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Introduction to MR Inspection
     **********************
  Emerging Applications
           to
Reduce Media Cost Per Disk
         Michael E. Boyd



                                1
Areal Density and Impact on Media Test
                                14        1997 Forecasted 95 mm Disk Pricing    1
                                                                                0 .9
                                12
                                                                                0 .8
                                10                                              0 .7

                                 8                                              0 .6
              T e s t T im e
                                                                                0 .5$ P e r D is k
              (M in /D is k )
                                 6                                              0 .4
                                 4                                              0 .3
                                                             Test Time Growth   0 .2
                                 2
                                                                                0 .1
                                 0                                              0
                                     97       98            99            00




           COST                                                     PRODUCTIVITY FACTORS
   Increasing areal density creates test                         Yields
    time dilemma                                                  Test methodology
   Budget for test roughly fixed                                 Equipment throughput and cost
      – 15-20 % of media cost                                     Equipment utilization
   Continued pressure on disk pricing



                                                                                                     2
Test Requirements
                         Drive Requirements


                            Magnetics
                             Defects
                             Glide
 Technology Driven                                 Cost Driven

         Scratches
            TA’s                              TPI vs % Coverage
       Shallow Defects
                                                Consumables
         Low Glide
       Contamination




                          Test Strategy



                                                                  3
Test Challenges
 Future Test strategies of media makers
  diverge:
     Parallelism in Test
     More magnetics testing, less single bit defect testing
     More emphasis on disk mechanics (glide and TA’s)
     Optical Glide
     Optical Certification
     Optically assisted testing
     Discrete Testers




                                                               4
Possible New Additions to Final Test
   Optical Testing:
     Traditional focus has been to replace glide or
      certification testing
     Optical systems for glide have had an issue with
      sensitivity vs. throughput
     Optical systems can find magnetic defects, however
      over-rejection is the problem
   MR Glide:
     Scanning with MR drive head on an erased disk
     Best sensor for detecting contact thermal asperities,
      non-contact bump/pit thermal signals, and scratches
     Has not been utilized in production testing



                                                              5
Defining Optical, Certification, PZT, & MR Glide Signals
                              Optical Signals, are
                                  Bright Field
                              from Specular Light,
                                       &
                                   Dark Field
                              from Scattered Light.



      Optical Signals                                    Cert. Missing Pulse Signal




                                MR Glide Signal, is
                                  Magnetic Signal
                              from the Defect’s Edges,
                                        &
                              Mass Spin-Valve Signal.
Non-contact MR Glide Signal                                   PZT Glide Signal
                                                                              6
Signal Characterstics from Reference 10m x 10m ~1.25 in Bump Defect




                             AFM Microgaph




       Optical Signals                              Non-contact MR Glide
     Bright & Dark Field




                                Contact PZT Glide
                                                                    7
Signal Characterstics from Reference 10m x 10m ~2 in Pit Defect




                          AFM Micrograph




    Optical Signals                                Non-contact MR Glide
  Bright & Dark Field




                           Non-contact PZT Glide
                                                                     8
Based on Defects Presented
     Bump/Pit Signal Polarity to Type &
 Defect Signal Amplitude to Size Dependence

Signal            Bump/Pit Signal    Defect Signal
Type              Polarity to Type Amplitude to Size

Optical Bright Field   Yes                Yes

Optical Dark Field     No                 Yes

PZT Glide               ?                  ?

MR Glide               Yes                Yes

                                                       9
PS5100 Signal vs MR Glide Signal on Scratch Defect




          PS5100 Microscope Image ~2.5m Width




     PS5100 Optical Signal     Non-contact MR Glide Signal
                                                       10
PS5100 Signal vs MR Glide Signal on Polishing Defect




           PS5100 Microscope Image ~40m x 30m




      PS5100 Optical Signal     Non-contact MR Glide Signal
                                                        11
PS5100 Signal vs MR Glide Signal on Bump Like Binary P.D.




