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Power Device Analyzer/Curve Tracer
- 1. New Power Device Analyzer / Curve Tracer Solves
C S
High Power Device Testing Challenges
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 1 October 22, 2009
- 2. Agenda for Today
• Challenges Facing Power Device Measurement
• Overview of the B1505A and EasyEXPERT Software
• Curve Tracer Mode: Features & Benefits
• Packaged Part Test & Wafer Probing Solutions
• Solar Cell Test with the B1505A
• Summary & Conclusions
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 2 October 22, 2009
- 3. Challenges Facing Power Device
g g
Measurement
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 3 October 22, 2009
- 4. Key Power Device Measurement Challenges – 1
Insufficient Measurement Capability
No single measurement solution available that can
perform both high current and high voltage IV and CV
high-current high-voltage
measurements.
Novel Device (SiC, GaN, etc.) Characterization
(SiC GaN etc )
The high breakdown voltages and fast switching speeds
of these devices require wide measurement dynamic
ranges for proper characterization.
characterization
Curve Tracer Obsolescence and Support
Support and repair of obsolete curve tracers is
becoming increasingly difficult. Also, getting curve
tracer data into PC compatible formats is inconvenient.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 4 October 22, 2009
- 5. Key Power Device Measurement Challenges – 2
Safe & Efficient Packaged Device Testing
The lack of a standardized test fixture for power devices
has forced many users to jury rig their own solution
solution,
which often compromises both safety and performance.
Power Device Development Costs
The ability to probe power devices on-wafer saves both
time and money by eliminating the need to package the
devices beforehand However until now on-wafer test
beforehand. However, on wafer
of power devices has not been easy to do.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 5 October 22, 2009
- 6. The New Agilent B1505A Meets
these Measurement Challenges
• Voltage force/measure capability up to 3000 V
• Accurate sub picoamp level current measurement at high
sub-picoamp
voltage bias
• Current force/measure capability up to 40 A
• 50 μs current pulse width at high current
• Switch between high current and high voltage measurement
without needing to recable
• Capacitance measurement at up to 3000 V of DC bias
p p
• True curve tracer functionality with knob sweep capability
• MS Windows based EasyEXPERT software facilitates data
management and simplifies data analysis
• Standard test fixture with interlock for safe packaged power
device testing
• Supported and secure on-wafer high power testing
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 6 October 22, 2009
- 7. Overview of the B1505A &
EasyEXPERT Software
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 7 October 22, 2009
- 8. The EasyEXPERT Parametric Test Environment
True
Tr e knob s eep c r e
sweep curve
tracer functionality IV & CV all in one box Easy data analysis &
parameter extraction
High power wafer
prober control
b t l
Offline test
development and
p
data analysis
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 8 October 22, 2009
- 9. Agilent EasyEXPERT 4.0 Software
Over 50 high power Innovative task-based Measure, append and
Microsoft Windows-based
Windows based approach to parametric test repeat functions
EasyEXPERT software application tests
Built-in semi-auto
wafer prober drivers
Supported Functions:
1. Sweep
2. Multi-channel sweep Standby mode for
3. List sweep circuit debug
4. Time sampling
5.
5 1 kHz to 5 MHz CV
6. Quasi-static CV
7. Direct control “My Favorite Setup”
feature allows users to
customize application
“Tracer Mode supports
Tracer Mode” tests
knob-sweep curve tracer
functionality
Intuitive GUI-based
application test
setup windows
Can automatically export
Data and setup information can be measurement data to
“Quick Test” utility
automatically saved or selectively external drives
supports test sequencing
without programming saved after each measurement
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 9 October 22, 2009
- 10. EasyEXPERT and Desktop EasyEXPERT Software
form a Complete Measurement Environment
Desktop EasyEXPERT Desktop Desktop EasyEXPERT
Online Mode EasyEXPERT
y Offline Mode
is free!
