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Technical	
  development	
  in	
  
commercializing	
  printed	
  memory	
  
and	
  integrated	
  systems	
   	
  	
  
	
  
Christer	
  Karlsson,	
  Ph.	
  D.	
  
CTO	
  
Thin	
  Film	
  Electronics	
  ASA	
  
	
  
Thinfilm	
  introducBon	
  Memory	
  
Standalone	
  
memory	
  for	
  
toys	
  and	
  games	
  
	
  Memory	
  +	
  Logic	
  
Addressable	
  
memory	
  for	
  
integraBon	
  
	
  Integrated	
  Systems	
  
Sensor	
  tags	
  
Display	
  tags	
  
Wireless	
  
•  Strong	
  IP	
  posi-on	
  in	
  unique	
  and	
  cri-cal	
  
memory	
  technology	
  	
  
•  Secured	
  partnerships	
  and	
  other	
  
technology	
  components	
  for	
  integrated	
  
systems	
  	
  
Thinfilm	
  ferro-­‐electric	
  memory	
  
BoHom	
  
Electrode	
  
(BE)	
  =	
  WL
FE	
  Polymer
Top	
  Electrode	
  	
  
(TE)	
  =	
  BL
•  Non-­‐volaBle	
  
•  Rewritable	
  
•  Excellent	
  retenBon	
  
Memory	
  product	
  development	
  
•  Mass	
  producBon	
  (R2R	
  
prinBng)	
  at	
  our	
  partner	
  
InkTec	
  (South	
  Korea)	
  	
  
•  Process	
  development	
  at	
  
Thinfilm	
  
–  Currently	
  S2S;	
  will	
  be	
  R2R.	
  	
  
•  	
  Gravure	
  prinBng	
  
•  	
  Slot	
  die	
  coaBng	
  
•  	
  Screen	
  prinBng	
  	
  
•  Test	
  speed:	
  up	
  to	
  10M	
  
memories	
  per	
  month	
  
equivalent	
  to	
  200M	
  cells/
month.	
  
•  Step-­‐and-­‐go	
  principle	
  
•  6	
  memories	
  are	
  currently	
  
tested	
  in	
  parallel.	
  	
  
R2R	
  tesBng	
  
5	
  
R2R	
  tester	
  data	
  
0-­‐signal:	
  blue	
  dots	
  indicate	
  
polarizaBon	
  by	
  ferro-­‐electric	
  
switching.	
  
1-­‐signal:	
  red	
  dots	
  indicate	
  
polarizaBon	
  by	
  bulk	
  capacitance.	
  	
  
Data	
  here	
  from	
  >	
  50000	
  cells	
  printed	
  roll-­‐
to-­‐roll.	
  	
  
Thinfilm	
  Electronics	
  confidenBal	
  
Q1	
  
Q0	
  
Cell	
  number	
  
Signal	
  charge	
  
Sorted	
  (no	
  defects)	
  
Unsorted	
  
ProtecBon	
  of	
  memories	
  
• 	
  Hard	
  scratch	
  protecBon:	
  
Significant	
  yield	
  drop	
  
• 	
  The	
  soluBon	
  is	
  a	
  two-­‐step	
  
coaBng	
  process:	
  	
  
–  A	
  first	
  layer	
  that	
  is	
  a	
  flexible	
  and	
  
handle	
  mechanical	
  stress	
  
–  A	
  second	
  layer	
  that	
  is	
  hard	
  and	
  
scratch	
  resistant	
  
	
  
Type	
   Yield	
  loss	
  
(%)	
  
Cross-­‐linkable	
  PPG	
   0%	
  
Natural	
  rubber	
   0%	
  
Polyvinylacetate	
   0%	
  
Cross-­‐linkable	
  PDMS	
   Low	
  
Highly	
  flexible	
  acrylates	
   Moderate	
  
Flexible	
  acrylates	
   High	
  
Epoxides	
   High	
  
Epoxide/acrylate	
  hybride	
   High	
  
AliphaBc	
  isocyanate	
   High	
  
Transistor	
  fabricaBon	
  steps	
  
2.	
   4.	
  
1.	
   3.	
   5.	
  
6.	
  