             PS5100 Microscope Image ~40m x 20m




       PS5100 Optical Signal       Non-contact MR Glide Signal
                                                           12
PS5100 Signal vs MR Glide Signal on Head Slap




         PS5100 Microscope Image ~ 30m x 10m




  PS5100 Optical Signal         Contact MR Glide Signal
                                                          13
Based on Defects Presented
          PS5100 Error Signal Characteristics vs
          MR Glide Error Signal Characteristics
Defect               PS5100               MR Glide
Type               Error Signal          Error Signal

Scratch           Dark Field Only       Magnetic Only

P.D.              Bright Field Only     Thermal Only

Head Slap         Bright & Dark Field Thermal Asperity

Binary P.D.       Bright Field Only     Thermal Only


                                                        14
Typical Test Cycle


10-25 seconds          10-20 seconds         20-35 seconds                120-150 seconds


   Burnish             Optical Scan              Glide                       Certify



• Mechanical Process   • Pre-glide screen   • Using PZT or AE Heads       • Defect Testing
• Removes Surface      • Saves heads        • Verify surface asperities   • Defects below specified
  Asperities           • Increases            are below set limits          size and count
                         Throughput         • Typically one event fails
                                              disk                        • Parametrics within
                                                                            set ranges
                                                                          • OD, MD, ID
                                                                          • Every disk or sample




                                                                                               15
MG250 Missing Pulse Errors vs PS5100 Bright
          and Dark Field Errors




                                              16
MG250 Missing Pulse Errors vs MR Glide Errors




                                                17
Correlation of Cert. Missing Pulse Errors
        to PS5100 and MR Glide
   Error Type          Correlation
   MR Glide         Very Good (~85%)
   PS5100              Good (~70%)

      With Proper Adjustment
    of Error Detection Thresholds
  Overkill and Underkill is Minimized


                                            18
MG250 Certification Errors vs. EPS Errors




                                        19
Possible Test Sequence


                    Grade 1     PZT Glide Only
                   Pass disks



   Optical Test     Grade 2
 and/or MR Glide                  PZT Glide      Ceritify by Zone
                   Pass Disks




                   Fail Disks




                                                               20
One Estimate of Savings

                   Yield   Time Savings   Savings/Disk

   Grade 1         15%      135 sec         20 sec

   Grade 2         80%       15 sec         12 sec

   Grade 3         5%       165 sec          8 sec

   Total Savings                            40 sec




                                                         21
Conclusions
   Correlation studies suggest that there is to sizeable
    under and over-rejection to have Optical or MR glide
    replace traditional glide and certification testing
   If over-rejection is minimized valuable yield and
    throughput benefits can be obtained with appropriate
    sequential testing
   These tests should also improve isolation of critical
    defects such as scratches, TA’s, and shallow defects



