
 Molecules in solution         proteins or DNA


                             • metallic nanoparticles to form connects, catalyst
Nanoparticle suspensions
                               particles, optical and chemical functions, …


                             • etch resist materials, sol-gel precursors, …

 Materials for processing

                                          Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 28
Nanotools – Nanoscale Dispensing

NADIS with FIB Modified Probes

• apertures with Ø down to 200 nm
• flexibility in location (off-center, …)
• possible to keep sharp AFM tips

                                                                                                                      1 µm




                                            sub-attoliter
                                            volumes
    Meister et al., App.Phys.Lett. (2004)

                                                     Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 29
Nanotools – Nanoscale Dispensing

NADIS of Fluorophores in Liquid Environments


                                                                          3 µm
                                                          1




                                     Intensity [a.u.]
                                                        0.5



                                                         0
                                                              0   2          4             6            8




 applied pressure ~ 2mbar




                                   Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 30
Nanotools – Nanoscale Dispensing

NADIS for Liquid Exchange with Living Cells

                                                               • injection after perforation
                                                                 of the cell membrane
                                                               • extraction of cytoplasm for
                                                                 remote analysis
                                                               • towards patch clamping



                                                                        viable neuroblastoma cells
                                                                        Cell TrackerTM green staining




                                   Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 31
Conclusions

Nanostructuring

• polymer demixing
  for random but regular microstructures

• co-polymer microphase separation
  for well-arranged functional nanostructures and lithography


THANK YOU !
• collaborators from CSEM: AM Popa, M Klein, W Li, F Montage, R Pugin, …
• cleanroom team from COMLAB and CMI EPF Lausanne
• partners from U Mulhouse, U Twente, EPFL, …




                                        Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 32
Conclusions

Nanotools

• probe array platform
  for parallel force spectroscopy in biological environments

• nanoscale dispensing (NADIS)
  for liquid arraying and cell manipulation


THANK YOU !
• collaborators from CSEM: J Przybylska, M Favre, J Polesel, A Meister, M Liley, …
• cleanroom team from COMLAB and CMI EPF Lausanne
• partners from IMT U Neuchâtel, U Lund, U Trento, ETHZ, EPFL, …




                                         Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 33
Thank you for your attention.

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Nanotechnology Tools for Life Sciences