# Layer Material Initial process Target process
- Substrate PEN foil - -
1 Planarization Polymer Spin coating Slot die/-
2 S/D electrodes Ag Evaporation or Inkjet Gravure
3 S/D treatment SAM Spin coating Printing or Immersion
4 Semiconductor Organic Spin coating or Inkjet Gravure
5 Gate insulator Polymer Spin coating Gravure or Screen
6 Gate electrodes Ag Evaporation or Inkjet Gravure
p-­‐channel	
  OTFTs	
  with	
  printed	
  S/D,	
  OSC,	
  GI	
  and	
  G	
  
L	
  =	
  ~30	
  µm	
  
W	
  =	
  650	
  µm	
  
Ci	
  =	
  4	
  nF/cm2	
  
µsat	
  =	
  ~0.5	
  cm2/Vs	
  @	
  20	
  V	
  
ION/IOFF	
  =	
  ~104	
  
Layer 	
  Material 	
  Deposi-on	
  process	
  
Source-­‐drain	
  electrodes 	
  Ag 	
  Gravure	
  
Semiconductor 	
  Organic 	
  Gravure	
  
Gate	
  insulator 	
  Polymer 	
  Screen	
  
Gate	
  electrodes 	
  Ag 	
  Gravure	
  
n-­‐channel	
  OTFTs	
  with	
  printed	
  S/D,	
  OSC	
  and	
  G	
  
L	
  =	
  ~35	
  µm	
  
W	
  =	
  2000	
  µm	
  
Ci	
  =	
  4.5	
  nF/cm2	
  
µsat	
  =	
  ~0.3	
  cm2/Vs	
  @	
  20	
  V	
  
ION/IOFF	
  =	
  ~105	
  
Layer 	
  Material 	
  Deposi-on	
  process	
  
Source-­‐drain	
  electrodes 	
  Ag 	
  Gravure	
  
Semiconductor 	
  Organic 	
  Gravure	
  
Gate	
  insulator 	
  Polymer 	
  Spin	
  coaBng	
  
Gate	
  electrodes 	
  Ag 	
  Gravure	
  
Temperature	
  tag	
  	
  
proof-­‐of-­‐concept	
  prototype	
  
2-­‐bit	
  memory	
  
Thinfilm	
TFT	
  circuits	
  
PARC	
Thermistor	
  bridge	
  
PST	
Electrochromic	
  
display	
  
ACREO	
Backplane	
  
and	
  
Integra-on	
  
Thinfilm	
  and	
  
PARC	
4	
  printed	
  devices/
technologies	
  
integrated	
  on	
  the	
  
same	
  printed	
  plasBc	
  
backplane	
  
Trigger	
  circuitry	
  supported	
  by	
  Flextech	
  
Tag	
  block	
  diagram	
  
Temp	
  
sensor	
  
Threshold	
  
trigger	
  
Amplifier/
Buffer	
  
Pulse	
  
generator	
  
External	
  electronics	
  
Display	
  
Memory	
  
Trigger	
  circuitry	
  supported	
  by	
  Flextech	
  
•  Basic	
  funcBonality	
  achived!	
  
•  CalibraBon	
  needed	
  using	
  current	
  processes	
  
Q&A	
  
Further	
  quesBons:	
  
christer@thinfilm.se	
  
+46	
  702	
  157921	
  

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Thinfilm Electronics Commercializing Printed Memory and Integrated Systems

