The document discusses challenges in MEMS development collaboration and proposes solutions. It describes the MEMS Industry Group's Technology Development Process template, which provides guidelines for multi-site, multi-disciplinary collaboration. It also discusses the CORONA methodology, which emphasizes customer involvement for shorter development times. The conclusions are that adopting collaboration methodologies and best practices can help overcome challenges and that new approaches to data exchange and infrastructure are needed.

1. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
The MEMS Industry Groups Technology
Development Process Template (TDP)
Improving multi-site, multi-disciplinary MEMS development
collaboration

2. CONFIDENTIAL
Process Relations GmbH
Slide 2
Negative Data
Comic by: Nik Papageorgiou http://upmic.wordpress.com/

3. CONFIDENTIAL
Process Relations GmbH
Slide 3
Negative Data
Comic by: Nik Papageorgiou http://upmic.wordpress.com/

4. CONFIDENTIAL
Process Relations GmbH
Slide 4
Negative Data
Comic by: Nik Papageorgiou http://upmic.wordpress.com/

5. CONFIDENTIAL
Process Relations GmbH
Slide 5
Negative Data
Comic by: Nik Papageorgiou http://upmic.wordpress.com/

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Process Relations GmbH
Slide 6
Why do I show this? – What are the challenges behind
this?
 Inappropiate data management in
R&D
 Inappropiate collaboration
methodology

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Process Relations GmbH
Slide 7
Agenda
 Quick company introduction
 The challenges in collaborative MEMS development
 The methodological approach – MIG TDP Template
 The next level – CORONA Methodology
 Conclusions

8. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
About Process Relations GmbH

9. CONFIDENTIAL
Process Relations GmbH
Slide 9
Process Relations’ Mission
…is to enable you to…
Expedite your R&D with improved Methodology and
flexible Software solutions
 Next generation recipe and DoE management
 Virtual manufacturing data management
 Automated data collection from various sources
 Experimental data management, analysis and extraction
We deliver the easy to use, unique, world class Process
Development Execution System (PDES)
and consulting services.

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Process Relations GmbH
Slide 10
PDES Coverage of other Manufacturing Solutions
Business SystemsERP
Enterprise IT SW Infrastructure
CRMMDM
Inbound
Supply Chain
Systems
SCP
etc.
etc.
Operations
Management
Systeme
PDES
MES
EMS LIMS
Operations IT SW Infrastructure
Design &
Engineering
Systems
Control and
Automation Systems
RTD
AmHS /
MCS
SPC
APC
Manufacturing Tools
EI
RMS
QMS
Shipping
Outbound
Systems
TMS
etc.
SRM
Doc-
Mgt
PLM
DwH
etc.
Doc-
Mgt

11. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
The challenges in collaborative
MEMS development

12. CONFIDENTIAL
Process Relations GmbH
Slide 12
The challenges
 25% development projects reach the market
 of those 66% fail their original expectations
 20% of projects take too long and miss their market
window
 35% of companies experience runaway projects
 40% of R&D experiments are repeated
Source: IDC “Accelerating Science-Led Innovation for
Competitive Advantage” Feb. 2012

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Process Relations GmbH
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Difficulties in collaborative MEMS development
 Wealth of information / technologies / data / …
 Diverse Variances, Options and Variability
 Multi-disciplinary teams required
 Collaboration along the value chain

14. CONFIDENTIAL
Process Relations GmbH
Slide 14
Collaboration challenges
 MEMS Development Phases must include Foundry
at early stages with multi-disciplinary team
 Design Review must be done for a transfer from
R&D Lab to High Volume Manufacturing
 …
14
Fabless Houses
Design Houses
Design Centres
MEMS Process
Development
Specialists
Assembly & Test
Houses
(Wafer) Foundry Services, Semiconductor
Contract Munufacturer (SCM)
Integrated Semiconductor(Device Manufacturer (ISM/IDM)
Distributors,
Fabless Houses,
Wholesalers,
Trading
Companies

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Process Relations GmbH
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Difficulties in collaborative MEMS development
 Question: How to manage for fast time
to market?