  • 1. Nanotechnology Tools for Life Sciences Harry Heinzelmann VP Nanotechnology & Life Sciences Neuchâtel, June 2009 v1.19
  • 2. CSEM profile Privately held Innovation Center, incorporated, not for profit Privately held Innovation Center, incorporated, not for profit since 1984, from watchmaking since 1984, from watchmaking about 70 shareholders (mostly private) about 70 shareholders (mostly private) 2008: 2008: >65 Mio. CHF annual turnover, 395 employees >65 Mio. CHF annual turnover, 395 employees 30 start-ups created since 2000 30 start-ups created since 2000 Activities: Activities: Applied research (contract with Swiss Government) Applied research (contract with Swiss Government) Industrialization of technologies, product development Industrialization of technologies, product development Technologies: Technologies: Micro- and Nanotechnology, Information Technology, Micro- and Nanotechnology, Information Technology, and System Engineering and System Engineering Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 1
  • 3. CSEM profile Bridge from Science to Innovation Applied Product Basic Research Res & Dev Development Marketing PhD programs Industrialisation Sales Teaching Customers Science & Market Education Success • technologies for innovations • research partners: Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 2
  • 4. CSEM profile Bridge from Science to Innovation • wide range of technologies, large experience and network innovative solutions • highly qualified and experienced staff fast developments • IP portfolio to support the customers’ application protected business • shareholders include • technologies for Green Solutions Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 3
  • 5. CSEM profile Technologies I (divisions in Neuchâtel) Microelectronics Circuit Design, RF, Information Processing Nanotechnology & Life Sciences Optical and Bio MNT, Self-assembly, Sensors Systems Engineering Mechatronics, Signal Processing, Communication Time and Frequency Atomic Clocks, Optical Advanced Systems Microsystems MEMS, Cleanroom Infrastucture, Microscopy & Analysis Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 4
  • 6. CSEM profile Technologies II (divisions outside Neuchâtel) Photonics (Zurich) Image Sensing, Optoelectronics Robotics (Alpnach) Lab Automation, Packaging, Assembly Thin Film Optics (Basel) Optoelectronics, Replicated Optics Nano Medicine (Landquart) Imaging, Medical Sensors CSEM UAE CSEM Brazil Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 5
  • 7. Technologies and Applications Nanostructuring • extended experience in self-assembly of polymer and nanoparticle systems • block copolymer microphase separation and copolymer lithography / MEMS • molecular grafting chemistries, from and to • controlled self-assembly of beads • partnerships & projects: • industrial collaborations: Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 6
  • 8. Nanostructuring Top-Down vs. Bottom-Up 10 classical (micro-) fabrication 1 mm 100 MEMS: Micro Electro Mechanical Systems lithography: 10 VIS 1 µm UV, X-ray, e – beam 100 FIB (serial) 10 1 nm molecular self-assembly 1 Å “molecular nanotechnology” 250 nm 4 µm Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 7
  • 9. Nanostructuring Polymeric Self-Assembly I : Polymer Demixing 50% PMMA / 50% PS 90% PMMA / 10% PS • demixing of immiscible polymer blends • qualitative structures on the micron scale • control over feature size and properties • large variety of polymers available 80 µm 5 µm • simple deposition technique • selective solvent can remove one polymer type • scalable to large surfaces large 5µm med 2µm small <1µm inexpensive and flexible method to control surface properties on a micron scale Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 8
  • 10. Nanostructuring – Polymer Demixing Nanoporous Layers for Ink-jet Printer Paper Polymer paper Nanoporous paper Nanoporous layer Polymer layer (Alumina film) Cellulose Cellulose stable images fast up-take, small spot size slow ink uptake, big spot size image fading (light, gas,…) polymer film transferred on paper paper, 5 µm x 5 µm polymer on Si Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 9
  • 11. Nanostructuring – Polymer Demixing Security Features for Anti-Counterfeiting Applications • market size for counterfeit goods (2004): 500 Bill. US$ for art pieces: >10 Bill. US$ (Europe) • nanoscale structures are difficult to counterfeit, and are mass-producible • self-assembly structures are random and unique *patent pending • security features can be mass produced at low cost, both for mass id and unique fingerprints Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 10
  • 12. Nanostructuring – Polymer Demixing Topography Gradients for Surface Interaction Screening PMMA / P2VP demixing on a pre-prepared surface chemistry gradient • surface coatings with controlled properties, varying over short length scales • combinatorial studies of cell-substrate interactions: effect of surface roughness on cell adhesion and proliferation, with gradients adapted to typical distances travelled by cells study of cell locomotion Blondiaux et al., submitted Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 11