Measurement data & test setups
M td t t t t
• Data analysis
• Full functionality & control • Test development
from a separate PC
EasyEXPERT
on the B1505A
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 10 October 22, 2009
- 11. The B1505A Supports a Variety of Source/Monitor
Units (SMUs) for High Power Test
High Voltage SMU
(HVSMU)
High current SMU
(HCSMU)
Multi-frequency
capacitance measurement
unit (MFCMU)
High power SMU
(HPSMU)
4.2 Amp ground
unit (GNDU)
Ten l t
T slot modular mainframe
d l i f
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 11 October 22, 2009
- 12. The High-Current SMU (HCSMU) Can Output a 20 A
Current Pulse with a 50 Microsecond Width
The HCSMU’s pulsing
p g
capability minimizes
20 A device heating effects
to insure proper device
characterization.
characterization
50 μs
200 nV voltage measurement resolution!
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 12 October 22, 2009
- 13. You Can Combine Two HCSMUs in Parallel to
Supply up to 40 A
A 40 A current pulse applied to
a 100 mΩ resistor using two
HCSMU modules in parallel
V drop at 100 mΩ Resistor
= (20 + 20) x 0.1
= 4.0 (V)
Power at 100 mΩ Resistor
= 40 x 4.0
= 160 (W)
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 13 October 22, 2009
- 14. Bipolar Transistor Emitter Resistance Measurement
Using the HCSMU
The B1505A can also
automatically draw a
regression line and calculate
the emitter resistance.
resistance
The HCSMU can function as a
precision voltmeter to measure
the emitter resistance of a
bipolar transistor.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 14 October 22, 2009
- 15. The High Voltage SMU (HVSMU) Can Sweep from
Microvolts to 3000 Volts in Milliseconds
A breakdown voltage of more than
1800 V accurately characterized
y
on a Schottky diode fabricated on
a diamond substrate
3000 V
~7 8 ms
7.8
10 fA current measurement
resolution!
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 15 October 22, 2009
- 16. High DC Bias Capacitance Measurements
Output capacitance (Coss)
measured at 1500 V
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 16 October 22, 2009
- 17. Curve Tracer Mode: Features & Benefits
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 17 October 22, 2009
- 18. Using the B1505A Curve Tracer Function
1.
1 Click or press
the repeat button.
2. Select the
parameter to be
controlled with the
knob sweep.
3. Move the knob
and observe the
curve as it changes.
Note: The default colors have been changed for easier viewing on these slides.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 18 October 22, 2009
- 19. The Curve Tracer Mode in Action
Functionality exactly the
same as a traditional
analog curve tracer!
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 19 October 22, 2009
- 20. Pre-Defined Curve Tracer Setups are Included
Clicking on the
“utility” icon in the
setup window opens
up a menu of pre-
defined curve tracer
setups for the most
common teststests.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 20 October 22, 2009
- 21. Curve Tracer Issue #1 –
Difficult to Manage Trace Data
It is VERY difficult to export curve tracer data into PC
compatible formats.
Many curve tracers have no or limited trace overlay
capabilities.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 21 October 22, 2009
- 22. Trace Management Feature - 1
Clicking on the
camera icon
saves trace data
into memory.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 22 October 22, 2009
- 23. Trace Management Feature - 2
Clicking on the
adjacent icon
j
opens up the
trace manager
window.
window
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 23 October 22, 2009
- 24. Using the Trace Management Feature
Pulsed Non-Pulsed
Measurement Measurement
Using the trace
management feature,
it is easy to show the
effects of device self-
heating by comparing
the results of pulsed
and non-pulsed
measurements.
measurements
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 24 October 22, 2009
- 25. Trace Manager Feature Detail
Show/Hide Invert Selected Delete Selected Open (Import) Save Selected
Selected Trace Trace Trace a Trace Trace Data
Simply Click on a
Trace to Select It
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 25 October 22, 2009
- 26. You Can Easily Save Data into XML (Spreadsheet)
or CSV Formats
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 26 October 22, 2009
- 27. Curve Tracer Issue #2 –
Difficult to Define “No Go Regions
No Go”
Many times it is useful to set up “stop” limits to prevent
your power device from being damaged.
Conventional curve tracers do not have this type of
capability.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 27 October 22, 2009
- 28. Forbidden Region (Stoplight) Feature - 1
Clicking on the stoplight icon
allows you to set up a “forbidden”
forbidden
region using the mouse. Note
that this region can be both
voltage and current sensitive.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 28 October 22, 2009
- 29. Forbidden Region (Stoplight) Feature - 2
As soon as the curve enters
the forbidden region, the
measurement stops.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 29 October 22, 2009
- 30. Curve Tracer Issue #3 –
Easy to Destroy Devices & Lose Data
Especially with power devices, it is easy to inadvertently
apply too much voltage/current and destroy the DUT.