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Process Relations GmbH
Slide 16
Historical Collaboration between Design and Process
 Microlelectronics:
Clear separation between manufacturing and
application development
 Micro Nano Technology: Fabrication effects
influence all stages
Concept Behaviour FabricationStructure Geometry
DesignRulesConcept Behaviour FabricationStructure Geometry ???

17. CONFIDENTIAL
Process Relations GmbH
Slide 17
The Traditional Development Cycle for MEMS Device
IDEA
DEVICE
DESIGN
EXPERIMENT
PROCESS
DESIGN

18. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
The methodological approach –
MIG TDP Template

19. CONFIDENTIAL
Process Relations GmbH
Slide 19
The basis for the
MIG Technology Development Process Template

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Process Relations GmbH
Slide 20
Principle structure MIG TDP Template

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Process Relations GmbH
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MIG TDP Template -- Protocols / Roles &
Responsibilities
Category Concept Feasibility Prototype Pilot Production
Maturity Idea
Design Defined
Process Established
Design and
Process Qualified
Design Frozen
Process Validated
Design and
Process Frozen
Lead Engineer R&D
R&D /
Development
R&D /
Development
Development /
Manufacturing
Manufacturing
Layout Design Team Design Team Design Team
Process Mapping Process Team Process Team
Process
Development
Process Team Process Team Process Team
Process
Improvement
Process Team Process Team
Processing Engineers Engineers
Engineers /
Operators
Operators Operators
Experimental
Approach
Manufacturing
POC DOE
Manufacturing
POC DOE
Target specs and
tolerances DOE
Process windowing
DOE
Surface
response DOE
Quality Protocols
Safety and
Equipement
Safety and
Equipement
Add Product
Subset
Add Full Product Full
Process / Material /
Equipment Changes
Frequent
Controlled
Change
Qualification
Required
Qualification
Required
Charge
Development
Project
Development
Project
Development
Project
Lot Charge
Yielded
die / wafers
POC = Proof of Concept
Protocols / Roles and Responsibillities

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Process Relations GmbH
Slide 22
MIG TDP Template -- Gating Requirement
Examples
Category Concept Feasibility Prototype Pilot Production
Maturity Idea
Design Defined
Process Established
Design and
Process Qualified
Design Frozen
Process Validated
Design and
Process Frozen
Lead Engineer R&D
R&D /
Development
R&D /
Development
Development /
Manufacturing
Manufacturing
Layout Design Team Design Team Design Team
Process Mapping Process Team Process Team
Process
Development
Process Team Process Team Process Team
Process
Improvement
Process Team Process Team
Processing Engineers Engineers
Engineers /
Operators
Operators Operators
Experimental
Approach
Manufacturing
POC DOE
Manufacturing
POC DOE
Target specs and
tolerances DOE
Process windowing
DOE
Surface
response DOE
Quality Protocols
Safety and
Equipement
Safety and
Equipement
Add Product
Subset
Add Full Product Full
Process / Material /
Equipment Changes
Frequent
Controlled
Change
Qualification
Required
Qualification
Required
Charge
Development
Project
Development
Project
Development
Project
Lot Charge
Yielded
die / wafers
POC = Proof of Concept
Protocols / Roles and Responsibillities
Category Concept Feasibility Prototype Pilot Production
Design Preliminary Test Freeze Optimize Revision
Design Failure Mode
and Effect Analysis
Preliminary Finalize
Verify
with Process
Process Failure Mode
and Effect Analysis
Preliminary Finalized Adjust/ Revise
Process Flow Diagram Draft Preliminary Test Finalized Finalized
Statistical
Processing Charts
Draft
Identify and
Establish Charts
Populate/Setup
/Control
Monitor/OCAP
/Adjust
Equipment Capability Study Test Identified Validated Finalized
Process Capabilities
for critical nodes
Study Test
Meeting
physical specs
Cp > 1 Cp> 1.3
Yield Estimate Model Initial
Establish
baseline yields
Yield
improvement
Specifications Draft
Target
specifications
Establish spec/
Acceptance criteria
Specifications
in place
Specifications
in place
BOM Draft Preliminary Finalize Frozen Frozen
Inventory Control Study
Build demand
forecast
Initial Plan In place
Adjust
when required
Manufacturing
Execution System
Draft
Build demand
forecast
Build models Models in place
Modify
as necessary
Capacity/
Throughput
Study
Build demand
forecast
Establish capacity/
Identify constraints
Address
constraints
Add capacity
if required
Safety Study Identify Initiate Plan Rectify Sustain
Shipping Protocols Schedule Identify Establish In place Frozen
Training Schedule Plan Initiate
Issue
documents
Revised
documents
Pricing/Contract Development Development Development
Manufacturing
price in place
Adjust
External Vendors Establish Establish Qualify Qualified Qualified
BOM = Bill of Materials
Gating Requirments