  • 13. Nanostructuring Polymeric Self-Assembly II : Microphase Separation • block copolymer A-b-B -A-A-A- -B-B-B- • Microphase Separation • inexpensive & flexible method to generate 10 -100 nm ordered structures on the molecular scale • wide choice of functions and chemistries: mechanical, chemical / catalytic, optical, electrical, magnetic, … high high A-fraction B-fraction Krishnamoorthy et al., materials today (September 2006) Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 12
  • 14. Nanostructuring – Copolymer Microphase Separation (Random) Nanostructures with Order and Function Function: Order: • PI-b-PFS poly(isoprene-b-ferrocenylsilane) • random and short range • spincoating of 30nm thin film, plasma etch • can be improved by templating • high density magnetic pattern: 4 1011 /cm2 • topographical, chemical, temp, fields, … H CH3 Fe Si CH3 n-Bu m n PI-b-PFS different FexOy stochiometries PS-PFS from Korczagin, Vancso et al., Mesa+ from Stoykovich et al., Science (2005) Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 13
  • 15. Nanostructuring – Copolymer Microphase Separation Copolymer Lithography for Nano-Pillars and Nano-Pores etch mask from inverted micelles etch mask copolymer patterns from polymer constituents with different etch rates in some cases it is necessary to provide an “amplification” of RIE the etch contrast Krishnamoorthy et al., Nanotechnology (2008) Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 14
  • 16. Nanostructuring – Copolymer Microphase Separation Non-Wetting Surfaces with Nanopillar Structures • self-cleaning surfaces by functionalization with perfluorosilane (wet or PVD) transition from Wenzel to Cassie-Baxter wetting mode for structure aspect ratio > 2:1 planar SiNx silanised with perfluorosilane: contact angle 111° Nanopillars in SiNx, 90nm high, 100nm periodicity silanised with perfluorosilane: water contact angle 150˚, highly mobile drop WCA adv 160° (compare to 110° on a flat surface) Krishnamoorthy et al., Nanotechnology (2008) hysteresis 5°, rolling angle 6°, 10ml droplet Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 15
  • 17. Nanostructuring – Nanoporous Membranes Osmotic Biosensor based on Nanoporous Membranes • nanoporous membranes from copolymer lithography • macro prototyping of osmotic sensor • size selectivity supported specific binding chemistry Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 16
  • 18. Nanostructuring – Nanoporous Membranes Wafer Scale Replication of Copolymer Lithography Patterns • replication by polymer casting • replication by embossing into PC foil master by Ni electroplating wafer scale PDMS casting • PMMA nanoporous membranes small medium large • nanostructured surfaces for cell studies influence on: • cell growth • protein expression • cytoskeleton organ. Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 17
  • 19. Technologies and Applications BioMEMS for Nanotoxicity Tests • experience in cell handling dedicated infrastructure • established knowledge in microfabrication and replication technologies, in house fab • nanotechnology / nanoparticle handling • microfluidics design and prototyping • partnerships & projects: InLiveTox • industrial collaborations: Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 18
  • 20. BioMEMS Nanotoxicology – Risks of Nanoparticle Technology • molecular nanotechnology “hype” • new class of nano-materials with “unknown” • “grey goo” & “green goo” properties: carbon (CNT, buckyballs, …), TiO2, SiO2, metallic (Au…), quantum dots (CdS, CdSe, CdTe, etc.), polymeric… gold latex Catalytic CO Oxidation by a Gold CNTs Nanoparticle, N. Lopez and J.K. Norskov, J.Am.Chem.Soc.(2002) • … in widespread applications: catalysts, sunscreens, fuel cells, solar panels, … Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 19
  • 21. BioMEMS - Nanotoxicology Translocation Measurement Device – EU IP Nanosafe2 • problem: unknown effects of nanoparticles on human organisms • microfabricated chip for the in vitro study of model epithelia transport properties nanoparticle suspension coming in confluent layer of epithelial cells porous Si3N4 electrodes for TEER membrane measurements detection of nanoparticles that cross the cell layer detection of inorganic nanoparticles off-line using inductively coupled plasma mass spectrometry (ICP-MS) Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 20
  • 22. BioMEMS - Nanotoxicology On-Chip Electrical Characterization of Cell Layers • microfabricated chip with cell culture wells • porous membranes at the basis of each well to allow toxins or drugs to pass through • TransEpithelial Electrical Resistance (TEER) to determine the tightness of a cell layer Calu-3 cells grown in one of five wells • electrical contacts • plastic holder • glass support, to seal the fluidic network • PDMS fluidics • SiN membrane • PDMS in plastic holder, electrical contacts at the bottom Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 21