When using conventional curve tracers, once the device
is destroyed there is no means to recover the data.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 30 October 22, 2009
- 31. Auto Record Feature Detail
Toggle Auto Record Open a Trace Save a Trace
Feature On/Off Record Record
Replay Controls
Record Settings
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 31 October 22, 2009
- 32. Auto Record Feature Example - 1
Notice that the
instrument is “off”
(i.e. not making an
active measurement)
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 32 October 22, 2009
- 33. Auto Record Feature Example - 2
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 33 October 22, 2009
- 34. Auto Record Feature Example - 3
The data “snapshot”
can be saved anywhere
as you move th slider
the lid
bar along.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 34 October 22, 2009
- 35. The B1505A is More Than Just a Digital Curve Tracer
+ =
The B1505A improves upon curve tracer functionality by:
• Supporting the easy export of numerical and g p
pp g y p graphical data into PC-
based formats
• Making it easy to overlay and compare trace data
• Providing a graphical means to limit current/voltage and prevent device
damage
• Automatically recording trace data so that information is not lost even if
the DUT is damaged or destroyed
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 35 October 22, 2009
- 36. Packaged Part Test and
g
Wafer Probing Solutions
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 36 October 22, 2009
- 37. The N1259A Test Fixture Supports Convenient and
Safe Testing of Packaged Devices
Universal Socket
Module
3-Pin In-line
Socket Module
Blank Teflon
Board
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 37 October 22, 2009
- 38. You Can Create Your Own Customer Socket
Modules with the Universal Socket Module
For more information please
refer to the product note
B1505A-1, “Creating Custom
Socket Modules for Packaged
Power Devices.”
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 38 October 22, 2009
- 39. The Module Selector Unit Facilitates Device Test
D Module Selector
G Unit
S
PSMU
HP
MU
MU
MU
DU
HCSM
HVSM
HPSM
GND
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 39 October 22, 2009
- 40. The High Voltage Bias-T Supports CV
Measurements with up to 3000 V of DC Bias
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 40 October 22, 2009
- 41. The N1259A Test Fixture Shown with the Module
Selector and High Voltage Bias-T Options
Bias T
N1259A-020 N1259A-300
p
HV bias-T option Module selector option
p
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 41 October 22, 2009
- 42. The B1505A Supports All Popular High-Power
Analytical Wafer Probers
Quick Test
Quick Test allows you to perform test sequencing
Q f
without any programming. You can also use Quick Test
with the built-in semiautomatic wafer prober drivers to
automate testing across an entire wafer. The test data
can b saved to any available storage d i
be d il bl device.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 42 October 22, 2009
- 43. Setting Up to Auto Probe Across a Wafer
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 43 October 22, 2009
- 44. High Voltage Wafer Probing Connection Example -1
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 44 October 22, 2009
- 45. High Current Wafer Probing Connection Example - 2
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 45 October 22, 2009
- 46. Module Selector Wafer Probing Example
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 46 October 22, 2009
- 47. The N1260A High Voltage Bias-T
(Wafer Prober Version)
3 SHV Outputs
164 mm
53 mm
AC Guard
Low
High
125 mm
High-voltage
triaxial connector 4 BNC C-meter
connections
ti Note: The d t face h screw h l
N t Th adapter f has holes
so that it can be mounted on a plate.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 47 October 22, 2009
- 48. Cgd Measurement Example (Lateral Device)
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 48 October 22, 2009
- 50. Solar Cell Test with the B1505A
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 50 October 22, 2009
- 51. Basic Solar Cell Parameters
IV measurement Capacitance measurement
Symbol Parameter Name Unit Symbol Parameter Name Unit
Isc Short circuit current A Cp Parallel capacitance F