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Process Relations GmbH
Slide 23
MIG TDP Template -- Expanded Design
Requirements
Category Concept Feasibility Prototype Pilot Production
Maturity Idea
Design Defined
Process Established
Design and
Process Qualified
Design Frozen
Process Validated
Design and
Process Frozen
Lead Engineer R&D
R&D /
Development
R&D /
Development
Development /
Manufacturing
Manufacturing
Layout Design Team Design Team Design Team
Process Mapping Process Team Process Team
Process
Development
Process Team Process Team Process Team
Process
Improvement
Process Team Process Team
Processing Engineers Engineers
Engineers /
Operators
Operators Operators
Experimental
Approach
Manufacturing
POC DOE
Manufacturing
POC DOE
Target specs and
tolerances DOE
Process windowing
DOE
Surface
response DOE
Quality Protocols
Safety and
Equipement
Safety and
Equipement
Add Product
Subset
Add Full Product Full
Process / Material /
Equipment Changes
Frequent
Controlled
Change
Qualification
Required
Qualification
Required
Charge
Development
Project
Development
Project
Development
Project
Lot Charge
Yielded
die / wafers
POC = Proof of Concept
Protocols / Roles and Responsibillities
Category Concept Feasibility Prototype Pilot Production
Design Preliminary Test Freeze Optimize Revision
Design Failure Mode
and Effect Analysis
Preliminary Finalize
Verify
with Process
Process Failure Mode
and Effect Analysis
Preliminary Finalized Adjust/ Revise
Process Flow Diagram Draft Preliminary Test Finalized Finalized
Statistical
Processing Charts
Draft
Identify and
Establish Charts
Populate/Setup
/Control
Monitor/OCAP
/Adjust
Equipment Capability Study Test Identified Validated Finalized
Process Capabilities
for critical nodes
Study Test
Meeting
physical specs
Cp > 1 Cp> 1.3
Yield Estimate Model Initial
Establish
baseline yields
Yield
improvement
Specifications Draft
Target
specifications
Establish spec/
Acceptance criteria
Specifications
in place
Specifications
in place
BOM Draft Preliminary Finalize Frozen Frozen
Inventory Control Study
Build demand
forecast
Initial Plan In place
Adjust
when required
Manufacturing
Execution System
Draft
Build demand
forecast
Build models Models in place
Modify
as necessary
Capacity/
Throughput
Study
Build demand
forecast
Establish capacity/
Identify constraints
Address
constraints
Add capacity
if required
Safety Study Identify Initiate Plan Rectify Sustain
Shipping Protocols Schedule Identify Establish In place Frozen
Training Schedule Plan Initiate
Issue
documents
Revised
documents
Pricing/Contract Development Development Development
Manufacturing
price in place
Adjust
External Vendors Establish Establish Qualify Qualified Qualified
BOM = Bill of Materials
Gating Requirments
Responsibility Requirement Concept Prototype Pilot
Engineer Application Review Preliminary Finalized Review
Engineer / Marketing
Review of competitive landscape.
Is it favorable?
Finalized
Engineer
Product History (new product,
derivative, cost reduction, change)
Finalized
Eng / Sales / Marketing
/ Purchaseing
Design to Cost Goals Preliminary Finalized
Adjust
Revise
Engineer
Intellectual Property /
Patent Review
Finalized Review Review
Engineer /
Patent Attorney
Intellectual Property Creation /
Patent Disclosure Submitted
Review Finalized Review
Sales / PM / Engineer
Customer Schedule /
Milestones Defined
Preliminary Finalized Review
Engineer
Detailed Review of Product
Design
Preliminary Finalized Review
Engineer
Review of analysis completed
to validate design
Preliminary Finalized Review
Engineer
Review for compliance to existing
engineering specifications
Preliminary Finalized Review
Engineer DFMEA Completion and Review Preliminary Finalized Review
Sales / PM / Engineer Customer Specification Review Preliminary Finalized
Review
Adjust
Engineer
Design and Production
Validation Test Plans
Preliminary Finalized Review
Engineer
Review of Design and Production
Validations Completed
Preliminary
Design
Finalized
Pilot
Finalize
Engineers
(design, proc and equip)
Prototype and Production Tooling
/ Equipment Strategies
Preliminary
Design
Finalized
Producti
Finalize
Design Review Gating Requirments