                                                       22

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MStestscenario

  • 1. Introduction to MR Inspection ********************** Emerging Applications to Reduce Media Cost Per Disk Michael E. Boyd 1
  • 2. Areal Density and Impact on Media Test 14 1997 Forecasted 95 mm Disk Pricing 1 0 .9 12 0 .8 10 0 .7 8 0 .6 T e s t T im e 0 .5$ P e r D is k (M in /D is k ) 6 0 .4 4 0 .3 Test Time Growth 0 .2 2 0 .1 0 0 97 98 99 00 COST PRODUCTIVITY FACTORS  Increasing areal density creates test  Yields time dilemma  Test methodology  Budget for test roughly fixed  Equipment throughput and cost – 15-20 % of media cost  Equipment utilization  Continued pressure on disk pricing 2
  • 3. Test Requirements Drive Requirements Magnetics Defects Glide Technology Driven Cost Driven Scratches TA’s TPI vs % Coverage Shallow Defects Consumables Low Glide Contamination Test Strategy 3
  • 4. Test Challenges  Future Test strategies of media makers diverge:  Parallelism in Test  More magnetics testing, less single bit defect testing  More emphasis on disk mechanics (glide and TA’s)  Optical Glide  Optical Certification  Optically assisted testing  Discrete Testers 4
  • 5. Possible New Additions to Final Test  Optical Testing:  Traditional focus has been to replace glide or certification testing  Optical systems for glide have had an issue with sensitivity vs. throughput  Optical systems can find magnetic defects, however over-rejection is the problem  MR Glide:  Scanning with MR drive head on an erased disk  Best sensor for detecting contact thermal asperities, non-contact bump/pit thermal signals, and scratches  Has not been utilized in production testing 5
  • 6. Defining Optical, Certification, PZT, & MR Glide Signals Optical Signals, are Bright Field from Specular Light, & Dark Field from Scattered Light. Optical Signals Cert. Missing Pulse Signal MR Glide Signal, is Magnetic Signal from the Defect’s Edges, & Mass Spin-Valve Signal. Non-contact MR Glide Signal PZT Glide Signal 6
  • 7. Signal Characterstics from Reference 10m x 10m ~1.25 in Bump Defect AFM Microgaph Optical Signals Non-contact MR Glide Bright & Dark Field Contact PZT Glide 7
  • 8. Signal Characterstics from Reference 10m x 10m ~2 in Pit Defect AFM Micrograph Optical Signals Non-contact MR Glide Bright & Dark Field Non-contact PZT Glide 8
  • 9. Based on Defects Presented Bump/Pit Signal Polarity to Type & Defect Signal Amplitude to Size Dependence Signal Bump/Pit Signal Defect Signal Type Polarity to Type Amplitude to Size Optical Bright Field Yes Yes Optical Dark Field No Yes PZT Glide ? ? MR Glide Yes Yes 9
  • 10. PS5100 Signal vs MR Glide Signal on Scratch Defect PS5100 Microscope Image ~2.5m Width PS5100 Optical Signal Non-contact MR Glide Signal 10
  • 11. PS5100 Signal vs MR Glide Signal on Polishing Defect PS5100 Microscope Image ~40m x 30m PS5100 Optical Signal Non-contact MR Glide Signal 11
  • 12. PS5100 Signal vs MR Glide Signal on Bump Like Binary P.D. PS5100 Microscope Image ~40m x 20m PS5100 Optical Signal Non-contact MR Glide Signal 12
  • 13. PS5100 Signal vs MR Glide Signal on Head Slap PS5100 Microscope Image ~ 30m x 10m PS5100 Optical Signal Contact MR Glide Signal 13
  • 14. Based on Defects Presented PS5100 Error Signal Characteristics vs MR Glide Error Signal Characteristics Defect PS5100 MR Glide Type Error Signal Error Signal Scratch Dark Field Only Magnetic Only P.D. Bright Field Only Thermal Only Head Slap Bright & Dark Field Thermal Asperity Binary P.D. Bright Field Only Thermal Only 14
  • 15. Typical Test Cycle 10-25 seconds 10-20 seconds 20-35 seconds 120-150 seconds Burnish Optical Scan Glide Certify • Mechanical Process • Pre-glide screen • Using PZT or AE Heads • Defect Testing • Removes Surface • Saves heads • Verify surface asperities • Defects below specified Asperities • Increases are below set limits size and count Throughput • Typically one event fails disk • Parametrics within set ranges • OD, MD, ID • Every disk or sample 15
  • 16. MG250 Missing Pulse Errors vs PS5100 Bright and Dark Field Errors 16
  • 17. MG250 Missing Pulse Errors vs MR Glide Errors 17
  • 18. Correlation of Cert. Missing Pulse Errors to PS5100 and MR Glide Error Type Correlation MR Glide Very Good (~85%) PS5100 Good (~70%) With Proper Adjustment of Error Detection Thresholds Overkill and Underkill is Minimized 18
  • 19. MG250 Certification Errors vs. EPS Errors 19
  • 20. Possible Test Sequence Grade 1 PZT Glide Only Pass disks Optical Test Grade 2 and/or MR Glide PZT Glide Ceritify by Zone Pass Disks Fail Disks 20
  • 21. One Estimate of Savings Yield Time Savings Savings/Disk Grade 1 15% 135 sec 20 sec Grade 2 80% 15 sec 12 sec Grade 3 5% 165 sec 8 sec Total Savings 40 sec 21
  • 22. Conclusions  Correlation studies suggest that there is to sizeable under and over-rejection to have Optical or MR glide replace traditional glide and certification testing  If over-rejection is minimized valuable yield and throughput benefits can be obtained with appropriate sequential testing  These tests should also improve isolation of critical defects such as scratches, TA’s, and shallow defects 22