  • 1. Technical  development  in   commercializing  printed  memory   and  integrated  systems         Christer  Karlsson,  Ph.  D.   CTO   Thin  Film  Electronics  ASA    
  • 2. Thinfilm  introducBon  Memory   Standalone   memory  for   toys  and  games    Memory  +  Logic   Addressable   memory  for   integraBon    Integrated  Systems   Sensor  tags   Display  tags   Wireless   •  Strong  IP  posi-on  in  unique  and  cri-cal   memory  technology     •  Secured  partnerships  and  other   technology  components  for  integrated   systems    
  • 3. Thinfilm  ferro-­‐electric  memory   BoHom   Electrode   (BE)  =  WL FE  Polymer Top  Electrode     (TE)  =  BL •  Non-­‐volaBle   •  Rewritable   •  Excellent  retenBon  
  • 4. Memory  product  development   •  Mass  producBon  (R2R   prinBng)  at  our  partner   InkTec  (South  Korea)     •  Process  development  at   Thinfilm   –  Currently  S2S;  will  be  R2R.     •   Gravure  prinBng   •   Slot  die  coaBng   •   Screen  prinBng    
  • 5. •  Test  speed:  up  to  10M   memories  per  month   equivalent  to  200M  cells/ month.   •  Step-­‐and-­‐go  principle   •  6  memories  are  currently   tested  in  parallel.     R2R  tesBng   5  
  • 6. R2R  tester  data   0-­‐signal:  blue  dots  indicate   polarizaBon  by  ferro-­‐electric   switching.   1-­‐signal:  red  dots  indicate   polarizaBon  by  bulk  capacitance.     Data  here  from  >  50000  cells  printed  roll-­‐ to-­‐roll.     Thinfilm  Electronics  confidenBal   Q1   Q0   Cell  number   Signal  charge   Sorted  (no  defects)   Unsorted  
  • 7. ProtecBon  of  memories   •   Hard  scratch  protecBon:   Significant  yield  drop   •   The  soluBon  is  a  two-­‐step   coaBng  process:     –  A  first  layer  that  is  a  flexible  and   handle  mechanical  stress   –  A  second  layer  that  is  hard  and   scratch  resistant     Type   Yield  loss   (%)   Cross-­‐linkable  PPG   0%   Natural  rubber   0%   Polyvinylacetate   0%   Cross-­‐linkable  PDMS   Low   Highly  flexible  acrylates   Moderate   Flexible  acrylates   High   Epoxides   High   Epoxide/acrylate  hybride   High   AliphaBc  isocyanate   High  
  • 8. Transistor  fabricaBon  steps   2.   4.   1.   3.   5.   6.   # Layer Material Initial process Target process - Substrate PEN foil - - 1 Planarization Polymer Spin coating Slot die/- 2 S/D electrodes Ag Evaporation or Inkjet Gravure 3 S/D treatment SAM Spin coating Printing or Immersion 4 Semiconductor Organic Spin coating or Inkjet Gravure 5 Gate insulator Polymer Spin coating Gravure or Screen 6 Gate electrodes Ag Evaporation or Inkjet Gravure
  • 9. p-­‐channel  OTFTs  with  printed  S/D,  OSC,  GI  and  G   L  =  ~30  µm   W  =  650  µm   Ci  =  4  nF/cm2   µsat  =  ~0.5  cm2/Vs  @  20  V   ION/IOFF  =  ~104   Layer  Material  Deposi-on  process   Source-­‐drain  electrodes  Ag  Gravure   Semiconductor  Organic  Gravure   Gate  insulator  Polymer  Screen   Gate  electrodes  Ag  Gravure  
  • 10. n-­‐channel  OTFTs  with  printed  S/D,  OSC  and  G   L  =  ~35  µm   W  =  2000  µm   Ci  =  4.5  nF/cm2   µsat  =  ~0.3  cm2/Vs  @  20  V   ION/IOFF  =  ~105   Layer  Material  Deposi-on  process   Source-­‐drain  electrodes  Ag  Gravure   Semiconductor  Organic  Gravure   Gate  insulator  Polymer  Spin  coaBng   Gate  electrodes  Ag  Gravure  
  • 11. Temperature  tag     proof-­‐of-­‐concept  prototype   2-­‐bit  memory   Thinfilm TFT  circuits   PARC Thermistor  bridge   PST Electrochromic   display   ACREO Backplane   and   Integra-on   Thinfilm  and   PARC 4  printed  devices/ technologies   integrated  on  the   same  printed  plasBc   backplane   Trigger  circuitry  supported  by  Flextech  
  • 12. Tag  block  diagram   Temp   sensor   Threshold   trigger   Amplifier/ Buffer   Pulse   generator   External  electronics   Display   Memory   Trigger  circuitry  supported  by  Flextech   •  Basic  funcBonality  achived!   •  CalibraBon  needed  using  current  processes  
  • 13. Q&A   Further  quesBons:   christer@thinfilm.se   +46  702  157921