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Process Relations GmbH
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Benefits of the usage MIG TDP Template

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Process Relations GmbH
Slide 25
 But Technology vs. Product
Development

26. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
The next level – CORONA
Methodology

27. CONFIDENTIAL
Process Relations GmbH
Slide 27
To be provoking …

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Process Relations GmbH
Slide 28
… with Customer Involvement
 The customer is the one who has detailed product knowledge
 Methodology must reflect customer interaction
Customer-Driven
Product
Engineering
Customer:
Define requirements and
constraints, initiate,
supervise and control
product realization
Implementation,
Verification
Development
Turns idea into technically
feasible product description
guided by customer
Manufacturing
Produce device from
product description to meet
customer needs

29. CONFIDENTIAL
Process Relations GmbH
Slide 29
… with Customer Involvement
 The customer is the one who has detailed product knowledge
 Methodology must reflect customer interaction
Customer-Driven
Product
Engineering
Customer:
Define requirements and
constraints, initiate,
supervise and control
product realization
Result Validation
Produce or result
assessment
“to do things right”
Implementation,
Verification
Task Definition
Product description
guided by customer control
“to do the right things”

30. CONFIDENTIAL
Process Relations GmbH
Slide 30
Product Engineering – Overview
Project Management
PRINCE2
Product Development
Stage Gate™

31. CONFIDENTIAL
Process Relations GmbH
Slide 31
Benefits from MEMS PE
 Shorter time-to-market:
 Reduced cycle time
 Fewer learning cycles
 Access to knowledge-
bases on design and
fabrication
 ICT based structure
and tools
 Improved transfer of knowledge from design to production
 Customer-lead multi-site product development
100 % product
level
time
3rd 2nd 1st cycle
MEMS PE enables reduced
development times, shorter
cycles  reduced time to market

32. CONFIDENTIAL
Process Relations GmbH
Slide 32
Documentation of this approach

33. COMS2013, Enschede, The Netherlands 27.08.2013 – Dirk Ortloff
Conclusions

34. CONFIDENTIAL
Process Relations GmbH
Slide 34
Collaboration between Design and Process 2.0
 Microlelectronics:
Clear separation between manufacturing and
application development
 Micro Nano Technology: „closing the
loop“
Concept Behaviour FabricationStructure Geometry
DesignRulesConcept Behaviour FabricationStructure Geometry

35. CONFIDENTIAL
Process Relations GmbH
Slide 35
MEMS development collaboration challenges can be
overcome by
 Putting the customer in control
 Following a customer
driven, thorough collaboration
methodology
 Adopting documented best
practices
 Pursue new approaches of data
exchange and infrastructure