  • 23. BioMEMS - Nanotoxicology Intestinal, Liver & Endothelial NP Toxicity – InLiveTox • CSEM, 4 university partners, Helmholtz Zentrum Berlin, Kirkstall Ltd, Alma • objectives: • develop in vitro test system to reduce/replace animal tests of nanoparticle toxicity • replace the “lab rat” ‘Gastro Intestinal tract’ ‘Intestinal epithelium’ by a setup of (co-culture of epithelial cells, ‘Bloodstream’ • microfluidics and monocytes and dendritic cells) • cell cultures ‘Vascular endothelium’ of model organs (endothelial cells) ‘Liver’ (hepatocytes) Nanoparticles Sampling ports • 3Rs: Replace, Reduce and Refine animal tests • REACH: Registration, Evaluation, Authorisation & Restriction of Chemical Substances Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 22
  • 24. Nanotools Probe Array Technology – PROBART • speed up single probe operation by parallel imaging and sensing • PROBART for Life Science applications, for nisenet.org - bioarrays - cells but: operation in liquids! Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 23
  • 25. Nanotools – Probe Arrays Force Spectroscopy on Cells • information about adhesion proteins, cell mechanics, kinetics, … • cell-surface, cell-cantilever, cell-cell • meaningful only with sufficient statistics, which makes experiments rather tedious • at current rate of a few cells per day, not useful for screening formats • array format would improve statistics and make high throughput screening formats more accessible source: JPK Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 24
  • 26. Nanotools – Probe Arrays PROBART for Parallel Imaging VEE (- 6V) Rlever Rref (~ 20 kohm) R ref Vout R1 R2 R lever probe #6 4x4 array imaging in buffer solution with probe continuous zoom-in #13 probe #15 Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 25
  • 27. Nanotools – Probe Arrays Cell Adhesion Forces similar adhesion forces for cells in all phases of the cell cycle (thus no need for synchronization in future studies) Human osteoblasts, growing on hemispherical pits (a, diameter 27 µm) and nanopillars (b, 45nm high, replicated in a non- metallic bone implant material Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 26
  • 28. Technologies and Applications Nanotools for Ultimate Pipetting • vast experience in Scanning Probe Methods • MEMS design and fabrication in house • fluidics design and fabrication • surface chemistry and characterization • experience in handling biomaterials, nanoparticles in solutions • partnerships & projects: • industrial collaborations: first contacts with instrument makers Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 27
  • 29. Nanotools – Nanoscale Dispensing Nanoscale Dispensing – NADIS deposition of liquids in ultrasmall volumes from microscopic tips • functional biomolecules for microarrays, such as Molecules in solution proteins or DNA • metallic nanoparticles to form connects, catalyst Nanoparticle suspensions particles, optical and chemical functions, … • etch resist materials, sol-gel precursors, … Materials for processing Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 28
  • 30. Nanotools – Nanoscale Dispensing NADIS with FIB Modified Probes • apertures with Ø down to 200 nm • flexibility in location (off-center, …) • possible to keep sharp AFM tips 1 µm sub-attoliter volumes Meister et al., App.Phys.Lett. (2004) Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 29
  • 31. Nanotools – Nanoscale Dispensing NADIS of Fluorophores in Liquid Environments 3 µm 1 Intensity [a.u.] 0.5 0 0 2 4 6 8 applied pressure ~ 2mbar Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 30
  • 32. Nanotools – Nanoscale Dispensing NADIS for Liquid Exchange with Living Cells • injection after perforation of the cell membrane • extraction of cytoplasm for remote analysis • towards patch clamping viable neuroblastoma cells Cell TrackerTM green staining Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 31
  • 33. Conclusions Nanostructuring • polymer demixing for random but regular microstructures • co-polymer microphase separation for well-arranged functional nanostructures and lithography THANK YOU ! • collaborators from CSEM: AM Popa, M Klein, W Li, F Montage, R Pugin, … • cleanroom team from COMLAB and CMI EPF Lausanne • partners from U Mulhouse, U Twente, EPFL, … Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 32
  • 34. Conclusions Nanotools • probe array platform for parallel force spectroscopy in biological environments • nanoscale dispensing (NADIS) for liquid arraying and cell manipulation THANK YOU ! • collaborators from CSEM: J Przybylska, M Favre, J Polesel, A Meister, M Liley, … • cleanroom team from COMLAB and CMI EPF Lausanne • partners from IMT U Neuchâtel, U Lund, U Trento, ETHZ, EPFL, … Copyright 2009 I Nanotechnology & Life Sciences I Harry Heinzelmann I page 33
  • 35. Thank you for your attention.