Jsc Short circuit current density A/cm2 Nc Carrier density cm-3
3
Voc Open circuit voltage V Ndl Drive-level density cm-3
Pmax Maximum power point W
Imax Current at maximum power point A
Vmax Voltage at maximum power point V Time domain measurement
FF Fill factor --- Symbol Parameter Name Unit
η Conversion efficiency
y % τ Minority carrier lifetime
y s
Rsh Shunt resistance Ω S Surface recombination velocity cm/s
Rs series resistance Ω Ld Minority carrier diffusion length m
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 51 October 22, 2009
- 52. Solar Cell DC and AC Equivalent Circuits
Solar Cell Rs Solar Cell rs
+ +
Rsh Load Cp rp Load
- -
DC Equivalent Circuit AC Equivalent Circuit
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 52 October 22, 2009
- 53. EasyEXPERT Solar Cell Application Tests
A suite of E
i f EasyEXPERT
EXPERT
solar cell application
tests is available from
the B1505A web page.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 53 October 22, 2009
- 54. Sample Application Test List
Application Test Name Type of Measurement Parameters & Plots
Solar Cell IV IV measurement
Isc, Jsc, Voc, Pmax, Imax, Vmax,
Solar Cell Fwd IV measurement
FF, η, Rsh, Rs
Solar Cell Rev IV measurement Rsh
Solar Cell Cp-V C-Vdc measurement Mott-Schottky Plot, Nc
Solar Cell Nc W
Nc-W C-V
C Vdc measurement Nc
Solar Cell Cp-Freq Log C-f measurement
Solar Cell Nyquist Plot
y C-f measurement Nyquist Plot
y
Solar Cell Cp-ACLevel C-Vac measurement Ndl
Solar Cell DLCP C-Vac measurement Ndl
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 54 October 22, 2009
- 55. Typical Solar Cell IV Forward Characteristics
ΔVsc
Isc ΔVsc Rsh = −
ΔIsc
ΔIsc
ΔVoc
Rs = −
ΔIoc
Imax
Pmax
ΔVoc
C ent
Curre
ΔIoc
Voltage Vmax Voc
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 55 October 22, 2009
- 56. Solar Cell Test Example (IV Fwd)
Note that EasyEXPERT
automatically extracts
all important device
parameters.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 56 October 22, 2009
- 57. C-AC Voltage Plot and DLCP Measurement
C-AC Voltage Plot
Drive-level Capacitance
Profile (DLCP)
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 57 October 22, 2009
- 58. Cp-f and Nyquist Plots
Cp-Frequency Plot
Nyquist Plot
Cole-Cole Plot
Complex Impedance Plot
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 58 October 22, 2009
- 59. Summary & Reference Information
y
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 59 October 22, 2009
- 60. The Agilent B1505A Power Device Analyzer / Curve
Tracer is the only Single Box Solution That Can…
• Measure and source current and voltage
at up to 3000 V and 40 A
• Measure capacitance at up to 3000 V of
DC bias
• Provide true curve tracer functionality
with easy data export into PC based work
environments
• Safely support both packaged part and
wafer prober testing environments
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 60 October 22, 2009
- 61. How Do I Get More Information?
For more information please go to:
www.agilent.com/find/b1505a
www agilent com/find/b1505a
On this web page you can find:
• Data Sheet
• Manuals
• Drivers & Software
• Application Notes
• Trade-In Information
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 61 October 22, 2009
- 62. How Can I Get a Live Demonstration?
Our staff at the North American technical contact
center (TCC) can give you a live demonstration of
the B1505A at your desk using Webex Please
Webex.
call one of the following numbers to arrange for a
B1505A demo.
United States: 800-829-4444
Canada: 877-894-4414
Latin America: 305-269-7500
If a live demonstration at your site is necessary,
then th
th the TCC engineers can put you in t
i t i touch with
h ith
an application engineer local to your area.
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 62 October 22, 2009
- 63. Trade In Program
Trade-in Credit
Trade-in Model
Towards B1505A1,2
Tek 370A, 370B,
$5,000
371A or 371B
Program to be
Tek 575, 576 or 577 $1,000 extended into
2010!
Agilent 4142B $3,900
1. These credits are valid for US only. Due to currency fluctuations the discount amount will vary for
other regions.
2. Trade-ins can only be made on a 1:1 basis (i.e. only one trade-in per B1505A purchased).
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 63 October 22, 2009
- 64. Questions?
New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 64 October 22, 2009